Gas inlet device for a chemical vapor deposition furnace

Abstract

The utility model discloses a gas inlet device for chemical vapor deposition furnace, include: outer gas pipe, its top fixedly arranged with the inner diameter gradually increasing from below to above flared mouth, inner gas pipe, through the coaxial fixed setting of connecting component in the outer gas pipe, its top stretches to the lower part in flared mouth, airflow adjusting assembly, set up in flared mouth, is used for respectively with the reaction gas of outer gas pipe output and the reaction gas of inner gas pipe output conversion into the cyclone, makes two in flared mouth mix. The utility model discloses a gas inlet device mixes before the reaction gas output, has improved raw material utilization rate, has guaranteed the deposition effect.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition technology, and in particular to an air inlet device for a chemical vapor deposition furnace. Background Technology

[0002] Chemical vapor deposition (CVD) is one of the core processes in semiconductor fabrication. Essentially, it involves a chemical reaction between a gaseous precursor and a substrate surface to generate a solid thin film or nanostructure. With its advantages such as high film purity, good thickness uniformity, strong adhesion to the substrate, and precise control over composition and structure, CVD has become an indispensable key step in semiconductor manufacturing.

[0003] Chemical vapor deposition (CVD) technology introduces multiple gas sources into the deposition chamber, where they undergo a series of complex processes to form the final product on the substrate surface. Traditional CVD gas inlet methods often use two concentric, separate pipes to directly introduce the reactive gases into the reaction chamber. The inner and outer pipes each carry different reactive gases. The core advantage of this inlet method is its simple structure and ease of maintenance.

[0004] The disadvantage is that the uniformity of the reaction gas distribution is poor. Specifically, if the reaction gas has high activity after entering the reaction chamber from the gas pipe outlet, it will enter the high temperature zone before being fully mixed, and will react prematurely in the gas phase, generating particulate impurities. If the reaction activity is low, the mixing lag will cause the reaction gas to not be fully contacted when it reaches the substrate, resulting in a local imbalance in the proportion of reaction gas. Utility Model Content

[0005] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide an inlet device for a chemical vapor deposition furnace that mixes the reaction gas before it is output, thereby improving the utilization rate of raw materials and ensuring the deposition effect.

[0006] This utility model provides an air inlet device for a chemical vapor deposition furnace, comprising:

[0007] The external trachea has a bell-shaped opening at its top end, with the inner diameter gradually increasing from bottom to top;

[0008] The inner air tube is coaxially and fixedly installed inside the outer air tube by a connecting component, with its top end extending into the lower part of the flared mouth;

[0009] An airflow regulating component is disposed inside the flared mouth to convert the reaction gas output from the outer air pipe and the reaction gas output from the inner air pipe into swirling flow, so that the two are mixed inside the flared mouth.

[0010] Furthermore, the flared mouth and the external air pipe are integrally formed, and the inner diameter of the bottom end of the flared mouth is consistent with the inner diameter of the external air pipe.

[0011] Furthermore, the top end of the inner air tube is provided with an air outlet section with a decreasing inner diameter. The air outlet section is connected to the inner air tube through a variable diameter section, and the inner diameter of the variable diameter section gradually decreases from bottom to top.

[0012] Furthermore, the inner diameter of the bottom end of the variable diameter section is the same as the inner diameter of the inner air pipe, and the inner diameter of the top end is the same as the inner diameter of the air outlet section.

[0013] Furthermore, the connecting assembly includes a plurality of first connecting posts evenly distributed circumferentially between the external trachea and the internal trachea.

[0014] Furthermore, the airflow regulating component includes a first sleeve and a second sleeve. The outer diameter of the variable diameter section gradually decreases from bottom to top. The first sleeve is separately sleeved on the variable diameter section. The inner diameter of the first sleeve is smaller than the maximum outer diameter of the variable diameter section and larger than the minimum outer diameter of the variable diameter section. A plurality of first swirl fan blades are evenly distributed on the outer periphery of the first sleeve. The second sleeve is disposed on the outer periphery of the top end of the air outlet section. The second sleeve is coaxially fixedly connected to the first sleeve through a plurality of second connecting posts. A plurality of second swirl fan blades are evenly distributed on the inner periphery of the second sleeve above the air outlet section.

[0015] Furthermore, a limiting component is provided between the airflow regulating component and the air outlet section; the limiting component includes connecting seats symmetrically fixed on both sides of the top of the first sleeve, a limiting ring is fixedly sleeved on the outer periphery of the air outlet section, a limiting groove is provided at the bottom of the limiting ring, and a shaft is provided radially between the connecting seat and the limiting groove along the first sleeve, one end of the shaft is fixedly connected to the connecting seat, and the other end is rotatably sleeved with a roller embedded in the limiting groove.

[0016] Furthermore, the external air pipe, internal air pipe, connecting assembly, airflow regulating assembly, and limiting assembly are all made of high-temperature resistant materials.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] The air intake device of this invention is equipped with a flared nozzle and an airflow regulating component. The reactive gas in the outer air pipe enters the flared nozzle at a reduced velocity, and then passes through the airflow regulating component to form a swirling flow within the nozzle. The top of the inner air pipe is positioned inside the flared nozzle, and the reactive gas output from it also forms a swirling flow within the nozzle after passing through the airflow regulating component. The two reactive gases forming the swirling flow mix within the flared nozzle and are then output from the nozzle. This ensures that the reactive gases are uniformly mixed according to process requirements before entering the reaction chamber, improving mixing uniformity and raw material utilization. It solves problems such as uneven deposition thickness and imbalanced reactive gas ratios, thus improving the deposition effect.

[0019] It should be understood that the description in this utility model description section is not intended to limit the key or essential features of the embodiments of this utility model, nor is it intended to restrict the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0020] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0021] Figure 1 This is a schematic diagram of the air intake device;

[0022] Figure 2 This is a cross-sectional structural diagram of the air intake device;

[0023] Figure 3 for Figure 2 Enlarged structural diagram at point A;

[0024] Figure 4 This is a schematic diagram of the exploded structure of the air intake device.

[0025] The diagram is labeled as follows: 1. External air tube; 2. Internal air tube; 3. Connecting assembly; 4. Airflow regulating assembly; 5. Limiting assembly;

[0026] 11. Trumpet mouth;

[0027] 21. Exhaust section; 22. Variable diameter section;

[0028] 31. First connecting post;

[0029] 41. First sleeve; 42. Second sleeve; 43. First swirl fan blade; 44. Second connecting post; 45. Second swirl fan blade;

[0030] 51. Connecting seat; 52. Limiting ring; 53. Limiting groove; 54. Shaft; 55. Roller. Detailed Implementation

[0031] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0032] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0033] Please refer to Figures 1-4An embodiment of this utility model provides an air inlet device for a chemical vapor deposition furnace, comprising:

[0034] The external air tube 1 has a bell mouth 11 with an inner diameter that gradually increases from bottom to top, which is fixedly installed at its top end;

[0035] The inner air tube 2 is coaxially fixed inside the outer air tube 1 via the connecting component 3, with its top end extending into the lower part of the flared mouth 11.

[0036] The airflow regulating component 3 is located inside the horn 11 and is used to convert the reaction gas output from the outer air pipe 1 and the reaction gas output from the inner air pipe 2 into swirling flow, so that the two are mixed inside the horn 11.

[0037] In this embodiment, during chemical vapor deposition, one reactive gas enters the funnel 11 through the outer gas pipe 1. The inner diameter of the funnel 11 gradually increases, reducing the flow rate of the reactive gas. Then, it is swirled within the funnel 11 by the airflow regulating component 4. The other reactive gas is output through the inner gas pipe 2 and then swirled within the funnel 11 by the airflow regulating component 4. The two reactive gases that form swirling flows are mixed within the funnel 11 and output from the funnel 11 after mixing. This ensures that the reactive gases are uniformly mixed according to process requirements before entering the reaction chamber, improving mixing uniformity and raw material utilization. It solves problems such as uneven deposition thickness and imbalance of reactive gas ratio, thereby improving the deposition effect.

[0038] In a preferred embodiment, such as Figure 2 As shown, the flared mouth 11 is integrally formed with the outer air pipe 1, and the inner diameter of the bottom end of the flared mouth 11 is consistent with the inner diameter of the outer air pipe 1, ensuring the smooth flow of the reaction gas into the flared mouth 11 through the outer air pipe 1.

[0039] In a preferred embodiment, such as Figure 2 and Figure 4 As shown, the top of the inner gas pipe 2 is provided with an outlet section 21 with a smaller inner diameter. The outlet section 21 is connected to the inner gas pipe 2 through a variable diameter section 22. The inner diameter of the variable diameter section 22 gradually decreases from bottom to top, which increases the flow rate of the reaction gas output through the inner gas pipe 2.

[0040] In a preferred embodiment, such as Figure 2 As shown, the inner diameter of the bottom end of the variable diameter section 22 is the same as the inner diameter of the inner gas pipe 2, and the inner diameter of the top end is the same as the inner diameter of the gas outlet section 21, ensuring the smooth output of the reaction gas.

[0041] In a preferred embodiment, such as Figure 2 As shown, the connecting component 3 includes several first connecting posts 31 evenly distributed circumferentially between the outer air pipe 1 and the inner air pipe 2. The structure is simple and the connection is stable.

[0042] In a preferred embodiment, such as Figure 2 and4 As shown, the airflow regulating component 4 includes a first sleeve 41 and a second sleeve 42. The outer diameter of the variable diameter section 22 gradually decreases from bottom to top. The first sleeve 41 is separately sleeved on the variable diameter section 22. The inner diameter of the first sleeve 41 is smaller than the maximum outer diameter of the variable diameter section 22 and larger than the minimum outer diameter of the variable diameter section 22. Several first swirl fan blades 43 are evenly distributed on the outer periphery of the first sleeve 42. The second sleeve 42 is located on the outer periphery of the top end of the air outlet section 21. The second sleeve 42 is coaxially fixedly connected to the first sleeve 41 through several second connecting posts 44. Several second swirl fan blades 45 are evenly distributed on the inner periphery of the second sleeve 42 above the air outlet section 21.

[0043] In this embodiment, the first sleeve 41 is mounted on the variable diameter section 22, resulting in a small contact area and low rotational friction resistance. After the reactive gas is blown onto the first swirl fan blade 43 and the second swirl fan blade 45, the first sleeve 41 and the second sleeve 42 rotate synchronously.

[0044] The reaction gas output from the external air pipe 1 forms a swirling flow in the horn mouth 11 after passing through the first swirling fan blade 43; the reaction gas output from the internal air pipe 2 forms a swirling flow in the horn mouth 11 after passing through the second swirling fan blade 45; the two reaction gases that form swirling flows are mixed in the horn mouth 11 and then output, which effectively improves the deposition effect of the reaction gas.

[0045] In a preferred embodiment, such as Figure 2 and 3 As shown, a limiting component 5 is provided between the airflow regulating component 4 and the air outlet section 21; the limiting component 5 includes connecting seats 51 symmetrically fixed on both sides of the top of the first sleeve 41, a limiting ring 52 is fixedly sleeved on the outer periphery of the air outlet section 21, a limiting groove 53 is provided at the bottom of the limiting ring 52, and a shaft 54 ​​is provided between the connecting seat 51 and the limiting groove 53 along the radial direction of the first sleeve 41. One end of the shaft 54 ​​is fixedly connected to the connecting seat 51, and the other end is rotatably sleeved with a roller 55 embedded in the limiting groove 53.

[0046] In this embodiment, the airflow regulating component 4 is limited by the limiting component 5 when it is working. When the airflow regulating component 4 is subjected to the force of the reactant gas, the roller 55 cooperates with the limiting groove 53, which can effectively prevent the airflow regulating component 4 from detaching and causing failure. When the airflow regulating component 4 rotates, the roller 55 rolls in the limiting groove 53, and the limiting component 5 has little resistance to the rotation of the airflow regulating component 4.

[0047] Preferably, a certain margin is reserved between the roller 55 and the limiting groove 53 so that the airflow regulating component 4 can be slightly raised when subjected to the force of the reaction gas, thereby separating from the variable diameter section 22, reducing rotational friction and improving the smoothness of the rotation of the airflow regulating component 4.

[0048] In a preferred embodiment, the external air pipe 1, the internal air pipe 2, the connecting component 3, the airflow regulating component 4, and the limiting component 5 are all made of high-temperature resistant materials, such as graphite and boron nitride, to meet the operational requirements of high-temperature environments.

[0049] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0050] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0051] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An air inlet device for a chemical vapor deposition furnace, characterized in that, include: An external trachea (1) has a bell mouth (11) with an inner diameter that gradually increases from bottom to top, which is fixedly installed at its top. The inner air tube (2) is coaxially fixed inside the outer air tube (1) by the connecting component (3), and its top end extends to the lower part inside the flared mouth (11); An airflow regulating component (4) is disposed inside the horn (11) and is used to convert the reaction gas output from the outer air pipe (1) and the reaction gas output from the inner air pipe (2) into swirling flow, so that the two are mixed inside the horn (11).

2. The gas inlet device for a chemical vapor deposition furnace according to claim 1, characterized in that, The flared mouth (11) is integrally formed with the external air pipe (1), and the inner diameter of the bottom end of the flared mouth (11) is consistent with the inner diameter of the external air pipe (1).

3. The gas inlet device for a chemical vapor deposition furnace according to claim 1, characterized in that, The top end of the inner air pipe (2) is provided with an air outlet section (21) with a smaller inner diameter. The air outlet section (21) is connected to the inner air pipe (2) through a variable diameter section (22). The inner diameter of the variable diameter section (22) gradually decreases from bottom to top.

4. The gas inlet device for a chemical vapor deposition furnace according to claim 3, characterized in that, The inner diameter of the bottom end of the variable diameter section (22) is the same as the inner diameter of the inner air pipe (2), and the inner diameter of the top end is the same as the inner diameter of the air outlet section (21).

5. The gas inlet device for a chemical vapor deposition furnace according to claim 1, characterized in that, The connecting assembly (3) includes a plurality of first connecting posts (31) evenly distributed circumferentially between the outer air tube (1) and the inner air tube (2).

6. The gas inlet device for a chemical vapor deposition furnace according to claim 3, characterized in that, The airflow regulating component (4) includes a first sleeve (41) and a second sleeve (42). The outer diameter of the variable diameter section (22) gradually decreases from bottom to top. The first sleeve (41) is separately sleeved on the variable diameter section (22). The inner diameter of the first sleeve (41) is smaller than the maximum outer diameter of the variable diameter section (22) and larger than the minimum outer diameter of the variable diameter section (22). A plurality of first swirl fan blades (43) are evenly distributed on the outer periphery of the first sleeve (41). The second sleeve (42) is disposed on the outer periphery of the top end of the air outlet section (21). The second sleeve (42) is coaxially fixedly connected to the first sleeve (41) through a plurality of second connecting columns (44). A plurality of second swirl fan blades (45) are evenly distributed on the inner periphery of the second sleeve (42) above the air outlet section (21).

7. The gas inlet device for a chemical vapor deposition furnace according to claim 6, characterized in that, A limiting component (5) is provided between the airflow regulating component (4) and the air outlet section (21); the limiting component (5) includes connecting seats (51) symmetrically fixed on both sides of the top of the first sleeve (41), a limiting ring (52) is fixedly sleeved on the outer periphery of the air outlet section (21), a limiting groove (53) is provided at the bottom of the limiting ring (52), a shaft (54) is provided between the connecting seat (51) and the limiting groove (53) along the radial direction of the first sleeve (41), one end of the shaft (54) is fixedly connected to the connecting seat (51), and the other end is rotatably sleeved with a roller (55) embedded in the limiting groove (53).

8. The gas inlet device for a chemical vapor deposition furnace according to claim 7, characterized in that, The external air pipe (1), internal air pipe (2), connecting component (3), airflow regulating component (4), and limiting component (5) are all made of high-temperature resistant materials.

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