A robot

Abstract

The utility model discloses a mechanical hand, including opposite main mechanical hand and deputy mechanical hand and hollow's connecting crossbeam and threading pipe, main mechanical hand and deputy mechanical hand lower part all are equipped with tray assembly, the tray assembly is used for supporting the product of waiting for carrying, the both ends of connecting crossbeam are connected with main mechanical hand's tray assembly and deputy mechanical hand's tray assembly respectively, the connecting crossbeam is used for driving main mechanical hand and deputy mechanical hand synchronous movement to assist tray assembly to carry the product of waiting for carrying, the both ends of threading pipe are connected with main mechanical hand and deputy mechanical hand respectively, and the threading pipe is used for wiring. The utility model has the characteristics of compact structure, convenient operation, high reliability, and wiring is carried out through the setting connecting crossbeam, cancels the wire slot of mechanical hand side part, and wiring is more convenient, and cost is lower.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic equipment technology, specifically to a robotic arm. Background Technology

[0002] With the rapid development of the photovoltaic industry, the output of equipment such as high-temperature diffusion furnaces, PECVD, and LPCVD is constantly increasing. The robotic arms of these two types of equipment grip quartz boats and graphite boats, respectively. As production increases, the load-bearing capacity of the robotic arms also demands higher strength. However, existing robotic arms have relatively low structural strength and cannot support the heavy quartz and graphite boats. Furthermore, both the main and auxiliary robotic arms have cable trays on their outer sides, requiring wiring to be done through conduits, resulting in a complex wiring method. To meet these requirements, the robotic arm design needs to be optimized. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a robotic arm that is compact, has convenient wiring, and has high structural strength, in order to overcome the shortcomings of the existing technology.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: A robotic arm includes a main robotic arm and a secondary robotic arm arranged opposite to each other, as well as a hollow connecting beam and a conduit. Each of the main and secondary robotic arms has a pallet assembly at its lower part, which is used to support products to be transported. The two ends of the connecting beam are respectively connected to the pallet assemblies of the main and secondary robotic arms. The connecting beam is used to drive the main and secondary robotic arms to move synchronously and to assist the pallet assemblies in carrying the products to be transported. The two ends of the conduit are respectively connected to the main and secondary robotic arms, and the conduit is used for cable routing.

[0005] As a further improvement of this utility model, the tray assembly includes a front cover plate and a rear cover plate arranged opposite to each other. The front cover plate is provided with a front cable routing hole, and the rear cover plate is provided with a rear cable routing hole. The connecting beam is also used for cable routing. After the cable in the tray assembly passes through the front cable routing hole and the rear cable routing hole, it is pulled and laid in the connecting beam.

[0006] As a further improvement of this utility model, the tray assembly also includes an adjustment plate, which has an oblong hole. Fasteners are screwed into the oblong hole to connect and fix the end of the connecting beam to the adjustment plate.

[0007] As a further improvement of this utility model, the connecting beam includes a hollow beam body, and the end of the beam body is provided with a pad with a threaded hole and a base plate with a smooth hole. The pad is located between the adjusting plate and the base plate. Fasteners are screwed into the smooth hole and the threaded hole to connect and fix the beam body to the pad. Fasteners are screwed into the waist-shaped hole and the threaded hole to connect and fix the adjusting plate to the pad.

[0008] As a further improvement of this utility model, both the main manipulator and the auxiliary manipulator include an inner side plate, and the two ends of the conduit are respectively connected and fixed to the inner side plate.

[0009] As a further improvement of this utility model, a pressure plate is provided on the inner side plate, which is used to fix the conduit.

[0010] As a further improvement of this utility model, both the main manipulator and the auxiliary manipulator include a horizontal plate, a cover plate, an outer side plate, a support plate, and a mounting plate. The horizontal plate, cover plate, outer side plate, and inner side plate are all disposed on the upper part of the mounting plate, and the outer side plate and the inner side plate are respectively located on both sides of the horizontal plate. The cover plate covers the top of the horizontal plate, and the support plate is disposed on the side of the mounting plate and connected to the outer side plate. The pallet assembly is slidably disposed on the side of the inner side plate.

[0011] As a further improvement of this utility model, the main manipulator and the auxiliary manipulator also include a connecting plate, which is disposed on the side of the mounting plate and connected to the inner side plate.

[0012] As a further improvement of this utility model, both the inner side of the support plate and the inner side of the connecting plate are provided with positioning grooves, which are used to install reinforcing ribs.

[0013] As a further improvement of this utility model, a transmission shaft is also provided between the main manipulator and the auxiliary manipulator. The two ends of the transmission shaft are respectively connected to the main manipulator and the auxiliary manipulator through bellows couplings. The transmission shaft is used to drive the main manipulator and the auxiliary manipulator to move synchronously.

[0014] Compared with the prior art, the advantages of this utility model are: 1. The robotic arm of this utility model has a hollow connecting beam, which is connected to the pallet assemblies on both sides of the robotic arm. The connecting beam enhances the motion synchronization between the main robotic arm and the auxiliary robotic arm. In addition, the connecting beam can also work with the pallet assemblies to support the products to be transported, thereby improving the overall load-bearing capacity of the robotic arm and better meeting the transportation needs of large-sized quartz boats and graphite boats.

[0015] 2. The robotic arm of this utility model uses a hollow connecting beam for wiring, eliminating the need for the wire groove on the side of the auxiliary robotic arm, making wiring simpler and more convenient, and helping to reduce the operating cost of the robotic arm.

[0016] 3. The manipulator of this utility model enhances the structural strength of the manipulator by adding cover plates, connecting plates and reinforcing ribs to the main manipulator and the auxiliary manipulator, so that the manipulator can better meet the handling needs of large-sized quartz boats and graphite boats. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structural principle of the robotic arm in a specific embodiment of this utility model; Figure 2 This is a schematic diagram of the partial structural principle of the robotic arm in a specific embodiment of this utility model; Figure 3 This is a schematic diagram of the structural principle of the tray assembly in a specific embodiment of this utility model; Figure 4 This is a schematic diagram illustrating the assembly structure principle of the pallet assembly and the connecting beam in a specific embodiment of this utility model; Figure 5 This is a schematic diagram of the explosive structure principle of the main manipulator in a specific embodiment of this utility model; Figure 6 This is a schematic diagram of the assembly structure of the main manipulator in a specific embodiment of this utility model.

[0018] Legend: 1. Main robot arm; 2. Secondary robot arm; 3. Connecting beam; 4. Cable guide tube; 5. Pallet assembly; 6. Pressure plate; 7. Inner side plate; 8. Front cover plate; 9. Front cable routing hole; 10. Adjustment plate; 11. Rear cover plate; 12. Rear cable routing hole; 13. Main beam body; 14. Waist-shaped hole; 15. Pad; 16. Threaded hole; 17. Base plate; 18. Smooth hole; 19. Horizontal plate; 20. Cover plate; 21. Outer side plate; 22. Support plate; 23. Reinforcing rib; 24. Mounting plate; 25. Connecting plate; 26. Positioning groove; 27. Drive shaft; 28. Bellows coupling; 29. ​​Support assembly. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0020] In the description of this utility model, it should be understood that the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0022] Example like Figure 1 As shown, the robotic arm of this invention includes a main robotic arm 1 and a secondary robotic arm 2 arranged opposite to each other, as well as a hollow connecting beam 3 and a conduit 4. Both the main robotic arm 1 and the secondary robotic arm 2 have a tray assembly 5 at their lower parts. The tray assembly 5 is used to support the product to be transported. The two ends of the connecting beam 3 are connected to the tray assembly 5 of the main robotic arm 1 and the secondary robotic arm 2, respectively. The connecting beam 3 is used to drive the main robotic arm 1 and the secondary robotic arm 2 to move synchronously and assists the tray assembly 5 in carrying the product to be transported. The two ends of the conduit 4 are connected to the main robotic arm 1 and the secondary robotic arm 2, respectively, and the conduit 4 is used for wiring. It is understood that the settings of the relevant driving components and detection components in the main robotic arm 1, the secondary robotic arm 2, and the tray assembly 5 can all adopt conventional settings in the art, and will not be described in detail here.

[0023] In this embodiment, by setting a hollow connecting beam 3 and connecting the connecting beam 3 to the pallet assemblies 5 on both sides of the robot, the motion synchronization of the main robot 1 and the auxiliary robot 2 is enhanced by the connecting beam 3. Furthermore, the connecting beam 3 can also work with the pallet assembly 5 to support the products to be transported, thereby improving the overall load-bearing capacity of the robot and better meeting the transport needs of large-sized quartz boats and graphite boats.

[0024] Furthermore, the hollow connecting beam 3 can also be used for wiring. By using the connecting beam 3 for wiring, the main robot 1 still has a wire channel on its side, maintaining its original function, while the wire channel on the side of the auxiliary robot 2 is eliminated, making wiring simpler and more convenient, and helping to reduce the operating cost of the robot.

[0025] In this embodiment, the connecting beam 3 serves as the "spine" of the robot arm and is the main body for the movement of the robot arm's lifting or telescopic axis. It needs to bear the entire weight or motion load from the pallet assembly 5, the boat, and the silicon wafer. The connecting beam 3 can accurately transmit the motion of the drive mechanism to the pallet assembly 5, thereby driving the boat to be transported to move.

[0026] like Figure 1 and Figure 2 As shown, a drive shaft 27 is also provided between the main robot 1 and the auxiliary robot 2. The drive shaft 27 and the conduit 4 are located on the same side, and both ends of the drive shaft 27 are connected to the main robot 1 and the auxiliary robot 2 respectively through bellows couplings 28. The main function of the drive shaft 27 is to forcibly maintain the absolute synchronous movement of the main robot 1 and the auxiliary robot 2. Since there are inevitably small manufacturing and assembly errors between the drive seat of the main robot 1 and the mounting seat of the auxiliary robot 2, these small errors may cause huge internal stresses, leading to drive shaft constriction, accelerated bearing wear, increased motor load, and even movement jamming. Therefore, the main robot 1 and the auxiliary robot 2 are connected to both ends of the drive shaft 27 through bellows couplings 28 respectively. The excellent angular, radial, and axial compensation capabilities of the bellows couplings 28 absorb the above-mentioned errors, ensuring synchronous transmission of movement and eliminating harmful stresses.

[0027] like Figure 2 and Figure 3 As shown, the tray assembly 5 includes a front cover plate 8 and a rear cover plate 11 arranged opposite to each other. The front cover plate 8 is provided with a plurality of front wiring holes 9, and the rear cover plate 11 is provided with a plurality of rear wiring holes 12. In this embodiment, the motion stroke detection switch of the auxiliary robot 2 is routed through the conduit 4, while in the main robot 1, the cable of the motion stroke detection switch enters the tray assembly 5 through the rear wiring hole 12 on the upper part of the rear cover plate 11, connects to the terminal block, and then exits through the rear wiring hole 12 on the lower part of the rear cover plate 11 and connects to the wiring groove on the side of the main robot 1; on the main robot 1 and the auxiliary robot 2, the shaft switch cable in the tray assembly 5 passes through the front wiring hole 9 and is pulled and laid in the connecting beam 3.

[0028] like Figure 2 and Figure 4 As shown, the tray assembly 5 also includes an adjustment plate 10 located on one side of the top of the front cover plate 8 and the rear cover plate 11. The adjustment plate 10 is provided with a waist-shaped hole 14, and fasteners are screwed into the waist-shaped hole 14 to connect and fix the end of the connecting beam 3 to the adjustment plate 10.

[0029] In this embodiment, the connecting beam 3 includes a hollow, welded beam body 13. The structural rigidity of the beam body 13 is crucial; it must effectively resist deformation to ensure that the pallet assemblies 5 connected to both ends always maintain a high level of synchronization and positional accuracy. A support assembly 29 can be provided in the middle of the beam body 13 for support to ensure the structural stability of the beam body 13. The ends of the beam body 13 are provided with a pad 15 with threaded holes 16 and a base plate 17 with smooth holes 18. The pad 15 is located between the adjusting plate 10 and the base plate 17. Screws are screwed into the smooth holes 18 and threaded holes 16 to connect and fix the beam body 13 to the pad 15; screws are screwed into the oblong holes 14 and threaded holes 16 to connect and fix the adjusting plate 10 to the pad 15; finally, the connecting beam 3 and the pallet assembly 5 are connected and fixed, the connection is reliable and easy to assemble and disassemble, and it will not affect the normal use of the pallet assembly 5. Figure 2 As shown, both the main robot 1 and the auxiliary robot 2 include an inner side plate 7, and a pressure plate 6 is provided on the inner side plate 7. The pressure plate 6 is used to press the two ends of the conduit 4, and then the pressure plate 6 is locked on the inner side plate 7 by screws, thus realizing the installation and fixation of the conduit 4.

[0030] like Figure 5 and Figure 6 As shown, both the main robot 1 and the auxiliary robot 2 include a horizontal plate 19, a cover plate 20, an outer side plate 21, a support plate 22, and a mounting plate 24. The mounting plate 24 is arranged vertically, while the horizontal plate 19, cover plate 20, outer side plate 21, and inner side plate 7 are all arranged horizontally on top of the mounting plate 24. The outer side plate 21 and inner side plate 7 are located on opposite sides of the horizontal plate 19, and the cover plate 20 covers the top of the horizontal plate 19. By setting the cover plate 20 on top of the horizontal plate 19, the outer side plate 21, inner side plate 7, horizontal plate 19, and cover plate 20 are connected to form a whole, which helps to enhance the structural strength of the upper part of the robot. The triangular support plate 22 is arranged vertically on the side of the mounting plate 24 and is connected to the outer side of the outer side plate 21 to further enhance the integrity of the robot and thus enhance its structural strength. The pallet assembly 5 is slidably arranged on the side of the inner side plate 7. It is understood that the connection and cooperation between the pallet assembly 5 and the robot can adopt conventional settings in the art, which will not be described in detail here.

[0031] In this embodiment, the main manipulator 1 and the auxiliary manipulator 2 also include an L-shaped connecting plate 25, which is disposed on the side of the mounting plate 24 and connected to the inner side plate 7. Further, both the inner side of the support plate 22 and the inner side of the connecting plate 25 are provided with positioning grooves 26 for installing reinforcing ribs 23. By providing support plates 22 and connecting plates 25 on both sides of the mounting plate 24, and connecting the support plates 22 and the connecting plates 25 with reinforcing ribs 23, more stable support can be provided for the horizontal plate 19, the cover plate 20, the outer side plate 21, and the inner side plate 7, enhancing the overall structural strength of the manipulator and enabling it to better meet the handling needs of large-sized quartz boats and graphite boats.

[0032] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A robotic arm, characterized in that, It includes a main robot (1) and a secondary robot (2) arranged opposite to each other, as well as a hollow connecting beam (3) and a conduit (4). The main robot (1) and the secondary robot (2) are each provided with a pallet assembly (5) at the bottom. The pallet assembly (5) is used to support the product to be transported. The two ends of the connecting beam (3) are respectively connected to the pallet assembly (5) of the main robot (1) and the pallet assembly (5) of the secondary robot (2). The connecting beam (3) is used to drive the main robot (1) and the secondary robot (2) to move synchronously and to assist the pallet assembly (5) in carrying the product to be transported. The two ends of the conduit (4) are respectively connected to the main robot (1) and the secondary robot (2). The conduit (4) is used for wiring.

2. The robotic arm according to claim 1, characterized in that, The pallet assembly (5) includes a front cover plate (8) and a rear cover plate (11) arranged opposite to each other. The front cover plate (8) is provided with a front cable routing hole (9), and the rear cover plate (11) is provided with a rear cable routing hole (12). The connecting beam (3) is also used for cable routing. After the cable in the pallet assembly (5) passes through the front cable routing hole (9) and the rear cable routing hole (12), it is pulled and laid in the connecting beam (3).

3. The robotic arm according to claim 1, characterized in that, The pallet assembly (5) also includes an adjustment plate (10) with a waist-shaped hole (14) into which fasteners are screwed to connect and fix the end of the connecting beam (3) to the adjustment plate (10).

4. The robotic arm according to claim 3, characterized in that, The connecting beam (3) includes a hollow beam body (13). The end of the beam body (13) is provided with a pad (15) with a threaded hole (16) and a base plate (17) with a light hole (18). The pad (15) is located between the adjusting plate (10) and the base plate (17). Fasteners are screwed into the light hole (18) and the threaded hole (16) to connect and fix the beam body (13) and the pad (15). Fasteners are screwed into the waist-shaped hole (14) and the threaded hole (16) to connect and fix the adjusting plate (10) and the pad (15).

5. The robotic arm according to any one of claims 1 to 4, characterized in that, Both the main manipulator (1) and the auxiliary manipulator (2) include an inner side plate (7), and the two ends of the conduit (4) are respectively connected and fixed to the inner side plate (7).

6. The robotic arm according to claim 5, characterized in that, The inner side plate (7) is provided with a pressure plate (6), which is used to fix the conduit (4).

7. The robotic arm according to claim 5, characterized in that, The main manipulator (1) and the auxiliary manipulator (2) each include a horizontal plate (19), a cover plate (20), an outer side plate (21), a support plate (22), and a mounting plate (24). The horizontal plate (19), the cover plate (20), the outer side plate (21), and the inner side plate (7) are all located on the upper part of the mounting plate (24), and the outer side plate (21) and the inner side plate (7) are located on both sides of the horizontal plate (19). The cover plate (20) covers the top of the horizontal plate (19). The support plate (22) is located on the side of the mounting plate (24) and is connected to the outer side plate (21). The pallet assembly (5) is slidably located on the side of the inner side plate (7).

8. The robotic arm according to claim 7, characterized in that, The main manipulator (1) and the auxiliary manipulator (2) also include a connecting plate (25), which is disposed on the side of the mounting plate (24) and connected to the inner side plate (7).

9. The robotic arm according to claim 8, characterized in that, The inner side of the support plate (22) and the inner side of the connecting plate (25) are provided with positioning grooves (26), which are used to install reinforcing ribs (23).

10. The robotic arm according to any one of claims 6 to 9, characterized in that, A drive shaft (27) is provided between the main manipulator (1) and the auxiliary manipulator (2). The two ends of the drive shaft (27) are connected to the main manipulator (1) and the auxiliary manipulator (2) respectively through a bellows coupling (28). The drive shaft (27) is used to drive the main manipulator (1) and the auxiliary manipulator (2) to move synchronously.

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