Winding type double-sided coating apparatus

Abstract

The application provides a winding type double-sided coating equipment, which comprises an unwinding roller and a winding roller, a base film transmission path is formed between the unwinding roller and the winding roller, and an auxiliary film threading mechanism is arranged on the winding type double-sided coating equipment, wherein the auxiliary film threading mechanism comprises a film threading driving element, a plurality of film threading wheels and a film threading traction assembly, the film threading traction assembly is arranged around the plurality of film threading wheels and forms an auxiliary film threading path, the film threading driving element is connected with the film threading wheels and drives the film threading wheels to rotate, the film threading wheels drive the film threading traction assembly to move along the auxiliary film threading path, and the film threading traction assembly pulls the base film to the base film transmission path when moving. The winding type double-sided coating equipment provided by the application pulls the base film to the base film transmission path through the auxiliary film threading mechanism, so that manual film threading is replaced, the film threading efficiency and the film threading quality are improved, and the production efficiency is further improved.

Description

Technical Field

[0001] This application relates to the field of magnetron sputtering technology, and more particularly to a roll-to-roll double-sided coating equipment. Background Technology

[0002] Magnetron sputtering machines are machines that use physical vapor deposition to manufacture composite films, which are widely used in the semiconductor industry.

[0003] Before coating, the base film needs to be threaded through the unwinding roller, passing through various guide rollers and the main drum before being wound onto the take-up roller. Currently, in order to save costs, manual threading is commonly used. However, for large-diameter and complex equipment, blind spots lead to poor threading quality and difficulty in correction. It often takes several hours to thread a single machine, which greatly reduces production efficiency. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a roll-to-roll double-sided coating equipment, which is beneficial to improving coating efficiency and coating quality, thereby improving production efficiency.

[0005] To achieve the above objectives, this application provides a roll-to-roll double-sided coating apparatus, the roll-to-roll double-sided coating apparatus comprising:

[0006] An unwinding roller and a take-up roller, wherein a base film transport path is formed between the unwinding roller and the take-up roller;

[0007] An auxiliary film-passing mechanism includes a film-passing drive, multiple film-passing wheels, and a film-passing traction assembly. The film-passing traction assembly is wound around the multiple film-passing wheels to form an auxiliary film-passing path. The film-passing drive is connected to the film-passing wheels and drives the film-passing wheels to rotate. The film-passing wheels drive the film-passing traction assembly to move along the auxiliary film-passing path. When the film-passing traction assembly moves, it pulls the base film to the base film transmission path.

[0008] In a preferred embodiment, the base film transport path includes multiple sub-transport paths, and the roll-up double-sided coating equipment includes at least one of the auxiliary film-passing mechanisms, which form multiple auxiliary film-passing paths.

[0009] In a preferred embodiment, the roll-to-roll double-sided coating equipment further includes a first main drum and a second main drum arranged sequentially along the base film transport path, and the sub-transport path includes a first sub-transport path located between the unwinding roller and the first main drum, a second sub-transport path located between the first main drum and the second main drum, and a third sub-transport path located between the second main drum and the take-up roller.

[0010] The auxiliary film threading mechanism includes a first auxiliary film threading mechanism and a second auxiliary film threading mechanism. The first auxiliary film threading mechanism is partially disposed between the unwinding roller and the first main drum, and partially disposed between the first main drum and the second main drum. The second auxiliary film threading mechanism is disposed between the second main drum and the take-up roller.

[0011] The auxiliary film threading path corresponding to the first auxiliary film threading mechanism is partially located between the unwinding roller and the first main drum, partially overlaps with the base film transport path on the first main drum, and partially located between the first main drum and the second main drum; the auxiliary film threading path corresponding to the second auxiliary film threading mechanism is located between the second main drum and the winding roller.

[0012] In a preferred embodiment, the roll-to-roll double-sided coating equipment further includes a first roller group and a second roller group, wherein the first roller group, the first main drum, the second roller group, and the second main drum are arranged sequentially along the base film transport path, the first roller group includes a first guide roller; and the second roller group includes a second guide roller, a third guide roller, and a fourth guide roller arranged sequentially along the base film transport path.

[0013] The first auxiliary film-penetrating mechanism includes a first tensioning wheel, a first pulley, a second pulley, a third pulley, a fourth pulley, a fifth pulley, and a sixth pulley arranged sequentially along the auxiliary film-penetrating path;

[0014] The first guide roller is disposed in the auxiliary film-passing path and located between the first tensioning roller and the sixth pulley; the second guide roller and the third guide roller are disposed in the auxiliary film-passing path and located between the third pulley and the fourth pulley; and the fourth guide roller is disposed in the auxiliary film-passing path and located between the fourth pulley and the fifth pulley.

[0015] In a preferred embodiment, the first roller group further includes a first flattening roller and a first tension roller, wherein the first guide roller, the first flattening roller and the first tension roller are arranged sequentially along the base film transport path;

[0016] And / or, the second roller group further includes a second tension roller, a second flattening roller and a third tension roller, wherein the second tension roller, the second guide roller, the third guide roller, the second flattening roller, the fourth guide roller and the third tension roller are arranged sequentially along the base film transport path.

[0017] In a preferred embodiment, the roll-to-roll double-sided coating equipment further includes a third roller group, and the roll-to-roll double-sided coating equipment further includes a first roller group and a second roller group. The first roller group, the first main drum, the second roller group, the second main drum and the third roller group are arranged sequentially along the base film transport path, and the third roller group includes a fifth guide roller.

[0018] The second auxiliary film-threading mechanism includes a seventh pulley, an eighth pulley, a second tensioning pulley, a ninth pulley, a tenth pulley, and an eleventh pulley arranged sequentially along the auxiliary film-threading path.

[0019] In a preferred embodiment, the third roller group further includes a fourth tension roller and a third flattening roller, wherein the fourth tension roller, the third flattening roller and the fifth guide roller are arranged sequentially along the base film transport path.

[0020] In a preferred embodiment, the membrane-piercing traction assembly includes two sets of parallel and spaced belts; during the assisted membrane-piercing process, both sides of the base membrane are respectively bonded to the two sets of belts.

[0021] In a preferred embodiment, the roll-to-roll double-sided coating equipment further includes a vacuum chamber, and the unwinding roller, the first roller group, the first main drum, the second roller group, the second main drum, the third roller group, the take-up roller, and the auxiliary film-threading mechanism are disposed in the vacuum chamber.

[0022] In a preferred embodiment, the roll-to-roll double-sided coating equipment further includes a correction sensor disposed on one side of the base film transport path, the correction sensor being used to detect the position of the base film during transport.

[0023] As can be seen from the above, the roll-to-roll double-sided coating equipment provided in this application, by setting an auxiliary film-threading mechanism, includes a film-threading drive, multiple film-threading wheels, and a film-threading traction assembly. The film-threading traction assembly is wound around the multiple film-threading wheels and forms an auxiliary film-threading path. The film-threading drive is connected to the film-threading wheels and drives the film-threading wheels to rotate. The film-threading wheels drive the film-threading traction assembly to move along the auxiliary film-threading path. When the film-threading traction assembly moves, it pulls the base film to the base film transfer path, thereby replacing manual film threading, improving film-threading efficiency and quality, and thus improving production efficiency. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in this application or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of a roll-to-roll double-sided coating apparatus in one embodiment of this application. Figure 1 ;

[0026] Figure 2 This is a schematic diagram of a roll-to-roll double-sided coating apparatus in one embodiment of this application. Figure 2 .

[0027] Figure Labels

[0028] 100. Roll-up double-sided coating equipment; 101. Unwinding roller; 102. First main drum; 103. Second main drum; 104. Rewinding roller; 105. Base film; 106. Web alignment sensor; M. Base film transport path; M1. First sub-transport path; M2. Second sub-transport path; M3. Third sub-transport path; N. Auxiliary film-passing path; N1. First auxiliary film-passing path; N2. Second auxiliary film-passing path;

[0029] 110. First roller group; 111. First guide roller; 112. First flattening roller; 113. First tension roller;

[0030] 120. Second roller group; 121. Second guide roller; 122. Third guide roller; 123. Fourth guide roller; 124. Second tension roller; 125. Second flattening roller; 126. Third tension roller;

[0031] 130. Third roller group; 131. Fifth guide roller; 132. Fourth tension roller; 133. Third flattening roller;

[0032] 141. First tension pulley; 142. First pulley; 143. Second pulley; 144. Third pulley; 145. Fourth pulley; 146. Fifth pulley; 147. Sixth pulley;

[0033] 151. Seventh pulley; 152. Eighth pulley; 153. Second tension pulley; 154. Ninth pulley; 155. Tenth pulley; 156. Eleventh pulley;

[0034] 160. Belt. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0036] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0037] Reference Figure 1 As shown, one embodiment of this application discloses a roll-to-roll double-sided coating equipment 100, which includes an unwinding roller 101 and a take-up roller 104, with a base film transport path M formed between the unwinding roller 101 and the take-up roller 104.

[0038] Reference Figure 2 As shown, the roll-to-roll double-sided coating equipment 100 also includes an auxiliary film-passing mechanism. The auxiliary film-passing mechanism includes a film-passing drive, multiple film-passing wheels, and a film-passing traction assembly. The film-passing traction assembly is wound around the multiple film-passing wheels and forms an auxiliary film-passing path N. The film-passing drive is connected to the film-passing wheels and drives the film-passing wheels to rotate. The film-passing wheels drive the film-passing traction assembly to move along the auxiliary film-passing path N. When the film-passing traction assembly moves, it pulls the base film 105 to the base film transmission path M.

[0039] The roll-to-roll double-sided coating equipment 100 provided in this embodiment is equipped with an auxiliary film-threading mechanism. The auxiliary film-threading mechanism includes a film-threading drive, multiple film-threading wheels, and a film-threading traction assembly. The film-threading traction assembly is wound around the multiple film-threading wheels and forms an auxiliary film-threading path N. The film-threading drive is connected to the film-threading wheels and drives the film-threading wheels to rotate. The film-threading wheels drive the film-threading traction assembly to move along the auxiliary film-threading path N. When the film-threading traction assembly moves, it pulls the base film 105 to the base film transmission path M, thereby replacing manual film threading, improving film-threading efficiency and quality, and thus improving production efficiency.

[0040] Specifically, before coating, film threading is required. During film threading, the base film 105 is pulled out from the unwinding roller 101 and fixed on the film threading traction assembly. Then, the film threading wheel is driven to rotate by the film threading drive component. The film threading wheel drives the film threading traction assembly to move along the auxiliary film threading path N. The film threading traction assembly pulls the base film 105 to move. Then, the base film 105 is tightened so that the base film 105 reaches the base film transport path M.

[0041] Optionally, the auxiliary membrane-penetrating path N and the base membrane transport path M form multiple intersection points. This can be understood as the membrane-penetrating traction component pulling the base membrane 105 back and forth on both sides of the base membrane transport path M so that the base membrane 105 can reach the base membrane transport path M after it is tightened.

[0042] Reference Figure 2 As shown, in one embodiment, the film-passing traction assembly includes two sets of parallel and spaced-apart belts 160. During assisted film-passing, both sides of the base film 105 are respectively bonded to the two sets of belts 160. The two sides of the base film 105 refer to the positions on the base film 105 near its side edges, located between the center and side edge of the base film 105. It should be noted that during film-passing, only the two sides of the initial section of the base film 105 need to be bonded to the two sets of belts 160; the portion of the base film 105 after the initial section does not need to be bonded to the belts 160. The belts 160 drive the initial section of the base film 105 to move along the assisted film-passing path N, and then, when tightening the base film 105, the base film 105 becomes taut and reaches the base film transport path M. Optionally, the two sides of the base film 105 are bonded to the belts with adhesive tape. Optionally, the film-passing drive component is a rotary motor or a rotary cylinder, etc.

[0043] In another embodiment, instead of a belt, the film-threading traction assembly can be configured to include two sets of parallel and spaced chains. During assisted film threading, both sides of the base film 105 are respectively bonded to the two sets of chains. It should be noted that during film threading, only the two sides of the initial section of the base film 105 need to be bonded to the two sets of chains; the portion of the base film 105 after the initial section does not need to be bonded to the chains. The chains drive the initial section of the base film 105 to move along the assisted film-threading path N, and thus, when the base film 105 is tightened, it reaches the base film transport path M.

[0044] In one embodiment, the base film transport path M includes multiple sub-transport paths, and the roll-to-roll double-sided coating equipment 100 includes at least one auxiliary film-passing mechanism. The at least one auxiliary film-passing mechanism forms multiple auxiliary film-passing paths N, thereby meeting the film-passing requirements of different sub-transport paths. Adjacent sub-transport paths may also share one auxiliary film-passing mechanism.

[0045] Reference Figure 1 As shown, in one embodiment, the roll-to-roll double-sided coating equipment 100 further includes a first main drum 102 and a second main drum 103 arranged sequentially along the base film transport path M. The first main drum 102 and the second main drum 103 serve to cool the base film 105. The base film 105 achieves coating on the first side when passing through the first main drum 102 and coating on the second side when passing through the second main drum 103, thereby achieving double-sided coating.

[0046] The base film transport path M includes a first sub-transport path M1 located between the unwinding roller 101 and the first main drum 102, a second sub-transport path M2 located between the first main drum 102 and the second main drum 103, and a third sub-transport path M3 located between the second main drum 103 and the take-up roller 104.

[0047] The multiple auxiliary film threading mechanisms include a first auxiliary film threading mechanism and a second auxiliary film threading mechanism. The first auxiliary film threading mechanism is partially disposed between the unwinding roller 101 and the first main drum 102, and partially disposed between the first main drum 102 and the second main drum 103. The second auxiliary film threading mechanism is disposed between the second main drum 103 and the take-up roller 104.

[0048] The auxiliary film threading path N corresponding to the first auxiliary film threading mechanism is located between the unwinding roller 101 and the first main drum 102, partially overlaps with the base film transmission path M on the first main drum 102, and partially is located between the first main drum 102 and the second main drum 103; the auxiliary film threading path N corresponding to the second auxiliary film threading mechanism is located between the second main drum 103 and the winding roller 104.

[0049] The first auxiliary film threading mechanism realizes film threading between the unwinding roller 101 and the second main drum 103, and the second auxiliary film threading mechanism realizes film threading between the second main drum 103 and the winding roller 104.

[0050] The roll-to-roll double-sided coating equipment 100 further includes a first main drum driver and a second main drum driver. The first main drum driver is connected to the first main drum 102 to drive the first main drum 102 to rotate, and the second main drum driver is connected to the second main drum 103 to drive the first main drum 102 to rotate. Optionally, the first main drum driver is a rotary motor or a rotary cylinder, and the second main drum driver is a rotary motor or a rotary cylinder, etc.

[0051] Reference Figure 1 and Figure 2 As shown, in one embodiment, the roll-to-roll double-sided coating equipment 100 further includes a first roller group 110 and a second roller group 120. The first roller group 110, the first main drum 102, the second roller group 120 and the second main drum 103 are arranged sequentially along the base film transport path M. The first roller group 110 includes a first guide roller 111. The second roller group 120 includes a second guide roller 121, a third guide roller 122 and a fourth guide roller 123 arranged sequentially along the base film transport path M. The plurality of film-passing wheels in the first auxiliary film-passing mechanism include a first tensioning wheel 141, a first pulley 142, a second pulley 143, a third pulley 144, a fourth pulley 145, a fifth pulley 146 and a sixth pulley 147 arranged sequentially along the auxiliary film-passing path N.

[0052] The first guide roller 111 is disposed in the auxiliary film-passing path N and located between the first tensioning roller 141 and the sixth pulley 147. The second guide roller 121 and the third guide roller 122 are disposed in the auxiliary film-passing path N and located between the third pulley 144 and the fourth pulley 145. The fourth guide roller 123 is disposed in the auxiliary film-passing path N and located between the fourth pulley 145 and the fifth pulley 146. The first tensioning roller 141 serves to tension the belt 160.

[0053] During the film threading process, the first auxiliary film threading mechanism winds the base film 105 onto the first guide roller 111, the first main drum 102, the second guide roller 121, the third guide roller 122, and the fourth guide roller 123.

[0054] Reference Figure 1 As shown, in one embodiment, the first roller group 110 further includes a first flattening roller 112 and a first tension roller 113. The first guide roller 111, the first flattening roller 112, and the first tension roller 113 are arranged sequentially along the base film transport path M (specifically, M1 as described above). The first flattening roller 112 serves to flatten the base film 105, and the first tension roller 113 is used to adjust the tension of the base film 105.

[0055] In one embodiment, the second roller group 120 further includes a second tension roller 124, a second flattening roller 125, and a third tension roller 126. The second tension roller 124, the second guide roller 121, the third guide roller 122, the second flattening roller 125, the fourth guide roller 123, and the third tension roller 126 are arranged sequentially along the base film transport path M (specifically, M2 as described above). The second flattening roller 125 flattens the base film 105, and the second tension roller 124 adjusts the tension of the base film 105.

[0056] Reference Figure 1 and 2 As shown, in one embodiment, the roll-to-roll double-sided coating equipment further includes a third roller group 130. The first roller group 110, the first main drum 102, the second roller group 120, the second main drum 103, and the third roller group 130 are sequentially arranged along the base film transport path M. The third roller group 130 includes a fifth guide roller 131. The second auxiliary film-threading mechanism includes a seventh pulley 151, an eighth pulley 152, a second tensioning pulley 153, a ninth pulley 154, a tenth pulley 155, and an eleventh pulley 156 sequentially arranged along the auxiliary film-threading path N. During film threading, the second auxiliary film-threading mechanism winds the base film 105 onto the fifth guide roller 131. The second tensioning pulley 153 serves to tension the belt 160.

[0057] In one embodiment, the third roller group 130 further includes a fourth tension roller 132 and a third flattening roller 133, which are arranged sequentially along the base film transport path M (specifically, M3 as described above). The third flattening roller 133 flattens the base film 105, and the fourth tension roller 132 adjusts the tension of the base film 105.

[0058] Specifically, the auxiliary membrane penetration path N includes a first auxiliary membrane penetration path N1 and a second auxiliary membrane penetration path N2, wherein the first auxiliary membrane penetration path N1 forms a first closed ring and the second auxiliary membrane penetration path N2 forms a second closed ring, wherein the first closed ring and the second closed ring can be irregular rings.

[0059] The first tension roller 113, the fourth guide roller 123, the second tension roller 124, and the second flattening roller 125 are located outside the first closed ring; the first guide roller 111, the first flattening roller 112, the second guide roller 121, the third guide roller 122, and the third tension roller 126 are located inside the first closed ring.

[0060] The fifth guide roller 131 and the third flattening roller 133 are located outside the second closed ring, and the fourth tension roller 132 is located inside the second closed ring.

[0061] During the assisted film threading process, the two sides of the starting section of the base film 105 are first bonded to two sets of belts 160 respectively. The first auxiliary film threading mechanism is activated, driving the belts 160 to move through the base film driving component. At the same time, the first main drum driving component is activated and drives the first main drum 102 to rotate, transferring the starting section of the base film 105 to the sixth pulley 147. Specifically, the base film 105 moves along the first auxiliary film threading path N1 under the drive of the belts 160. It first passes between the first flattening roller 112 and the first tension roller 113 and then winds onto the first main drum 102. Then it passes between the second guide roller 121 and the second tension roller 124. Then it passes between the third guide roller 122 and the second flattening roller 125. Finally, it passes between the fourth guide roller 123 and the third tension roller 126.

[0062] Then, the starting segment of the base film 105 is removed and bonded to the second main drum 103. The second main drum drive is activated and drives the second main drum 103 to rotate, tightening the base film 105 and transferring the starting segment of the base film 105 to a position near the seventh pulley 151. At this time, the base film 105 travels from the first auxiliary die-cutting path N1 to the first sub-transfer path M1 and the second sub-transfer path M2.

[0063] Then, the starting section of the base film 105 is removed and bonded to the seventh pulley 151. The second auxiliary film-threading mechanism operates, driving the belt 160 through the base film drive component to move the starting section of the base film 105 to a position near the take-up roller 104. Specifically, the base film 105 moves along the second auxiliary film-threading path N2 under the drive of the belt 160, first passing between the fourth tension roller 132 and the third flattening roller 133, and then passing between the third flattening roller 133 and the fifth guide roller 131.

[0064] Then, the starting section of the base film 105 is removed and bonded to the take-up roller 104, and the take-up roller 104 is driven to rotate to tighten the base film 105. At this time, the base film 105 moves from the second auxiliary die-cutting path N2 to the third sub-transfer path M3.

[0065] As described above, in this embodiment, the film threading between the unwinding roller 101 and the first main drum 102 and the film threading between the unwinding roller 101 and the first main drum 102 share the first auxiliary film threading mechanism. In another embodiment, a separate auxiliary film threading mechanism can be provided to realize the film threading between the unwinding roller 101 and the first main drum 102, and a separate auxiliary film threading mechanism can be provided to realize the film threading between the first main drum 102 and the second main drum 103.

[0066] In one embodiment, the roll-to-roll double-sided coating equipment 100 further includes a vacuum chamber, and an unwinding roller 101, a first roller group 110, a first main drum 102, a second roller group 120, a second main drum 103, a third roller group 130, a take-up roller 104 and an auxiliary film-passing mechanism are disposed in the vacuum chamber to realize vacuum magnetron sputtering coating.

[0067] In one embodiment, the roll-to-roll double-sided coating equipment 100 further includes a web correction sensor 106. The web correction sensor 106 is disposed on one side of the base film transport path M. The web correction sensor 106 is used to detect the position of the base film 105 during transport, so as to adjust the base film 105 in real time to achieve web correction. Specifically, the web correction sensor 106 is disposed on one side of the base film 105 to detect the position of the side of the base film 105 and compare it with a preset reference position to obtain the offset of the base film 105. When the offset is too large, web correction is achieved by adjusting the axially adjustable unwinding roller 101 and / or take-up roller 104.

[0068] Furthermore, a deviation correction sensor 106 is provided on one side of the first sub-transmission path M1, which is located near the unwinding roller 101 to correct deviations during unwinding. A deviation correction sensor 106 is provided on one side of the third sub-transmission path M3, which is located near the take-up roller 104 to correct deviations during take-up.

[0069] It should be noted that some embodiments of this application have been described above. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. In addition, the processes depicted in the drawings do not necessarily require the specific order or sequential order shown to achieve the desired result.

[0070] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this application (including the claims) is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the above embodiments of this application, which are not provided in detail for the sake of brevity.

[0071] The embodiments of this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this application should be included within the protection scope of this application.

Claims

1. A roll-to-roll double-sided coating equipment, characterized in that, include: An unwinding roller and a take-up roller, wherein a base film transport path is formed between the unwinding roller and the take-up roller; An auxiliary film-passing mechanism includes a film-passing drive, multiple film-passing wheels, and a film-passing traction assembly. The film-passing traction assembly is wound around the multiple film-passing wheels to form an auxiliary film-passing path. The film-passing drive is connected to the film-passing wheels and drives the film-passing wheels to rotate. The film-passing wheels drive the film-passing traction assembly to move along the auxiliary film-passing path. When the film-passing traction assembly moves, it pulls the base film to the base film transmission path.

2. The roll-to-roll double-sided coating equipment according to claim 1, characterized in that, The base film transport path includes multiple sub-transport paths, and the roll-up double-sided coating equipment includes at least one of the auxiliary film-passing mechanisms, which form multiple auxiliary film-passing paths.

3. The roll-to-roll double-sided coating equipment according to claim 2, characterized in that, The roll-to-roll double-sided coating equipment also includes a first main drum and a second main drum arranged sequentially along the base film transport path, and the plurality of sub-transport paths include a first sub-transport path located between the unwinding roller and the first main drum, a second sub-transport path located between the first main drum and the second main drum, and a third sub-transport path located between the second main drum and the take-up roller. The auxiliary film threading mechanism includes a first auxiliary film threading mechanism and a second auxiliary film threading mechanism. The first auxiliary film threading mechanism is partially disposed between the unwinding roller and the first main drum, and partially disposed between the first main drum and the second main drum. The second auxiliary film threading mechanism is disposed between the second main drum and the take-up roller. The auxiliary film threading path corresponding to the first auxiliary film threading mechanism is partially located between the unwinding roller and the first main drum, partially overlaps with the base film transport path on the first main drum, and partially located between the first main drum and the second main drum; the auxiliary film threading path corresponding to the second auxiliary film threading mechanism is located between the second main drum and the winding roller.

4. The roll-to-roll double-sided coating equipment according to claim 3, characterized in that, The roll-to-roll double-sided coating equipment further includes a first roller group and a second roller group. The first roller group, the first main drum, the second roller group, and the second main drum are arranged sequentially along the base film transport path. The first roller group includes a first guide roller. The second roller group includes a second guide roller, a third guide roller, and a fourth guide roller arranged sequentially along the base film transport path. The first auxiliary film-penetrating mechanism includes a first tensioning wheel, a first pulley, a second pulley, a third pulley, a fourth pulley, a fifth pulley, and a sixth pulley arranged sequentially along the auxiliary film-penetrating path; The first guide roller is disposed in the auxiliary film-passing path and located between the first tensioning roller and the sixth pulley; the second guide roller and the third guide roller are disposed in the auxiliary film-passing path and located between the third pulley and the fourth pulley; and the fourth guide roller is disposed in the auxiliary film-passing path and located between the fourth pulley and the fifth pulley.

5. The roll-to-roll double-sided coating equipment according to claim 4, characterized in that, The first roller group further includes a first flattening roller and a first tension roller, wherein the first guide roller, the first flattening roller and the first tension roller are arranged sequentially along the base film transport path; And / or, the second roller group further includes a second tension roller, a second flattening roller and a third tension roller, wherein the second tension roller, the second guide roller, the third guide roller, the second flattening roller, the fourth guide roller and the third tension roller are arranged sequentially along the base film transport path.

6. The roll-to-roll double-sided coating equipment according to claim 3, characterized in that, The roll-to-roll double-sided coating equipment also includes a third roller group, and the roll-to-roll double-sided coating equipment also includes a first roller group and a second roller group. The first roller group, the first main drum, the second roller group, the second main drum and the third roller group are arranged sequentially along the base film transport path. The third roller group includes a fifth guide roller. The second auxiliary film-threading mechanism includes a seventh pulley, an eighth pulley, a second tensioning pulley, a ninth pulley, a tenth pulley, and an eleventh pulley arranged sequentially along the auxiliary film-threading path.

7. The roll-to-roll double-sided coating equipment according to claim 6, characterized in that, The third roller group also includes a fourth tension roller and a third flattening roller, and the fourth tension roller, the third flattening roller and the fifth guide roller are arranged sequentially along the base film transport path.

8. The roll-to-roll double-sided coating equipment according to claim 1, characterized in that, The membrane-penetrating traction assembly includes two sets of parallel and spaced belts; during the assisted membrane-penetrating process, the two sides of the base membrane are respectively bonded to the two sets of belts.

9. The roll-to-roll double-sided coating equipment according to claim 1, characterized in that, The roll-to-roll double-sided coating equipment also includes a vacuum chamber, in which the unwinding roller, the first roller group, the first main drum, the second roller group, the second main drum, the third roller group, the take-up roller, and the auxiliary film-threading mechanism are disposed.

10. The roll-to-roll double-sided coating equipment according to any one of claims 1-9, characterized in that, The roll-to-roll double-sided coating equipment also includes a correction sensor, which is disposed on one side of the base film transport path and is used to detect the position of the base film during transport.

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