A vertical furnace body mounting tool

Abstract

The vertical furnace body mounting tool provided by the application relates to the field of furnace body mounting. The vertical furnace body mounting tool comprises a furnace body carrying vehicle for carrying a vertical furnace body; a furnace body mounting lifting vehicle is mounted on the furnace body carrying vehicle and can move on the furnace body carrying vehicle, and is used for moving the vertical furnace body to a specified position relative to the furnace body carrying vehicle; and a furnace body clamping device is connected with the furnace body mounting lifting vehicle and is used for clamping the vertical furnace body. The vertical furnace body mounting tool provided by the application can be used to mechanically realize the mounting of a vertical diffusion furnace body in a semiconductor diffusion process, and is favorable for improving the furnace body mounting efficiency and reducing safety hazards, and significantly improves or avoids problems such as large labor consumption, low mounting efficiency, inaccurate positioning and poor tool versatility in the furnace body mounting process.

Description

Technical Field

[0001] This application relates to the field of furnace body installation, and more specifically, to a tool for installing a vertical furnace body. Background Technology

[0002] The installation of vertical diffusion furnaces in semiconductor diffusion processes typically presents numerous challenges. The furnace bodies are generally large and heavy, and traditional installation methods rely heavily on manpower, resulting in high labor costs, low efficiency, and safety hazards. Furthermore, the complex shape and structure of the furnace body make precise positioning and adjustment difficult during installation, easily leading to installation deviations that affect the furnace's subsequent performance and safety stability. In addition, existing installation tools lack versatility, requiring different tools for different furnace models and specifications, further increasing installation costs and complexity. Utility Model Content

[0003] To overcome the aforementioned shortcomings in the prior art, the purpose of this application is to provide a vertical furnace body installation tool. This vertical furnace body installation tool can achieve the installation of the vertical diffusion furnace body in the semiconductor diffusion process through mechanized operation, which is beneficial to improving the furnace body installation efficiency, reducing safety hazards, and significantly improving or avoiding problems such as high labor consumption, low installation efficiency, inaccurate positioning, and poor tool versatility during the furnace body installation process.

[0004] This utility model provides a vertical furnace body installation tool for installing a vertical furnace body. The vertical furnace body installation tool includes: A furnace body transport vehicle is used to transport the vertical furnace body. A furnace body installation lifting vehicle is installed on the furnace body transport vehicle and can move on the furnace body transport vehicle, used to move the vertical furnace body relative to the furnace body transport vehicle to a designated position; A furnace body clamping device is connected to the furnace body installation lifting vehicle and is used to clamp the vertical furnace body.

[0005] Furthermore, in an optional embodiment, the furnace body transport vehicle is equipped with a vehicle-mounted track, and the furnace body installation lifting vehicle is capable of moving on the vehicle-mounted track. The vertical furnace body installation tool also includes an extension track, which is detachably connected to the furnace body transport vehicle. When the extension track is connected to the furnace body transport vehicle, the extension track cooperates with the vehicle-mounted track to enable the furnace body installation lifting vehicle to move on both the vehicle-mounted track and the extension track.

[0006] Furthermore, in an optional embodiment, the vertical furnace body installation tool further includes a track stop structure, which is connected to the end of the extended track away from the vehicle-mounted track, for keeping the furnace body installation lifting vehicle confined within the extended track.

[0007] Further, in an optional embodiment, the track stop structure includes a mounting part, a stop part, and an extension part arranged in sequence. The mounting part is connected to the extended track, the stop part is located in the traveling direction of the extended track and is used to stop the furnace body installation lifting vehicle, and the extension part is set at an angle to the stop part and extends away from the extended track.

[0008] Furthermore, in an optional embodiment, the furnace body mounting lifting vehicle includes a lifting vehicle base, a set of traveling wheels, a lifting assembly, and a lifting vehicle body. The set of traveling wheels is mounted on the lifting vehicle base, and the lifting assembly is connected to the lifting vehicle base and the lifting vehicle body to lift the lifting vehicle body.

[0009] Furthermore, in an optional embodiment, the traveling wheel assembly includes a traveling wheel frame, a traveling wheel axle, and a traveling wheel body. The traveling wheel frame is connected to the lifting vehicle base, the traveling wheel axle is mounted on the traveling wheel axle, and the traveling wheel body is mounted on the traveling wheel axle.

[0010] Furthermore, in an optional embodiment, the furnace body transport vehicle is equipped with a vehicle-mounted track, the vehicle-mounted track including a track body and an anti-tipping hook component, the track body being installed on the furnace body transport vehicle, the traveling wheels cooperating with the track body, the anti-tipping hook component being connected to the track body and forming an anti-tipping hook space with the track body, and the traveling wheel frame, the traveling wheel axle, the traveling wheel body, and the lifting vehicle base all being located within the anti-tipping hook space.

[0011] Furthermore, in an optional embodiment, the lifting assembly includes a lifting drive and a lifting structure. The lifting structure is connected to the lifting vehicle base and the lifting vehicle body, respectively. The lifting drive is connected to the lifting structure for driving the lifting structure to raise or lower the lifting vehicle body.

[0012] Further, in an optional embodiment, the furnace body clamping device includes a first furnace body clamping member and a second furnace body clamping member. One end of the first furnace body clamping member is rotatably connected to one end of the second furnace body clamping member, and the other end of the first furnace body clamping member is detachably connected to the other end of the second furnace body clamping member. The first furnace body clamping member and the second furnace body clamping member form a space for clamping the vertical furnace body and clamp the vertical furnace body.

[0013] Furthermore, in an optional embodiment, one end of the first furnace body clamping member is rotatably connected to one end of the second furnace body member via a hinge, and the other end of the first furnace body clamping member is detachably connected to the other end of the second furnace body member via bolts.

[0014] In existing technologies, vertical furnace bodies are typically installed manually. However, furnace bodies are generally large and heavy, and traditional installation methods rely heavily on manpower, which is not only costly but also inefficient and poses safety hazards. Furthermore, due to the complex shape and structure of the furnace body, precise positioning and adjustment during installation are difficult, easily leading to installation deviations and affecting the subsequent performance and safety stability of the furnace body. In addition, existing installation tools have poor versatility; different tools are required for different models and specifications of furnace bodies, increasing installation costs and complexity. Compared to existing technologies, this application has the following advantages: This utility model provides a vertical furnace body installation tool, which includes a furnace body clamping device, a furnace body installation lifting trolley, and a furnace body transport trolley. The furnace body clamping device is used to fix the vertical furnace body to be installed onto the furnace body installation lifting trolley, which is mounted on the furnace body transport trolley. The furnace body installation lifting trolley can move on the furnace body transport trolley to adjust the position of the vertical furnace body to be installed. The furnace body transport trolley is used to transport the vertical furnace body. When installing a vertical furnace body, the furnace body is first secured to a furnace body transport vehicle and a furnace body installation lifting vehicle using a furnace body clamping device. The furnace body transport vehicle then transports the furnace body to the designated location. Once in position, the furnace body installation lifting vehicle fine-tunes the furnace body's position and raises and lowers it to adjust its height, facilitating installation. It should be noted that the horizontal position and height of the furnace body can be repeatedly adjusted as needed to ensure precise horizontal and vertical alignment and accurate installation. The vertical furnace body installation tool provided in this embodiment of the utility model can realize the installation of the vertical diffusion furnace body in the semiconductor diffusion process through mechanized operation, which helps to shorten the installation time and improve the installation efficiency of the furnace body. At the same time, compared with the traditional manual installation method, it reduces the direct contact between the installer and the furnace body. Through mechanized lifting and pushing, it can significantly reduce personal injuries such as pinching and squeezing, which helps to reduce safety hazards and significantly improve or avoid problems such as high labor consumption, low installation efficiency, inaccurate positioning and poor tool versatility in the furnace body installation process. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic diagram of the structure of the vertical furnace body installation tool provided in the embodiments of this application; Figure 2 A schematic diagram of the vertical furnace body installation tool provided in an embodiment of this application from another perspective; Figure 3 This is a structural schematic diagram of the vertical furnace body installation tool provided in an embodiment of this application from another perspective.

[0017] Icons: 100, Vertical furnace body installation tool; 110, Furnace body transport vehicle; 111, Vehicle-mounted rail; 1111, Rail body; 1112, Anti-tipping hook; 120, Furnace body installation lifting vehicle; 121, Lifting vehicle base; 122, Walking wheel set; 1221, Walking wheel frame; 1222, Walking wheel axle; 1223, Walking wheel body; 124, Lifting vehicle body; 130, Furnace body clamping device; 131, First furnace body clamping component; 132, Second furnace body clamping component; 140, Extended rail; 150, Rail stop structure; 151, Installation part; 152, Stop part; 153, Extension part. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0020] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0021] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0023] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] Please see Figures 1 to 3 This utility model provides a vertical furnace body installation tool 100. This tool allows for mechanized installation of the furnace body of a vertical diffusion furnace used in semiconductor diffusion processes, improving installation efficiency, reducing safety hazards, and significantly improving or avoiding problems such as high labor costs, low installation efficiency, inaccurate positioning, and poor tool versatility during furnace body installation. This tool 100 is used for installing vertical furnace bodies, such as those in semiconductor diffusion processes. However, it is not limited to this; in other embodiments of this utility model, it can also be used to install other types of vertical furnace bodies. This utility model does not impose specific requirements or limitations in this regard.

[0025] like Figure 1 and Figure 2As shown in the embodiment of this utility model, the vertical furnace body installation tool 100 includes a furnace body transport vehicle 110 for transporting the vertical furnace body; a furnace body installation lifting vehicle 120, which is mounted on the furnace body transport vehicle 110 and can move on the furnace body transport vehicle 110 to move the vertical furnace body relative to the furnace body transport vehicle 110 to a designated position; and a furnace body clamping device 130, which is connected to the furnace body installation lifting vehicle 120 and is used to clamp the vertical furnace body.

[0026] It should be noted that the furnace body clamping device 130 is used to fix the vertical furnace body to be installed on the furnace body installation lifting vehicle 120. The furnace body installation lifting vehicle 120 is mounted on the furnace body transport vehicle 110. The furnace body installation lifting vehicle 120 can move on the furnace body transport vehicle 110 to adjust the position of the vertical furnace body to be installed. The furnace body transport vehicle 110 is used to transport the vertical furnace body. When installing the vertical furnace body, the furnace body to be installed is first fixed to the furnace body transport vehicle 110 and the furnace body installation lifting vehicle 120 using the furnace body clamping device 130. Then, the furnace body to be installed is transported to the designated position by the furnace body transport vehicle 110. After arriving at the designated position on the furnace body transport vehicle 110, the position of the furnace body to be installed is finely adjusted by the furnace body installation lifting vehicle 120. The furnace body is then raised and lowered by the furnace body installation lifting vehicle 120 to adjust its height, thus facilitating the installation of the vertical furnace body. It should be noted that the horizontal position and height of the furnace body to be installed can be repeatedly adjusted according to actual needs, thereby achieving precise adjustment of the furnace body in both horizontal and vertical directions and ensuring accurate installation. The vertical furnace body installation tool 100 provided in this embodiment of the utility model can realize the installation of the vertical diffusion furnace body in the semiconductor diffusion process through mechanized operation, which helps to shorten the installation time and improve the installation efficiency of the furnace body. At the same time, compared with the traditional manual installation method, it reduces the direct contact between the installer and the furnace body. Through mechanized lifting and pushing, it can significantly reduce personal injuries such as pinching and squeezing, which helps to reduce safety hazards and significantly improve or avoid problems such as high labor consumption, low installation efficiency, inaccurate positioning and poor tool versatility in the furnace body installation process.

[0027] like Figure 2 As shown, in an optional embodiment, the furnace body transport vehicle 110 is provided with a vehicle-mounted rail 111, and the furnace body installation lifting vehicle 120 can move on the vehicle-mounted rail 111. The vertical furnace body installation tool 100 also includes an extension rail 140, which is detachably connected to the furnace body transport vehicle 110. When the extension rail 140 is connected to the furnace body transport vehicle 110, the extension rail 140 cooperates with the vehicle-mounted rail 111 so that the furnace body installation lifting vehicle 120 can move on the vehicle-mounted rail 111 and the extension rail 140.

[0028] In other words, by extending the track 140, the horizontal travel of the furnace body installation lifting vehicle 120 is increased, allowing for a wider adjustment range and thus improving adjustment accuracy. In this embodiment of the invention, the extended track 140 is detachably connected to the furnace body transport vehicle 110. After the furnace body transport vehicle 110 reaches the designated position, the extended track 140 is installed on it. The onboard track 111 cooperates with the extended track 140, enabling the furnace body installation lifting vehicle 120 to slide along the onboard track 111 and the extended track 140, thereby achieving horizontal position adjustment of the furnace body installation lifting vehicle 120.

[0029] Furthermore, the vertical furnace body installation tool 100 also includes a track stop structure 150. The track stop structure 150 is connected to the end of the extended track 140 away from the vehicle track 111, and is used to confine the furnace body installation lifting vehicle 120 within the extended track 140. The stop structure is mainly used to limit the horizontal travel of the furnace body installation lifting vehicle 120. Optionally, in this embodiment, the track stop structure 150 includes a mounting part 151, a stop part 152, and an extension part 153 arranged sequentially. The mounting part 151 is connected to the extended track 140, the stop part 152 is located in the traveling direction of the extended track 140 and is used to stop the furnace body installation lifting vehicle 120, and the extension part 153 is set at an angle to the stop part 152 and extends in a direction away from the extended track 140.

[0030] In an optional embodiment, the furnace body mounting lifting cart 120 includes a lifting cart base 121, a set of traveling wheels 122, a lifting assembly, and a lifting cart body 124. The set of traveling wheels 122 is mounted on the lifting cart base 121, and the lifting assembly is connected to the lifting cart base 121 and the lifting cart body 124 for lifting the lifting cart body 124. Optionally, in this embodiment, the set of traveling wheels 122 includes a traveling wheel frame 1221, a traveling wheel axle 1222, and a traveling wheel body 1223. The traveling wheel frame 1221 is connected to the lifting cart base 121, the traveling wheel axle 1222 is mounted on the traveling wheel axle 1222, and the traveling wheel body 1223 is mounted on the traveling wheel axle 1222.

[0031] Furthermore, the vehicle-mounted track 111 includes a track body 1111 and an anti-tipping hook 1112. The track body 1111 is installed on the furnace body transport vehicle 110. The traveling wheels 1223 cooperate with the track body 1111. The anti-tipping hook 1112 is connected to the track body 1111 and forms an anti-tipping space with the track body 1111. The traveling wheel frame 1221, traveling wheel axle 1222, traveling wheels 1223, and the lifting vehicle base 121 are all located within the anti-tipping space. The track body 1111 can be made of square steel. The anti-tipping hook 1112 is used to prevent the traveling wheels 1223 and other components from derailing. In this embodiment, the anti-tipping hook 1112 has a transverse U-shaped structure.

[0032] Optionally, the lifting assembly includes a lifting drive and a lifting structure. The lifting structure is connected to the lifting vehicle base 121 and the lifting vehicle body 124, respectively. The lifting drive is connected to the lifting structure for driving the lifting structure to raise or lower the lifting vehicle body 124. The lifting drive can be a hydraulic component, and the lifting structure can be a linkage or other structure. It should be noted that this embodiment of the invention does not impose requirements or limitations on the specific forms of the lifting drive and the lifting structure.

[0033] In an optional embodiment, the furnace body clamping device 130 includes a first furnace body clamping member 131 and a second furnace body clamping member 132. One end of the first furnace body clamping member 131 is rotatably connected to one end of the second furnace body member, and the other end of the first furnace body clamping member 131 is detachably connected to the other end of the second furnace body clamping member 132. The first furnace body clamping member 131 and the second furnace body clamping member 132 form a space for clamping the vertical furnace body and clamp the vertical furnace body. That is, the furnace body clamping device 130 consists of two parts, namely the first furnace body clamping member 131 and the second furnace body clamping member 132. The clamping and fixing of the vertical furnace body is achieved through the first furnace body clamping member 131 and the second furnace body clamping member 132, which makes assembly more convenient and simple and helps to improve assembly efficiency.

[0034] Optionally, in this embodiment, one end of the first furnace body clamping member 131 is rotatably connected to one end of the second furnace body member via a hinge, and the other end of the first furnace body clamping member 131 is detachably connected to the other end of the second furnace body member via bolts. The connection method of hinges and bolts is simple and convenient, and can realize convenient assembly of the vertical furnace body. Of course, it is not limited to this. In other embodiments of this utility model, the first furnace body clamping member 131 and the second furnace body clamping member 132 can also be connected by other connection methods.

[0035] Please refer to the following: Figures 1 to 3The vertical furnace body installation tool 100 provided in this embodiment of the present invention can realize the installation of the vertical diffusion furnace body in the semiconductor diffusion process through mechanized operation. The vertical furnace body installation tool 100 includes a furnace body clamping device 130, a furnace body installation lifting trolley 120, and a furnace body transport trolley 110. The furnace body clamping device 130 is used to fix the vertical furnace body to be installed on the furnace body installation lifting trolley 120, which is mounted on the furnace body transport trolley 110. The furnace body installation lifting trolley 120 can move on the furnace body transport trolley 110 to adjust the position of the vertical furnace body to be installed. The furnace body transport trolley 110 is used to transport the vertical furnace body. When installing the vertical furnace body, the furnace body to be installed is first fixed to the furnace body transport vehicle 110 and the furnace body installation lifting vehicle 120 using the furnace body clamping device 130. Then, the furnace body to be installed is transported to the designated position by the furnace body transport vehicle 110. After arriving at the designated position on the furnace body transport vehicle 110, the position of the furnace body to be installed is finely adjusted by the furnace body installation lifting vehicle 120. The furnace body is then raised and lowered by the furnace body installation lifting vehicle 120 to adjust its height, thus facilitating the installation of the vertical furnace body. It should be noted that the horizontal position and height of the furnace body to be installed can be repeatedly adjusted according to actual needs, thereby achieving precise adjustment of the furnace body in both horizontal and vertical directions and ensuring accurate installation. The vertical furnace body installation tool 100 provided in this embodiment of the utility model can realize the installation of the vertical diffusion furnace body in the semiconductor diffusion process through mechanized operation, which helps to shorten the installation time and improve the installation efficiency of the furnace body. At the same time, compared with the traditional manual installation method, it reduces the direct contact between the installer and the furnace body. Through mechanized lifting and pushing, it can significantly reduce personal injuries such as pinching and squeezing, which helps to reduce safety hazards and significantly improve or avoid problems such as high labor consumption, low installation efficiency, inaccurate positioning and poor tool versatility in the furnace body installation process.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0037] The above descriptions are merely various embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A vertical furnace body installation tool, used for installing a vertical furnace body, characterized in that, The vertical furnace body installation tools include: A furnace body transport vehicle, used to transport the vertical furnace body; A furnace body installation lifting vehicle is installed on the furnace body transport vehicle and can move on the furnace body transport vehicle, used to move the vertical furnace body relative to the furnace body transport vehicle to a designated position; A furnace body clamping device is connected to the furnace body installation lifting vehicle and is used to clamp the vertical furnace body.

2. The vertical furnace body installation tool according to claim 1, characterized in that, The furnace body transport vehicle is equipped with a vehicle-mounted track, and the furnace body installation lifting vehicle can move on the vehicle-mounted track. The vertical furnace body installation tool also includes an extension track, which is detachably connected to the furnace body transport vehicle. When the extension track is connected to the furnace body transport vehicle, the extension track cooperates with the vehicle-mounted track to enable the furnace body installation lifting vehicle to move on both the vehicle-mounted track and the extension track.

3. The vertical furnace body installation tool according to claim 2, characterized in that, The vertical furnace body installation tool also includes a track stop structure, which is connected to the end of the extended track away from the vehicle track, and is used to limit the furnace body installation lifting vehicle to be within the extended track.

4. The vertical furnace body installation tool according to claim 3, characterized in that, The track stop structure includes an installation part, a stop part, and an extension part arranged in sequence. The installation part is connected to the extended track. The stop part is located in the traveling direction of the extended track and is used to stop the furnace body installation lifting vehicle. The extension part is set at an angle to the stop part and extends away from the extended track.

5. The vertical furnace body installation tool according to any one of claims 1-4, characterized in that, The furnace body mounting lifting vehicle includes a lifting vehicle base, a set of traveling wheels, a lifting assembly, and a lifting vehicle body. The set of traveling wheels is mounted on the lifting vehicle base, and the lifting assembly is connected to the lifting vehicle base and the lifting vehicle body to enable the lifting of the lifting vehicle body.

6. The vertical furnace body installation tool according to claim 5, characterized in that, The traveling wheel assembly includes a traveling wheel frame, a traveling wheel axle, and a traveling wheel body. The traveling wheel frame is connected to the lifting vehicle base, the traveling wheel axle is mounted on the traveling wheel axle, and the traveling wheel body is mounted on the traveling wheel axle.

7. The vertical furnace body installation tool according to claim 6, characterized in that, The furnace body transport vehicle is equipped with a vehicle-mounted track, which includes a track body and an anti-tipping hook. The track body is installed on the furnace body transport vehicle, the traveling wheels cooperate with the track body, and the anti-tipping hook is connected to the track body and forms an anti-tipping space with the track body. The traveling wheel frame, the traveling wheel axle, the traveling wheel body, and the lifting vehicle base are all located within the anti-tipping space.

8. The vertical furnace body installation tool according to claim 5, characterized in that, The lifting assembly includes a lifting drive and a lifting structure. The lifting structure is connected to the lifting vehicle base and the lifting vehicle body respectively. The lifting drive is connected to the lifting structure for driving the lifting structure to raise or lower the lifting vehicle body.

9. The vertical furnace body installation tool according to claim 1, characterized in that, The furnace body clamping device includes a first furnace body clamping member and a second furnace body clamping member. One end of the first furnace body clamping member is rotatably connected to one end of the second furnace body clamping member, and the other end of the first furnace body clamping member is detachably connected to the other end of the second furnace body clamping member. The first furnace body clamping member and the second furnace body clamping member form a space for clamping the vertical furnace body and clamp the vertical furnace body.

10. The vertical furnace body installation tool according to claim 9, characterized in that, One end of the first furnace body clamping member is rotatably connected to one end of the second furnace body member via a hinge, and the other end of the first furnace body clamping member is detachably connected to the other end of the second furnace body member via bolts.

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