Material feeding device

Abstract

Embodiments of the present application provide a material feeding device, and relate to the technical field of solar cell preparation. The material feeding device comprises a feeding table, a docking assembly and a plurality of carriers. The feeding table is configured to drive a storage box to move along a first direction. The docking assembly comprises a docking piece and a connecting piece, and the docking piece is connected to the connecting piece. The docking piece is configured to drive the storage box to move along the first direction. The plurality of carriers are arranged at intervals along the extension direction of the connecting piece. The plurality of carriers comprise a first carrier and a second carrier. The first carrier is in communication with a process workshop on the side of the first carrier away from the docking piece, and the second carrier is not in communication with the process workshop. The docking piece is movable relative to the connecting piece along the extension direction of the connecting piece, so that the storage box can be transferred between the docking piece and the feeding table, and the storage box can be transferred between the docking piece and any carrier. Embodiments of the present application can reduce the risk of process workshop downtime caused by unpacking stagnation or slow unpacking speed.

Description

Technical Field

[0001] The embodiments of this application relate to the technical field of solar cell fabrication, and more particularly to a feeding device. Background Technology

[0002] In the process of manufacturing solar cells, silicon wafers are usually unpacked and placed in storage boxes. These storage boxes can carry the silicon wafers into the process workshop, such as the texturing process workshop, to achieve the texturing treatment of the silicon wafers.

[0003] When unpacking stops or the unpacking speed is slow, such as when unpacking personnel are resting, eating, or when the unpacking production line malfunctions, the process workshop will stop working due to lack of materials, affecting the production capacity of the process workshop. Utility Model Content

[0004] The embodiments of this application disclose a material feeding device that can reduce the risk of process workshop shutdown due to material shortages and reduce the impact of unpacking stagnation or slow unpacking speed on the production capacity of the process workshop.

[0005] On one hand, embodiments of this application provide a material dispensing device. The dispensing device includes a loading platform, a docking assembly, and multiple carriers. The loading platform is used to move a storage box along a first direction. The docking assembly is located on one side of the loading platform along the first direction. The docking assembly includes a docking member and a connecting member, which are connected. The docking member is used to move the storage box along the first direction, which is perpendicular to the extension direction of the connecting member. Multiple carriers are located on the side of the docking assembly away from the loading platform along the first direction, and the multiple carriers are spaced apart along the extension direction of the connecting member. The multiple carriers include a first carrier and a second carrier. The first carrier is connected to a process workshop located on the side of the first carrier away from the docking member, and the second carrier is not connected to the process workshop. The docking member is movable relative to the connecting member along the extension direction of the connecting member, so that the storage box can be transferred between the docking member and the loading platform, and the storage box can be transferred between the docking member and any one of the carriers.

[0006] In some possible implementations, the mating components include a first mating component and a second mating component, which are spaced apart along the extension direction of the connector, and are respectively connected to the connector. The distance between the first and second mating components along the extension direction of the connector is equal to the distance between any two adjacent carrier components.

[0007] In some possible implementations, the first carrier includes a first first carrier and a second first carrier, which are arranged adjacent to each other. The first first carrier and the first mating member are used to transfer the storage box carrying the silicon wafer, and the second first carrier and the second mating member are used to transfer the empty storage box.

[0008] In some possible implementations, there are multiple second carriers, which are used to store the silicon wafer storage box and the empty storage box, respectively.

[0009] In some possible implementations, the feeding device further includes a housing that encloses a receiving space, within which a docking assembly and multiple carriers are disposed. The housing has a first opening and a second opening, through which a storage box is transferred between the carriers and the process workshop via the first opening, and between the docking assembly and the loading platform via the second opening.

[0010] In some possible implementations, the feeding device further includes a first door plate and a second door plate, the first door plate being used to open or close a first opening and the second door plate being used to open or close a second opening.

[0011] In some possible implementations, the feeding device further includes a first sensor, a second sensor, and a controller. The first sensor detects the distance between the storage box and the first door panel, and the second sensor detects the distance between the storage box and the second door panel. The controller is electrically connected to the first and second sensors and is used to control the first door panel to open or close the first opening based on the detection result of the first sensor, and to control the second door panel to open or close the second opening based on the detection result of the second sensor.

[0012] In some possible implementations, the docking component includes a docking conveyor belt, docking conveyor wheels, and a first motor. There are multiple docking conveyor wheels, spaced apart along a first direction. The docking conveyor belt is connected to the multiple docking conveyor wheels. The docking conveyor belt carries the storage box. The first motor is connected to the docking conveyor wheels and drives them to rotate. The carrying component includes a buffer conveyor belt, buffer conveyor wheels, and a second motor. There are multiple buffer conveyor wheels, spaced apart along a first direction. The buffer conveyor belt is connected to the multiple buffer conveyor wheels. The buffer conveyor belt carries the storage box. The second motor is connected to the buffer conveyor wheels and drives them to rotate.

[0013] In some possible implementations, the feeding device also includes a baffle connected between the carrier and the docking assembly. A gap exists between the baffle and the carrier, through which the storage box is transferred between the carrier and the docking assembly.

[0014] In some possible implementations, the feeding device also includes an air knife, which is set on the feeding platform and used to blow away impurities in the storage box.

[0015] In summary, the embodiments of this application have at least the following beneficial effects:

[0016] In the embodiments of this application, the docking member is configured to be movable along the extension direction of the connecting member, so that the docking member can dock with the loading platform and any carrier, thereby enabling the storage box to be transferred between the loading platform, the docking member and any carrier.

[0017] For example, during normal unpacking, some of the storage boxes carrying silicon wafers can be transferred to the process workshop through the docking parts and the first carrier to meet the material needs of the process workshop, while other storage boxes carrying silicon wafers can be stored on the second carrier through the docking parts.

[0018] When unpacking is stalled or slow, the storage box carrying the silicon wafer on the second carrier can be transferred to the first carrier through the docking part, and then transferred to the process workshop through the first carrier. This reduces the risk of the process workshop being shut down due to lack of materials, thereby reducing the impact of unpacking stalls or slow unpacking speeds on the production capacity of the process workshop. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a feeding device provided in some embodiments of this application;

[0021] Figure 2 Schematic diagrams of the structure of the docking parts provided in some embodiments of this application;

[0022] Figure 3 This is a schematic diagram of the structure of the carrier provided in some embodiments of this application;

[0023] Figure 4 Schematic diagrams of the material feeding device provided in other embodiments of this application;

[0024] Figure 5 Provided for some embodiments of this application Figure 4 A magnified view of a portion of region B1;

[0025] Figure 6 Provided for some embodiments of this application Figure 4 A magnified view of a portion of region B2.

[0026] Explanation of reference numerals in the attached figures:

[0027] 100 - Feeding device; 101 - Housing; 102 - Baffle; 103 - Support foot; 110 - Feeding platform; 120 - Docking assembly; 121 - Docking component; 1211 - First docking component; 1212 - Second docking component; 121a - Docking conveyor belt; 121b - Docking conveyor wheel; 122 - Connector; 130 - Bearing component; 130a - Buffer conveyor belt; 130b - Buffer conveyor wheel; 131 - First bearing component; 1311 - First first bearing component; 1312 - Second first bearing component; 132 - Second bearing component; 1321 - First second bearing component; 1322 - Second second bearing component Components, 1323-Third second carrier, 1324-Fourth second carrier, 1325-Fifth second carrier, 141-First door panel, 1411-First sub-door panel, 1412-Second sub-door panel, 142-Second door panel, 1421-Third sub-door panel, 1422-Fourth sub-door panel, 151-Air knife, 201-Storage box, 2011-Storage box for carrying silicon wafers, 2012-Empty storage box, X-First direction, X1-First sub-direction, X2-Second sub-direction, Y-Extension direction of connector 122, P-Accommodation space, M1-First opening, M2-Second opening, D-Gap. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] In this application, the terms "upper," "left," "right," "front," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0030] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0031] Furthermore, the terms "installation," "setup," "equipped with," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0032] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0033] In the fabrication process of solar cells, it is necessary to unpack the entire package of silicon wafers and then place the unpacked wafers into a storage box. For example, the entire package of silicon wafers can be unpacked manually and then placed into the storage box, or an unpacking production line can be used. For instance, the unpacking production line may include an automated guided vehicle (AGV) robot, or it may include other robots capable of automatic unpacking; the embodiments of this application do not further limit this.

[0034] The storage box carrying the silicon wafer can be transferred to a feeding device, and then from the feeding device to a process workshop, such as a texturing workshop. Alternatively, the storage box carrying the silicon wafer can also be transferred to other process workshops via the feeding device; the embodiments of this application do not further limit this.

[0035] Under normal circumstances, the unpacking speed is greater than the processing speed of the process workshop. In other words, under normal circumstances, the unpacking speed can meet the material needs of the process workshop.

[0036] However, when unpacking stops or the unpacking speed is slow, such as when unpacking personnel are resting, eating, or when the unpacking production line malfunctions, the material feeding device may not be able to provide enough silicon wafers to the process workshop, causing the process workshop to stop working and wait for materials, thus affecting the production capacity of the process workshop.

[0037] Figure 1 This is a schematic diagram of the structure of a feeding device provided in some embodiments of this application. Based on this, as... Figure 1 As shown, an embodiment of this application provides a material dispensing device 100, which can slowly store material boxes, reducing the risk of downtime in the process workshop due to material shortages, thereby reducing the impact of unpacking stagnation or slow unpacking speed on the production capacity of the process workshop.

[0038] In some examples, such as Figure 1 As shown, the feeding device 100 includes a loading platform 110, a docking assembly 120, and multiple carriers 130. The loading platform 110 is capable of carrying a storage box 201. For example, unpacked silicon wafers can be placed in the storage box 201 located on the loading platform 110. The loading platform 110 is used to drive the storage box 201 to move along a first direction X.

[0039] For example, the loading platform 110 may include a loading conveyor belt, loading conveyor wheels, and a third motor. There may be multiple loading conveyor wheels, which may be spaced apart along a first direction X. The loading conveyor belt is connected to the multiple loading conveyor wheels. The third motor is connected to the loading conveyor wheels and drives them to rotate, enabling the loading conveyor wheels to move the loading conveyor belt along the first direction X. The loading conveyor belt carries the storage box 201, allowing the storage box 201 to move along the first direction X.

[0040] Alternatively, the loading platform 110 may include other components, such as a third guide rail and a third cylinder. The third guide rail extends along the first direction X, and the storage box 201 can be slidably connected to the third guide rail. The third guide rail can limit the movement of the storage box 201. The third cylinder can drive the storage box 201 to move along the first direction X.

[0041] For example, there can be two third guide rails, each capable of supporting two sets of three storage boxes 201, meaning the loading platform 110 can support four sets of twelve storage boxes 201 in total. Alternatively, the loading platform 110 can also support other numbers of storage boxes 201. The embodiments of this application do not further limit the number of storage boxes 201 that the loading platform 110 can support.

[0042] Understandably, the loading platform 110 may also include other components capable of driving the storage box 201 to move along the first direction X. The embodiments of this application do not further limit the specific structure of the loading platform 110.

[0043] Continue to refer to Figure 1 In some examples, the docking assembly 120 is located on one side of the loading table 110 along the first direction X. The docking assembly 120 includes a docking member 121 and a connecting member 122, which are connected together.

[0044] For example, connector 122 can be a connecting rod. Connector 121 and connector 122 can be directly connected or indirectly connected through other structures.

[0045] The first direction X is perpendicular to the extension direction Y of the connector 122. For example, the first direction X and the extension direction of the connector 122 can be perpendicular or approximately perpendicular, that is, the angle between the first direction X and the connector 122 can be 90°, 88°, or 89°, etc.

[0046] For example, the loading platform 110 can drive the storage box 201 to move along the first direction X toward the docking member 121, so that the storage box 201 can be transferred to the docking member 121. Understandably, the gap between the loading platform 110 and the docking member 121 is reduced to reduce the impact of the gap between them on the transfer of the storage box 201 between the loading platform 110 and the docking member 121.

[0047] In some examples, the docking member 121 is used to drive the storage box 201 to move along the first direction X.

[0048] For example, the docking component 121 can drive the storage box 201 to move along the first direction X towards the loading table 110, such as... Figure 1 As shown in the second sub-direction X2, this allows the storage box 201 on the docking member 121 to be transferred to the loading platform 110. Alternatively, the docking member 121 can also drive the storage box 201 to move away from the loading platform 110 along the first direction X, such as... Figure 1 As shown in the first sub-direction X1, the storage box 201 on the docking member 121 can be transferred to other components (e.g., the carrier member 130).

[0049] Figure 2 This is a schematic diagram of the structure of a docking component provided in some embodiments of this application. In some examples, such as... Figure 2 As shown, the docking component 121 may include a docking conveyor belt 121a, a docking conveyor wheel 121b, and a first motor (not shown in the figure).

[0050] Multiple docking conveyor wheels 121b are provided, and these wheels can be spaced apart along a first direction X. A docking conveyor belt 121a is connected to the multiple docking conveyor wheels 121b. A first motor is connected to the docking conveyor wheels 121b and drives them to rotate, enabling the wheels to move the docking conveyor belt 121a along the first direction X. The docking conveyor belt 121a carries the storage box 201, allowing it to move along the first direction X.

[0051] The docking component 121 includes a docking conveyor belt 121a, a docking conveyor wheel 121b, and a first motor, which enables the docking component 121 to drive the storage box 201 to move along the first direction X, without the need for a complex mechanical structure, thus reducing the cost of the dispensing device 100.

[0052] Alternatively, the docking component 121 may also include other components, such as a first guide rail and a first cylinder. The first guide rail extends along a first direction X, and the storage box 201 can be slidably connected to the first guide rail. The first guide rail can limit the movement of the storage box 201. The first cylinder can drive the storage box 201 to move along the first direction X. For example, the number of first guide rails and the number of third guide rails can be the same.

[0053] Understandably, the docking component 121 may also include other components that can drive the storage box 201 to move along the first direction X.

[0054] Continue to refer to Figure 1 In some examples, multiple carriers 130 are located along the first direction X on the side of the docking assembly 120 away from the loading table 110.

[0055] For example, the number of carriers 130 can be two, three, four, five, six, seven, or more. The embodiments of this application do not further limit the number of carriers 130. Understandably, multiple carriers 130 can each carry a storage box 201, increasing the number of storage boxes 201 that the dispensing device 100 can store, reducing the risk of downtime in the process workshop due to material shortages, and thus minimizing the impact of unpacking stagnation or slow unpacking speed on the production capacity of the process workshop.

[0056] Continue to refer to Figure 1 In some examples, multiple carriers 130 include a first carrier 131 and a second carrier 132. The first carrier 131 is connected to a process workshop located on the side of the first carrier 131 away from the docking member 121, while the second carrier 132 is not connected to the process workshop.

[0057] Understandably, the first support member 131 can drive the storage box 201 to move away from the docking member 121 along the first direction X, such as... Figure 1 As shown in the first sub-direction X1, the storage box 201 on the first carrier 131 can be transferred to the process workshop to realize the loading of materials to the process workshop.

[0058] Alternatively, the first support member 131 can also drive the storage box 201 to move along the first direction X towards the docking member 121, such as... Figure 1 As shown in the second sub-direction X2, the storage box 201 on the first carrier 131 can be transferred to the docking member 121.

[0059] The second support member 132 can drive the storage box 201 to move away from the docking member 121 along the first direction X, such as Figure 1 As shown in the first sub-direction X1, the storage box 201 on the docking member 121 can be transferred to the second carrier member 132.

[0060] Alternatively, the second support member 132 can also drive the storage box 201 to move along the first direction X towards the docking member 121, such as... Figure 1 As shown in the second sub-direction X2, the storage box 201 on the second carrier 132 can be transferred to the docking member 121.

[0061] Understandably, by connecting the first support component 131 to the process workshop, material can be fed into the process workshop. By not connecting the second support component 132 to the process workshop, the risk of dust, debris, and other impurities from the feeding device 100 being brought into the process workshop is reduced, thereby improving the cleanliness of the process workshop.

[0062] For example, the gap between the carrier 130 and the docking member 121 is reduced to minimize the impact of the gap on the transfer of the storage box 201 between the carrier 130 and the docking member 121.

[0063] For example, there can be multiple first carriers 131 and multiple second carriers 132. The number of first carriers 131 and multiple second carriers 132 can be the same or different, and the embodiments of this application do not further limit this.

[0064] Figure 3 This is a schematic diagram of the structure of a carrier provided in some embodiments of this application. In some examples, such as... Figure 3 As shown, the carrier 130 may include a buffer conveyor belt 130a, a buffer conveyor wheel 130b, and a second motor (not shown in the figure).

[0065] Multiple buffer conveyor rollers 130b are provided, and these rollers are spaced apart along a first direction X. A buffer conveyor belt 130a is connected to the multiple buffer conveyor rollers 130b. A second motor is connected to the buffer conveyor rollers 130b and drives them to rotate, enabling the buffer conveyor belt 130a to move along the first direction X. The buffer conveyor belt 130a carries the storage box 201, allowing the storage box 201 to move along the first direction X.

[0066] The carrier 130 includes a buffer conveyor belt 130a, a buffer conveyor wheel 130b, and a second motor, which enables the carrier 130 to drive the storage box 201 to move along the first direction X, without the need for a complex mechanical structure, thus reducing the cost of the dispensing device 100.

[0067] Alternatively, the carrier 130 may also include other components, such as a second guide rail and a second cylinder. The second guide rail extends along the first direction X, and the storage box 201 can be slidably connected to the second guide rail. The second guide rail can limit the movement of the storage box 201. The second cylinder can drive the storage box 201 to move along the first direction X. For example, the number of second guide rails can be the same as the number of first guide rails.

[0068] Understandably, the support member 130 may also include other components capable of driving the storage box 201 to move along the first direction X. The structures of the first support member 131 and the second support member 132 may be the same or different, and the embodiments of this application do not further limit this.

[0069] Continue to refer to Figure 1 In some examples, multiple carriers 130 are spaced apart along the extension direction Y of connector 122. Dock 121 is movable relative to connector 122 along the extension direction Y of connector 122 so that storage box 201 can be transferred between dock 121 and loading platform 110, and between dock 121 and any one of the carriers 130.

[0070] As can be seen from the above, the loading platform 110, the docking member 121 and the carrier member 130 can all drive the storage box 201 to move along the first direction X (including the first sub-direction X1 and the second sub-direction X2), so that the storage box 201 can be transferred between the loading platform 110, the docking member 121 and the carrier member 130.

[0071] There are multiple carriers 130, which are spaced apart along the extension direction Y of the connector 122. The docking member 121 is movable relative to the connector 122 along the extension direction Y of the connector 122, so that the docking member 121 can dock with the loading platform 110 and any one of the carriers 130. That is, the storage box 201 can be transferred between the docking member 121 and the loading platform 110, and the storage box 201 can be transferred between the docking member 121 and any one of the carriers 130.

[0072] For example, the storage box 2011 carrying silicon wafers on the loading platform 110 can be transferred to the docking member 121. The docking member 121 can move along the extension direction Y of the connector 122, so that the docking member 121 can dock with the first carrier 131. The first carrier 131 can drive the storage box 2011 carrying silicon wafers to move away from the docking member 121 along the first direction X, such as... Figure 1 As shown in the first sub-direction X1, the storage box 2011 carrying the silicon wafer can be transferred to the process room to realize the loading of the process room.

[0073] Furthermore, the docking member 121 can move along the extension direction Y of the connector 122, allowing the docking member 121 to dock with the second carrier member 132. The second carrier member 132 can drive the storage box 2011 carrying the silicon wafer to move away from the docking member 121 along the first direction X, such as... Figure 1 As shown in the first sub-direction X1, the storage box 201 on the docking member 121 can be transferred to the second carrier member 132.

[0074] Under normal circumstances, the unpacking process is relatively fast. Some of the silicon wafer storage boxes 2011 can meet the material needs of the process workshop, while other silicon wafer storage boxes 2011 can be stored on the second carrier 132. In other words, the second carrier 132 can store excess silicon wafer storage boxes 2011.

[0075] When unpacking stops or the unpacking speed is slow, the docking member 121 can move along the extension direction Y of the connector 122, so that the docking member 121 can dock with the second carrier 132. The second carrier 132 can drive the storage box 2011 carrying the silicon wafer to move closer to the docking member 121 along the first direction X. Figure 1 As shown in the second sub-direction X2, the storage box 2011 carrying the silicon wafer can be transferred to the docking member 121.

[0076] Subsequently, the docking member 121 can move along the extension direction Y of the connector 122, allowing it to dock with the first carrier member 131. The docking member 121 can then drive the storage box 2011 carrying the silicon wafer to move closer to the carrier member 130 along the first direction X, such as... Figure 1 As shown in the first sub-direction X1, the storage box 2011 carrying the silicon wafer can be transferred to the first carrier 131.

[0077] The first carrier 131 can drive the storage box 2011 carrying the silicon wafer to move away from the docking member 121 along the first direction X, such as... Figure 1 As shown in the first sub-direction X1, the storage box 2011 carrying the silicon wafer can be transferred to the process workshop to realize the loading of materials into the process workshop, reduce the impact of unpacking stagnation or slowness on the production capacity of the process workshop, and thus reduce the risk of the process workshop being shut down due to material shortage.

[0078] The docking component 121 is movable relative to the connector 122 along the extension direction Y of the connector 122, so that the docking component 121 can dock with the loading platform 110 and any of the carriers 130. This allows the storage box 2011 carrying silicon wafers to be transferred to the first carrier 131 or the second carrier 132 as needed, and the storage box 2011 carrying silicon wafers on the second carrier 132 to be transferred to the first carrier 131 as needed. The first carrier 131 then transfers the silicon wafers to the process workshop, reducing the risk of downtime in the process workshop due to material shortages and minimizing the impact of unpacking delays or slow unpacking speeds on the production capacity of the process workshop.

[0079] For example, connector 122 may include a first lead screw. The first lead screw may include a first threaded rod and a first nut, which are threaded together. Understandably, the extension direction Y of connector 122 is the extension direction of the first threaded rod.

[0080] The docking assembly 120 may also include a fourth motor, the shaft of which can be connected to the first screw to drive the first screw to rotate, so that the first nut and the first screw can move relative to each other in the extension direction of the first screw (the extension direction Y of the connector 122).

[0081] For example, when the first nut can move relative to the loading table 110 along the extension direction Y of the connector 122, and the first screw can remain stationary relative to the loading table 110 along the extension direction Y of the connector 122, the mating member 121 can be connected to the first nut.

[0082] In this way, when the fourth motor drives the first screw to rotate and the first nut and the first screw move relative to each other in the extension direction Y of the connector 122, the docking member 121 can be driven to move in the extension direction Y of the connector 122.

[0083] Alternatively, the connector 122 may include a fourth guide rail, and the docking assembly 120 may include a fourth cylinder. The docking member 121 is slidably connected to the fourth guide rail, which limits the movement of the docking member 121. The fourth cylinder drives the docking member 121 to move along the extension direction of the fourth guide rail (the extension direction Y of the connector 122).

[0084] Understandably, the docking assembly 120 may also include other components capable of driving the docking member 121 to move along the extension direction Y of the connector 122. Embodiments of this application do not further limit this.

[0085] In the embodiments of this application, the docking member 121 is movable along the extension direction Y of the connecting member 122, so that the docking member 121 can dock with the loading platform 110 and any one of the carrier members 130, thereby enabling the storage box 201 to be transferred between the loading platform 110, the docking member 121 and any one of the carrier members 130.

[0086] For example, during normal unpacking, a portion of the silicon wafer storage boxes 2011 can be transferred to the process workshop through the docking member 121 and the first carrier 131 to meet the material requirements of the process workshop, while another portion of the silicon wafer storage boxes 2011 can be stored on the second carrier 132 through the docking member 121.

[0087] When unpacking is stalled or slow, the storage box 201 carrying the silicon wafer on the second carrier 132 can be transferred to the first carrier 131 through the docking part 121, and then transferred to the process workshop through the first carrier 131. This reduces the risk of the process workshop being shut down due to lack of materials, thereby reducing the impact of unpacking stalls or slow unpacking speeds on the production capacity of the process workshop.

[0088] Continue to refer to Figure 1 In some examples, the docking member 121 includes a first docking member 1211 and a second docking member 1212, which are spaced apart along the extension direction Y of the connector 122, and are respectively connected to the connector 122.

[0089] For example, the relative position between the first docking member 1211 and the second docking member 1212 is fixed, that is, the first docking member 1211 and the second docking member 1212 cannot move relative to each other.

[0090] Understandably, the docking member 121 can be controlled to move along the extension direction Y of the connecting member 122, so that the first docking member 1211 and the second docking member 1212 can dock with the loading platform 110 respectively.

[0091] Continue to refer to Figure 1 In some examples, along the extension direction Y of the connector 122, the distance H1 between the first mating member 1211 and the second mating member 1212 is equal to the distance H2 between any two adjacent carrier members 130.

[0092] Understandably, the distance H1 between the first docking member 1211 and the second docking member 1212 and the distance H2 between any two adjacent carrier members 130 can be equal or approximately equal.

[0093] The distance H1 between the first docking member 1211 and the second docking member 1212 is set to be equal to the distance H2 between any two adjacent carrier members 130, so that the first docking member 1211 and the second docking member 1212 can synchronously dock with any two adjacent carrier members 130, thereby improving the efficiency of material storage box 201 in transmission between docking member 121 and carrier member 130.

[0094] Continue to refer to Figure 1 In some examples, the first carrier 131 includes a first first carrier 1311 and a second first carrier 1312, which are arranged adjacent to each other.

[0095] Understandably, the first first carrier 1311 and the second first carrier 1312 can be connected to the process workshop respectively. The number of first first carriers 1311 can be one or more, and the number of second first carriers 1312 can also be one or more. The number of first first carriers 1311 and second first carriers 1312 can be the same or different. The embodiments of this application do not further limit the number of first first carriers 1311 and second first carriers 1312.

[0096] The first first carrier 1311 and the second first carrier 1312 are arranged adjacent to each other, so that the first docking member 1211 and the second docking member 1212 can dock with the first first carrier 1311 and the second first carrier 1312 respectively.

[0097] In some examples, the first carrier 1311 and the first docking member 1211 are used to transfer the storage box 2011 carrying silicon wafers, and the second carrier 1312 and the second docking member 1212 are used to transfer the empty storage box 2012. Understandably, the empty storage box 2012 is the storage box 2011 without silicon wafers, and the empty storage box 2012 may contain impurities such as dust, packaging materials, and debris.

[0098] Understandably, the docking member 121 moves relative to the connector 122 along the extension direction Y of the connector 122, so that the first docking member 1211 can dock with the first first carrier member 1311, and the second docking member 1212 can dock with the second first carrier member 1312.

[0099] In this way, the first carrier 1311 and the first docking member 1211 can transfer the storage box 2011 carrying the silicon wafer, and the second carrier 1312 and the second docking member 1212 can transfer the empty storage box 2012.

[0100] For example, the storage box 2011 carrying the silicon wafer can be transferred to the first docking member 1211 via the loading platform 110 or the second carrier 132. The docking member 121 moves relative to the connector 122 along the extension direction Y of the connector 122, so that the first docking member 1211 can dock with the first first carrier 1311 and the second docking member 1212 can dock with the second first carrier 1312.

[0101] The first docking member 1211 can drive the storage box 201 carrying the silicon wafer to move along the first direction X towards the first first carrier member 1311, such as Figure 1 As shown in the first sub-direction X1, the storage box 2011 carrying the silicon wafer can be transferred to the first first carrier 1311. The first first carrier 1311 can drive the storage box 201 carrying the silicon wafer to move away from the first docking member 1211 along the first direction X, so that the storage box 201 carrying the silicon wafer can be transferred to the process workshop to realize the loading of materials to the process workshop.

[0102] After the silicon wafer is removed from the process workshop, the empty storage box 2012 can be transferred to the second first carrier 1312. The second first carrier 1312 can drive the empty storage box 2012 to move along the first direction X towards the second docking member 1212, such as... Figure 1 As shown in the second sub-direction X2, the empty storage box 2012 can be transferred to the second docking member 1212. The second docking member 1212 can drive the empty storage box 2012 to move away from the second first support member 1312 along the first direction X, so that the empty storage box 2012 can be transferred to the loading platform 110.

[0103] Understandably, the first carrier 1311 and the first docking member 121 are set up to transfer the storage box 2011 carrying silicon wafers, and the second carrier 1312 and the second docking member 1212 are used to transfer the empty storage box 2012. This allows the storage box 2011 carrying silicon wafers on the loading platform 110 or the second carrier 132 to be transferred to the process workshop through the first carrier 1311 and the first docking member 1211, and the empty storage box 2012 to be transferred to the loading platform 110 through the second carrier 1312 and the second docking member 1212. This realizes the circulation of the storage box 201 between the process workshop and the loading platform 110, eliminating the need for manual handling of the storage box 201, improving production efficiency and reducing production costs.

[0104] Continue to refer to Figure 1 In some examples, there are multiple second carriers 132, which are used to store the storage box 2011 carrying the silicon wafer and the empty storage box 2012, respectively.

[0105] Understandably, setting multiple second carriers 132 can increase the number of storage boxes 201 that the feeding device 100 can store, enabling the feeding device 100 to achieve a large buffer and reducing the risk of the process workshop being shut down due to lack of materials.

[0106] Multiple second carriers 132 are provided to store the silicon wafer storage box 2011 and the empty storage box 2012 respectively. This allows the feeding device 100 to store not only the silicon wafer storage box 2011, but also the empty storage box 2012. This reduces the risk that too many empty storage boxes 2011 cannot be placed on the feeding platform 110, meets the usage requirements under different conditions, and improves the applicability of the feeding device 100.

[0107] Furthermore, by adjusting the position of the docking member 121 along the extension direction Y of the connector 122, the docking member 121 can dock not only with the second carrier member 132 of the storage box 2011 that carries silicon wafers, but also with the second carrier member 132 of the empty storage box 2012. This allows the docking member 121 to automatically switch between the storage box 2011 that carries silicon wafers and the empty storage box 2012, improving the ease of use of the feeding device 100.

[0108] For example, one of the plurality of second carriers 132 may be used to store an empty storage box 2012, and the remaining second carriers 132 may be used to store a storage box 2011 carrying silicon wafers. Alternatively, two or three of the plurality of second carriers 132 may be used to store an empty storage box 2012, and the remaining second carriers 132 may be used to store a storage box 2011 carrying silicon wafers.

[0109] In some examples, the number of second carriers 132 storing empty storage boxes 2012 is less than the number of second carriers 132 storing silicon wafers in storage boxes 2011, in order to increase the storage space of the silicon wafer storage boxes 2011.

[0110] For example, such as Figure 1 As shown, the feeding device 100 may include a support foot 103, and a second docking member 1212 is located near the support foot 103 relative to the first docking member 1211. A second first bearing member 1312 is located near the support foot 103 relative to the first first bearing member 1311, such that the first docking member 1211 can dock with the first first bearing member 1311, and the second docking member 1212 can dock with the second first bearing member 1312.

[0111] The second support member 132 is located away from the support foot 103 relative to the first support member 131. The second support member 132 may include a first second support member 1321, a second second support member 1322, a third second support member 1323, a fourth second support member 1324, and a fifth second support member 1325, which are located away from the support foot 103 in sequence.

[0112] Understandably, the second docking member 1212 can dock with other second carrier members 132 besides the fifth second carrier member 1325; that is, other second carrier members 132 besides the fifth second carrier member 1325 can be used to store empty storage boxes 2012. For example, ... Figure 1 As shown, the fourth second carrier 1324 can be used to store an empty storage box 2012.

[0113] Figure 4 This is a schematic diagram of the structure of a feeding device provided in some other embodiments of this application. Figure 5 Provided for some embodiments of this application Figure 4 A magnified view of a portion of region B1. Figure 6 Provided for some embodiments of this application Figure 4 A magnified view of a portion of region B2.

[0114] In some examples, such as Figure 4 As shown, the feeding device 100 also includes a housing 101, which encloses a receiving space P. The docking assembly 120 and a plurality of carriers 130 are disposed within the receiving space P.

[0115] Understandably, the housing 101 can isolate the docking part 121 and the carrier part 130 from the unpacking production line and the process workshop, reducing the risk that packaging materials and dust and other impurities from the unpacking production line will be brought into the docking part 121 and the carrier part 130, and then into the process workshop via the docking part 121 and the carrier part 130. This improves the cleanliness of the feeding device 100 and the process workshop, and reduces the impact of impurities on the production yield of the process workshop.

[0116] Furthermore, by placing the docking component 120 and multiple carriers 130 within the accommodating space P, the docking component 120 and carriers 130 can be isolated from the operator, reducing the risk of injury to the operator when the docking component 121 and carriers 130 move, and improving the safety of the feeding device 100.

[0117] like Figure 5 and Figure 6As shown, the housing 101 has a first opening M1 and a second opening M2. It can be understood that the first opening M1 can penetrate the housing 101 along the thickness direction of the housing 101, and the second opening M2 can penetrate the housing 101 along the thickness direction of the housing 101.

[0118] The shape of the first opening M1 can be square, circular, or irregular, and the shape of the second opening M2 can also be square, circular, or irregular. The shapes of the first opening M1 and the second opening M2 can be the same or different. The embodiments of this application do not further limit the shapes of the first opening M1 and the second opening M2.

[0119] The storage box 201 is transferred between the carrier 130 and the process workshop through the first opening M1, and the storage box 201 is transferred between the docking part 121 and the loading table 110 through the second opening M2.

[0120] Understandably, the storage box 201 can be transferred between the carrier 130 and the process room through the first opening M1. For example, as... Figure 5 As shown, there can be two first openings M1, with the two first openings M1 respectively positioned opposite to the first first carrier 1311 and the second first carrier 1312. The silicon wafer storage box 2011 on the first first carrier 1311 can be transferred to the process room via one first opening M1, while the empty storage box 2012 can be transferred to the second first carrier 1312 via the other first opening M1. This reduces the mutual interference between the silicon wafer storage box 2011 and the empty storage box 2012 during the transfer process.

[0121] For example, the material dispensing device 100 and the process workshop can be located in adjacent rooms. Holes can be opened in the walls of the rooms opposite to the first opening M1, so that the storage box 201 can be transferred between the carrier 130 and the process workshop through the first opening M1, reducing the risk that packaging materials and dust and other impurities from the unpacking workshop will be brought into the process workshop.

[0122] Understandably, the storage box 201 can be transferred between the docking member 121 and the loading platform 110 through the second opening M2. For example, there may be one second opening M2, and the docking member 121 is movable along the extension direction Y of the connector 122, so that the first docking member 1211 and the second docking member 1212 can be respectively arranged opposite to the second opening M2, thereby allowing the storage box 2011 carrying the silicon wafer on the loading platform 110 to be transferred to the first docking member 1211 through the first opening M1, and allowing the storage box 2012 above the second docking member 1212 to be transferred to the loading platform 110 through the second opening M2.

[0123] Understandably, by setting the first opening M1 and the second opening M2, the storage box 201 can be transferred between the carrier 130 and the process workshop, and the storage box 201 can be transferred between the docking part 121 and the loading platform 110, thereby reducing the impact of the housing 101 on the transfer of the storage box 201.

[0124] In some examples, such as Figure 5 and Figure 6 As shown, the feeding device 100 also includes a first door plate 141 and a second door plate 142. The first door plate 141 is used to open or close the first opening M1, and the second door plate 142 is used to open or close the second opening M2.

[0125] For example, when the storage box 201 needs to be transferred between the carrier 130 and the process workshop, the first door panel 141 can open the first opening M1 to reduce the impact of the first door panel 141 on the transfer of the storage box 201 between the carrier 130 and the process workshop.

[0126] When the storage box 201 does not need to be transferred between the carrier 130 and the process workshop, the first door panel 141 can close the first opening M1, which can isolate the carrier 130 and the process workshop, reduce the risk of impurities on the carrier 130 entering the process workshop, improve the cleanliness of the process workshop, and reduce the impact of impurities on the production yield of the process workshop.

[0127] When the storage box 201 needs to be transferred between the docking part 121 and the loading platform 110, the second door plate 142 can open the second opening M2 to reduce the impact of the second door plate 142 on the transfer of the storage box 201 between the docking part 121 and the loading platform 110.

[0128] When the storage box 201 does not need to be transferred between the docking part 121 and the loading platform 110, the second door panel 142 can close the second opening M2, which can isolate the docking part 121 and the loading platform 110, reduce the risk of packaging materials and dust and other impurities in the packaging workshop being brought into the containing space P, and improve the cleanliness of the dispensing device 100.

[0129] For example, the first door panel 141 can be slidably connected to the housing 101 or the carrier 130, so that the first door panel 141 can open or close the first opening M1. Alternatively, the first door panel 141 can also be rotatably connected to the housing 101 or the carrier 130, so that the first door panel 141 can open or close the first opening M1. There are two first door panels 141, and the two first door panels 141 are used to open or close the two first openings M1 respectively.

[0130] The second door panel 142 can be slidably connected to the housing 101, so that the second door panel 142 can open or close the second opening M2. Alternatively, the second door panel 142 can also be rotatably connected to the housing 101, so that the second door panel 142 can open or close the second opening M2.

[0131] For example, such as Figure 5 As shown, the first door panel 141 may include a first sub-door panel 1411 and a second sub-door panel 1412, which are slidably connected and movable along the extension direction Y of the connector 122. Furthermore, the first door panel 141 is movable relative to the housing 101 along the extension direction Y of the connector 122.

[0132] When the first door panel 141 needs to open the first opening M1, the second sub-door panel 1412 moves away from the support foot 103 along the extension direction Y of the connector 122. Furthermore, the first sub-door panel 1411 and the second sub-door panel 1412 can move together away from the support foot 103 along the extension direction Y of the connector 122, so that the first door panel 141 can open the first opening M1.

[0133] When the first door panel 141 needs to close the first opening M1, the second sub-door panel 1412 moves closer to the support foot 103 along the extension direction Y of the connector 122. The first sub-door panel 1411 and the second sub-door panel 1412 can move together along the extension direction Y of the connector 122 closer to the support foot 103, so that the first door panel 141 can close the first opening M1.

[0134] Understandably, by setting the first sub-door panel 1411 and the second sub-door panel 1412 to slide together, the travel of the first door panel 141 can be reduced, thereby reducing the impact of the first door panel 141 on other components when it moves.

[0135] Alternatively, the first door panel 141 can also be an integral structure, excluding the first sub-door panel 1411 and the second sub-door panel 1412, in order to simplify the structure of the first door panel 141 and reduce the cost of the feeding device 100.

[0136] For example, such as Figure 6 As shown, the second door panel 142 may include a third sub-door panel 1421 and a fourth sub-door panel 1422, which are slidably connected and movable along the extension direction Y of the connector 122. Furthermore, the second door panel 142 is movable relative to the housing 101 along the extension direction Y of the connector 122.

[0137] When the second door panel 142 needs to open the second opening M2, the fourth sub-door panel 1422 moves away from the support foot 103 along the extension direction Y of the connector 122. Furthermore, the third sub-door panel 1421 and the fourth sub-door panel 1422 can move together away from the support foot 103 along the extension direction Y of the connector 122, so that the second door panel 142 can open the second opening M2.

[0138] When the second door panel 142 needs to close the second opening M2, the fourth sub-door panel 1422 moves closer to the support foot 103 along the extension direction Y of the connector 122. Furthermore, the third sub-door panel 1421 and the fourth sub-door panel 1422 can move together along the extension direction Y of the connector 122 closer to the support foot 103, so that the second door panel 142 can close the second opening M2.

[0139] Understandably, by setting the third sub-door panel 1421 and the fourth sub-door panel 1422 to slide together, the travel of the second door panel 142 can be reduced, thereby reducing the impact of the second door panel 142 on other components when it moves.

[0140] Alternatively, the second door panel 142 can also be an integral structure, excluding the third sub-door panel 1421 and the fourth sub-door panel 1422, to simplify the structure of the second door panel 142 and reduce the cost of the feeding device 100.

[0141] For example, the feeding device 100 may include a fifth cylinder and a sixth cylinder. The fifth cylinder is capable of driving the first door panel 141 to move along the extension direction Y of the connector 122 to open or close the first opening M1. The sixth cylinder is capable of driving the second door panel 142 to move along the extension direction Y of the connector 122 to open or close the second door panel 142.

[0142] Alternatively, the feeding device 100 may include other driving components besides the fifth and sixth cylinders, such as the fifth and sixth motors.

[0143] The fifth motor can be connected to the first door plate 141 via a second lead screw. For example, the second lead screw may include a second screw rod and a second nut, which are threaded together. The extension direction of the second screw rod is the same as the extension direction of the connector 122.

[0144] The shaft of the fifth motor can be connected to the second screw to drive the second screw to rotate, so that the second nut and the second screw can move relative to each other in the extension direction of the second screw.

[0145] For example, when the second nut can move relative to the housing 101 along the extension direction Y of the connector 122, and the second screw can remain stationary relative to the housing 101 along the extension direction Y of the connector 122, the first door panel 141 can be connected to the second nut.

[0146] In this way, when the fifth motor drives the second screw to rotate and the second nut and the second screw move relative to each other in the extension direction Y of the connector 122, the first door panel 141 can be driven to move along the extension direction of the second screw (that is, the extension direction Y of the connector 122) to open or close the first opening M1.

[0147] The sixth motor can be connected to the second door plate 142 via a third lead screw. For example, the third lead screw may include a third screw rod and a third nut, which are rotatably connected. The extension direction of the third screw rod is the same as the extension direction of the connector 122.

[0148] The shaft of the sixth motor can be connected to the third screw to drive the third screw to rotate, so that the third nut and the third screw can move relative to each other in the extension direction of the third screw.

[0149] For example, the third nut can move relative to the housing 101 along the extension direction Y of the connector 122, the third screw can remain stationary relative to the housing 101 along the extension direction Y of the connector 122, and the second door panel 142 can be connected to the third nut.

[0150] In this way, when the fifth motor drives the third screw to rotate and the third nut and the third screw move relative to each other in the extension direction Y of the connector 122, the second door panel 142 can be driven to move along the extension direction of the third screw (that is, the extension direction Y of the connector 122) to open or close the first opening M1.

[0151] In some examples, the feeding device 100 also includes a first sensor, a second sensor, and a controller (not shown in the figure).

[0152] The first sensor is used to detect the distance between the storage box 201 and the first door panel 141, and the second sensor is used to detect the distance between the storage box 201 and the second door panel 142. The controller is electrically connected to the first and second sensors and is used to control the first door panel 141 to open or close the first opening M1 according to the detection result of the first sensor, and to control the second door panel 142 to open or close the second opening M2 according to the detection result of the second sensor.

[0153] For example, the first sensor can be a laser sensor, or it can be another type of sensor. When the first sensor detects that the distance between the storage box 201 (e.g., the storage box 2011 carrying silicon wafers) and the first door plate 141 is less than a first set distance, the controller can control the first door plate 141 to open the first opening M1, so that the storage box 201 can be transferred between the process room and the carrier 130 through the first opening M1.

[0154] When the first sensor detects that the distance between the storage box 201 (e.g., the storage box 2011 carrying silicon wafers) and the first door panel 141 is greater than or equal to a first preset distance, the controller can control the first door panel 141 to close the first opening M1, so that the first door panel 141 can isolate the process room and the carrier 130, thereby improving the cleanliness of the process room. It is understood that the embodiments of this application do not further limit the value of the first preset distance.

[0155] The number of first sensors can be two, and the two first sensors are used to detect the distance between the storage box 201 and the two first door panels 141, respectively.

[0156] For example, the second sensor can be a laser sensor, or it can be another type of sensor. The first sensor and the second sensor can be the same type or different types.

[0157] When the second sensor detects that the distance between the storage box 201 (e.g., an empty storage box 2012) and the second door panel 142 is less than a second set distance, the controller can control the second door panel 142 to open the second opening M2, so that the storage box 201 can be transferred between the docking part 121 and the loading table 110 through the second opening M2.

[0158] When the second sensor detects that the distance between the storage box 201 (e.g., an empty storage box 2012) and the second door panel 142 is greater than or equal to a second preset distance, the controller can control the second door panel 142 to close the second opening M2, thereby isolating the docking piece 121 and the loading platform 110 and improving the cleanliness within the accommodating space P. It is understood that the embodiments of this application do not further limit the value of the second preset distance. The value of the first preset distance and the value of the second preset distance can be the same or different.

[0159] For example, the controller can be a programmable logic controller (PLC), or it can be a central processing unit, etc. The embodiments of this application do not further limit the specific form of the controller.

[0160] Understandably, the controller is configured to open or close the first opening M1 of the first door panel 141 based on the detection result of the first sensor, and open or close the second opening M2 of the second door panel 142 based on the detection result of the second sensor. This eliminates the need for manual operation of the first door panel 141 and the second door panel 142, thus improving the ease of use of the feeding device 100.

[0161] In other examples, the feeding device 100 may not include sensors and controllers. In this case, the first door panel 141 can rotate relative to the housing 101 to open or close the first opening M1. The second door panel 142 can rotate relative to the housing 101 to open or close the second opening M2.

[0162] Understandably, when the storage box 201 is transferred to the position where it contacts the first door panel 141 and continues to move closer to the first door panel 141 along the first direction X, the storage box 201 can apply a force along the first direction X to the first door panel 141 to push the first door panel 141 open. When the force acting on the first door panel 141 disappears, the first door panel 141 can be reset under the action of the elastic member.

[0163] When the storage box 201 is transferred to the position where it contacts the second door panel 142 and continues to move closer to the second door panel 142 along the first direction X, the storage box 201 can apply a force along the first direction X to the second door panel 142 to push the second door panel 142 open. When the force acting on the second door panel 142 disappears, the second door panel 142 can be reset under the action of the elastic member.

[0164] By adopting the above configuration method, there is no need to set up sensors and controllers, which helps to simplify the structure of the feeding device 100 and reduce the cost of the feeding device 100.

[0165] In some examples, such as Figure 4 As shown, the feeding device 100 also includes a baffle 102, which is connected between the carrier 130 and the docking assembly 120.

[0166] For example, there can be multiple baffles 102, which are respectively disposed between multiple carriers 130 and docking assembly 120. The baffles 102 can be connected to the housing 101, or the baffles 102 can be connected to the carriers 130.

[0167] Understandably, the baffle 102 can block the airflow in the receiving space P, reduce the convection of gas in the receiving space P, and help improve the cleanliness of the receiving space P, thereby improving the cleanliness of the feeding device 100.

[0168] Continue to refer to Figure 4 In some examples, there is a gap D between the baffle 102 and the carrier 130, and the storage box 201 is transferred between the carrier 130 and the docking member 121 through the gap D.

[0169] Understandably, the height of the interval D along the extension direction Y of the connector 122 is greater than the height of the storage box 201 along the extension direction Y of the connector 122, so that the storage box 201 can be transferred between the carrier 130 and the docking member 121 through the interval D.

[0170] By adopting the above configuration, the impact of the baffle 102 on the transmission of the storage box 201 between the carrier 130 and the docking member 121 can be reduced.

[0171] In some examples, such as Figure 4 and Figure 6 As shown, the feeding device 100 also includes an air knife 151, which is installed on the feeding platform 110 and is used to blow away impurities in the storage box 201.

[0172] Understandably, the air knife 151 can eject gas, such as air, to blow away impurities, such as packaging materials, dust, or debris, inside the storage box 201, reducing the risk of impurities being carried into the containment space P and the process room by the storage box 201, and improving the cleanliness of the dispensing device 100 and the process room.

[0173] For example, the number of air knives 151 can be multiple, such as two, three, or four. The embodiments of this application do not further limit the number of air knives 151. Multiple air knives 151 can be arranged at intervals on the loading table 110.

[0174] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A feeding device, characterized in that, include: The loading platform is used to drive the storage box to move in the first direction; A docking assembly is located on one side of the loading platform along the first direction; the docking assembly includes a docking member and a connecting member, the docking member and the connecting member being connected; the docking member is used to drive the storage box to move along the first direction, the first direction being perpendicular to the extending direction of the connecting member; and, Multiple carriers are located along the first direction on the side of the docking assembly away from the loading platform, and the multiple carriers are spaced apart along the extension direction of the connector; the multiple carriers include a first carrier and a second carrier, the first carrier is connected to a process workshop located on the side of the first carrier away from the docking assembly, and the second carrier is not connected to the process workshop; The docking member is movable relative to the connecting member along the extension direction of the connecting member, so that the storage box can be transferred between the docking member and the loading platform, and the storage box can be transferred between the docking member and any of the carrying members.

2. The feeding device according to claim 1, characterized in that, The docking component includes a first docking component and a second docking component, the first docking component and the second docking component are spaced apart along the extension direction of the connecting component, and the first docking component and the second docking component are respectively connected to the connecting component; Along the extending direction of the connector, the distance between the first mating member and the second mating member is equal to the distance between any two adjacent carrier members.

3. The feeding device according to claim 2, characterized in that, The first support member includes a first first support member and a second first support member, wherein the first first support member and the second first support member are arranged adjacent to each other; The first first carrier and the first docking member are used to transfer the storage box that carries the silicon wafer, and the second first carrier and the second docking member are used to transfer the empty storage box.

4. The feeding device according to claim 1, characterized in that, The number of the second carriers is multiple, and the multiple second carriers are respectively used to store the storage box carrying the silicon wafer and the empty storage box.

5. The feeding device according to claim 1, characterized in that, It also includes a housing that encloses a receiving space, within which the docking assembly and the plurality of the carrier members are disposed; The housing has a first opening and a second opening. The storage box is transferred between the carrier and the process workshop through the first opening, and the storage box is transferred between the docking member and the loading platform through the second opening.

6. The feeding device according to claim 5, characterized in that, It also includes a first door panel and a second door panel, the first door panel being used to open or close the first opening, and the second door panel being used to open or close the second opening.

7. The feeding device according to claim 6, characterized in that, It also includes a first sensor, a second sensor, and a controller; The first sensor is used to detect the distance between the storage box and the first door panel, and the second sensor is used to detect the distance between the storage box and the second door panel; The controller is electrically connected to the first sensor and the second sensor, and is used to control the first door panel to open or close the first opening according to the detection result of the first sensor, and to control the second door panel to open or close the second opening according to the detection result of the second sensor.

8. The feeding device according to any one of claims 1 to 7, characterized in that, The docking component includes a docking conveyor belt, docking conveyor wheels, and a first motor; there are multiple docking conveyor wheels, which are spaced apart along the first direction; the docking conveyor belt is connected to the multiple docking conveyor wheels; the docking conveyor belt is used to carry the storage box; the first motor is connected to the docking conveyor wheels and is used to drive the docking conveyor wheels to rotate. The carrier includes a buffer conveyor belt, buffer conveyor wheels, and a second motor; there are multiple buffer conveyor wheels, which are spaced apart along the first direction; the buffer conveyor belt is connected to the multiple buffer wheels; the buffer conveyor belt is used to carry the storage box; The second motor is connected to the buffer conveyor wheel and is used to drive the buffer conveyor wheel to rotate.

9. The feeding device according to any one of claims 1 to 7, characterized in that, It also includes a baffle connected between the carrier and the docking assembly; there is a gap between the baffle and the carrier, through which the storage box is transferred between the carrier and the docking assembly.

10. The feeding device according to any one of claims 1 to 7, characterized in that, It also includes an air knife, which is set on the loading platform and is used to blow away impurities in the storage box.

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