A steel belt structure substrate coating carrier plate

Abstract

The utility model relates to the field of coating carrier plate, disclose a kind of steel band structure substrate coating carrier plate, including carrier plate frame and the fixed sleeve and several sub-carriers of being set on carrier plate frame. Several steel bands of horizontal and vertical arrangement are provided on carrier plate frame, and several sub-carriers are clamped on steel band. The both sides and middle of sub-carrier are provided with the clamping groove matched with steel band. Clamping groove and steel band gap fit connection. The both ends of fixed sleeve are respectively with the clamping groove end portion of the transition fit connection of adjacent two sub-carriers, located between clamping groove and steel band, fill the gap between clamping groove and steel band, connect adjacent sub-carrier to limit the displacement of sub-carrier horizontal and vertical. The utility model under the condition that the diameter of wire cannot be increased, the service life of carrier plate is improved by increasing the cross-sectional area of steel band, and the defect that sub-carrier can only limit displacement in one direction is solved.

Description

Technical Field

[0001] This utility model relates to the field of coating carrier plates, and in particular to a steel strip structure substrate coating carrier plate. Background Technology

[0002] In photovoltaic, semiconductor, and vacuum coating equipment such as PECVD and PVD, a carrier plate is needed as a substrate carrier for silicon wafers to transport the silicon wafers into the coating equipment cavity and transport them within multiple cavities.

[0003] Currently, substrate coating carriers are secured with metal wires of 0.3mm-0.5mm diameter, such as nickel-based alloy or tungsten wire, before a sub-carrier is placed on top. While the materials of the metal wires used on current carriers vary, the diameter is too small at only 0.3-0.5mm. As carrier sizes continue to increase, the current wire diameter is insufficient to meet the demands of long service life. Furthermore, due to the structural limitations of the sub-carrier, the thickness is only 2.5mm, preventing a direct increase in wire diameter. This results in a shorter service life for the coating carrier, increased maintenance frequency, and higher production costs. Moreover, the previous method of using metal wires to secure the sub-carrier only restricts displacement in one direction during transport (e.g., restricting left-right or up-down movement). During transport, the sub-carrier is prone to drifting in directions without restriction, causing the silicon wafers on the carrier to wobble, leading to wafer breakage and coating defects. Utility Model Content

[0004] The purpose of this invention is to solve the problems of short service life and insufficient displacement restriction of the existing technology, and to provide a steel strip structure substrate coated carrier plate. Under the condition that the wire diameter cannot be increased, the service life of the carrier plate is improved by increasing the cross-sectional area of ​​the steel strip, while solving the defect that the sub-carrier plate can only restrict displacement in one direction.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model discloses a steel strip structure substrate coating carrier plate, which includes a carrier plate frame, a fixing sleeve disposed on the carrier plate frame, and several sub-carrier plates. Several steel strips are arranged horizontally and vertically on the carrier plate frame, and several sub-carrier plates are clamped onto the steel strips. The sub-carrier plates have grooves on both sides and in the middle that mate with the steel strips, and the grooves are gap-fitted with the steel strips. The two ends of the fixing sleeve are respectively transitionally connected to the ends of the grooves of two adjacent sub-carrier plates, located between the grooves and the steel strips, filling the gap between the grooves and the steel strips, and connecting adjacent sub-carrier plates to restrict the lateral and longitudinal displacement of the sub-carrier plates.

[0007] Furthermore, the thickness of the subcarrier plate is 2-2.5 mm, the length of the steel strip is 1-2 mm, and the width is 0.3-0.5 mm.

[0008] Furthermore, let the direction of the carrier plate movement be the X-axis, and the direction perpendicular to the X-axis be the Y-axis. Each sub-carrier plate is equipped with three Y-axis steel strips along the Y-axis and one X-axis steel strip along the X-axis. The three Y-axis steel strips are located on both sides of the sub-carrier plate and at the center line of the sub-carrier plate in the X-axis direction, respectively, while the X-axis steel strip is located at the center line of the sub-carrier plate in the Y-axis direction.

[0009] Furthermore, both ends of the steel strip are fixed to the frame of the carrier plate by a fixing component; the fixing component includes a pressure plate and screws, the steel strip is disposed between the pressure plate and the frame of the carrier plate, and the pressure plate is fixed to the frame of the carrier plate by screws.

[0010] Furthermore, the fixing component is also provided with an adjusting component for adjusting the tension of the steel belt.

[0011] Furthermore, the slot is provided with an opening for inserting a steel strip.

[0012] Furthermore, a buffer gap is provided between the sub-carrier plate located at the edge of the carrier plate frame and the carrier plate frame, and a limiting sleeve is fitted on the steel strip within the buffer gap; one end of the limiting sleeve abuts against the inner side of the carrier plate frame, and the other end abuts against the outer side of the sub-carrier plate.

[0013] The advantages of this utility model are:

[0014] 1. In situations where it is not possible to increase the diameter of the metal wire, this utility model universally replaces the 0.3-0.5mm diameter metal wire with a 0.5x1mm to 0.5x2mm metal steel strip. The increased cross-sectional area of ​​the steel strip improves the tensile strength compared to the metal wire, thereby extending the service life of the carrier plate.

[0015] 2. The addition of fixed steel strip sleeves between the subcarrier plates not only protects the steel strip from exposure to the plasma area during the coating process, increasing its lifespan, but also restricts the displacement of the subcarrier plates due to the steel strip sleeves, reducing the risk of displacement during transport. This overcomes the limitation of existing subcarrier plates that can only restrict displacement in one direction, thus increasing the stability of the subcarrier plates. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a front view of this embodiment.

[0018] Figure 2 yes Figure 1 A magnified view of a portion of point A in the middle.

[0019] Figure 3 This is a schematic diagram of the back of this embodiment.

[0020] Figure 4 yes Figure 3 A magnified view of a section at point B.

[0021] Figure 5 yes Figure 3 A schematic diagram of the cross-section along CC.

[0022] Figure 6 yes Figure 5 A magnified view of a section at point D.

[0023] Explanation of key component symbols:

[0024] 1. Carrier plate frame;

[0025] 2. Fixing the sleeve;

[0026] 3. Limiting sleeve;

[0027] 4. Subcarrier board; 41. Slot;

[0028] 5. Steel strip; 51. X-axis steel strip; 52. Y-axis steel strip;

[0029] 6. Fixing components, 61. Pressure plate, 62. Screws. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0031] In this utility model, unless otherwise stated, directional terms such as "up," "down," "left," and "right" are generally understood in conjunction with the accompanying drawings and the directions shown in actual applications.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0033] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0034] The endpoints and any values ​​of the ranges disclosed herein are not limited to the precise ranges or values, and should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of the various ranges, the endpoint values ​​of the various ranges and individual point values, and individual point values ​​can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed herein. The terms "optional" and "discretionary" mean that they may or may not be included (or may or may not be present).

[0035] like Figures 1 to 6 As shown, this embodiment discloses a steel strip 5 structure substrate coating carrier plate, which includes a carrier plate frame 1 and a fixing sleeve 2, a limiting sleeve 3 and several sub-carrier plates 4 disposed on the carrier plate frame 1.

[0036] like Figure 1 As shown, several steel strips 5 are arranged horizontally and vertically on the carrier frame 1. The two ends of the steel strips 5 are fixed to the carrier frame edge by fixing components 6. Figure 2 As shown, the fixing component 6 includes a pressure plate 61 and screws 62. The steel strip 5 is disposed between the pressure plate 61 and the frame of the carrier plate, and the pressure plate 61 is fixed to the frame of the carrier plate by the screws 62. In order to reduce the sag of the sub-carrier plate 4, the fixing component 6 may be provided with an adjusting component for adjusting the tension of the steel strip 5 (not shown in the figure). The adjusting component may be adjusted by a screw or by a buckle.

[0037] The sub-carrier plate 4 has slots 41 on both sides and in the middle to mate with the steel strip 5. The outer side of the slots 41 has openings for engaging the steel strip 5. Several sub-carrier plates 4 are used to hold the steel strip 5 within the slots 41 through the openings, with the slots 41 and steel strip 5 connected by a clearance fit. This clearance fit connection facilitates the installation of the sub-carrier plates 4 and the adjustment of their position.

[0038] like Figure 1As shown, a buffer gap is provided between the sub-carrier plate 4, which is located on the edge of the carrier plate frame 1, and the carrier plate frame 1. A limiting sleeve 3 is fitted on the steel strip 5 within the buffer gap. One end of the limiting sleeve 3 abuts against the inner side of the carrier plate frame 1, and the other end abuts against the outer side of the sub-carrier plate 4.

[0039] like Figure 3 , 4 As shown, the ends of the slots 41 of two adjacent sub-carrier plates 4 are respectively connected to the two ends of the fixing sleeve 2 through a transition fit. The fixing sleeve 2 is located between the slots 41 and the steel strip 5, and is used to fill the gap between the slots 41 and the steel strip 5, connecting adjacent sub-carrier plates 4 to restrict the lateral and longitudinal displacement of the sub-carrier plates 4.

[0040] The thickness of the subcarrier plate 4 is 2-2.5mm, and the length of the steel strip 5 is 1-2mm, and the width is 0.3-0.5mm.

[0041] Specifically, let the direction of the carrier plate's movement be the X-axis, and the direction perpendicular to the X-axis be the Y-axis. Each sub-carrier plate 4 is equipped with three Y-axis steel strips 52 along the Y-axis and one X-axis steel strip 51 along the X-axis. The three Y-axis steel strips 52 are located on both sides of the sub-carrier plate 4 and at the center line of the sub-carrier plate in the X-axis direction, respectively, while the X-axis steel strip 51 is located at the center line of the sub-carrier plate in the Y-axis direction. Increasing the number of steel strips along the direction of the carrier plate's movement reduces the impact intensity on the steel strips caused by the inertia generated during the sub-carrier plate's movement.

[0042] The installation process for the coated carrier plate is as follows:

[0043] Fixing the steel strip 5: First, fix one end of the steel strip 5 to the carrier frame 1, then pre-install the fixing sleeve 2 and the limiting sleeve 3 on the steel strip 5, and finally fix the other end of the steel strip 5 to the carrier frame 1.

[0044] Installing the subcarrier plate 4: The subcarrier plate 4 is installed on the steel strip 5 by clamping the steel strip 5 in the slot 41 through the opening. The outer side of the subcarrier plate 4 at the edge abuts against the limiting sleeve. Adjacent subcarrier plates 4 are connected by a fixing sleeve set at the end of the slot 41.

[0045] Tighten steel belt 5: Adjust the tension of steel belt 5 according to the flatness requirements of subcarrier plate 4 by adjusting the component.

[0046] In summary, given the limitation of not being able to increase the wire diameter, this invention generally replaces the 0.3mm-0.5mm diameter metal wire with a 0.5x1mm / 0.5x2mm metal steel strip. Increasing the cross-sectional area of ​​the steel strip improves the service life of the carrier plate and simultaneously solves the defect that the sub-carrier plate can only restrict displacement in one direction.

[0047] The preferred embodiments of this utility model have been described in detail above; however, this utility model is not limited thereto. Within the scope of the technical concept of this utility model, various simple modifications can be made to the technical solution of this utility model, including combining the various technical features in any other suitable manner. These simple modifications and combinations should also be considered as the content disclosed by this utility model and are all within the protection scope of this utility model.

Claims

1. A steel strip structure substrate coating carrier plate, characterized in that: The system includes a carrier frame (1), a fixing sleeve (2) and several sub-carrier plates (4) disposed on the carrier frame (1); several steel strips (5) are arranged horizontally and vertically on the carrier frame (1), and several sub-carrier plates (4) are clamped on the steel strips (5); the sub-carrier plates (4) are provided with slots (41) that cooperate with the steel strips (5) on both sides and in the middle, and the slots (41) are connected to the steel strips (5) with a clearance fit; the two ends of the fixing sleeve (2) are respectively connected to the ends of the slots (41) of two adjacent sub-carrier plates (4) with a transition fit, located between the slots (41) and the steel strips (5), filling the gap between the slots (41) and the steel strips (5), connecting adjacent sub-carrier plates (4) to restrict the horizontal and vertical displacement of the sub-carrier plates (4).

2. The steel strip structure substrate coating carrier plate according to claim 1, characterized in that: The thickness of the subcarrier plate (4) is 2-2.5 mm, the length of the steel strip (5) is 1-2 mm, and the width is 0.3-0.5 mm.

3. The steel strip structure substrate coating carrier plate according to claim 1, characterized in that: Let the direction of the carrier plate movement be the X-axis, and the direction perpendicular to the X-axis be the Y-axis. Each sub-carrier plate (4) is equipped with three Y-axis steel strips (5) along the Y-axis and one X-axis steel strip (5) along the X-axis. The three Y-axis steel strips (5) are located on both sides of the sub-carrier plate (4) and at the center line of the X-axis of the sub-carrier plate (4), respectively. The X-axis steel strip (5) is located at the center line of the Y-axis of the sub-carrier plate (4).

4. The steel strip structure substrate coating carrier plate according to claim 1, characterized in that: The two ends of the steel strip (5) are fixed to the frame of the carrier plate by a fixing component (6); the fixing component (6) includes a pressure plate (61) and screws (62), the steel strip (5) is disposed between the pressure plate (61) and the frame of the carrier plate, and the pressure plate (61) is fixed to the frame of the carrier plate by screws (62).

5. The steel strip structure substrate coating carrier plate according to claim 4, characterized in that: The fixing component (6) is also provided with an adjusting component for adjusting the tightness of the steel belt (5).

6. The steel strip structure substrate coating carrier plate according to claim 1, characterized in that: The slot (41) is provided with an opening for inserting the steel strip (5).

7. The steel strip structure substrate coating carrier plate according to claim 1, characterized in that: A buffer gap is provided between the sub-carrier plate (4) located on the edge of the carrier plate frame (1) and the carrier plate frame (1). A limiting sleeve (3) is fitted on the steel strip (5) within the buffer gap. One end of the limiting sleeve (3) abuts against the inner side of the carrier plate frame (1), and the other end abuts against the outer side of the sub-carrier plate (4).

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