A chargeable rotary lifting mechanism

Abstract

The utility model provides a kind of live rotary lifting mechanism, it is related to the technical field of semiconductor equipment.It includes vacuum outer cavity, process upper cavity being set in vacuum outer cavity, it further includes floating platform, rotary support platform, hollow magnetic fluid, magnetic fluid rotating core rod;Rotary support platform is provided with heater to be used to heat substrate;Magnetic fluid rotating core rod is connected with rotating system;Hollow magnetic fluid is connected with lifting system, the floating platform is connected in process upper cavity below to form process inner cavity;Magnetic fluid rotating core rod bottom is provided with feedthrough structure, the feedthrough structure bottom is connected with rotating core shaft, rotating core shaft is rotatably arranged on the conductive slip ring connected with external power supply, and the feedthrough structure is connected with the heater in the magnetic fluid rotating core rod inside to be provided with electric connector to connect, the utility model discloses a kind of live rotary lifting mechanism.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to an electrically energized rotary lifting mechanism. Background Technology

[0002] In the field of vacuum coating lifting and transport, vacuum bellows are generally used to achieve sealed lifting and transport of substrates, etc. In actual use, heating of the substrate is usually involved. In order to achieve better uniformity during the process, the substrate usually needs to be rotated. Electric heaters usually cannot be attached to the back of the substrate and rotate together to heat it. In this case, the substrate is usually heated by the heat radiation of the fixed heater, which leads to low heating efficiency and affects the uniformity and efficiency of the substrate process. Utility Model Content

[0003] This utility model discloses an electrically powered rotary lifting mechanism, which aims to solve the problems mentioned above.

[0004] The present invention adopts the following solution:

[0005] An electrically energized rotary lifting mechanism includes a vacuum outer cavity, a process upper cavity disposed within the vacuum outer cavity, a floating stage adapted to be connected below the process upper cavity, a rotary support stage for supporting a substrate, a hollow magnetic fluid connected to the floating stage, and a magnetic fluid rotating mandrel rotatably disposed within the hollow magnetic fluid and connected to the rotary support stage. A heater is disposed on the rotary support stage for heating the substrate. The magnetic fluid rotating mandrel is connected to a rotation system to drive the rotary support stage to rotate. The hollow magnetic fluid is connected to a lifting system to drive the... The hollow magnetic fluid, the magnetic fluid rotating mandrel, and the floating platform are raised and lowered synchronously. When the floating platform rises to a preset height, it is suitable for sealing and connecting below the upper cavity of the process to form an inner cavity of the process. The bottom of the magnetic fluid rotating mandrel is provided with a feedthrough structure, and the bottom of the feedthrough structure is connected to a rotating mandrel. The rotating mandrel is rotatably mounted on a conductive slip ring connected to an external power source. The magnetic fluid rotating mandrel is provided with an electrical connector to connect the heater and the feedthrough structure, and is electrically connected to the external power source through the feedthrough structure and the rotating mandrel, so that the rotating support platform can rotate under power.

[0006] Furthermore, an inner cavity sealing ring is provided at the connection between the floating platform and the upper process cavity, so as to seal with the lower part of the upper process cavity when the floating platform rises to a preset height to form the inner process cavity.

[0007] Furthermore, an outer support rod and an outer rod connecting plate are provided between the floating platform and the hollow magnetic fluid. The hollow magnetic fluid is connected to the outer rod connecting plate through the outer support rod. The outer rod connecting plate is disposed between the floating platform and the outer support rod, and a telescopic spring is provided between the outer rod connecting plate and the floating platform to provide cushioning.

[0008] Furthermore, a rotating sliding sleeve is provided between the outer support rod and the rotating support platform.

[0009] Furthermore, an outer rod sleeve is provided on the vacuum outer cavity to support the outer support rod.

[0010] Furthermore, a vacuum bellows is provided between the hollow magnetic fluid and the bottom of the vacuum outer cavity, and a bellows sealing ring is provided at the connection between the vacuum bellows and the vacuum outer cavity and the hollow magnetic fluid, respectively.

[0011] Furthermore, a mounting groove is formed on the side of the floating platform facing the upper cavity of the process, and a bearing is provided in the mounting groove. The bearing is used to provide rotation and support for the rotating support platform. A mounting hole for the rotating support platform is provided in the mounting groove, and a shaft seal is provided in the mounting hole.

[0012] Furthermore, the feedthrough structure is connected to the rotating mandrel via a connecting sleeve, and the feedthrough structure is sealed to the magnetohydrodynamic rotating mandrel via a feedthrough sealing ring.

[0013] Furthermore, the rotation system includes a rotation drive motor, which is connected to the magnetohydrodynamic rotating mandrel via a first pulley and a first synchronous belt to drive the magnetohydrodynamic rotating mandrel to rotate.

[0014] Furthermore, the lifting system includes a lifting drive motor, a second pulley connected to the lifting drive motor, and a second synchronous belt. The second synchronous belt connects to a lifting module equipped with a pulley, and the lifting module is connected to the hollow magnetic fluid via a fixing frame.

[0015] Beneficial effects: This solution utilizes a lifting system, a rotating system, hollow magnetic fluid, conductive slip rings, springs, vacuum bellows, shaft seals, and sealing rings, along with a rational structural design. This enables the entire system to achieve both internal and external cavity sealing while introducing the function of electrically charged rotational discharge. This makes it possible for the substrate to directly contact the heater, thereby improving the heating efficiency of the substrate and solving the problem of electrically charged rotational discharge while satisfying the need for internal and external cavity sealing. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of an electrically powered rotary lifting mechanism according to an embodiment of the present invention; Reference numerals: 1. Vacuum outer cavity; 2. Process upper cavity; 3. Substrate; 4. Heater; 5. Rotary support platform; 6. Inner cavity sealing ring; 7. Bearing; 8. Shaft seal; 9. Floating platform; 10. Telescopic spring; 11. Outer rod connecting plate; 12. Rotary sliding sleeve; 13. Outer rod sliding sleeve; 14. Outer support rod; 15. Bellows sealing ring; 16. Vacuum bellows; 17. Magnetofluid rotating mandrel; 18. Hollow magnetofluid; 19. Rotary drive motor; 20. First pulley; 21. First synchronous belt; 22. Lifting drive motor; 23. Second pulley; 24. Second synchronous belt; 25. Fixing frame; 26. Lifting module; 27. Feedthrough structure; 28. Feedthrough sealing ring; 29. ​​Connecting sleeve; 30. Rotating spindle; 31. Conductive slip ring; 32. Electrical connector. Detailed Implementation

[0017] Combination Figure 1 This embodiment provides an electrically energized rotary lifting mechanism, including a vacuum outer cavity 1, a process upper cavity 2 disposed within the vacuum outer cavity 1, a floating stage 9 adapted to be connected below the process upper cavity 2, a rotary support stage 5 for supporting a substrate 3, a hollow magnetic fluid 18 connected to the floating stage 9, and a magnetic fluid rotating mandrel 17 rotatably disposed within the hollow magnetic fluid 18 and connected to the rotary support stage 5; a heater 4 is disposed on the rotary support stage 5 for heating the substrate 3; wherein, the magnetic fluid rotating mandrel 17 is connected to a rotation system to drive the rotary support stage 5 to rotate; the hollow magnetic fluid 18 is connected to a lifting system to drive... The hollow magnetic fluid 18, the magnetic fluid rotating mandrel 17, and the floating platform 9 rise and fall synchronously. When the floating platform 9 rises to a preset height, it is suitable for sealing and connecting below the upper process cavity 2 to form the inner process cavity. The bottom of the magnetic fluid rotating mandrel 17 is provided with a feedthrough structure 27, and the bottom of the feedthrough structure 27 is connected to a rotating spindle 30. The rotating spindle 30 is rotatably mounted on a conductive slip ring 31 connected to an external power source. An electrical connector 32 is provided inside the magnetic fluid rotating mandrel 17 to connect the heater 4 and the feedthrough structure 27, and is electrically connected to the external power source through the feedthrough structure 27 and the rotating spindle, so that the rotating support platform 5 can rotate under power. Furthermore, an inner cavity sealing ring 6 is provided at the connection between the floating platform 9 and the upper process cavity 2 to seal below the upper process cavity 2 when the floating platform 9 rises to a preset height to form the inner process cavity.

[0018] In this embodiment, the lifting system can drive the floating platform 9 and the magnetic fluid rotating mandrel 17 to rise and fall synchronously. When rising, it cooperates with the upper process cavity 2 to form the inner process cavity. The rotating support platform 5 is located in the inner process cavity to carry out the reaction. It can also rotate while rising and falling, thereby improving the reaction uniformity of the substrate.

[0019] In this embodiment, an outer support rod 14 and an outer rod connecting plate 11 are provided between the floating platform 9 and the hollow magnetic fluid 18. The hollow magnetic fluid 18 is connected to the outer rod connecting plate 11 via the outer support rod 14. The outer rod connecting plate 11 is positioned between the floating platform 9 and the outer support rod 14, and a telescopic spring 10 is provided between the outer rod connecting plate 11 and the floating platform 9 to provide cushioning. Additionally, a rotating sleeve 12 is provided between the outer support rod 14 and the rotating support platform 5 to improve the rotational stability of the rotating support platform 5. An outer rod sleeve 13 is provided on the vacuum outer cavity 1 to support the outer support rod 14, enabling the outer support rod 14 to move up and down stably.

[0020] It should be noted that the process cavity 2, floating stage 9, rotating support stage 5, and rotating sliding sleeve 12 are all located within the process outer cavity. A vacuum bellows 16 is provided between the hollow magnetic fluid 18 and the bottom of the vacuum outer cavity 1, and bellows sealing rings 15 are respectively provided at the connection points of the vacuum bellows 16 with the vacuum outer cavity 1 and the hollow magnetic fluid 18. Through the action of the vacuum bellows 16 and the outer rod sliding sleeve 13, a seal can be achieved at the through hole of the vacuum outer cavity 1. The hollow magnetic fluid 18 is fixed to the lifting system by the fixed frame 25. The lifting system drives the hollow magnetic fluid 18 to rise. At this time, the outer support rod 14 fixed to the magnetic fluid shell slides stably up and down by the outer rod sleeve 13. The vacuum bellows 16 realizes dynamic extension and retraction. The outer support rod 14 is connected to the outer rod connecting plate 11. The outer rod connecting plate 11 is connected to the floating platform 9 by the telescopic spring 10. The outer support rod 14 drives all its connecting parts to rise and fall at the same time. When it reaches the designated position, the telescopic spring 10 provides buffer. At this time, the static seal between the floating platform 9 and the end face of the process cavity 2 is completed by the inner cavity sealing ring 6.

[0021] In this embodiment, the floating platform 9 has a mounting groove on the side facing the process cavity, and a bearing 7 is installed in the mounting groove. The bearing 7 is used to provide rotation and support for the rotating support platform 5. The mounting groove has a mounting hole for the rotating support platform 5, and a shaft seal 8 is installed in the mounting hole. The magnetic fluid rotating mandrel 17 is driven to rotate by the rotating system. The rotating support platform 5 is connected to the magnetic fluid rotating mandrel 17 and its rotation is stably restricted by the rotating sleeve 12 and the bearing 7. The outer ring of the shaft seal 8 is fixed to the floating platform 9 to form an outer ring static seal, and the inner ring forms a rotational dynamic seal with the rotating support platform 5. At this time, the entire inner cavity is completely sealed. Since the outer support rod 14 is fixed to the hollow magnetic fluid 18 shell, the magnetic fluid mandrel is not subjected to force when the seal is lifted and raised. Although the rotating support platform 5 is fixed to the magnetic fluid rotating mandrel 17, all the force is borne by the bearing 7. The magnetic fluid rotating mandrel 17 only provides rotational output, which better protects the magnetic fluid.

[0022] In this embodiment, the bottom of the magnetohydrodynamic rotating mandrel 17 is sealed by the feedthrough structure 27, and a feedthrough sealing ring 28 is provided between the feedthrough structure 27 and the magnetohydrodynamic rotating mandrel 17 for sealing connection. The feedthrough structure 27 is connected to the rotating spindle 30 through a connecting sleeve 29. The electrical connector 32 can be configured as a cable conductor for connecting the feedthrough structure 27 to the heater 4 on the rotating support platform 5. The heater 4 is fixed to the rotating support platform 5 and rotates with it, providing heating for the upper substrate 3. The electrical connector 32 passes through the hollow rotating support platform 5 and the hollow magnetohydrodynamic rotating mandrel 17, and is connected to the feedthrough structure 27. The lead wire of the feedthrough structure 27 is connected to the wire led out from the rotating spindle 30 provided on the conductive slip ring 31. The feedthrough structure 27 rotates together with the rotating spindle 30 through the connecting sleeve 29. All connected rotating parts are relatively stationary and will not entangle with each other. Finally, a static cable is led out through the conductive slip ring 31 and connected to an external power source.

[0023] In this embodiment, the rotation system includes a rotation drive motor 19, which is connected to the magnetohydrodynamic rotating mandrel 17 via a first pulley 20 and a first synchronous belt 21 to drive the magnetohydrodynamic rotating mandrel 17 to rotate. The lifting system includes a lifting drive motor 22, a second pulley 23 connected to the lifting drive motor 22, and a second synchronous belt 24. The second synchronous belt 24 connects to a lifting module 26 equipped with pulleys. The lifting module 26 is connected to the hollow magnetohydrodynamic fluid 18 via a fixing frame 25. Here, the lifting module 26 can be a ball screw and nut mechanism. With this configuration, when the lifting module 26 lifts or lowers, it synchronously drives the lifting system to lift or lower together.

[0024] This embodiment achieves sealing of the inner and outer cavities while introducing the function of electrically charged rotational discharge, making direct contact heating of the substrate 3 possible and improving the heating efficiency of the substrate 3.

[0025] It should be understood that the above are only preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0026] The accompanying drawings used in the above description of the embodiments only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

Claims

1. An electrically energized rotary lifting mechanism, comprising a vacuum outer cavity and a process upper cavity disposed within the vacuum outer cavity, characterized in that, It also includes a floating stage adapted to be connected below the upper cavity of the process, a rotating support stage for supporting the substrate, a hollow magnetic fluid connected to the floating stage, and a magnetic fluid rotating mandrel rotatably disposed within the hollow magnetic fluid and connected to the rotating support stage; a heater is provided on the rotating support stage for heating the substrate; wherein, the magnetic fluid rotating mandrel is connected to a rotation system to drive the rotating support stage to rotate; the hollow magnetic fluid is connected to a lifting system to drive the hollow magnetic fluid, the magnetic fluid rotating mandrel, and the floating stage to rise and fall synchronously, and when the floating stage rises to a preset height, it is adapted to be sealed and connected below the upper cavity of the process to form an inner cavity of the process; The bottom of the magnetohydrodynamic rotating mandrel is provided with a feedthrough structure, and the bottom of the feedthrough structure is connected to a rotating mandrel. The rotating mandrel is rotatably mounted on a conductive slip ring connected to an external power source. An electrical connector is provided inside the magnetohydrodynamic rotating mandrel to connect the heater and the feedthrough structure, and is electrically connected to the external power source through the feedthrough structure and the rotating mandrel, so that the rotating support platform can rotate under power.

2. The electrically energized rotary lifting mechanism according to claim 1, characterized in that, The connection between the floating platform and the upper process cavity is provided with an inner cavity sealing ring, so that when the floating platform rises to a preset height, it seals with the lower part of the upper process cavity to form the inner process cavity.

3. The electrically energized rotary lifting mechanism according to claim 1, characterized in that, An outer support rod and an outer rod connecting plate are provided between the floating platform and the hollow magnetic fluid. The hollow magnetic fluid is connected to the outer rod connecting plate through the outer support rod. The outer rod connecting plate is located between the floating platform and the outer support rod, and a telescopic spring is provided between the outer rod connecting plate and the floating platform to provide cushioning.

4. The electrically energized rotary lifting mechanism according to claim 3, characterized in that, A rotating sliding sleeve is provided between the outer support rod and the rotating support platform.

5. The electrically energized rotary lifting mechanism according to claim 3, characterized in that, The vacuum outer cavity is provided with an outer rod sleeve to support the outer support rod.

6. The electrically energized rotary lifting mechanism according to claim 3, characterized in that, A vacuum bellows is provided between the hollow magnetic fluid and the bottom of the vacuum outer cavity, and a bellows sealing ring is provided at the connection between the vacuum bellows and the vacuum outer cavity and the hollow magnetic fluid.

7. The electrically energized rotary lifting mechanism according to claim 3, characterized in that, The floating platform has a mounting groove on the side facing the upper cavity of the process, and a bearing is provided in the mounting groove. The bearing is used to provide rotation and support for the rotating support platform. The mounting groove has a mounting hole for the rotating support platform, and a shaft seal is provided in the mounting hole.

8. The electrically energized rotary lifting mechanism according to claim 3, characterized in that, The feedthrough structure is connected to the rotating mandrel via a connecting sleeve, and the feedthrough structure and the magnetohydrodynamic rotating mandrel are sealed together via a feedthrough sealing ring.

9. The electrically energized rotary lifting mechanism according to claim 1, characterized in that, The rotation system includes a rotation drive motor, which is connected to the magnetohydrodynamic rotating mandrel via a first pulley and a first synchronous belt to drive the magnetohydrodynamic rotating mandrel to rotate.

10. The electrically energized rotary lifting mechanism according to claim 1, characterized in that, The lifting system includes a lifting drive motor, a second pulley connected to the lifting drive motor, and a second synchronous belt. The second synchronous belt is connected to a lifting module equipped with a pulley. The lifting module is connected to the hollow magnetic fluid via a fixing frame.

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