A fixing device for silicon wafer basket detection

Abstract

The utility model relates to the technical field of silicon wafer basket production, and disclose a kind of fixing device for silicon wafer basket detection, including detection table, and the silicon wafer basket body in the inside of detection table, the end of the detection table close to silicon wafer basket body is equipped with accommodating groove, the top wall of the accommodating groove is equipped with guide slot in the end close to silicon wafer basket body, the front side of the detection table is fixedly installed with servo motor, the output shaft of the servo motor is fixedly installed with two-way screw rod.The fixing device for silicon wafer basket detection, through the thread connection with the two-way screw rod of connecting block, can realize the guiding nature of two groups of calibration seat in guide slot Synchronous movement to middle until with silicon wafer basket body close contact, realize the quick calibration to silicon wafer basket body, and by the pulley of rotating installation in the inside of calibration seat, it can be convenient when calibrating silicon wafer basket body, reduce the friction force with silicon wafer basket body, to protect the outer surface of silicon wafer basket body.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer basket production technology, specifically a fixing device for silicon wafer basket inspection. Background Technology

[0002] In semiconductor manufacturing, photovoltaic industry, and other fields, silicon wafers are a core raw material, and their quality directly affects the performance and yield of the final product. Silicon wafer baskets, as important carriers in the production, processing, transportation, and storage of silicon wafers, play a crucial role in the entire process. Silicon wafer baskets are typically made of high-strength, corrosion-resistant materials, and their internal design includes specifically sized slots or holes that neatly and stably fix the silicon wafers in their respective positions. This prevents collisions and friction between wafers, effectively protecting the wafer surface from damage and ensuring the integrity and quality stability of the wafers during the transfer process.

[0003] After the silicon wafers are manufactured and processed, in order to ensure that they meet quality standards, the silicon wafer baskets need to be thoroughly and meticulously inspected to confirm whether there are any problems such as deformation, damage, or residual impurities. These problems may have a negative impact on the subsequent storage and processing of silicon wafers.

[0004] Chinese Utility Model Patent Publication No. CN 222671563 U discloses a fixing device for silicon wafer basket inspection. The device, as described in the specification, uses a fixing platform, a fixing groove, and a fixing mechanism to fix the silicon wafer basket, thereby preventing it from shifting during inspection and improving the inspection effect. However, this fixing device is only designed for silicon wafer baskets of specific sizes or shapes. When encountering baskets of different specifications, it cannot effectively fix them, requiring the entire fixing device to be replaced, resulting in high costs, cumbersome operation, and a lack of versatility. Summary of the Invention

[0005] The technical problem to be solved by this utility model is to provide a fixing device for silicon wafer basket inspection, which can effectively solve the problems in the prior art.

[0006] The technical solution adopted by this utility model is: a fixing device for silicon wafer basket inspection, including an inspection platform and a silicon wafer basket body located inside the inspection platform. The inspection platform has a receiving groove at one end near the silicon wafer basket body, and a guide groove is formed at one end of the top wall of the receiving groove near the silicon wafer basket body. A servo motor is fixedly installed on the front side of the inspection platform, and a bidirectional screw is fixedly installed on the output shaft of the servo motor. A calibration seat is provided on the top of the receiving groove, and a connecting block threaded to the bidirectional screw is fixedly installed at one end of the calibration seat near the inspection platform. Cylinders are fixedly installed on both sides of the inspection platform, and a pressing block is fixedly installed on the movable end of the cylinder. A limit component is fixedly installed at the center of the top of the pressing block.

[0007] Preferably, a pulley is rotatably mounted on the inner side of the calibration seat, and the connecting block and the guide groove are slidably connected.

[0008] The above technical solution, by setting a pulley to rotate on the inner side of the calibration seat, can reduce the friction between the calibration seat and the silicon wafer basket body when calibrating the silicon wafer basket body. The sliding connection between the connecting block and the guide groove can guide and limit the calibration seat, thereby improving the accuracy of calibration.

[0009] Preferably, the limiting component includes a fixed rod and an extension rod. The inner side of the fixed rod has a movable groove. A limiting block is fixedly installed at the end of the fixed rod near the extension rod. A retaining ring is fixedly installed at the end of the extension rod near the fixed rod. A fixed seat is fixedly installed at the end of the extension rod away from the fixed rod. A handwheel is provided on the side of the fixed seat near the silicon wafer basket body. A threaded rod is fixedly installed at the end of the handwheel near the fixed seat. A clamping block is fixedly installed at the end of the threaded rod away from the handwheel.

[0010] The above technical solution incorporates a limiting component to facilitate the fixation of silicon wafer basket bodies of different sizes, ensuring normal operation of the testing process and improving the applicability of the device.

[0011] Preferably, the outer diameter of the retaining ring is the same as the inner diameter of the movable groove, the outer diameter of the extension rod is the same as the inner diameter of the limiting block, and the inner diameter of the limiting block is smaller than the outer diameter of the retaining ring. A return spring is fixedly installed between the extension rod and the fixed rod.

[0012] By using the above technical solution, setting the outer diameter of the retaining ring to be the same as the inner diameter of the movable groove facilitates the movement of the extension rod within the fixed rod. Furthermore, by setting the outer diameter of the extension rod to be the same as the inner diameter of the limiting block, and the inner diameter of the limiting block being smaller than the outer diameter of the retaining ring, the extension rod is prevented from detaching from the fixed rod. Additionally, a return spring is fixedly installed between the extension rod and the fixed rod, allowing the extension rod to automatically extend and retract when subjected to external force. This ensures that the fixing seat remains in contact with the silicon wafer basket body during fixation, further improving the fixation of the silicon wafer basket body.

[0013] Preferably, the cross-section of the fixed seat is L-shaped, and the threaded rod passes through the fixed seat and is threadedly connected to the fixed seat.

[0014] The above technical solution, by setting the cross-section of the fixing seat to be "L"-shaped, provides a stable mounting base for the handwheel and threaded rod. It also better mates with the side of the silicon wafer basket body away from the extrusion block, achieving multi-faceted fixing of the silicon wafer basket body. The threaded rod passes through the fixing seat and is threadedly connected to it. During fixing, the operator can manually rotate the handwheel, causing the threaded rod to rotate and move the clamping block towards the silicon wafer basket body until it is in close contact with the basket body. This bidirectional fixing of the extrusion block and clamping block further improves the fixing strength of the silicon wafer basket body, thereby increasing testing efficiency.

[0015] Preferably, the calibration seat, the squeezing block, and the limiting component are provided in two identical sets, and the two sets of the calibration seat, the squeezing block, and the limiting component are symmetrically distributed on the inner side of the detection stage.

[0016] Through the above technical solution, the silicon wafer basket body can be calibrated, squeezed and limited from multiple directions by two sets of symmetrically distributed calibration seats, extrusion blocks and limiting components, ensuring that the silicon wafer basket body will not shake or shift during the testing process, thereby improving the accuracy and reliability of the testing results.

[0017] Preferably, a rubber pad is bonded to one end of the extrusion block near the silicon wafer basket body, and the cross-section of the rubber pad has a "water ripple" structure.

[0018] The above technical solution involves attaching a rubber pad to one end of the extrusion block near the silicon wafer basket body. The rubber pad has a "water ripple" cross-section, which increases the friction between the extrusion block and the silicon wafer basket body, preventing the silicon wafer basket body from sliding during the testing process. The rubber pad also has a certain degree of elasticity, which can protect the outer surface of the silicon wafer basket body and prevent damage during extrusion.

[0019] Compared with the prior art, this utility model provides a fixing device for silicon wafer basket inspection, which has the following beneficial effects:

[0020] 1. This fixing device for silicon wafer basket inspection starts with a servo motor. The output shaft of the servo motor drives a bidirectional screw to rotate. Through the threaded connection with the bidirectional screw of the connecting block, two sets of calibration seats can move synchronously towards the center in the guide groove until they are in close contact with the silicon wafer basket body, realizing rapid calibration of the silicon wafer basket body. By rotating and installing pulleys on the inner side of the calibration seat, the friction between the silicon wafer basket body and the body can be reduced during calibration, thereby protecting the outer surface of the silicon wafer basket body. By pushing the extrusion block with the cylinders on both sides of the inspection table, it is easy to fix silicon wafer basket bodies of different sizes, improving the applicability of the device.

[0021] 2. This fixing device for silicon wafer basket inspection features an "L"-shaped cross-section for the fixing base, providing a stable mounting foundation for the handwheel and threaded rod. It also better engages with the side of the silicon wafer basket body furthest from the extrusion block, achieving multi-faceted fixing of the basket body. The threaded rod passes through and is threadedly connected to the fixing base. During fixing, the operator can manually rotate the handwheel, causing the threaded rod to rotate and move the clamping block towards the silicon wafer basket body until it is in close contact. This bidirectional fixing of the extrusion block and clamping block further enhances the fixing strength of the silicon wafer basket body, thereby improving inspection efficiency. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 1 ;

[0023] Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 2 ;

[0024] Figure 3 This is a three-dimensional structural diagram of the testing station of this utility model;

[0025] Figure 4 This is a schematic diagram of the internal structure of the testing station of this utility model;

[0026] Figure 5 This is a schematic diagram of the installation structure of the calibration base of this utility model;

[0027] Figure 6 This is a schematic diagram of the installation structure of the limiting component of this utility model;

[0028] Figure 7 This is a three-dimensional structural diagram of the limiting component of this utility model.

[0029] The components include: 1. Testing platform; 2. Receiving groove; 3. Guide groove; 4. Servo motor; 5. Bidirectional screw; 6. Calibration seat; 7. Connecting block; 8. Pulley; 9. Cylinder; 10. Extrusion block; 11. Rubber pad; 12. Limiting assembly; 1201. Fixing rod; 1202. Extension rod; 1203. Movable groove; 1204. Limiting block; 1205. Return spring; 1206. Retaining ring; 1207. Fixing seat; 1208. Handwheel; 1209. Threaded rod; 1210. Clamping block; 13. Silicon wafer basket body. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Example 1: As Figure 1-7 As shown, the present invention provides a fixing device for silicon wafer basket inspection, including a testing platform 1 and a silicon wafer basket body 13 located inside the testing platform 1. A receiving groove 2 is provided at one end of the testing platform 1 near the silicon wafer basket body 13, and a guide groove 3 is provided at one end of the top wall of the receiving groove 2 near the silicon wafer basket body 13. A servo motor 4 is fixedly installed on the front side of the testing platform 1, and a bidirectional screw 5 is fixedly installed on the output shaft of the servo motor 4. A calibration seat 6 is provided on the top of the receiving groove 2, and a connecting block 7 threadedly connected to the bidirectional screw 5 is fixedly installed at one end of the calibration seat 6 near the testing platform 1. Cylinders 9 are fixedly installed on both sides of the testing platform 1, and a pressing block 10 is fixedly installed on the movable end of the cylinder 9. A limit component 12 is fixedly installed at the center of the top of the pressing block 10.

[0032] Specifically, a pulley 8 is rotatably mounted on the inner side of the calibration base 6, and the connecting block 7 is slidably connected to the guide groove 3. The advantage is that by rotatably mounting the pulley 8 on the inner side of the calibration base 6, friction with the silicon wafer basket body 13 can be reduced during calibration. Furthermore, the slidable connection between the connecting block 7 and the guide groove 3 guides and limits the calibration base 6, improving calibration accuracy.

[0033] Specifically, the limiting component 12 includes a fixed rod 1201 and an extension rod 1202. The fixed rod 1201 has an inner groove 1203. A limiting block 1204 is fixedly installed at the end of the fixed rod 1201 near the extension rod 1202. A retaining ring 1206 is fixedly installed at the end of the extension rod 1202 near the fixed rod 1201. A fixing seat 1207 is fixedly installed at the end of the extension rod 1202 away from the fixed rod 1201. A handwheel 1208 is provided on the side of the fixing seat 1207 near the silicon wafer basket body 13. A threaded rod 1209 is fixedly installed at the end of the handwheel 1208 near the fixing seat 1207. A clamping block 1210 is fixedly installed at the end of the threaded rod 1209 away from the handwheel 1208. The advantage is that the limiting component 12 facilitates the fixing of silicon wafer basket bodies 13 of different sizes, ensuring normal operation of the detection system and improving the applicability of the device.

[0034] Specifically, the outer diameter of the retaining ring 1206 is the same as the inner diameter of the movable groove 1203, the outer diameter of the extension rod 1202 is the same as the inner diameter of the limiting block 1204, and the inner diameter of the limiting block 1204 is smaller than the outer diameter of the retaining ring 1206. A return spring 1205 is fixedly installed between the extension rod 1202 and the fixed rod 1201. The advantages are that by setting the outer diameter of the retaining ring 1206 to be the same as the inner diameter of the movable groove 1203, the extension rod 1202 can move within the fixed rod 1201. By setting the outer diameter of the extension rod 1202 to be the same as the inner diameter of the limiting block 1204, and the inner diameter of the limiting block 1204 being smaller than the outer diameter of the retaining ring 1206, the extension rod 1202 can be prevented from detaching from the fixed rod 1201. Furthermore, by fixing the extension rod 1202 and the fixed rod 1201 with a return spring 1205, the extension rod 1202 can automatically extend and retract when subjected to external force. Thus, when fixing the silicon wafer basket body 13, the fixing seat 1207 is always in contact with the silicon wafer basket body 13, further improving the fixation of the silicon wafer basket body 13.

[0035] Example 2: Figure 2-7 As shown, this is an improvement on the previous embodiment.

[0036] Specifically, the fixed base 1207 has an "L"-shaped cross-section, and the threaded rod 1209 passes through the fixed base 1207 and is threadedly connected to it. The advantage is that by setting the fixed base 1207 to an "L"-shaped cross-section, a stable mounting base can be provided for the handwheel 1208 and the threaded rod 1209. It also allows for better engagement with the side of the silicon wafer basket body 13 away from the extrusion block 10, achieving multi-faceted fixation of the silicon wafer basket body 13. Through the threaded rod 1209 passing through and threadedly connected to the fixed base 1207, during fixing, the operator can manually rotate the handwheel 1208, causing the threaded rod 1209 to rotate and move the clamping block 1210 towards the silicon wafer basket body 13 until it is in close contact with it. The bidirectional fixation by the extrusion block 10 and the clamping block 1210 further enhances the fixing strength of the silicon wafer basket body 13, thereby improving testing efficiency.

[0037] Specifically, the calibration seat 6, the pressing block 10, and the limiting component 12 are all provided in two identical sets, with the two sets of calibration seats 6, pressing blocks 10, and limiting components 12 symmetrically distributed on the inner side of the testing stage 1. The advantage is that, through the two symmetrically distributed sets of calibration seats 6, pressing blocks 10, and limiting components 12, the silicon wafer basket body 13 can be calibrated, pressed, and limited from multiple directions, ensuring that the silicon wafer basket body 13 does not shake or shift during the testing process, thereby improving the accuracy and reliability of the testing results.

[0038] Specifically, a rubber pad 11 is bonded to one end of the extrusion block 10 near the silicon wafer basket body 13. The rubber pad 11 has a "water ripple" cross-section. The advantage is that by bonding the rubber pad 11 to one end of the extrusion block 10 near the silicon wafer basket body 13, and by setting the rubber pad 11 to have a "water ripple" cross-section, the friction between the extrusion block 10 and the silicon wafer basket body 13 can be increased, preventing the silicon wafer basket body 13 from sliding during the testing process. Furthermore, the rubber pad 11 has a certain degree of elasticity, which can protect the outer surface of the silicon wafer basket body 13 and prevent damage during extrusion.

[0039] Working Principle: In use, the silicon wafer basket body 13 to be tested is first placed in the receiving groove 2. Then, the servo motor 4 is started, and the output shaft of the servo motor 4 drives the bidirectional screw 5 to rotate. Through the threaded connection with the bidirectional screw 5 of the connecting block 7, the two sets of calibration seats 6 can be guided synchronously towards the center in the guide groove 3 until they are in close contact with the silicon wafer basket body 13. Then, the cylinders 9 on both sides of the testing platform 1 are started. The moving ends of the cylinders 9 push the extrusion block 10 towards the silicon wafer basket body 13. While approaching the silicon wafer basket body 13, the operator can manually pull the fixing seat 1207 until it is in close contact with the silicon wafer basket body 13. Releasing the fixing seat 1207, the elastic action of the return spring 1205 ensures that the fixing seat 1207 remains in contact with the silicon wafer basket body 13. During the pushing process, the inner side of the calibration seat 6 is equipped with a pulley 8, which facilitates calibration. When clamping the silicon wafer basket body 13, the friction between the clamping block 10 and the silicon wafer basket body 13 is reduced. A rubber pad 11 is bonded to one end of the extrusion block 10 near the silicon wafer basket body 13. The rubber pad 11 has a "water ripple" cross-section, which increases the friction between the extrusion block 10 and the silicon wafer basket body 13, preventing the silicon wafer basket body 13 from sliding during the inspection process. The rubber pad 11 also has a certain elasticity, which can protect the outer surface of the silicon wafer basket body 13 and avoid damage during extrusion. After clamping the silicon wafer basket body 13, the operator can manually turn the handwheel 1208 to drive the threaded rod 1209 to rotate, so that the clamping block 1210 moves towards the silicon wafer basket body 13 until it is in close contact with the silicon wafer basket body 13. The bidirectional fixation of the extrusion block 10 and the clamping block 1210 further improves the fixation strength of the silicon wafer basket body 13, thereby improving the inspection efficiency.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fixing device for inspecting silicon wafer baskets, comprising an inspection table (1) and a silicon wafer basket body (13) located inside the inspection table (1), characterized in that: The testing platform (1) has a receiving groove (2) at one end near the silicon wafer basket body (13). The top wall of the receiving groove (2) has a guide groove (3) at one end near the silicon wafer basket body (13). A servo motor (4) is fixedly installed on the front side of the testing platform (1). A bidirectional screw (5) is fixedly installed on the output shaft of the servo motor (4). A calibration seat (6) is provided on the top of the receiving groove (2). A connecting block (7) threadedly connected to the bidirectional screw (5) is fixedly installed on one end of the calibration seat (6) near the testing platform (1). Cylinders (9) are fixedly installed on both sides of the testing platform (1). A pressing block (10) is fixedly installed on the movable end of the cylinder (9). A limit component (12) is fixedly installed at the center of the top of the pressing block (10).

2. The fixing device for silicon wafer basket inspection according to claim 1, characterized in that: The calibration seat (6) is rotatably mounted with a pulley (8), and the connecting block (7) and the guide groove (3) are slidably connected.

3. The fixing device for silicon wafer basket inspection according to claim 1, characterized in that: The limiting component (12) includes a fixed rod (1201) and an extension rod (1202). The fixed rod (1201) has an inner groove (1203). A limiting block (1204) is fixedly installed at the end of the fixed rod (1201) near the extension rod (1202). A retaining ring (1206) is fixedly installed at the end of the extension rod (1202) near the fixed rod (1201). A fixed seat (1207) is fixedly installed at the end of the extension rod (1202) away from the fixed rod (1201). A handwheel (1208) is provided on the side of the fixed seat (1207) near the silicon wafer basket body (13). A threaded rod (1209) is fixedly installed at the end of the handwheel (1208) near the fixed seat (1207). A clamping block (1210) is fixedly installed at the end of the threaded rod (1209) away from the handwheel (1208).

4. A fixing device for silicon wafer basket inspection according to claim 3, characterized in that: The outer diameter of the retaining ring (1206) is the same as the inner diameter of the movable groove (1203), the outer diameter of the extension rod (1202) is the same as the inner diameter of the limiting block (1204), and a return spring (1205) is fixedly installed between the extension rod (1202) and the fixed rod (1201).

5. A fixing device for silicon wafer basket inspection according to claim 3, characterized in that: The cross-section of the fixed seat (1207) is "L" shaped, and the threaded rod (1209) passes through the fixed seat (1207) and is threadedly connected to the fixed seat (1207).

6. A fixing device for silicon wafer basket inspection according to claim 1, characterized in that: The calibration seat (6), the squeezing block (10) and the limiting component (12) are all provided in two identical sets, and the two sets of the calibration seat (6), the squeezing block (10) and the limiting component (12) are symmetrically distributed on the inner side of the detection table (1).

7. A fixing device for silicon wafer basket inspection according to claim 1, characterized in that: A rubber pad (11) is bonded to one end of the extrusion block (10) near the silicon wafer basket body (13), and the cross section of the rubber pad (11) has a "water ripple" structure.

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