A shower panel

Abstract

The utility model discloses a kind of spray plate, including two plate bodies of up-down stacking connection, gas passage assembly is equipped in the plate body, the gas passage assembly includes first vertical air passage and multiple horizontal air passages, each the horizontal air passage is communicated with first vertical air passage respectively, multiple spray holes are equipped on the horizontal air passage, the lower end of first vertical air passage in the plate body of upper layer is communicated with the upper end of first vertical air passage in the plate body of lower layer, the upper portion of first vertical air passage in the plate body of lower layer or the lower portion of the plate body of upper layer is communicated with air inlet in process chamber.The utility model has the advantages of simple structure and good film deposition uniformity.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a spray plate. Background Technology

[0002] Thin film deposition technology is a technique for forming thin films on the surface of substrate materials. To ensure uniform distribution of reactant gases and obtain films with uniform thickness and good quality, a spray system is required within the process chamber. As industrial applications demand continuously reduced production costs and improved economic efficiency, the volume of the thin film deposition reaction chamber is constantly increasing to enhance single-process production capacity. With the increase in reaction chamber size, the size of the spray plate also increases. The longer distance from bottom to top in the inlet channel of the spray plate leads to greater pressure loss and a large flow rate difference between the upper and lower ends of the inlet channel, severely affecting the uniformity of gas output and resulting in poor film deposition uniformity and low product yield. Utility Model Content

[0003] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a spray plate with simple structure and good film deposition uniformity.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A spray plate includes two plates stacked vertically. An air duct assembly is provided inside the plate. The air duct assembly includes a first vertical air duct and multiple horizontal air ducts. Each of the horizontal air ducts is connected to the first vertical air duct. Multiple spray holes are provided on the horizontal air ducts. The lower end of the first vertical air duct in the upper plate is connected to the upper end of the first vertical air duct in the lower plate. The upper part of the first vertical air duct in the lower plate or the lower part of the upper plate is connected to an air inlet in the process chamber.

[0005] As a further improvement to the above technical solution: The air duct assembly also includes a second vertical air duct, the upper part of which is connected to the upper part of the first vertical air duct through an air duct connection hole. The second vertical air duct of the plate is used to connect to the air inlet in the process chamber.

[0006] The second vertical air passage is a through hole opened in the plate body. The upper end of the second vertical air passage is provided with a plug, and the lower end of the second vertical air passage is used to connect with the air inlet in the process chamber.

[0007] The first and second vertical air passages of the air passage assembly are arranged at intervals in the thickness direction of the plate.

[0008] The first vertical air passage is a through hole opened in the plate body. The upper plate body is covered with a cover plate, and the upper end of the first vertical air passage in the upper plate body is blocked by the cover plate.

[0009] The lower end of the first vertical air passage of the lower plate is sealed by a carrier plate structure in the process chamber used to hold the spray plate.

[0010] Each of the spray holes is evenly spaced on the transverse air passage.

[0011] The plate contains at least two sets of independent airway components.

[0012] The airway assembly is provided in two sets, and the transverse airways of the two sets of airway assemblies are staggered in the vertical direction.

[0013] The first vertical airways of the two sets of airway assemblies are located on both sides of the plate, and the second vertical airways of the two sets of airway assemblies are located on both sides of the plate.

[0014] Compared with the prior art, the advantages of this utility model are: The spray plate of this invention has two layers, allowing process gas to flow from both the top and bottom directions to the two layers respectively. The structure is simple, which can reduce pressure loss between the upper and lower plates, reduce the gas flow difference between the upper and lower plates, make the gas output more uniform, and improve the uniformity of thin film deposition.

[0015] Other features and advantages of this invention will be described in detail in the following detailed description section. Attached Figure Description

[0016] Figure 1 This is the front view of the spray plate of this utility model.

[0017] Figure 2 This is a front sectional view of the spray plate of this utility model.

[0018] Figure 3 This is a side sectional view of the spray plate of this utility model.

[0019] The labels in the diagram represent: 1. Plate; 2. Cover plate; 3. Air duct assembly; 31. First vertical air duct; 32. Second vertical air duct; 33. Horizontal air duct; 34. Spray hole; 35. Plug; 36. Connection hole. Detailed Implementation

[0020] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0023] In this utility model, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] like Figures 1 to 3 As shown, the spray plate of this embodiment includes two plates 1 stacked on top of each other. An air duct assembly 3 is provided inside the plate 1. The air duct assembly 3 includes a first vertical air duct 31 and multiple horizontal air ducts 33. Each horizontal air duct 33 is connected to the first vertical air duct 31. Multiple spray holes 34 are provided on the horizontal air ducts 33. The lower end of the first vertical air duct 31 in the upper plate 1 is connected to the upper end of the first vertical air duct 31 in the lower plate 1. The upper part of the first vertical air duct 31 in the lower plate 1 is connected to the air inlet (not shown in the figure) in the process chamber.

[0025] In this embodiment, the spray plate allows process gas to flow in from the upper part of the first vertical air channel 31 in the lower plate 1. Part of the process gas flows upward to the first vertical air channel 31 of the upper plate 1, while the other part flows downward to the first vertical air channel 31 of the lower plate 1. The process gas then enters each horizontal air channel 33 through the first vertical air channel 31 and is discharged from each spray hole 34 in the horizontal air channels 33, thus achieving process gas delivery. This embodiment, by setting two plate bodies 1, allows process gas to flow to both plate bodies 1 from both vertical and horizontal directions. The structure is simple, reduces pressure loss between the upper and lower plate bodies 1, minimizes the gas flow difference between them, and results in more uniform gas output, improving the uniformity of thin film deposition.

[0026] Of course, in other embodiments, the lower part of the first vertical air passage 31 in the upper plate 1 can be connected to the air inlet in the process chamber, which can also achieve the above-mentioned technical effect.

[0027] Furthermore, in this embodiment, the air duct assembly 3 also includes a second vertical air duct 32. The upper part of the second vertical air duct 32 is connected to the upper part of the first vertical air duct 31 through an air duct connection hole 36. The second vertical air duct 32 of the plate 1 is used to connect to the air inlet in the process chamber. The upper part of the second vertical air duct 32 is connected to the upper part of the first vertical air duct 31 through an air duct connection hole 36, which is simple in structure and easy to process.

[0028] Furthermore, in this embodiment, the second vertical air passage 32 is a through hole formed within the plate 1. A plug 35 is provided at the upper end of the second vertical air passage 32, and the lower end of the second vertical air passage 32 is used to connect with the air inlet in the process chamber. The second vertical air passage 32 is a through hole, which facilitates processing. The plug 35 seals the passages, preventing the second vertical air passages 32 in the upper and lower plates 1 from connecting, thus preventing mutual interference and turbulent flow of the process gases in the upper and lower plates 1. The plug 35 is made of metal and non-metallic materials such as graphite, ceramic, and silicon carbide.

[0029] Furthermore, in this embodiment, the first vertical airway 31 and the second vertical airway 32 of the airway assembly 3 are arranged at intervals in the thickness direction of the plate 1, which is a reasonable layout.

[0030] Preferably, in this embodiment, the air passage connection hole 36 is a blind hole opened along the thickness direction of the plate 1, which is convenient for processing.

[0031] Furthermore, in this embodiment, the first vertical air passage 31 is a through hole opened in the plate 1. The upper plate 1 is covered with a cover plate 2. The upper end of the first vertical air passage 31 in the upper plate 1 is blocked by the cover plate 2, and the lower end of the first vertical air passage 31 in the lower plate 1 is blocked by the carrier plate structure in the process chamber used to hold the spray plate. Since the first vertical air passage 31 is a through hole, when the two plates 1 are stacked and connected, the two first vertical air passages 31 can be aligned and connected, which is simple in structure and reasonable in layout. The upper end of the first vertical air passage 31 in the upper plate 1 is blocked by the cover plate 2, and the lower end of the first vertical air passage 31 in the lower plate 1 is blocked by the carrier plate structure in the process chamber used to hold the spray plate. The process gas can only enter the transverse air passage 33 from the first vertical air passage 31 and then flow out from the spray hole 34. The structure is simple and reliable.

[0032] Furthermore, in this embodiment, each spray hole 34 is evenly spaced on the transverse air passage 33 to achieve array-type delivery of process gas, resulting in a more uniform airflow field.

[0033] Furthermore, in this embodiment, the plate body 1 is provided with at least two sets of independent air duct components 3. By providing multiple sets of independent air duct components 3, it is possible to simultaneously introduce various different process gases into the spray plate, thus enhancing its applicability.

[0034] Furthermore, in this embodiment, the gas channel assembly 3 is provided in two sets, and the transverse gas channels 33 of the two sets of gas channel assemblies 3 are arranged in a staggered manner in the vertical direction, so that the two process gases can be deposited more evenly and the coating effect is better.

[0035] Furthermore, in this embodiment, the first vertical air passages 31 of the two sets of air passage components 3 are respectively located on both sides of the plate 1, and the second vertical air passages 32 of the two sets of air passage components 3 are respectively located on both sides of the plate 1. The first vertical air passages 31 and the second vertical air passages 32 of the two sets of air passage components 3 are respectively located on both sides of the plate 1 to prevent interference between the two process gases, and the layout is reasonable.

[0036] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present utility model using the methods and techniques disclosed above, or modify it into equivalent embodiments with equivalent changes, without departing from the spirit and technical solution of the present utility model. Therefore, any simple modifications, equivalent substitutions, equivalent changes and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the content of the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A spray plate, characterized in that: The system includes two stacked plates (1) connected vertically. Each plate (1) has an air duct assembly (3). The air duct assembly (3) includes a first vertical air duct (31) and multiple horizontal air ducts (33). Each horizontal air duct (33) is connected to the first vertical air duct (31). Each horizontal air duct (33) has multiple spray holes (34). The lower end of the first vertical air duct (31) in the upper plate (1) is connected to the upper end of the first vertical air duct (31) in the lower plate (1). The upper part of the first vertical air duct (31) in the lower plate (1) or the lower part of the upper plate (1) is connected to the air inlet in the process chamber.

2. The spray plate according to claim 1, characterized in that: The airway assembly (3) further includes a second vertical airway (32), the upper part of which is connected to the upper part of the first vertical airway (31) through an airway connection hole (36). The second vertical airway (32) of the plate (1) is used to connect with the air inlet in the process chamber.

3. The spray plate according to claim 2, characterized in that: The second vertical air passage (32) is a through hole opened in the plate (1). The upper end of the second vertical air passage (32) is provided with a plug (35), and the lower end of the second vertical air passage (32) is used to communicate with the air inlet in the process chamber.

4. The spray plate according to claim 2, characterized in that: The first vertical airway (31) and the second vertical airway (32) of the airway assembly (3) are arranged at intervals in the thickness direction of the plate (1).

5. The spray plate according to claim 1, characterized in that: The first vertical air passage (31) is a through hole opened in the plate (1). The upper plate (1) is covered with a cover plate (2), and the upper end of the first vertical air passage (31) in the upper plate (1) is blocked by the cover plate (2).

6. The spray plate according to claim 5, characterized in that: The lower end of the first vertical air passage (31) of the lower plate (1) is sealed by the carrier plate structure in the process chamber used to hold the spray plate.

7. The spray plate according to claim 1, characterized in that: Each of the spray holes (34) is evenly spaced on the transverse air passage (33).

8. The spray plate according to any one of claims 1 to 7, characterized in that: The plate (1) contains at least two sets of independent airway components (3).

9. The spray plate according to claim 8, characterized in that: The airway assembly (3) is provided in two sets, and the transverse airways (33) of the two sets of airway assemblies (3) are staggered in the vertical direction.

10. The spray plate according to claim 9, characterized in that: The first vertical airways (31) of the two sets of airway assemblies (3) are located on both sides of the plate (1), and the second vertical airways (32) of the two sets of airway assemblies (3) are located on both sides of the plate (1).

Images