Leveling adjustment discharge device

Abstract

The utility model provides a kind of leveling adjustment discharging device including rack and be set to the discharging assembly, locking mechanism and adjusting assembly of rack.The rack is provided with through slot, and discharging assembly is set to the bottom of rack and below through slot.Discharging assembly includes first discharging plate and second discharging plate, and it is provided with the accommodation space for accommodating substrate between first discharging plate and second discharging plate.Locking mechanism is set below discharging assembly, including support assembly and locking assembly, support assembly is used to support discharging assembly, locking assembly act to lock discharging assembly in support assembly, and locking mechanism release lock to be able to take out or put into discharging assembly from support assembly.Adjusting assembly is set on discharging assembly, and can pass through the gap between first discharging plate and second discharging plate is adjusted to adjusting assembly, to adjust the parallelism of substrate in accommodation space.The leveling adjustment discharging device of the utility model is simple in overall structure, convenient to adjust, and lower in cost.

Description

Technical Field

[0001] This utility model relates to the field of photolithography production technology, and in particular to a leveling and adjusting feeding device. Background Technology

[0002] Photolithography is a core step in the manufacturing of FPC (Flexible Printed Circuit Board) circuits, directly determining the precision and final performance of the circuitry. On a flexible substrate covered with copper foil, the designed circuit pattern is "carved" using photolithography and chemical etching. Photolithography is also the most complex and critical process in semiconductor chip production. Geometric structures are etched onto a photoresist layer using exposure and development, and then the pattern on the photomask is transferred to the substrate through etching.

[0003] In FPC lithography, it is crucial to ensure full-area, high-precision, and uniform close contact between the mask and the flexible printed circuit (FPC) substrate during exposure, or to maintain a precise and uniform proximity gap. The mask comprises the substrate and its circuitry. The circuitry can be etched onto the substrate using film, or the film can be attached to the substrate. Film-attached films are suitable for products with different circuitry requirements; only the film needs to be replaced. The substrate must possess high flatness, a low coefficient of thermal expansion, and good optical properties. Common materials include quartz glass, soda ash glass, and metals (such as iron-nickel alloys). If the substrate is not properly aligned with the substrate, the lithography effect will be affected. Therefore, the substrate must be placed with excellent parallelism to prevent the exposure pattern from becoming misaligned and affecting the molding process. In semiconductor chip lithography, adjusting the parallelism of the mask is also critical, directly impacting the molding effect. Therefore, the parallelism of the mask needs to be adjusted on the equipment to prevent misalignment of the exposure pattern during exposure with the substrate, which would affect the molding process.

[0004] However, most existing leveling and feeding mechanisms are complex in structure, requiring adjustments to the position of the mask in three axes, which is cumbersome and costly.

[0005] Therefore, it is necessary to provide a leveling and adjusting feeding device with a simpler structure and lower cost. Utility Model Content

[0006] The purpose of this invention is to provide a leveling and adjusting feeding device with a simpler structure and lower cost.

[0007] To achieve the above objectives, this utility model provides a leveling and adjusting feeding device, comprising: The frame has through slots; The feeding assembly is located at the bottom of the frame and below the through slot, and includes a first feeding plate and a second feeding plate. A receiving space for accommodating the substrate is provided between the first feeding plate and the second feeding plate. A locking mechanism is provided below the feeding assembly, including a support assembly and a locking assembly. The support assembly supports the feeding assembly, the locking assembly is activated to lock the feeding assembly inside the support assembly, and the locking mechanism is released to allow the feeding assembly to be removed from or placed into the support assembly. An adjustment component is disposed on the feeding component and can pass through the through slot to adjust the gap between the first feeding plate and the second feeding plate, so as to adjust the parallelism of the substrate in the accommodating space.

[0008] Compared with the prior art, the leveling and adjusting feeding device of this utility model includes a frame and a feeding assembly, a locking mechanism, and an adjusting assembly disposed on the frame. A through slot is formed on the frame, and the feeding assembly is disposed at the bottom of the frame and below the through slot. The feeding assembly includes a first feeding plate and a second feeding plate, with a receiving space for accommodating a substrate between the first and second feeding plates. The substrate is placed in the receiving space between the first and second feeding plates and locked by the locking mechanism. Then, the parallelism of the substrate is adjusted within the receiving space by the adjusting assembly. The locking mechanism is disposed below the feeding assembly and includes a support assembly and a locking assembly. The support assembly supports the feeding assembly. The locking assembly actuates to lock the feeding assembly within the support assembly, and the locking mechanism releases to allow the feeding assembly to be removed or inserted from the support assembly. The adjusting assembly is disposed on the feeding assembly and can pass through the through slot to adjust the gap between the first and second feeding plates, thereby adjusting the parallelism of the substrate within the receiving space. The leveling and adjusting feeding device of this utility model fixes the substrate with the feeding component, locks the feeding component with the locking component, and then adjusts the parallelism of the substrate within the accommodating space with the adjusting component. The overall structure is simple, the adjustment is convenient, and the cost is lower.

[0009] Preferably, the adjustment assembly includes multiple adjustment components, which are evenly distributed on the frame and can pass through the first feeding plate to act on the second feeding plate to adjust the position between the first feeding plate and the second feeding plate; a positioning plate is provided in the through groove, and the multiple adjustment components are provided on the positioning plate.

[0010] Preferably, the support assembly is connected to the frame and protrudes from the bottom of the frame. The support assembly has a support space for supporting and accommodating the feeding assembly. The feeding assembly is slidably disposed in the support assembly. The locking assembly is fixed to the support assembly and extends into the support space to act on the second feeding plate to lock the feeding assembly in the support space.

[0011] Preferably, the support assembly includes two support members disposed on both sides of the through slot. Each support member includes a connecting part and a supporting part. The connecting part is connected to the frame, and the supporting part protrudes from the connecting part toward the through slot, forming a support space between the two support members.

[0012] Preferably, the support portion has multiple grooves, and each groove is provided with a first rolling element for supporting the feeding assembly, which rolls to support the feeding assembly in a first direction.

[0013] Preferably, a second rolling element is provided at one end of the support part, and the feeding component enters the support space from one end of the support component and slides along the plurality of first rolling elements until it rolls into contact with the second rolling element.

[0014] Preferably, the locking assembly includes multiple locking cylinders, which are evenly distributed on the support members on both sides. The locking cylinders are fixed to the support members and the output end of the locking cylinders passes through the support members so as to act on the first and second feeding plates in the support space.

[0015] Preferably, the first feeding plate has a first hollow portion, the second feeding plate has a second hollow portion, and a handle is provided at one end of the first feeding plate and the second feeding plate so as to pull the first feeding plate and the second feeding plate.

[0016] Preferably, the frame is also provided with an adsorption assembly for adsorbing film. The adsorption assembly includes a fixing member and an adsorption member. The fixing member is installed on the frame, and the adsorption member is installed on the fixing member. A groove is opened on the substrate for the adsorption member to pass through. The adsorption member passes through the groove to adsorb the film and positions it at a preset position on the substrate to form a mask.

[0017] Preferably, it also includes an adsorption platform that is raised and lowered below the feeding assembly, the adsorption platform being used to transfer the substrate onto the feeding assembly to cooperate with the mask. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a structural diagram of a leveling and adjusting feeding device provided in one embodiment of the present invention.

[0020] Figure 2 yes Figure 1 A structural diagram from another angle.

[0021] Figure 3 yes Figure 2 Enlarged view of point A in the middle.

[0022] Figure 4 yes Figure 1 Another structural diagram from a different angle.

[0023] Figure 5 yes Figure 1 Remove the structural diagram of the adsorption platform.

[0024] Figure 6 yes Figure 1 Structural diagram of the feeding assembly, locking mechanism and adjusting assembly.

[0025] Figure 7 yes Figure 6 A structural diagram from another angle.

[0026] Explanation of reference numerals in the attached figures: 100. Leveling and adjusting feeding device; 101. Frame; 102. Through slot; 103. Positioning plate; 1001. Mask; 1002. Substrate; 1003. Film; 10. Feeding assembly; 110. Accommodating space; 11. First feeding plate; 111. First cutout section; 12. Second feeding plate; 121. Second cutout section; 13. Handle; 20. Locking mechanism; 21. Support assembly; 210. Support space; 211. Connecting part; 212. Support part; 213. Groove; 22. Locking assembly; 221. Locking cylinder; 23. First rolling element; 24. Second rolling element; 30. Adjustment assembly; 31. Adjustment component; 40. Adsorption platform; 50. Adsorption component; 51. Fixing component; 52. Adsorption component. Detailed Implementation

[0027] To explain the technical content and structural features of this utility model in detail, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0028] Please see Figures 1 to 3This utility model provides a leveling and adjusting feeding device 100, including a frame 101 and a feeding assembly 10, a locking mechanism 20, and an adjusting assembly 30 connected to the frame 101. A through slot 102 is provided on the frame 101, and the feeding assembly 10 is disposed at the bottom of the frame 101 and below the through slot 102. The feeding assembly 10 includes a first feeding plate 11 and a second feeding plate 12, with a receiving space 110 between the first feeding plate 11 and the second feeding plate 12 for accommodating a substrate 1002. The substrate 1002 is fixed within the receiving space 110 between the first feeding plate 11 and the second feeding plate 12 by the locking mechanism 20, and its parallelism can be adjusted by the adjusting assembly 30. The locking mechanism 20 is disposed below the feeding assembly 10 and includes a support assembly 21 and a locking assembly 22. The support assembly 21 supports the feeding assembly 10. The locking assembly 22 actuates to lock the feeding assembly 10 within the support assembly 21, or the locking mechanism 20 releases to allow the feeding assembly 10 to be removed from or placed into the support assembly 21. The adjustment assembly 30 is disposed on the feeding assembly 10 and can pass through the through slot 102 to adjust the gap between the first feeding plate 11 and the second feeding plate 12, thereby adjusting the parallelism of the substrate 1002 within the receiving space 110. Specifically, the feeding assembly 10 is pulled out from the support assembly 21, and the substrate 1002 is placed in the receiving space 110 between the first feeding plate 11 and the second feeding plate 12. Then, the feeding assembly 10 with the substrate 1002 placed is placed within the support assembly 21. The feeding assembly 10 is then locked within the support assembly 21 by the locking assembly 22. A feeler gauge is then used to check the parallelism of the substrate 1002 within the accommodating space 110 through the through-slot 102. The gap between the first feeding plate 11 and the second feeding plate 12 is then adjusted by the adjusting assembly 30 to ensure that the parallelism of the substrate 1002 within the accommodating space 110 meets the preset requirements. Finally, the substrate 1002 and the film 1003 are exposed together. The substrate 1002 can be made of quartz glass, soda glass, or metal (such as an iron-nickel alloy).

[0029] Compared with the prior art, the leveling and adjusting feeding device 100 of this utility model includes a frame 101 and a feeding assembly 10, a locking mechanism 20, and an adjusting assembly 30 disposed on the frame 101. A through slot 102 is provided on the frame 101, and the feeding assembly 10 is disposed at the bottom of the frame 101 and below the through slot 102. The feeding assembly 10 includes a first feeding plate 11 and a second feeding plate 12, and a receiving space 110 for accommodating a substrate 1002 is provided between the first feeding plate 11 and the second feeding plate 12. The substrate 1002 is placed in the receiving space 110 between the first feeding plate 11 and the second feeding plate 12 and locked by the locking mechanism 20. Then, the parallelism of the substrate 1002 is adjusted within the receiving space 110 by the adjusting assembly 30. The locking mechanism 20 is disposed below the feeding assembly 10 and includes a support assembly 21 and a locking assembly 22. Support component 21 supports feeding component 10. Locking component 22 actuates to lock feeding component 10 within support component 21, and locking mechanism 20 releases to allow feeding component 10 to be removed or inserted from support component 21. Adjustment component 30 is disposed on feeding component 10 and passes through through slot 102 to adjust the gap between first feeding plate 11 and second feeding plate 12, thereby adjusting the parallelism of substrate 1002 within accommodating space 110. The leveling and adjusting feeding device 100 of this invention fixes substrate 1002 with feeding component 10, locks feeding component 10 with locking component 22, and then adjusts the parallelism of substrate 1002 within accommodating space 110 with adjustment component 30. The overall structure is simple, adjustment is convenient, and cost is lower.

[0030] Please see Figure 4 , Figure 6 and Figure 7 In some optional embodiments, the adjustment assembly 30 includes a plurality of adjustment members 31, which are evenly distributed on the frame 101 to precisely adjust the parallelism of the substrate 1002 between the first feeding plate 11 and the second feeding plate 12. Specifically, the adjustment members 31 can pass through the first feeding plate 11 and act on the second feeding plate 12 to adjust the position between the first feeding plate 11 and the second feeding plate 12. A positioning plate 103 is provided within the through slot 102, and the plurality of adjustment members 31 are disposed on the positioning plate 103. The adjustment members 31 are mounted on the positioning plate 103 and act on the first feeding plate 11 and the second feeding plate 12 to adjust the substrate 1002 to a suitable parallelism for better subsequent exposure results.

[0031] Please see Figures 1 to 6In some optional embodiments, the support assembly 21 is connected to the frame 101 and protrudes from the bottom of the frame 101 to support the feeding assembly 10. A support space 210 is provided within the support assembly 21 to support and accommodate the feeding assembly 10. The feeding assembly 10 is slidably disposed within the support assembly 21, and can slide into and out of the support space 210. Conversely, a locking assembly 22 is fixed to the support assembly 21 and extends into the support space 210, acting on the second feeding plate 12 to lock the feeding assembly 10 within the support space 210. The locking assembly 22 locks the feeding assembly 10 to position it within the support space 210. The locking assembly 22 releases the locking assembly 22, allowing the feeding assembly 10 to slide out of the support space 210.

[0032] Please see Figure 2 , Figure 3 and Figures 5 to 7 In some optional embodiments, the support assembly 21 includes two support members disposed on both sides of the through groove 102. The two support members are symmetrically disposed on the bottom surface of the frame 101 and located on both sides of the through groove 102. Specifically, the support member includes a connecting portion 211 and a supporting portion 212. The connecting portion 211 is connected to the frame 101, and the supporting portion 212 protrudes from the connecting portion 211 toward the through groove 102, forming a support space 210 between the two support members. For example, the cross-section of the support member is L-shaped.

[0033] Please see Figure 2 , Figure 3 and Figures 5 to 7 In some optional embodiments, the support portion 212 has multiple grooves 213 distributed at certain intervals. Each groove 213 contains a first rolling element 23 for supporting the feeding assembly 10, which rolls to support the feeding assembly 10 in a first direction. The first rolling element 23 slightly protrudes from the groove 213 to allow the feeding assembly 10 to roll in contact with the multiple first rolling elements 23 within the support space 210, thereby reducing friction, preventing wear on the second feeding plate 12, and providing good sliding performance for easy material handling. On the other hand, a second rolling element 24 is also provided at one end of the support portion 212. The feeding assembly 10 enters the support space 210 from one end of the support component 21 and slides along the multiple first rolling elements 23 until it rolls in contact with the second rolling element 24. The second rolling element 24 is located at one end of the support space 210 to limit the sliding of the feeding assembly 10, and then the locking component 22 positions the feeding assembly 10 within the support space 210. The second rolling element 24 makes rolling contact with the feeding assembly 10, which can reduce friction, prevent wear of the feeding assembly 10, and avoid affecting parallelism.

[0034] Please see Figure 2 , Figure 3 and Figure 5 and Figure 6 In some optional embodiments, the locking assembly 22 includes a plurality of locking cylinders 221, which are evenly distributed on the support members on both sides. Specifically, the locking cylinders 221 are fixed to the support portion 212 and the output end of the locking cylinders 221 passes through the support portion 212 so as to act on the first feeding plate 11 and the second feeding plate 12 in the support space 210. It can be understood that the feeding assembly 10 is locked in the support space 210 by the plurality of locking cylinders 221, and then the parallelism of the substrate 1002 is detected by the feeler gauge. Then, the gap between the first feeding plate 11 and the second feeding plate 12 is adjusted by the plurality of adjusting members 31 so that the substrate 1002 is adjusted to a suitable position. Then, the film 1003 is attached to the substrate 1002 to form a mask 1001 so that it can better cooperate with the substrate for subsequent exposure.

[0035] Please see Figure 6 and Figure 7 In some optional embodiments, a first cutout portion 111 is provided in the first feeding plate 11, and a second cutout portion 121 is provided in the second feeding plate 12. That is, the substrate 1002 is clamped only by the periphery of the first feeding plate 11 and the second feeding plate 12, and the substrate 1002 can be manipulated through the through slot 102 and the first cutout portion 111 and the second cutout portion 121. On the other hand, a handle 13 is provided at one end of the first feeding plate 11 and the second feeding plate 12, so as to pull the first feeding plate 11 and the second feeding plate 12. The substrate 1002 is inserted from the end of the first feeding plate 11 and the second feeding plate 12 away from the handle 13.

[0036] Please see Figures 1 to 4 In some optional embodiments, the frame 101 is further provided with an adsorption assembly 50 for adsorbing the film 1003. The adsorption assembly 50 includes a fixing member 51 and an adsorption member 52. The fixing member 51 is mounted on the frame 101, and the adsorption member 52 is mounted on the fixing member 51. A groove is formed on the substrate 1002 for the adsorption member 52 to pass through. After the substrate 1002 is adjusted for parallelism, the film 1003 is adsorbed by the adsorption member 52 passing through the groove, so that the film 1003 is positioned at a preset position on the substrate 1002 to form a mask 1001. On the other hand, it also includes an adsorption platform 40 that is raised and lowered below the unloading assembly 10. The adsorption platform 40 is used to transport the substrate to the unloading assembly 10 for exposure with the mask 1001.

[0037] Please see Figures 1 to 7The leveling and adjusting feeding device 100 of this utility model includes a frame 101 and a feeding assembly 10, a locking mechanism 20, and an adjusting assembly 30 disposed on the frame 101. A through slot 102 is provided on the frame 101, and the feeding assembly 10 is disposed at the bottom of the frame 101 and below the through slot 102. The feeding assembly 10 includes a first feeding plate 11 and a second feeding plate 12, with a receiving space 110 for accommodating a substrate 1002 provided between the first feeding plate 11 and the second feeding plate 12. The substrate 1002 is placed in the receiving space 110 between the first feeding plate 11 and the second feeding plate 12 and locked by the locking mechanism 20. Then, the parallelism of the substrate 1002 is adjusted within the receiving space 110 by the adjusting assembly 30. The locking mechanism 20 is disposed below the feeding assembly 10 and includes a support assembly 21 and a locking assembly 22. The support assembly 21 is used to support the feeding assembly 10. The locking component 22 actuates to lock the feeding component 10 within the support component 21, or the locking mechanism 20 releases to allow the feeding component 10 to be removed from or placed into the support component 21. The adjusting component 30 is disposed on the feeding component 10 and passes through the through slot 102 to adjust the gap between the first feeding plate 11 and the second feeding plate 12, thereby adjusting the parallelism of the substrate 1002 within the accommodating space 110. The leveling and adjusting feeding device 100 of this invention fixes the substrate 1002 with the feeding component 10, locks the feeding component 10 with the locking component 22, and then adjusts the parallelism of the substrate 1002 within the accommodating space 110 using the adjusting component 30. The overall structure is simple, the adjustment is convenient, and the cost is lower.

[0038] The above-disclosed examples are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the claims of the present utility model shall fall within the scope of the present utility model.

Claims

1. A leveling and adjusting feeding device, characterized in that, include: The frame has through slots; The feeding assembly is disposed at the bottom of the frame and below the through slot, and includes a first feeding plate and a second feeding plate, with an accommodating space for accommodating the substrate provided between the first feeding plate and the second feeding plate. A locking mechanism is provided below the feeding assembly, including a support assembly and a locking assembly. The support assembly supports the feeding assembly, and the locking assembly is activated to lock the feeding assembly inside the support assembly. The locking mechanism is released to allow the feeding assembly to be removed from or placed into the support assembly. An adjustment component is disposed on the feeding component and can pass through the through slot to adjust the gap between the first feeding plate and the second feeding plate, so as to adjust the parallelism of the substrate in the accommodating space.

2. The leveling and adjusting feeding device according to claim 1, characterized in that, The adjustment assembly includes multiple adjustment components, which are evenly distributed on the frame and can pass through the first feeding plate to act on the second feeding plate to adjust the position between the first feeding plate and the second feeding plate; a positioning plate is provided in the through groove, and the multiple adjustment components are disposed on the positioning plate.

3. The leveling and adjusting feeding device according to claim 1, characterized in that, The support assembly is connected to the frame and protrudes from the bottom of the frame. The support assembly has a support space for supporting and accommodating the feeding assembly. The feeding assembly is slidably disposed in the support assembly. The locking assembly is fixed to the support assembly and extends into the support space to act on the second feeding plate to lock the feeding assembly in the support space.

4. The leveling and adjusting feeding device according to claim 3, characterized in that, The support assembly includes two support members disposed on both sides of the through groove. Each support member includes a connecting part and a supporting part. The connecting part is connected to the frame, and the supporting part protrudes from the connecting part toward the through groove, forming the support space between the two support members.

5. The leveling and adjusting feeding device according to claim 4, characterized in that, The support portion has multiple grooves, and each groove is provided with a first rolling element for supporting the feeding assembly, so as to support the feeding assembly in a first direction by means of the first rolling element.

6. The leveling and adjusting feeding device according to claim 5, characterized in that, One end of the support is also provided with a second rolling element. The feeding component enters the support space from one end of the support component and slides along the plurality of first rolling elements until it rolls into contact with the second rolling element.

7. The leveling and adjusting feeding device according to claim 4, characterized in that, The locking assembly includes multiple locking cylinders, which are evenly distributed on the support members on both sides. The locking cylinders are fixed to the support members and their output ends pass through the support members so as to act on the first and second feeding plates within the support space.

8. The leveling and adjusting feeding device according to claim 1, characterized in that, The first feeding plate has a first hollow part, the second feeding plate has a second hollow part, and a handle is provided at one end of the first feeding plate and the second feeding plate, so as to pull the first feeding plate and the second feeding plate.

9. The leveling and adjusting feeding device according to claim 1, characterized in that, The frame is also provided with an adsorption assembly for adsorbing film. The adsorption assembly includes a fixing member and an adsorption member. The fixing member is installed on the frame, and the adsorption member is installed on the fixing member. A groove is formed on the substrate for the adsorption member to pass through. The adsorption member passes through the groove to adsorb the film and positions it at a preset position on the substrate to form a mask.

10. The leveling and adjusting feeding device according to claim 9, characterized in that, It also includes an adsorption platform that is raised and lowered below the feeding assembly, the adsorption platform being used to transfer the substrate onto the feeding assembly to cooperate with the mask.

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