Continuous melting method quartz rod rectification structure and continuous melting method quartz rod production device

Abstract

This utility model discloses a correction structure and a production apparatus for quartz rods produced by continuous melting, relating to the field of quartz rod production technology. The correction structure includes: a frame configured to allow quartz rods drawn from the continuous melting furnace by a vertical tube drawing machine to pass through; two image detection components with orthogonal optical axes at the same detection height, used to simultaneously capture contour images of the quartz rod portion at that detection height in two orthogonal directions; four electric push rods evenly distributed around the standard centerline of the quartz rod, each push rod having its mounting portion fixedly mounted on the frame, and its extension portion capable of linear reciprocating motion radially along the standard centerline of the quartz rod; and a control system electrically connected to the two image detection components and all electric push rods; the control system is configured to control the movement of the extension portion of the corresponding electric push rod based on the contour image, thereby moving the quartz rod to correct its bending amount.

Description

Technical Field

[0001] This utility model relates to the field of quartz glass rod production technology, specifically to a quartz rod correction structure and a quartz rod production device for continuous melting method. Background Technology

[0002] Continuous melting is one of the main processes in the production of quartz glass products, and it can produce quartz tubes, quartz rods, quartz cylinders, quartz plates, and other products. A key challenge in producing quartz glass rods using the continuous melting method is controlling the curvature of the rods. With the continuous development of applications in photovoltaics and semiconductors, higher requirements have been placed on the level of curvature control for quartz rods, with some customers having tightened their standards to <0.3‰.

[0003] In related technologies, the main method for controlling the curvature of quartz rods is to manually observe the furnace opening and the position of the quartz rod during the drawing process. Once a curvature or deviation of the quartz rod from the center is detected, the guide rod at the bottom of the furnace opening is manually adjusted to restore the quartz rod to the center position. However, due to the insufficient precision of visual inspection and manual adjustment, even the most experienced workers find it difficult to stably control the curvature to below 0.5‰, resulting in a high rate of product downgrading.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0005] Purpose of the utility model: The technical problem to be solved by this utility model is to address the shortcomings of the existing technology by providing a quartz rod correction structure and a quartz rod production device for continuous melting method, which automatically corrects the deviation of the quartz rod during the continuous melting process and has a higher level of control over the curvature of the quartz rod.

[0006] To solve the above-mentioned technical problems, this utility model discloses a quartz rod correction structure using a continuous melting method, comprising:

[0007] The frame is configured to allow quartz rods drawn from the continuous furnace by a vertical tube drawing machine to pass through;

[0008] Two image detection components, with their optical axes at the same detection height and orthogonally arranged, are used to simultaneously capture the contour images of the quartz rod in two orthogonal directions;

[0009] Four electric actuators are evenly distributed around the standard center line of the quartz rod; the mounting part of each electric actuator is fixedly installed on the frame, and the telescopic part of each electric actuator can reciprocate linearly along the radial direction of the standard center line of the quartz rod.

[0010] The system is electrically connected to the two image detection components and all the electric actuators; the system is configured to control the movement of the telescopic portion of the corresponding electric actuator in real time based on the contour images captured by the two image detection components, thereby moving the quartz rod to correct its bending.

[0011] In one embodiment, among the four electric actuators, the line connecting the two electric actuators symmetrical about the standard center line of the quartz rod is one of the two orthogonal directions, and the line connecting the remaining two electric actuators is the other of the two orthogonal directions.

[0012] In one embodiment, the image detection component includes a CCD camera and a screen grating facing the CCD camera, with the quartz rod located between the CCD camera and the screen grating.

[0013] In one embodiment, the CCD camera and the screen grating are respectively fitted with a high-temperature water-cooled protective cover for high-temperature protection. The high-temperature water-cooled protective cover has an inlet for low-temperature water to flow in, an outlet for water to flow out after heat exchange, and a water-cooling channel formed inside it and extending from the inlet to the outlet. Low-temperature water from an external low-temperature water source flows into the water-cooling channel from the inlet to carry away heat and reduce the temperature of the image detection component. The water after heat exchange flows out from the outlet.

[0014] In one embodiment, the end portion of the telescopic part is rotatably connected to a roller for contacting the quartz rod, the roller being made of a high-temperature resistant material.

[0015] In one embodiment, the high-temperature resistant material is graphite or ceramic.

[0016] In one embodiment, the electric actuator is an electric actuator with a built-in pressure sensor. The pressure sensor is electrically connected to the control system and is used to measure the thrust of the electric actuator. The control system also controls the start and stop of the corresponding electric actuator based on the thrust measurement value of the pressure sensor and a preset thrust threshold. The electric actuator is a servo electric actuator mechanism.

[0017] This utility model also provides a continuous melting method quartz rod production device, including a continuous melting furnace, a vertical tube drawing machine, and a continuous melting method quartz rod correction structure of any one of the above. The continuous melting method quartz rod correction structure is fixed between the continuous melting furnace and the vertical tube drawing machine by a frame. There are two or more continuous melting method quartz rod correction structures in the vertical direction.

[0018] In one embodiment, two or more of the continuous-melting quartz rod correction structures share a single control system, and the vertical tube drawing machine is electrically connected to the control system, which is further configured to control the rotational speed of the tube drawing machine in real time based on a contour image captured by at least one continuous-melting quartz rod correction structure.

[0019] In one embodiment, the control system is a PLC control system.

[0020] Beneficial effects:

[0021] 1. The quartz rod correction structure provided by this utility model automatically corrects the deviation of the quartz rod during the continuous melting process, reducing manual intervention and providing a higher level of control over the curvature of the quartz rod. It also facilitates the digitization and automation of product control production data.

[0022] 2. This utility model has a roller made of high temperature resistant material rotatably connected to the end of the telescopic part. The roller contacts the quartz rod. The high temperature resistant roller does not deform or age at high temperatures and rolls along with the quartz rod without scratching the outer wall of the quartz rod.

[0023] 3. The quartz rod correction structure provided by this utility model uses an electric push rod with a built-in pressure sensor. Once the push force is detected to exceed the preset push force threshold, the control system will immediately command the electric push rod to stop, thus eliminating the risk of breaking the quartz rod due to motor malfunction.

[0024] 4. This utility model effectively isolates the effects of high temperature by adding a high-temperature water-cooled protective cover to the outside of the CCD camera and the screen grating, ensuring the stable operation of the image detection component in a high-temperature environment, thereby realizing the continuous production of quartz rods by the continuous melting method.

[0025] 5. The continuous melting method quartz rod production apparatus of this application can also control the rotation speed of the vertical tube drawing machine in real time according to the captured contour image, realize closed-loop control of the outer diameter of the quartz rod, and continuously suppress the fluctuation of the outer diameter of the quartz rod. Attached Figure Description

[0026] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments, and the advantages of the present invention in the above and / or other aspects will become clearer.

[0027] Figure 1 A front view of a continuous melting method quartz rod production apparatus provided for one embodiment of this utility model.

[0028] Figure 2 A top view of the correction structure provided by this utility model.

[0029] Figure 3This is a schematic diagram of the assembly of the telescopic part and the roller of the electric push rod provided by this utility model.

[0030] The reference numerals in the attached drawings are as follows: 100, continuous melting quartz rod production device; 110, continuous melting furnace; 120, continuous melting quartz rod correction structure; 121, frame; 122, image detection component; 130, electric push rod; 131, mounting part; 132, telescopic part; 140, high-temperature water-cooled protective cover; 150, vertical tube drawing machine; 200, quartz rod; 310, third floor top; 320, third floor ground; 330, second floor ground; 340, first floor ground; 1221, camera; 1222, screen grating; 133, roller. Detailed Implementation

[0031] Example 1

[0032] In related technologies, the main method for controlling the curvature of the quartz rod 200 is to manually observe the furnace opening and the position of the quartz rod 200 during the drawing process. Once a curvature or deviation of the quartz rod 200 from the center is detected, the guide rod at the bottom of the furnace opening is manually adjusted to restore the quartz rod 200 to the center position. However, due to the insufficient precision of visual inspection and manual adjustment, even the most experienced workers find it difficult to stably control the curvature level below 0.5‰, resulting in a high rate of product downgrading.

[0033] Therefore, this embodiment provides a quartz rod correction structure 120 for continuous melting method, which automatically corrects the deviation of quartz rod 200 during the continuous melting method production process, and has a higher level of control over the curvature of quartz rod 200.

[0034] Combination Figure 1 and Figure 2As shown, the continuous melting quartz rod correction structure 120 provided in this embodiment includes: a frame 121, through which the continuous melting quartz rod correction structure 120 is fixed between the continuous melting furnace 110 and the vertical tube drawing machine 150; the frame 121 is configured to allow the quartz rod 200 drawn from the continuous melting furnace 110 by the vertical tube drawing machine 150 to pass through; two image detection components 122, whose optical axes are located at the same detection height and are orthogonally arranged, for simultaneously capturing the contour images of the quartz rod 200 in two orthogonal directions; and four electric push rods 130 surrounding the quartz rod. The standard center lines of the rod 200 are evenly distributed; the mounting parts 131 of each electric actuator 130 are fixedly mounted on the frame 121, and the telescopic parts 132 of each electric actuator 130 can reciprocate linearly along the radial direction of the standard center line of the quartz rod 200; and a control system is electrically connected to the two image detection components 122 and all the electric actuators 130; the control system is configured to control the telescopic parts 132 of the corresponding electric actuators 130 to move in real time according to the contour images captured by the two image detection components 122, thereby driving the quartz rod 200 to move to correct its bending amount.

[0035] Preferably, the electric actuator 130 is a servo electric actuator mechanism. The specific structure of the servo electric actuator mechanism is prior art and therefore will not be described in detail in this application.

[0036] Specifically, the optical axes of the two image detection components 122 intersect at 90° on the same plane, and simultaneously acquire the contour image of the measured part of the quartz rod 200 at the detection height in real time, and send the acquired contour image to the control system; the control system obtains the deviation value of the measured part of the quartz rod 200 from the center based on the obtained contour image, and controls the telescopic part 132 of the corresponding electric push rod 130 to move based on the deviation value. The moving telescopic part 132 drives the quartz rod 200 to move so as to correct its bending amount to the specified range.

[0037] In one embodiment, to simplify control, among the four electric actuators 130, the line connecting the two electric actuators 130 symmetrical about the standard center line of the quartz rod 200 is one of the two orthogonal directions, and the line connecting the remaining two electric actuators 130 is the other of the two orthogonal directions.

[0038] In this embodiment, the two orthogonal directions are defined as the first direction and the second direction, respectively. The control system controls the movement of the extension and retraction portions 132 of the two electric push rods 130 located in the second direction based on the contour image measured by the image detection component 122 located in the first direction. At the same time, the control system controls the movement of the extension and retraction portions 132 of the two electric push rods 130 located in the first direction based on the contour image measured by the image detection component 122 located in the second direction.

[0039] In one embodiment, combined with Figure 1As shown, the image detection component 122 includes a CCD camera 1221 and a screen grating 1222 facing the CCD camera 1221, with a quartz rod 200 located between the CCD camera 1221 and the screen grating 1222.

[0040] Furthermore, combined Figure 1 As shown, in order to ensure that the image detection component 122 can be used normally at high temperatures, the CCD camera 1221 and the screen grating 1222 are respectively fitted with high-temperature water-cooled protective covers 140 for high-temperature protection. The high-temperature water-cooled protective cover 140 has an inlet for low-temperature water to flow in, an outlet for water to flow out after heat exchange, and a water-cooling channel formed inside it and extending from the inlet to the outlet. Low-temperature water from an external low-temperature water source flows into the water-cooling channel from the inlet to carry away heat and reduce the temperature of the image detection component 122. The water after heat exchange flows out from the outlet.

[0041] It should be understood that the shape of the high-temperature water-cooled protective cover 140 should not affect the image detection function of the image detection component 122. The specific structure of the high-temperature water-cooled protective cover 140 adopts the existing structure for high-temperature protection of the image detection component. Its specific structure is not the main improvement point of this application, and therefore will not be described in detail here.

[0042] In one embodiment, combined with Figure 3 As shown, the end portion of the telescopic part 132 is rotatably connected to a roller 133 for contacting the quartz rod 200. The roller 133 is made of a high-temperature resistant material. The high-temperature resistant roller 133 does not deform or age at high temperatures, and rotates with the quartz rod 200 without scratching the outer wall of the quartz rod 200.

[0043] In one embodiment, the high-temperature resistant material is graphite or ceramic.

[0044] In one embodiment, the electric actuator 130 is an electric actuator with a built-in pressure sensor. The pressure sensor is electrically connected to the control system. The pressure sensor is used to measure the thrust of the electric actuator. The control system also controls the start and stop of the corresponding electric actuator based on the thrust measurement value of the pressure sensor and a preset thrust threshold.

[0045] In this embodiment, an electric actuator with a built-in pressure sensor is used. Once the control system detects that the thrust exceeds the preset thrust threshold, it will immediately command the electric actuator to stop, thus eliminating the risk of the quartz rod 200 being crushed due to motor malfunction.

[0046] Combination Figure 1As shown, this embodiment also provides a continuous melting quartz rod production apparatus 100, including a continuous melting furnace 110, a vertical tube drawing machine 150, and the aforementioned continuous melting quartz rod correction structure 120. The continuous melting quartz rod correction structure 120 is fixed between the continuous melting furnace 110 and the vertical tube drawing machine 150 by a frame 121. Four continuous melting quartz rod correction structures 120 are arranged in the vertical direction. It should be understood that the number of continuous melting quartz rod correction structures 120 can be increased or decreased as needed according to the distance between the continuous melting furnace 110 and the vertical tube drawing machine 150.

[0047] In one embodiment, in order to control the uniformity of the outer diameter of the quartz rod 200, the control system is electrically connected to the vertical tube drawing machine 150, and the control system is also configured to control the rotational speed of the vertical tube drawing machine 150 based on the contour image captured by at least one continuous melting quartz rod correction structure 120.

[0048] The specific process by which the control system controls the rotation speed of the tube drawing machine based on the contour image captured by at least one continuous melting quartz rod correction structure 120 is as follows: The control system acquires the contour images captured in real time by two image detection components 122; the control system obtains the outer diameter measurement value of the measured part of the quartz rod 200 based on the obtained contour image; the control system compares the outer diameter measurement value with the preset standard value and calculates the outer diameter deviation value; the control system controls the rotation speed of the vertical tube drawing machine 150 based on the outer diameter deviation value, thereby realizing closed-loop control of the outer diameter of the quartz rod 200 and continuously suppressing the fluctuation of the outer diameter of the quartz rod 200.

[0049] In one embodiment, the control system is a PLC control system.

[0050] In this embodiment, the PLC control system performs the following steps to achieve closed-loop control of the outer diameter of the quartz rod 200:

[0051] The PLC compares the measured outer diameter value with the preset standard value and calculates the outer diameter deviation value.

[0052] Based on the outer diameter deviation value obtained from the comparison, the PLC performs calculations using its internal preset control logic algorithm to generate a corresponding speed control signal. The control logic algorithm is configured to dynamically adjust the output of the speed control signal according to the sign and magnitude of the outer diameter deviation value. When the measured outer diameter value is greater than the standard outer diameter value, a control signal is output to increase the speed of the vertical pipe drawing machine 150, allowing the quartz rod 200 to be stretched faster and thinner; when the measured outer diameter value is less than the standard outer diameter value, a control signal is output to decrease the speed of the vertical pipe drawing machine 150, slowing down the stretching of the quartz rod 200 and thickening it.

[0053] The PLC outputs a speed control signal to the vertical tube drawing machine 150 to adjust its rotation speed, thereby achieving closed-loop control of the outer diameter of the quartz rod 200 and continuously suppressing the fluctuation of the outer diameter of the quartz rod 200.

[0054] The PLC control system also performs the following steps to correct the 200° bend of the quartz rod:

[0055] The PLC calculates based on the deviation from the center value and generates drive control signals corresponding to the bending direction and degree of bending;

[0056] The PLC sends a drive control signal to the corresponding electric push rod 130, controlling its telescopic part 132 to perform telescopic movement, so as to apply a corrective force to the quartz rod 200, thereby dynamically correcting the bending amount of the quartz rod 200 to a preset range in real time.

[0057] In one particular embodiment, combined with Figure 1 As shown, the continuous melting furnace 110 is usually fixedly installed on the top of the third floor 310, the vertical tube drawing machine 150 is fixedly installed on the ground of the first floor 340, the two continuous melting quartz rod correction structures 120 are installed on the top of the third floor 310 via the frame 121, one of the remaining two continuous melting quartz rod correction structures 120 is installed on the ground of the third floor 320 via the frame 121, and the other is installed on the ground of the second floor 330 via the frame 121.

[0058] This utility model provides a concept and method for a straightening structure and a production apparatus for quartz rods produced using the continuous melting method. Many methods and approaches exist for implementing this technical solution; the above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. All components not explicitly stated in this embodiment can be implemented using existing technology.

Claims

1. A quartz rod correction structure (120) using a continuous melting method, characterized in that, include: The frame (121) is configured to allow a quartz rod (200) drawn from the continuous furnace (110) by a vertical tube drawing machine (150) to pass through; Two image detection components (122), with their optical axes at the same detection height and orthogonally arranged, are used to simultaneously capture the contour images of the quartz rod (200) in two orthogonal directions; Four electric actuators (130) are evenly distributed around the standard center line of the quartz rod (200); the mounting part (131) of each electric actuator (130) is fixedly connected to the frame (121), and the telescopic part (132) of each electric actuator (130) can reciprocate linearly along the radial direction of the standard center line of the quartz rod (200); The system is electrically connected to the two image detection components (122) and all the electric actuators (130); the system is configured to control the movement of the telescopic portion (132) corresponding to the electric actuator (130) in real time based on the contour images captured by the two image detection components (122), thereby moving the quartz rod (200) to correct its bending.

2. The quartz rod correction structure (120) according to claim 1, characterized in that, Of the four electric actuators (130), the line connecting the two electric actuators (130) symmetrical about the standard center line of the quartz rod (200) is one of the two orthogonal directions, and the line connecting the remaining two electric actuators (130) is the other of the two orthogonal directions.

3. The continuous melting method quartz rod correction structure (120) according to claim 1 or 2, characterized in that, The image detection component (122) includes a CCD camera (1221) and a screen grating (1222) facing the CCD camera (1221), and the quartz rod (200) is located between the CCD camera (1221) and the screen grating (1222).

4. The quartz rod correction structure (120) according to claim 3, characterized in that, The CCD camera (1221) and the screen grating (1222) are respectively fitted with a high-temperature water-cooled protective cover (140) for high-temperature protection. The high-temperature water-cooled protective cover (140) has an inlet for low-temperature water to flow in, an outlet for water to flow out after heat exchange, and a water-cooling channel formed inside it and extending from the inlet to the outlet. Low-temperature water from an external low-temperature water source flows into the water-cooling channel from the inlet to carry away heat and reduce the temperature of the image detection component (122). The water after heat exchange flows out from the outlet.

5. The quartz rod correction structure (120) according to claim 1 or 2, characterized in that, The end portion of the telescopic part (132) is rotatably connected to a roller (133) for contacting the quartz rod (200), the roller (133) being made of a high-temperature resistant material.

6. The quartz rod correction structure (120) according to claim 5, characterized in that, The high-temperature resistant material is graphite or ceramic.

7. The quartz rod correction structure (120) according to claim 1 or 2, characterized in that, The electric push rod (130) is an electric push rod with a built-in pressure sensor. The pressure sensor is electrically connected to the control system. The pressure sensor is used to measure the thrust of the electric push rod. The control system also controls the start and stop of the corresponding electric push rod according to the thrust measurement value of the pressure sensor and the preset thrust threshold. The electric actuator (130) is a servo electric actuator mechanism.

8. A continuous melting method for producing quartz rods (100), characterized in that, The system includes a continuous melting furnace (110), a vertical tube drawing machine (150), and a continuous melting quartz rod correction structure (120) as described in any one of claims 1 to 7. The continuous melting quartz rod correction structure (120) is fixed between the continuous melting furnace (110) and the vertical tube drawing machine (150) by a frame (121). There are two or more continuous melting quartz rod correction structures (120) in the vertical direction.

9. The continuous melting method quartz rod production apparatus (100) according to claim 8, characterized in that, Two or more of the continuous-melting quartz rod correction structures (120) share a control system, and the vertical tube drawing machine (150) is electrically connected to the control system, which is also configured to control the rotational speed of the tube drawing machine in real time based on the contour image captured by at least one continuous-melting quartz rod correction structure (120).

10. The continuous melting method quartz rod production apparatus (100) according to claim 9, characterized in that, The control system is a PLC control system.

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