Coating preparation device

Abstract

The utility model provides a kind of coating preparation device, it is related to vacuum coating preparation technical field, to solve the problem of low production efficiency of coating preparation device. Coating preparation device includes main vacuum chamber and multiple loading chambers, each loading chamber is arranged around main vacuum chamber, and isolation valve is respectively arranged between each loading chamber and main vacuum chamber;Workpiece displacement module is further provided in each loading chamber, workpiece displacement module is used to install workpiece and change the position and attitude of workpiece, each loading chamber is further connected with linear movement module, linear movement module is connected with workpiece displacement module and drives workpiece displacement module to switch position in loading chamber and main vacuum chamber. It can improve the production efficiency of coating preparation device.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating preparation technology, and more specifically, to a coating preparation apparatus. Background Technology

[0002] Low-Pressure Plasma Spraying (LPPS) is a new technology developed based on Atmospheric Plasma Spraying (APS). Coatings prepared under vacuum or low pressure exhibit better density and bonding strength. Domestic and international research has focused on Plasma Spraying-Physical Vapor Deposition (PS-PVD) and Low-Pressure Plasma Spraying (LPPS) technologies. Currently, most equipment lacks continuous loading capability. This means that after each batch of coating is completed, the vacuum chamber pressure must be increased to atmospheric pressure before opening the chamber to change workpieces. This process of pre-vacuuming and gas backfilling is then repeated, severely impacting production efficiency and causing wasted energy consumption (working gas, electricity, etc.), thus increasing production costs.

[0003] Although continuous loading vacuum spraying control methods and multi-degree-of-freedom turntable technology have been developed, there is still a lack of technology for the movement of turntables containing sprayed workpieces between the vacuum chamber and the loading chamber, as well as for the power transmission of turntables under vacuum conditions. In particular, for the needs of multi-free rotation and angled installation spraying of larger sprayed workpieces, how to enable multi-degree-of-freedom turntables containing sprayed workpieces to move smoothly between the main vacuum chamber and the loading chamber, and to reliably transmit power at varying angles, so as to achieve continuous loading and efficient production of workpieces under vacuum or low pressure conditions, has become an urgent problem to be solved by those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide a coating preparation device to solve the technical problem of low production efficiency of existing coating preparation devices.

[0005] The coating preparation apparatus provided by this utility model includes a main vacuum chamber and multiple loading chambers. Each loading chamber is arranged around the main vacuum chamber, and an isolation valve is provided between each loading chamber and the main vacuum chamber. Each loading chamber is also provided with a workpiece displacement module, which is used to install the workpiece and change the position and orientation of the workpiece. Each loading chamber is also connected to a linear movement module, which is connected to the workpiece displacement module and drives the workpiece displacement module to switch positions between the loading chamber and the main vacuum chamber.

[0006] The beneficial effects of this coating preparation device are:

[0007] By arranging multiple loading chambers around the main vacuum chamber and installing isolation valves between each loading chamber and the main vacuum chamber, the vacuum in the other loading chambers can be released and workpieces can be loaded and unloaded while coating preparation is being performed in the main vacuum chamber. When coating preparation in the main vacuum chamber is complete, the isolation valves release the corresponding main vacuum chamber and loading chamber, and the linear movement module moves the workpiece displacement module from the main vacuum chamber to the loading chamber. Once the main vacuum chamber and the loading chamber are isolated by the isolation valves, the workpiece unloading and loading operations in the loading chamber will not affect the use of the main vacuum chamber. Simultaneously, the workpiece displacement modules in other loading chambers move the workpieces into the main vacuum chamber, thereby improving the utilization rate of the main vacuum chamber and increasing production efficiency.

[0008] In an optional technical solution, the workpiece displacement module includes a support mechanism, a revolution mechanism, and a rotation mechanism. The revolution mechanism is rotatably connected to the support mechanism, the rotation mechanism rotates on the revolution mechanism, the rotation mechanism is connected to the rotation drive mechanism via a rotation transmission mechanism, and the revolution mechanism is connected to the revolution drive mechanism via the revolution transmission mechanism.

[0009] In an optional technical solution, the linear motion module includes a linear motion base, which is movable relative to the loading chamber, and both the rotation drive mechanism and the revolution drive mechanism are mounted on the linear motion base.

[0010] In an optional technical solution, the revolution transmission mechanism includes a first revolution transmission shaft, which is connected to the revolution drive mechanism. The first revolution transmission shaft is connected to a second revolution transmission shaft via a first bevel gear set, and the second revolution transmission shaft is connected to the revolution mechanism.

[0011] In an optional technical solution, both the first and second revolution drive shafts are hollow shafts; the rotation drive mechanism includes a first rotation drive shaft, which is connected to the rotation drive mechanism; the first rotation drive shaft is connected to the second rotation drive shaft via a second bevel gear set; the second rotation drive shaft is connected to the rotation mechanism; the first rotation drive shaft is inserted into the first revolution drive shaft, and the second rotation drive shaft is inserted into the second revolution drive shaft.

[0012] In an optional technical solution, the coating preparation apparatus further includes a cooling device, which includes a cooling slip ring. A cooling channel is provided in the first revolution drive shaft. The cooling channel has a channel inlet and a channel outlet. The channel inlet and the channel outlet are respectively connected to the interior of the cooling slip ring. The cooling slip ring is configured to connect the cooling input section and the cooling output section.

[0013] In an optional technical solution, the rotation mechanism includes a rotation shaft, which is rotatably connected to the revolution mechanism. The second rotation transmission shaft is installed in the revolution mechanism, and the rotation shaft and the second rotation transmission shaft are connected by gear transmission.

[0014] In an optional technical solution, the first revolution drive shaft is inserted into the outer sealing element and rotatably sealed to the outer sealing element, the outer sealing element is fixedly disposed on the linear moving base, the first rotation drive shaft is inserted into the inner sealing element and rotatably sealed to the inner sealing element, the inner sealing element is fixedly disposed on the linear moving base, and the outer sealing element is connected to the loading chamber through a sealing telescopic cylinder.

[0015] In an optional technical solution, a vacuum chamber guide rail is provided in the main vacuum chamber, and a loading chamber guide rail is provided in the loading chamber. The vacuum chamber guide rail and the loading chamber guide rail are arranged collinearly and spaced apart. The spacing between the vacuum chamber guide rail and the loading chamber guide rail is configured to allow the valve body of the isolation valve to be inserted and to seal and isolate the main vacuum chamber and the loading chamber.

[0016] In an optional technical solution, the support mechanism is provided with support rollers and limiting rollers. The support rollers are in rolling friction connection with the upper surface of the vacuum cavity guide rail and / or the loading cavity guide rail; the limiting rollers are in rolling friction connection with the side surfaces of the vacuum cavity guide rail and the loading cavity guide rail; on the support mechanism, the distance between the two support rollers located at the ends of the linear movement module in the driving direction is smaller than the distance between the vacuum cavity guide rail and the loading cavity guide rail. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments or background art of this utility model, the drawings used in the description of the embodiments or background art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the coating preparation apparatus provided in an embodiment of the present invention.

[0019] Figure 2 A partial cross-sectional view of the workpiece displacement module in the coating preparation apparatus provided in this embodiment of the present invention.

[0020] Figure 3 Cross-sectional views of the second and fourth sub-drive shafts in the coating preparation apparatus provided in this embodiment of the present invention.

[0021] Figure 4 This is a front view of the operation of the loading cavity guide rail and vacuum cavity guide rail of the support mechanism in the coating preparation device provided in this embodiment of the utility model.

[0022] Figure 5 A side view of the operation of the loading cavity guide rail and vacuum cavity guide rail of the support mechanism in the coating preparation device provided in this embodiment of the utility model.

[0023] Explanation of reference numerals in the attached figures:

[0024] 100 - Vacuum chamber; 110 - Spray gun; 120 - Vacuum chamber guide rail;

[0025] 200 - Loading chamber; 210 - Loading chamber guide rail;

[0026] 300 - Isolation valve;

[0027] 400 - Workpiece positioning module; 410 - Support mechanism; 411 - Support roller; 412 - Limiting roller; 420 - Revolution mechanism; 430 - Rotation transmission mechanism; 431 - First rotation transmission shaft; 432 - Second rotation transmission shaft; 433 - Second bevel gear set; 434 - Third sub-transmission shaft; 435 - Fourth sub-transmission shaft; 436 - Rotation driven gear; 440 - Revolution transmission mechanism; 441 - First revolution transmission shaft; 442 - Second revolution transmission shaft; 443 - First bevel gear set; 444 - First sub-transmission shaft; 445 - Second sub-transmission shaft; 446 - Flow channel inlet; 447 - Flow channel outlet; 448 - Revolution driven gear; 450 - Rotation shaft;

[0028] 500 - Linear movement module; 510 - Linear movement base; 520 - Rotation drive mechanism; 521 - Second mounting support; 522 - Rotation motor; 523 - Rotation drive gear; 530 - Revolution drive mechanism; 531 - First mounting support; 532 - Revolution motor; 533 - Revolution drive gear;

[0029] 600-Cooling slip ring;

[0030] 710 - External sealing element; 720 - Internal sealing element; 730 - Telescopic sealing cylinder;

[0031] 900 - Workpiece. Detailed Implementation

[0032] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it.

[0033] Figure 1 This is a schematic diagram of the coating preparation apparatus provided in an embodiment of the present invention. Figure 1 As shown, the coating preparation apparatus provided in Embodiment 1 of this utility model includes a main vacuum chamber 100 and multiple loading chambers 200. Each loading chamber 200 is arranged around the main vacuum chamber 100, and each loading chamber 200 is provided with an isolation valve 300 between it and the main vacuum chamber 100. Each loading chamber 200 is also provided with a workpiece displacement module 400, which is used to install a workpiece 900 and change the position and orientation of the workpiece 900. Each loading chamber 200 is also connected to a linear movement module 500, which is connected to the workpiece displacement module 400 and drives the workpiece displacement module 400 to switch positions between the loading chamber 200 and the main vacuum chamber 100.

[0034] By arranging multiple loading chambers 200 around the main vacuum chamber 100, and installing isolation valves 300 between each loading chamber 200 and the main vacuum chamber 100, the vacuum in the other loading chambers 200 can be released and workpieces 900 can be loaded / unloaded while coating preparation is being performed in the main vacuum chamber 100. When coating preparation in the main vacuum chamber 100 is completed, the isolation valves 300 release the corresponding isolation between the main vacuum chamber 100 and the loading chamber 200. The linear movement module 500 drives the workpiece displacement module 400 to move from the main vacuum chamber 100 to the loading chamber 200. After the main vacuum chamber 100 and the loading chamber 200 are isolated by the isolation valves 300, the unloading and loading operations of the workpieces 900 in the loading chamber 200 will not affect the use of the main vacuum chamber 100. Meanwhile, the workpiece displacement module 400 in the other loading chamber 200 drives the workpiece 900 into the main vacuum chamber 100, thereby improving the utilization rate of the main vacuum chamber 100 and increasing production efficiency.

[0035] Specifically, in this embodiment, two loading chambers 200 can be provided. Because with two loading chambers 200, if the total time for disassembling and installing the workpiece 900 in the loading chamber 200 is less than the time for preparing a coating on the workpiece 900 by spraying or deposition in the main vacuum chamber 100, then only two loading chambers 200 are needed to satisfy the disassembly and assembly of the workpiece 900 in one loading chamber 200, while the other loading chamber 200 is connected to the main vacuum chamber 100 for coating preparation on the workpiece 900. Of course, if the total time for disassembling and installing the workpiece 900 in the loading chamber 200 is greater than the processing time for spraying the workpiece 900 by the spray gun 110 in the main vacuum chamber 100, then a greater number of loading chambers 200 can be provided to meet the needs of disassembling and installing the workpiece 900.

[0036] It should be noted that when the isolation valve 300 releases the isolation, it reconnects the main vacuum chamber 100 and the loading chamber 200. If the main vacuum chamber 100 was previously under vacuum while the loading chamber 200 was not, this action will cause the main vacuum chamber 100 to lose its vacuum. Therefore, after the workpiece positioning module 400 sends the workpiece 900 into the main vacuum chamber 100, before coating preparation begins, the main vacuum chamber 100 and its connected loading chamber 200 need to be evacuated together to achieve the required reaction environment. How the loading chamber 200 maintains its seal during this process will be explained in detail later.

[0037] Figure 2 A partial cross-sectional view of the workpiece displacement module in the coating preparation apparatus provided in this embodiment of the utility model. Figure 1 and Figure 2 As shown, optionally, the workpiece displacement module 400 includes a support mechanism 410, a revolution mechanism 420, and a rotation mechanism. The revolution mechanism 420 is rotatably connected to the support mechanism 410, the rotation mechanism rotates around the revolution mechanism 420, the rotation mechanism is connected to the rotation drive mechanism 520 through the rotation transmission mechanism 430, and the revolution mechanism 420 is connected to the revolution drive mechanism 530 through the revolution transmission mechanism 440.

[0038] A revolution mechanism 420 and a rotation mechanism are set on the support mechanism 410 of the workpiece displacement module 400. The rotation mechanism and the revolution mechanism 420 can be driven to move respectively. The movements of the two do not interfere with each other, which is beneficial to improving the coating preparation effect of the workpiece 900.

[0039] like Figure 1 As shown, optionally, the linear motion module 500 includes a linear motion base 510, which is movable relative to the loading chamber 200. The rotation drive mechanism 520 and the revolution drive mechanism 530 are both mounted on the linear motion base 510.

[0040] By mounting both the rotation drive mechanism 520 and the revolution drive mechanism 530 on the linear moving base 510, the rotation drive mechanism 520 and the revolution drive mechanism 530 can move together with the workpiece displacement module 400, thereby improving the reliability of transmission from the rotation drive mechanism 520 to the rotation mechanism and the reliability of transmission from the revolution drive mechanism 440 to the revolution mechanism 420.

[0041] The linear moving base 510 can be a vehicle, and the vehicle moves to achieve the movement of the linear moving base 510. Alternatively, the linear moving base 510 can be driven by a component that outputs linear movement, such as a linear motor, electric push rod, push rod pump, hydraulic cylinder, or pneumatic cylinder.

[0042] Of course, in another implementation, the rotation drive mechanism 520 and the revolution drive mechanism 530 may not be mounted on the linear moving base 510. Specifically, a spline shaft and spline sleeve or other transmission components that can slide relative to each other can be provided in the revolution transmission mechanism 440 and the rotation transmission mechanism 430, thereby enabling the workpiece displacement module 400 to move but always maintain the transmission connection with the revolution transmission mechanism 440 and the rotation transmission mechanism 430.

[0043] Figure 3 This is a cross-sectional view of the second and fourth sub-drive shafts in the coating preparation apparatus provided in an embodiment of the present invention. Figure 2 and Figure 3 As shown, optionally, the revolution transmission mechanism 440 includes a first revolution transmission shaft 441, which is connected to the revolution drive mechanism 530. The first revolution transmission shaft 441 is connected to the second revolution transmission shaft 442 through the first bevel gear set 443. The second revolution transmission shaft 442 is connected to the revolution mechanism 420.

[0044] The first revolution drive shaft 441 is connected to the second revolution drive shaft 442 through the first bevel gear set 443. This can convert the horizontal rotation input to the revolution drive mechanism 440 into the vertical rotation input to the revolution mechanism 420, thereby facilitating the revolution of the workpiece 900 by the workpiece displacement module 400.

[0045] Specifically, in this embodiment, the first revolution drive shaft 441 includes a first sub-drive shaft 444 and a second sub-drive shaft 445. A portion of the first sub-drive shaft 444 is disposed within the support mechanism 410. Specifically, the first sub-drive shaft 444 can be mounted in the sleeve of the support mechanism 410 via rolling bearings fitted at both ends. The second sub-drive shaft 445 can be fixedly connected to the first sub-drive shaft 444 via a flange connection. The second sub-drive shaft 445 enables transmission from the revolution drive mechanism 530 to the first sub-drive shaft 444. Specifically, a first mounting support 531 is provided on the linear moving base 510 to mount the revolution drive mechanism 530. The revolution drive mechanism 530 may include, for example, a revolution motor 532. The power output end of the revolution motor 532 is provided with a revolution driving gear 533, which meshes with a revolution driven gear 448. The revolution driven gear 448 is fixedly disposed at one end of the second sub-drive shaft 445. The rotation speed of the 532 orbital motor can be steplessly adjusted.

[0046] The second revolution drive shaft 442 is fixedly connected to the revolution mechanism 420, and the rotational speed range of the second revolution drive shaft 442 is 0 rpm to 200 rpm. The rotational speed of the second revolution drive shaft 442 can be steplessly adjusted.

[0047] like Figure 2 and Figure 3 As shown, optionally, both the first revolution drive shaft 441 and the second revolution drive shaft 442 are hollow shafts; the rotation drive mechanism 430 includes a first rotation drive shaft 431, which is connected to the rotation drive mechanism 520. The first rotation drive shaft 431 is connected to the second rotation drive shaft 432 through a second bevel gear set 433. The second rotation drive shaft 432 is connected to the rotation mechanism; the first rotation drive shaft 431 is inserted into the first revolution drive shaft 441, and the second rotation drive shaft 432 is inserted into the second revolution drive shaft 442.

[0048] The first revolution drive shaft 441 is connected to the second revolution drive shaft 442 via the first bevel gear set 443. This converts the horizontal rotation input to the revolution drive mechanism 440 into the vertical rotation input to the revolution mechanism 420, thus facilitating the revolution of the workpiece 900 driven by the workpiece positioning module 400. Furthermore, by inserting the first self-rotation drive shaft 431 inside the first revolution drive shaft 441 and the second self-rotation drive shaft 432 inside the second revolution drive shaft 442, the overall volume of the self-rotation drive mechanism 430 and the revolution drive mechanism 440 can be reduced, which also facilitates sealing of both.

[0049] Specifically, the first self-rotating drive shaft 431 may include a third sub-drive shaft 434 and a fourth sub-drive shaft 435. The third sub-drive shaft 434 is partially disposed within the support mechanism 410. Specifically, the third sub-drive shaft 434 is axially fixed and circumferentially driven within the first sub-drive shaft 444 via rolling bearings at both ends, meaning the third sub-drive shaft 434 and the first sub-drive shaft 444 are concentrically arranged. The fourth sub-drive shaft 435 is mounted within the second sub-drive shaft 445. Specifically, the fourth sub-drive shaft 435 is axially fixed and circumferentially driven with the second sub-drive shaft 445 via rolling bearings near its two ends, meaning the fourth sub-drive shaft 435 and the second sub-drive shaft 445 are concentrically arranged. The third sub-drive shaft 434 and the fourth sub-drive shaft 435 are circumferentially fixedly connected. Specifically, this can be achieved by providing a groove with parallel sidewalls and radially penetrating at one end of one sub-drive shaft 434, and a protrusion with parallel sidewalls at the other end of the other sub-drive shaft 435. The groove and the protrusion cooperate to achieve the circumferential transmission connection.

[0050] The fourth sub-drive shaft 435 enables the transmission connection from the self-rotation drive mechanism 520 to the second sub-drive shaft 445. Specifically, a second mounting bracket 521 is provided on the linear moving base 510 to mount the self-rotation drive mechanism 520. The self-rotation drive mechanism 520 may include, for example, a self-rotation motor 522. The power output end of the self-rotation motor 522 is provided with a self-rotation driving gear 523, which meshes with a self-rotation driven gear 436. The self-rotation driven gear 436 is fixedly mounted on one end of the fourth sub-drive shaft 435. The speed of the self-rotation motor 522 can be steplessly adjusted.

[0051] In this embodiment, the included angle between the gear axes of the first bevel gear set 443 and the second bevel gear set 433 can be a right angle. Of course, in other implementations, the included angle between the gear axes can be an acute angle.

[0052] like Figure 1 and Figure 3 As shown, optionally, the coating preparation apparatus further includes a cooling device, which includes a cooling slip ring 600. A cooling channel is provided in the first revolution drive shaft 441. The cooling channel has a channel inlet 446 and a channel outlet 447. The channel inlet 446 and the channel outlet 447 are respectively connected to the interior of the cooling slip ring 600. The cooling slip ring 600 is configured to connect the cooling input part and the cooling output part.

[0053] By setting a cooling slip ring 600 to connect the cooling channel in the first revolution drive shaft 441, the temperature of the first revolution drive shaft 441 during operation can be reduced, thereby reducing the deformation caused by high temperature during coating preparation.

[0054] Specifically, the second sub-drive shaft 445 of the first revolution drive shaft 441 can be a multi-layered hollow structure. For example, the second sub-drive shaft 445 can include concentrically arranged multi-layered cylindrical structures, such as three layers. The two ends of the three-layered cylindrical structures are connected to an annular structure to form the overall shape of the second sub-drive shaft 445. The outermost cylindrical structure is provided with a flow channel inlet 446 and a flow channel outlet 447. The flow channel outlet 447 and the flow channel inlet 446 are not connected between the two outermost cylindrical structures, but they are connected to the annular flow channel formed by the two innermost cylindrical structures. Therefore, a cooling medium such as cooling water can fully absorb the heat of the first revolution drive shaft 441 to reduce the temperature of the first revolution drive shaft 441.

[0055] The cooling input section and cooling output section can be coolant input pipe and coolant output pipe (not shown), and the coolant input pipe can be connected to the factory's clean water supply system.

[0056] like Figure 2 As shown, optionally, the rotation mechanism includes a rotation shaft 450, which is rotatably connected to the revolution mechanism 420. A second rotation transmission shaft 432 is mounted in the revolution mechanism 420, and the rotation shaft 450 and the second rotation transmission shaft 432 are connected by gear transmission.

[0057] By setting a second self-rotating drive shaft 432 to be installed in the revolution mechanism 420, the transmission can be achieved by using a gear set that meshes between the self-rotating drive shaft and the self-rotating shaft 450. This enables one self-rotating drive shaft to drive multiple self-rotating shafts 450 to rotate synchronously, thereby ensuring the synchronicity of the rotation of each self-rotating shaft 450 and improving the uniformity of the workpiece 900 machining.

[0058] Specifically, the rotation shaft 450 is connected to the revolution mechanism 420 via rolling bearings, and each rotation shaft 450 is fixedly connected to a planetary gear. The planetary gears mesh with the sun gear fixedly connected to the second self-transmission shaft, and the rotation of the sun gear drives the rotation of each planetary gear. The rotation speed range of the rotation shaft 450 is 0 rpm to 500 rpm. The rotation speed of the rotation shaft 450 can be steplessly adjusted.

[0059] like Figure 1 As shown, optionally, the first revolution drive shaft 441 is inserted into the outer sealing element 710 and rotatably sealed to the outer sealing element 710. The outer sealing element 710 is fixedly installed on the linear moving base 510. The first rotation drive shaft 431 is inserted into the inner sealing element 720 and rotatably sealed to the inner sealing element 720. The inner sealing element 720 is fixedly installed on the linear moving base 510. The outer sealing element 710 and the loading chamber 200 are connected by a sealing telescopic cylinder.

[0060] By setting an external sealing element 710 to seal the first revolution drive shaft 441, and connecting the external sealing element 710 to the loading chamber 200 through a sealing telescopic sleeve, the first revolution drive shaft 441 can be sealed. By setting an internal sealing element 720 to seal the first rotation drive shaft 431, the first rotation drive shaft can be sealed, preventing air leakage from the loading chamber 200 at the first revolution drive shaft 441 and the first rotation drive shaft 431.

[0061] Specifically, in this embodiment, the outer sealing element 710 can be installed on the first mounting support 531 to seal the first revolution drive shaft 441. The inner sealing element 720 can be installed on the second mounting support 521 to seal the first rotation drive shaft 431. The telescopic sealing cylinder 730 does not necessarily mean that the component is cylindrical; for example, it can also be tubular. Specifically, in this embodiment, the telescopic sealing cylinder 730 can be a bellows, with one end connected to the outer sealing element 710 and the other end connected to the loading chamber 200.

[0062] like Figure 1 As shown, optionally, the main vacuum chamber 100 is provided with a vacuum chamber guide rail 120, and the loading chamber is provided with a loading chamber guide rail 210. The vacuum chamber guide rail 120 and the loading chamber guide rail 210 are arranged collinearly and spaced apart. The spacing between the vacuum chamber guide rail 120 and the loading chamber guide rail 210 is configured to allow the valve body of the isolation valve 300 to be inserted and to seal and isolate the main vacuum chamber 100 and the loading chamber 200.

[0063] By arranging the loading cavity guide rail 210 and the vacuum cavity guide rail 120 collinearly and spaced apart, it is beneficial to ensure the straightness of the workpiece displacement module 400's movement, thereby reducing the movement resistance of the workpiece displacement module 400. Furthermore, by configuring the vacuum cavity guide rail 120 and the loading cavity guide rail 210 to allow the insertion of the isolation valve 300, it is ensured that during spraying in the main vacuum chamber 100, only the loading cavity 200 connected to the workpiece displacement module 400 in the main vacuum chamber 100 remains connected to the main vacuum chamber 100, while the other loading cavities 200 are closed.

[0064] Specifically, in this embodiment, since there are two loading chambers 200, and the loading chambers 200 are located on opposite sides of the main vacuum chamber 100, the loading chamber guide rails 210 of both loading chambers 200 are collinear with the vacuum chamber guide rails 120. Specifically, loading chamber guide rails 210 are provided on both side walls of the loading chambers 200, and vacuum chamber guide rails 120 are provided on both side walls of the main vacuum chamber 100.

[0065] Figure 4 This is a front view of the operation of the loading cavity guide rail and vacuum cavity guide rail of the support mechanism in the coating preparation device provided in this embodiment of the utility model. Figure 5A side view of the operation of the loading cavity guide rail and vacuum cavity guide rail of the support mechanism in the coating preparation apparatus provided in this embodiment of the utility model. Figure 4 and Figure 5 As shown, optionally, the support mechanism 410 is provided with a support roller 411 and a limiting roller 412. The support roller 411 is in rolling friction connection with the upper surface of the vacuum chamber guide rail 120 and / or the loading chamber guide rail 210; the limiting roller 412 is in rolling friction connection with the side of the vacuum chamber guide rail 120 and the loading chamber guide rail 210; on the support mechanism 410, the distance between the two support rollers 411 located at the end of the linear movement module 500 in the driving direction is smaller than the distance between the vacuum chamber guide rail 120 and the loading chamber guide rail 210.

[0066] By setting the limiting rollers 412, the movement of the support mechanism 410 on the vacuum chamber guide rail 120 and the loading chamber guide rail 210 can be horizontally limited. Furthermore, setting the spacing of the support rollers 411 on the support mechanism 410 to be smaller than the spacing between the vacuum chamber guide rail 120 and the loading chamber guide rail 210 facilitates a stable transition between the multiple rollers on the support mechanism 410 and the different guide rails.

[0067] Specifically, in this embodiment, four support rollers 411 are provided on one side of the support mechanism 410, while... Figure 4 In the middle, the support structure 410 along Figure 4 The linear motion module 500 drives the support mechanism 410 in the left-right direction as shown in the figure. Therefore, four support rollers 411 are provided on one side of the support mechanism 410 from left to right. The two support rollers 411 located at the end of the linear motion module 500 in the driving direction can be the first and second support rollers 411 from the left in the figure, or the first and second support rollers 411 from the right in the figure, with a spacing of 'a' between the two support rollers 411. The spacing between the vacuum chamber guide rail 120 and the loading chamber guide rail 210 is 'b', where 'a' is greater than 'b'. Of course, in other implementations, the number of support rollers 411 provided on one side of the support mechanism 410 can also be greater than four.

[0068] The vacuum chamber guide rail 120 and the loading chamber guide rail 210 can be made of channel steel or a U-shaped profile that opens horizontally. The support rollers 411 are mounted on the legs of the channel steel, while the limiting rollers 412 can be connected to the waist of the channel steel through rolling friction. Specifically, in the support mechanism 410, the number of limiting rollers 412 on each side is at least two.

[0069] Although the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

[0070] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0071] In the above embodiments, descriptions of directions such as "up" and "down" are based on the accompanying drawings.

[0072] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention.

[0073] Therefore, this invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A coating preparation apparatus, characterized in that, The system includes a main vacuum chamber (100) and multiple loading chambers (200), each of which is arranged around the main vacuum chamber (100). Each loading chamber (200) is connected to the main vacuum chamber (100) by an isolation valve (300). Each loading chamber (200) is also provided with a workpiece displacement module (400), which is used to install a workpiece (900) and change the position and orientation of the workpiece (900). Each loading chamber (200) is also connected to a linear motion module (500), which is connected to the workpiece displacement module (400) and drives the workpiece displacement module (400) to switch positions between the loading chamber (200) and the main vacuum chamber (100).

2. The coating preparation apparatus according to claim 1, characterized in that, The workpiece displacement module (400) includes a support mechanism (410), a revolution mechanism (420), and a rotation mechanism. The revolution mechanism (420) is rotatably connected to the support mechanism (410), and the rotation mechanism rotates on the revolution mechanism (420). The rotation mechanism is connected to the rotation drive mechanism (520) through a rotation transmission mechanism (430), and the revolution mechanism (420) is connected to the revolution drive mechanism (530) through a revolution transmission mechanism (440).

3. The coating preparation apparatus according to claim 2, characterized in that, The linear motion module (500) includes a linear motion base (510) that is movable relative to the loading chamber (200), and the self-rotation drive mechanism (520) and the revolution drive mechanism (530) are both mounted on the linear motion base (510).

4. The coating preparation apparatus according to claim 2, characterized in that, The revolution transmission mechanism (440) includes a first revolution transmission shaft (441), which is connected to the revolution drive mechanism (530). The first revolution transmission shaft (441) is connected to a second revolution transmission shaft (442) via a first bevel gear set (443), and the second revolution transmission shaft (442) is connected to the revolution mechanism (420).

5. The coating preparation apparatus according to claim 4, characterized in that, Both the first revolution drive shaft (441) and the second revolution drive shaft (442) are hollow shafts; the rotation drive mechanism (430) includes a first rotation drive shaft (431), which is connected to the rotation drive mechanism (520). The first rotation drive shaft (431) is connected to the second rotation drive shaft (432) through a second bevel gear set (433), and the second rotation drive shaft (432) is connected to the rotation mechanism; the first rotation drive shaft (431) is inserted into the first revolution drive shaft (441), and the second rotation drive shaft (432) is inserted into the second revolution drive shaft (442).

6. The coating preparation apparatus according to claim 5, characterized in that, The coating preparation apparatus further includes a cooling device, which includes a cooling slip ring (600). A cooling channel is provided in the first revolution drive shaft (441). The cooling channel has a channel inlet (446) and a channel outlet (447). The channel inlet (446) and the channel outlet (447) are respectively connected to the interior of the cooling slip ring (600). The cooling slip ring (600) is configured to connect the cooling input part and the cooling output part.

7. The coating preparation apparatus according to claim 5, characterized in that, The rotation mechanism includes a rotation shaft (450), which is rotatably connected to the revolution mechanism (420). The second rotation transmission shaft (432) is installed in the revolution mechanism (420). The rotation shaft (450) and the second rotation transmission shaft (432) are connected by gear transmission.

8. The coating preparation apparatus according to claim 5, characterized in that, The first revolution drive shaft (441) is inserted into the outer sealing element (710) and rotates and seals with the outer sealing element (710). The outer sealing element (710) is fixedly installed on the linear moving base (510). The first rotation drive shaft (431) is inserted into the inner sealing element (720) and rotates and seals with the inner sealing element (720). The inner sealing element (720) is fixedly installed on the linear moving base (510). The outer sealing element (710) is connected to the loading chamber (200) through a sealing telescopic cylinder.

9. The coating preparation apparatus according to any one of claims 2-8, characterized in that, The main vacuum chamber (100) is provided with a vacuum chamber guide rail (120), and the loading chamber is provided with a loading chamber guide rail (210). The vacuum chamber guide rail (120) and the loading chamber guide rail (210) are arranged collinearly and spaced apart. The spacing between the vacuum chamber guide rail (120) and the loading chamber guide rail (210) is configured to allow the valve body of the isolation valve (300) to be inserted and to seal and isolate the main vacuum chamber (100) and the loading chamber (200).

10. The coating preparation apparatus according to claim 9, characterized in that, The support mechanism (410) is provided with a support roller (411) and a limiting roller (412). The support roller (411) is in rolling friction connection with the upper surface of the vacuum cavity guide rail (120) and / or the loading cavity guide rail (210). The limiting roller (412) is in rolling friction connection with the side of the vacuum cavity guide rail (120) and the loading cavity guide rail (210). On the support mechanism (410), the distance between the two support rollers (411) located at the end of the linear moving module (500) in the driving direction is smaller than the distance between the vacuum cavity guide rail (120) and the loading cavity guide rail (210).

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