A waste liquid regeneration and extraction device for TMAH developing solution for positive photoresist

Abstract

The utility model relates to TMAH developing solution waste liquid's regeneration recovery technical field especially relates to a kind of waste liquid regeneration extraction device of TMAH developing solution for positive photoresist, including waste liquid tank, filter, evaporating tank, separation tank, adsorber, ion exchanger and storage tank in turn intercommunication.This device does not need to remove photoresist component in waste liquid by nanofiltration, but by directly adding acid to make TMAH and soluble carboxylic acid tetramethylammonium salt convert into tetramethylammonium chloride (TMAC), then according to the solubility difference of TMAC and other components in waste liquid in organic solvent to separate, the TMAC aqueous solution obtained is converted into TMAH by ion exchange method.This device can effectively extract and recycle TMAH in the waste liquid of TMAH developing solution for positive photoresist.

Description

Technical Field

[0001] This utility model relates to the field of TMAH developer waste liquid regeneration and recycling technology, and in particular to a waste liquid regeneration and extraction device for TMAH developer liquid used in positive photoresist. Background Technology

[0002] Positive photoresist compositions contain phenolic resin, photosensitizer, solvent, and additives. Photoresist utilizes photochemical reactions to transfer desired patterns from a photomask onto a substrate through photolithography processes such as exposure and development. Typically, a TMAH (tetramethylammonium hydroxide) aqueous solution is used as the developer for positive photoresist during development.

[0003] After coating and pre-baking, the solvent in the positive photoresist film evaporates. Upon exposure to ultraviolet light, the solubility of the light-exposed areas changes, allowing them to dissolve in the developer. Specifically, the photosensitizer diazonaphthoquinone sulfonate (DNQ) in the photoresist undergoes a photochemical reaction after exposure to light, generating indenecarboxylic acid (R-COOH). Indenecarboxylic acid then reacts with TMAH (tetramethylammonium hydroxide) in the developer to form a soluble tetramethylammonium carboxylate salt: R-COOH + (CH3)4N + OH - → R-COON(CH3)4 + H2O. Therefore, the waste liquid of TMAH developer contains tetramethylammonium carboxylate (R-COON(CH3)4), unreacted TMAH, photoresist components such as resin, and trace amounts of additives (surfactants, defoamers, leveling agents, etc.).

[0004] TMAH is a highly alkaline, high-nitrogenous substance with poor biodegradability. Therefore, TMAH developer wastewater poses a significant environmental hazard and requires centralized collection and treatment. Furthermore, since this substance is listed in the "National Hazardous Chemicals Catalogue," it is necessary to regenerate and recycle TMAH developer wastewater to avoid environmental pollution and reduce costs. Existing patents, such as CN 101993380 A and CN 113415934 A, use nanofiltration to remove the photoresist component from TMAH developer wastewater. However, the photoresist resin and additives in the developer wastewater are viscous and easily form a gel layer on the nanofiltration membrane surface, clogging the membrane pores and shortening the membrane's lifespan. Moreover, unreacted TMAH and soluble tetramethylammonium carboxylate in the developer wastewater are also partially retained by the nanofiltration membrane, affecting the TMAH recovery rate. Therefore, it is necessary to develop a device that can effectively extract and recover TMAH from positive photoresist developer wastewater. Utility Model Content

[0005] In view of this, the present invention proposes a waste liquid regeneration and extraction device for TMAH developer solution used in positive photoresist.

[0006] The technical solution of this utility model is implemented as follows: This utility model proposes a waste liquid regeneration and extraction device for TMAH developer solution used in positive photoresist, comprising a waste liquid tank, a filter, an evaporator, a separation tank, an adsorber, an ion exchanger, and a storage tank connected in sequence; the waste liquid tank is used to store waste liquid; the filter is used to remove particulate matter and suspended solids; the evaporator is used to precipitate tetramethylammonium chloride; the separation tank is used to retain the precipitated tetramethylammonium chloride; the adsorber is used to adsorb residual organic solvents; the ion exchanger is used to convert the tetramethylammonium chloride aqueous solution into a tetramethylammonium hydroxide aqueous solution; and the storage tank is used to store the tetramethylammonium hydroxide aqueous solution.

[0007] Based on the above technical solutions, preferably, the system also includes a condenser, a pure water tank, a vacuum pump, and an external pure water pipe; the top of the evaporator is connected to the condenser, the condenser is connected to the pure water tank, the vacuum pump is connected to the condenser, and the external pure water pipe is connected to the pure water tank.

[0008] Specifically, the vacuum pump is used to control the pressure of the evaporator; the external pure water pipe is used for replenishing the pure water tank.

[0009] Based on the above technical solutions, preferably, it also includes an acid replenishment tank and an organic solvent replenishment tank; both the acid replenishment tank and the organic solvent replenishment tank are located on the top of the evaporator.

[0010] Specifically, both the acid replenishment tank and the organic solvent replenishment tank are used for replenishing the liquid in the evaporator.

[0011] Based on the above technical solutions, preferably, the separation tank is equipped with a filter screen inside, and also includes an organic tank, a first nozzle, and a second nozzle; the organic tank is located at the top of the separation tank, and the organic tank is connected to the first nozzle, which is located inside the separation tank and above the filter screen; the pure water tank is connected to the second nozzle, which is located inside the separation tank and above the filter screen; and a drain pipe is also provided at the bottom of the separation tank.

[0012] Specifically, the first nozzle is used to clean tetramethylammonium chloride; the second nozzle is used to dissolve tetramethylammonium chloride.

[0013] Based on the above technical solutions, preferably, the solution also includes: a sodium hydroxide tank and an online conductivity meter; the sodium hydroxide tank is located at the top of the ion exchanger; and the online conductivity meter is located in the bottom pipeline of the ion exchanger.

[0014] Specifically, the sodium hydroxide tank is used for the regeneration of the ion exchanger; the online conductivity meter is used to detect the regeneration of the ion exchanger.

[0015] Based on the above technical solutions, preferably, a fourth pump and a sixth pump are also included; the fourth pump is used to transport pure water in the pure water tank to the ion exchanger; the sixth pump is used to transport the tetramethylammonium hydroxide aqueous solution in the storage tank to the ion exchanger again.

[0016] Based on the above technical solutions, preferably, the top of the storage tank is provided with a fourth cover, through which pure water or solid tetramethylammonium hydroxide is added to the storage tank.

[0017] Based on the above technical solutions, preferably, the filter screen has a pore size of 0.45μm, and the filter screen is made of polytetrafluoroethylene.

[0018] Based on the above technical solutions, preferably, the filter has a filter element inside; the filter element is made of polypropylene and the filter diameter range is 5~25μm.

[0019] Based on the above technical solutions, preferably, the adsorber contains a non-polar resin, the material of which includes polystyrene-divinylbenzene; the ion exchanger contains an ion exchange resin, the ion exchange resin including OH... - Type strong base anion exchange resin.

[0020] The waste liquid regeneration and extraction device for TMAH developer solution used in positive photoresist of this invention has the following advantages over the prior art: (1) The device of this utility model does not require nanofiltration to remove the photoresist component in the waste liquid. Instead, it directly adds acid to convert TMAH and soluble carboxylic acid tetramethylammonium salt into tetramethylammonium chloride (TMAC). Then, it separates TMAC and other components in the waste liquid based on the difference in solubility in organic solvents. The obtained TMAC aqueous solution is converted into TMAH by ion exchange.

[0021] (2) The waste liquid regeneration and extraction device for positive photoresist TMAH developer of this utility model can effectively extract and recover TMAH in the waste liquid. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the waste liquid regeneration and extraction device for TMAH developer solution used in positive photoresist according to this utility model.

[0024] In the diagram, 1-waste liquid tank, 2-feed inlet, 3-first pipeline, 4-first pump, 5-filter, 6-filter element, 7-second pipeline, 8-evaporator, 9-first valve, 10-stirrer, 11-stirring paddle, 12-heater, 13-heating tube, 14-acid replenishment tank, 15-first cover, 16-second valve, 17-organic solvent replenishment tank, 18-second cover, 19-third valve, 20-third pipeline, 21-condenser, 22-... - Fourth pipeline, 23-Fifth pipeline, 24-Sixth pipeline, 25-Fourth valve, 26-Online pH meter, 27-First probe, 28-Pure water tank, 29-Seventh pipeline, 30-Fifth valve, 31-Separator tank, 32-Eighth pipeline, 33-Ninth pipeline, 34-Sixth valve, 35-Tenth pipeline, 36-Seventh valve, 37-Second pump, 38-Filter screen, 39-Third cover, 40-Eleventh pipeline, 41-Third pump 42-Eighth valve, 43-First nozzle, 44-Twelfth pipeline, 45-Fourth pump, 46-Thirteenth pipeline, 47-Ninth valve, 48-Second nozzle, 49-Fourteenth pipeline, 50-Adsorber, 51-Non-polar resin, 52-Fifteenth pipeline, 53-Ion exchanger, 54-Ion exchange resin, 55-Sixteenth pipeline, 56-Seventeenth pipeline, 57-Tenth valve, 58-Storage tank, 59-Fourth cover, 60-... Pipeline 18, Valve 11 (61-11th valve), Pipeline 19 (62-19th valve), Valve 12 (63-12th valve), Online conductivity meter (64-2nd probe), Sodium hydroxide tank (66-5th cover), Pipeline 20 (68-20th valve), Pump 5 (69-5th pump), Valve 13 (70-13th valve), Valve 14 (71-14th valve), Valve 15 (72-15th valve), Pump 6 (73-6th pump), Pipeline 21 (74-21st valve), Valve 16 (75-16th valve), Organic tank (76-77-17th valve). Detailed Implementation

[0025] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0026] In the description of this utility model, it should be understood that the orientation or positional relationship indicated by terms such as "top" and "bottom" is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of description and simplification, and does not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features; "a plurality of" means two or more.

[0027] To effectively extract and recover TMAH from waste liquid, this invention provides a waste liquid regeneration and extraction device for TMAH developer used in positive photoresist, such as... Figure 1 As shown, the device includes a waste liquid tank 1, a filter 5, an evaporator 8, a separation tank 31, an adsorber 50, an ion exchanger 53, and a storage tank 58 connected in sequence.

[0028] The waste liquid tank 1 is used to store waste liquid; the filter 5 is used to remove particulate matter and suspended solids; the evaporator 8 is used to precipitate tetramethylammonium chloride; the separation tank 31 is used to retain the precipitated tetramethylammonium chloride; the adsorber 50 is used to adsorb residual organic solvents; the ion exchanger 53 is used to convert the tetramethylammonium chloride aqueous solution into a tetramethylammonium hydroxide aqueous solution; and the storage tank 58 is used to store the tetramethylammonium hydroxide aqueous solution.

[0029] In a specific embodiment, the filter 5 is provided with a filter element 6 inside; the filter element 6 is made of polypropylene, and the filter diameter of the filter element 6 is in the range of 5~25μm.

[0030] Specifically, the first step is waste liquid filtration: waste liquid tank 1 is used to store TMAH developer waste liquid; a feed inlet 2 is provided above waste liquid tank 1; the first pump 4 is turned on, and the waste liquid in waste liquid tank 1 enters the filter 5 through the first pipeline 3; after passing through the filter element 6, larger particles and suspended solids can be removed; and then it enters the evaporator 8 through the second pipeline 7.

[0031] In a specific embodiment, the device further includes a condenser 21, a pure water tank 28, a vacuum pump, and an external pure water pipe; the top of the evaporator 8 is connected to the condenser 21, and the condenser 21 is connected to the pure water tank 28; the vacuum pump is connected to the condenser 21 and is used to control the pressure of the evaporator 8; the external pure water pipe is connected to the pure water tank 28 and is used to replenish the pure water tank 28.

[0032] In a specific embodiment, the device further includes an acid replenishment tank 14 and an organic solvent replenishment tank 17; the acid replenishment tank 14 and the organic solvent replenishment tank 17 are disposed on the top of the evaporator 8 and are used for replenishing the liquid in the evaporator 8.

[0033] Specifically, the second step is waste liquid neutralization: A stirrer 10 is installed at the bottom of the evaporator 8, which controls the stirring speed of the stirring paddle 11 to ensure thorough and uniform mixing of the waste liquid and other components in the evaporator 8; an acid replenishment tank 14 is installed at the top of the evaporator 8, and a first cover 15 is installed on the top of the acid replenishment tank 14, through which acid can be replenished; with the stirrer 10 turned on, the second valve 16 is opened, allowing the acid (10-20% dilute hydrochloric acid) in the acid replenishment tank 14 to enter the evaporator 8 through a pipeline and mix with the waste liquid. The soluble tetramethylammonium carboxylate and tetramethylammonium hydroxide (TMAH) in the waste liquid undergo a neutralization reaction to generate carboxylic acid and tetramethylammonium chloride (TMAC), specifically: R-COON(CH3)4 + HCl → R-COOH + (CH3)4NCl; An online pH meter 26 is installed on the side wall of the evaporator. The first probe 27 of the online pH meter 26 is inserted into the evaporator 8 to detect the pH value of the waste liquid. When the pH value is neutral, the second valve 16 is closed. At this time, the soluble tetramethylammonium carboxylate and tetramethylammonium hydroxide in the waste liquid react completely with hydrochloric acid.

[0034] Specifically, the third step is waste liquid evaporation: A heater 12 is installed at the bottom of the evaporator 8. The heater 12 can be set to heat the temperature. The heating tube 13 of the heater 12 is in the evaporator 8. The heater 12 is started to heat the waste liquid in the evaporator 8. At the same time, the stirrer 10 is turned on to evaporate the water in the waste liquid and enter the condenser 21 through the third pipe 20. The condenser 21 condenses the water vapor to form liquid pure water and enters the pure water tank 28 through the fourth pipe 22. The top of the condenser 21 is connected to the vacuum pump through the fifth pipe 23 to make the air pressure in the evaporator 8 negative, thereby accelerating the evaporation rate of the water in the waste liquid.

[0035] In a specific embodiment, the separation tank 31 is provided with a filter screen; the filter screen 38 has a pore size of 0.45μm and is made of polytetrafluoroethylene.

[0036] In a specific embodiment, the device further includes: an organic tank 76, a first nozzle 43, and a second nozzle 48; the organic tank 76 is disposed on top of the separation tank 31, and the organic tank 76 is connected to the first nozzle 43, which is located inside the separation tank 31 and above the filter screen 38, and is used to clean tetramethylammonium chloride; the pure water tank 28 is connected to the second nozzle 48, which is located inside the separation tank 31 and above the filter screen 38, and is used to dissolve tetramethylammonium chloride; a drain pipe is also provided at the bottom of the separation tank 31.

[0037] Furthermore, as the water continues to evaporate, carboxylic acid, tetramethylammonium chloride (TMAC), and other photoresist components in the waste liquid will gradually precipitate out. An organic solvent replenishment tank 17 is provided at the top of the evaporator 8. During the evaporation of water in the waste liquid, the third valve 19 is continuously opened to allow the organic solvent (cyclohexanone) in the organic solvent replenishment tank 17 to be slowly added to the evaporator 8. Cyclohexanone can dissolve the solid carboxylic acid and other components of the photoresist (surfactants, defoamers, and other additives) precipitated during the evaporation process, while the tetramethylammonium chloride (TMAC) precipitated during the evaporation process is suspended in the solution in solid form.

[0038] Specifically, the fourth step involves component separation, cleaning, and dissolution: a. Separation: After the water in the waste liquid has evaporated, that is, when no more liquid pure water enters the pure water tank 28 from the condenser 21, turn off the heater 12 and the vacuum pump connected to the fifth pipeline 23 to restore the gas pressure in the evaporator 8 to the standard atmospheric pressure; then open the fourth valve 25 to allow the waste liquid to enter the separation tank 31 through the sixth pipeline 24; after passing through the filter screen 38, the liquid part of the waste liquid will reach the bottom of the separation tank 31 through the filter screen 38 and be discharged through the eighth pipeline 32 and the ninth pipeline 33 (at this time, the sixth valve 34 is opened and the seventh valve 36 is closed), while tetramethylammonium chloride (TMAC) is trapped above the filter screen 38; b. Cleaning: An organic tank 76 is installed above the separation tank 31. The organic tank 76 contains an organic solvent (cyclohexanone). A third cover 39 is installed above the organic tank 76 to replenish the organic solvent. The eighth valve 42 is opened and the third pump 41 is turned on, so that the organic solvent in the organic tank 76 enters the separation tank 31 through the eleventh pipeline 40 and the first nozzle 43 at the end of the pipeline, and is sprayed onto the surface of the solid tetramethylammonium chloride (TMAC) above the filter screen 38 to clean the solid tetramethylammonium chloride (TMAC) and remove residual solid carboxylic acid and photoresist components. The cleaned organic solution is also discharged through the eighth pipeline 32 and the ninth pipeline 33. c. Dissolving: Close valves 34 and 36, and open valve 47 and pump 45 (valve 71 is closed at this time). This allows the pure water in the pure water tank 28 to be sprayed onto the surface of solid tetramethylammonium chloride (TMAC) through pipe 44 and nozzle 48 at the end of the pipe. This dissolves the tetramethylammonium chloride (TMAC) trapped on filter screen 38, forming a tetramethylammonium chloride aqueous solution. The solution then passes through filter screen 38 to the bottom of separation tank 31. Pipe 29 and valve 30 are connected to the top of the pure water tank 28. Pipe 29 is connected to an external pure water pipe to replenish the pure water tank 28. After the solid tetramethylammonium chloride (TMAC) above filter screen 38 has completely dissolved, close pump 45 and valve 47.

[0039] In a specific embodiment, the adsorber 50 contains a non-polar resin 51, the material of which includes polystyrene-divinylbenzene; the ion exchanger 53 contains an ion exchange resin 54, the ion exchange resin 54 comprising OH... - Type strong base anion exchange resin.

[0040] Specifically, the fifth step is ion exchange: The seventh valve 36 and the second pump 37 are opened, the seventeenth valve 77 is opened, and the tenth valve 57 is opened (all other valves are closed). This allows the tetramethylammonium chloride aqueous solution at the bottom of the separation tank 31 to enter the adsorber 50 through the tenth pipe 35. The adsorber 50 is filled with non-polar resin 51 (Amberlite XAD-2, XAD-4, XAD-16, etc., resins made of polystyrene-divinylbenzene), which adsorbs and removes trace amounts of residual organic solvents in the tetramethylammonium chloride aqueous solution. Then, the tetramethylammonium chloride aqueous solution continues to enter the ion exchanger 53 through the fifteenth pipe 52. The ion exchanger 53 is filled with OH... - The strong base anion exchange resin 54 converts tetramethylammonium chloride (TMAC) aqueous solution into tetramethylammonium hydroxide (TMAH) aqueous solution through the principle of ion exchange, and then enters the storage tank 58 through the sixteenth pipeline 55 and the seventeenth pipeline 56.

[0041] In a specific embodiment, the device further includes a fourth pump 45 and a sixth pump 73; the fourth pump 45 is used to transport pure water in the pure water tank 28 to the ion exchanger 53 and rinse the ion exchange resin 54; the sixth pump 73 is used to transport the tetramethylammonium hydroxide aqueous solution in the storage tank 58 back to the ion exchanger 53 until the chloride ion content in the tetramethylammonium hydroxide aqueous solution in the storage tank 58 is qualified.

[0042] In a specific embodiment, the top of the storage tank 58 is provided with a fourth cover 59, through which pure water or solid tetramethylammonium hydroxide can be added to the storage tank 58 to adjust the concentration of the tetramethylammonium hydroxide aqueous solution in the storage tank 58.

[0043] Furthermore, the bottom of storage tank 58 is connected to the twenty-first pipeline 74. By opening the sixteenth valve 75, the chloride ion content of the tetramethylammonium hydroxide aqueous solution in storage tank 58 can be sampled and analyzed. If the chloride ion content exceeds the standard, the eleventh valve 61 and the sixth pump 73 are opened, and the fifteenth valve 72 is opened, so that the tetramethylammonium hydroxide aqueous solution in storage tank 58 re-enters the ion exchanger 53 through the eighteenth pipeline 60 until the chloride ion content in the tetramethylammonium hydroxide aqueous solution in storage tank 58 is qualified. Then, the eleventh valve 61 and the sixth pump 73 are closed, and the fifteenth valve 72 is closed.

[0044] Furthermore, a fourth cover 59 is provided on the storage tank 58. Pure water or solid tetramethylammonium hydroxide can be added through the fourth cover 59 to adjust the concentration of the tetramethylammonium hydroxide aqueous solution in the storage tank 58 to achieve the required concentration. The final tetramethylammonium hydroxide aqueous solution is transferred through the twenty-first pipeline 74 and the sixteenth valve 75.

[0045] In a specific embodiment, the device further includes a sodium hydroxide tank 66 and an online conductivity meter 64; the sodium hydroxide tank 66 is disposed at the top of the ion exchanger 53 for regeneration of the ion exchanger 53; the online conductivity meter 64 is disposed at the bottom of the ion exchanger 53 for detecting the regeneration of the ion exchanger 53.

[0046] Specifically, the sixth step involves regenerating the ion exchanger 53: the ion exchanger 53 is connected to the sodium hydroxide tank 66 via the twentieth pipe 68. Sodium hydroxide solution is added to the sodium hydroxide tank 66 through the fifth cover 67. The fifth pump 69 and the thirteenth valve 70 are opened, and the twelfth valve 63 is opened (while other valves are closed). This allows the sodium hydroxide solution in the sodium hydroxide tank 66 to enter the ion exchanger 53 through the twentieth pipe 68, where it is replaced and carried away by the ion exchange resin 54. - It regenerates into OH - The solution from the strong base anion exchange resin 54 is discharged through the sixteenth pipe 55 and the nineteenth pipe 62. The nineteenth pipe 62 is equipped with an online conductivity meter 64, and the second probe 65 of the online conductivity meter 64 extends into the nineteenth pipe 62. When the value of the online conductivity meter 64 is consistent with the concentration of the sodium hydroxide aqueous solution in the sodium hydroxide tank 66, it means that the regeneration of the ion exchange resin 54 is complete. At this time, the fifth pump 69 and the thirteenth valve 70 are closed.

[0047] Furthermore, open the fourteenth valve 71 and the fourth pump 45 to allow pure water from the pure water tank 28 to enter the ion exchanger 53 through the fourteenth pipeline 49, and flush the ion exchange resin 54 in the ion exchanger 53 to remove the residual sodium hydroxide solution in the ion exchange resin 54 after regeneration. The flushed aqueous solution is discharged through the sixteenth pipeline 55 and the nineteenth pipeline 62. When the value of the online conductivity meter 64 reaches the standard of pure water in the pure water tank 28, it means that the ion exchange resin 54 has been flushed clean. Close the fourth pump 45 and the fourteenth valve 71, and close the twelfth valve 63. At this time, the ion exchanger 53 has completed regeneration.

[0048] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A waste liquid regeneration and extraction device for TMAH developer solution used in positive photoresist, characterized in that: It includes a waste liquid tank (1), a filter (5), an evaporator (8), a separation tank (31), an adsorber (50), an ion exchanger (53), and a storage tank (58) connected in sequence. The waste liquid tank (1) is used to store waste liquid; The filter (5) is used to remove particulate matter and suspended matter; The evaporator (8) is used to precipitate tetramethylammonium chloride; The separation tank (31) is used to retain the precipitated tetramethylammonium chloride; The adsorber (50) is used to adsorb residual organic solvents; The ion exchanger (53) is used to convert tetramethylammonium chloride aqueous solution into tetramethylammonium hydroxide aqueous solution; The storage tank (58) is used to store an aqueous solution of tetramethylammonium hydroxide.

2. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 1, characterized in that, Also includes: Condenser (21), pure water tank (28), vacuum pump and external pure water pipe; The top of the evaporator (8) is connected to the condenser (21), and the condenser (21) is connected to the pure water tank (28); the vacuum pump is connected to the condenser (21); and the external pure water pipe is connected to the pure water tank (28).

3. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 1, characterized in that, It also includes: acid replenishment tank (14) and organic solvent replenishment tank (17); The acid replenishment tank (14) and the organic solvent replenishment tank (17) are both located on top of the evaporator (8).

4. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 2, characterized in that, The separation tank (31) is equipped with a filter screen (38); the waste liquid regeneration and extraction device also includes: an organic tank (76), a first nozzle (43), and a second nozzle (48); The organic tank (76) is located on top of the separator (31). The organic tank (76) is connected to the first nozzle (43), which is located inside the separator (31) and above the filter screen (38). The pure water tank (28) is connected to the second nozzle (48), which is located inside the separator (31) and above the filter screen (38). The bottom of the separator (31) is also provided with a drain pipe.

5. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 1, characterized in that, It also includes: a sodium hydroxide tank (66) and an online conductivity meter (64); The sodium hydroxide tank (66) is located at the top of the ion exchanger (53); the online conductivity meter (64) is located in the bottom pipeline of the ion exchanger (53).

6. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 2, characterized in that, Also includes: Fourth pump (45) and sixth pump (73); The fourth pump (45) is used to transport pure water in the pure water tank (28) to the ion exchanger (53); the sixth pump (73) is used to transport the tetramethylammonium hydroxide aqueous solution in the storage tank (58) to the ion exchanger (53) again.

7. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 1, characterized in that, The storage tank (58) is provided with a fourth cover (59) on top, through which pure water or solid tetramethylammonium hydroxide is added to the storage tank (58).

8. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 4, characterized in that, The filter screen (38) has a pore size of 0.45 μm and is made of polytetrafluoroethylene.

9. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 1, characterized in that, The filter (5) is provided with a filter element (6) inside; the filter element (6) is made of polypropylene and the filter diameter range of the filter element (6) is 5~25μm.

10. The waste liquid regeneration and extraction apparatus for TMAH developer solution for positive photoresist as described in claim 1, characterized in that, The adsorber (50) contains a non-polar resin (51), the material of which includes polystyrene-divinylbenzene; the ion exchanger (53) contains an ion exchange resin (54), the ion exchange resin (54) comprising OH... - Type strong base anion exchange resin.

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