A multi-dimensional motion device for a liquid phase epitaxy apparatus

Abstract

The utility model discloses a kind of multi-dimensional motion devices for liquid phase epitaxial equipment, comprising: lifting assembly, rotating assembly, sealing assembly, pull rod assembly and graphite boat, the graphite boat is used to load process piece;The pull rod assembly includes nested inner pull rod and outer pull rod, the lower portion of inner pull rod and outer pull rod is connected with graphite boat, and outer pull rod top and the nested connection place of inner pull rod are equipped with sealing assembly, and the sealing assembly is used to realize inner pull rod and outer pull rod dynamic sealing connection;The upper portion of inner pull rod is connected with lifting assembly, and lifting assembly is used to drive pull rod assembly lifting, drives graphite boat lifting to enter and exit mother liquor, realizes process piece coating;The upper portion of outer pull rod is connected with rotating assembly, and rotating assembly is used to drive pull rod assembly rotation, drives graphite boat rotation to agitate mother liquor.The utility model has the characteristics of compact structure, convenient operation, high reliability, significantly improves the uniformity and consistency of epitaxial process piece coating.

Description

Technical Field

[0001] This utility model relates to the field of liquid phase epitaxy equipment technology, specifically to a multi-dimensional motion device for liquid phase epitaxy equipment. Background Technology

[0002] Currently, most liquid phase epitaxy equipment uses a single-dimensional horizontal or vertical boat feeding method. The graphite boat enters the reaction chamber via a pull rod, which cannot simultaneously perform high-precision lifting and rotating movements, thus resulting in the following disadvantages: (1) Single-dimensional displacement motion cannot meet the positioning requirements of graphite boats in diverse processes; (2) One-dimensional displacement motion cannot stir the mother liquor, while the process requires the rotation of the graphite boat to mix the mother liquor evenly. (3) Single-dimensional displacement motion cannot accurately control the surface temperature of the process sheet at different positions, resulting in poor temperature control stability. Utility Model Content

[0003] The technical problem to be solved by this utility model is that the existing liquid phase epitaxy equipment has a single boat pushing method, which cannot drive the graphite boat to rotate, and the dynamic sealing of the tie rod is poor, which limits the uniformity of film thickness and temperature stability of the equipment. The present invention provides a multi-dimensional motion device for liquid phase epitaxy equipment that is compact, easy to operate and highly stable.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: A multi-dimensional motion device for a liquid phase epitaxy apparatus includes: a lifting assembly, a rotating assembly, a sealing assembly, a pull rod assembly, and a graphite boat. The graphite boat is used to load a process wafer. The pull rod assembly includes a nested inner pull rod and an outer pull rod, the lower parts of which are connected to the graphite boat. A sealing assembly is provided at the nested connection between the top of the outer pull rod and the inner pull rod, the sealing assembly being used to achieve a dynamic sealing connection between the inner and outer pull rods. The upper part of the inner pull rod is connected to the lifting assembly, which drives the pull rod assembly to lift and lower, thereby moving the graphite boat to move in and out of the mother liquor to achieve coating of the process wafer. The upper part of the outer pull rod is connected to the rotating assembly, which drives the pull rod assembly to rotate, thereby rotating the graphite boat to agitate the mother liquor.

[0005] As a further improvement of this utility model, the multi-dimensional motion device also includes a mounting frame, on which the lifting component and the rotating component are both mounted and fixed.

[0006] As a further improvement of this utility model, the lifting assembly includes a lifting motor, a first synchronous transmission assembly, a lead screw assembly, and a slide rail pair; the mounting frame includes a mounting side plate, a first mounting plate, a first connecting plate, and a second mounting plate; the slide rail pair is vertically disposed on the mounting side plate, the first connecting plate is slidably connected to the slide rail pair, and the lead screw assembly and the inner tie rod are both disposed through the first connecting plate; the first mounting plate and the second mounting plate are both horizontally disposed on the mounting side plate, the lifting motor is mounted on the first mounting plate, one end of the lead screw assembly is connected to the lifting motor through the first synchronous transmission assembly, and the other end of the lead screw assembly is rotatably connected to the second mounting plate; when the lifting motor drives the lead screw assembly to rotate, the first connecting plate drives the inner tie rod to reciprocate up and down along the slide rail pair to realize the lifting of the graphite boat.

[0007] As a further improvement of this utility model, the first synchronous transmission assembly includes a first synchronous belt and a first pulley. The two first pulleys are respectively connected to the lead screw assembly and the lifting motor. The first synchronous belt is used to connect the two first pulleys to realize the transmission of lifting driving force.

[0008] As a further improvement of this utility model, the rotating assembly includes a rotary motor, a second synchronous transmission assembly, and a rotary bearing; the mounting frame includes a mounting base plate, and the rotary motor is mounted on the mounting base plate; one end of the second synchronous transmission assembly is connected to the rotary motor, and the other end of the second synchronous transmission assembly is connected to the rotary bearing, the rotary bearing being nested around the outer circumference of the outer tie rod, so that the graphite boat can rotate when the rotary motor drives the rotary bearing and the outer tie rod to rotate.

[0009] As a further improvement of this utility model, the second synchronous transmission assembly includes a second synchronous belt and a second pulley. The two second pulleys are respectively connected to a rotary bearing and a rotary motor. The second synchronous belt is used to connect the two second pulleys to realize the transmission of rotational driving force.

[0010] As a further improvement of this utility model, the mounting bracket further includes a second connecting plate and a third mounting plate. The second connecting plate is connected to the third mounting plate and the mounting base plate respectively. The third mounting plate is parallel to the mounting base plate. The sealing component is disposed on the third mounting plate.

[0011] As a further improvement of this utility model, the sealing assembly includes a sealing pressure ring, a sleeve, and a shell arranged sequentially from the inside to the outside, and multiple O-rings are provided in the vertical direction between the sealing pressure ring and the sleeve, and between the sleeve and the shell; the sealing pressure ring is nested on the outer periphery of the inner pull rod, the upper part of the sleeve is nested on the outer periphery of the sealing pressure ring, the lower part of the sleeve is nested on the outer periphery of the outer pull rod, and multiple O-rings are provided between the sleeve and the outer pull rod.

[0012] As a further improvement of this utility model, the top of the outer shell is sealed to the outer periphery of the sleeve, the bottom of the outer shell is sealed to the third mounting plate, and a connection port is provided on the side of the outer shell. The connection port is connected to a vacuum pump through a pipe to realize vacuuming inside the sealing assembly.

[0013] As a further improvement of this utility model, lubricating grease is applied between the inner tie rod and the outer tie rod to achieve lubrication.

[0014] Compared with the prior art, the advantages of this utility model are: 1. This utility model discloses a multi-dimensional motion device for liquid phase epitaxy equipment. It comprises a tie rod assembly consisting of nested inner and outer tie rods, both connected at their bottoms to a graphite boat. The inner tie rod is also connected to a lifting assembly, which drives the graphite boat to move in and out of the mother liquor. The outer tie rod is connected to a rotating assembly, which drives the graphite boat to rotate and agitate the mother liquor, ensuring the boat is completely immersed and simultaneously stirring the molten mother liquor. This improves the uniformity and consistency of the epitaxial wafers. This utility model expands the structural design of the boat-entry motion assembly in liquid phase epitaxy equipment, enabling multi-dimensional boat-entry motion and providing the equipment with high-precision lifting and rotating motion functions, thus improving the film thickness uniformity and temperature control stability of the process.

[0015] 2. The multi-dimensional motion device for liquid phase epitaxy equipment disclosed in this utility model achieves multi-dimensionality and reliable sealing in the boat-pushing method by utilizing a combination of a motor and modules. Multiple O-rings ensure reliable dynamic sealing between the inner and outer tie rods. A pulley kinematic pair and a rotary bearing enable the tie rod to drive the rotation of the graphite boat, ensuring the boat is completely immersed in the mother liquor and capable of stirring the molten mother liquor. Simultaneously, a vacuum module is used to detect the vacuum between the multiple O-rings. This multi-dimensional motion device has a compact structure, flexible operation, and is safe and reliable, providing a solution for the boat-pushing motion method in liquid phase epitaxy while avoiding mechanical interference and improving user operability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram illustrating the structural principle of the multi-dimensional motion device used in a liquid phase epitaxy apparatus in a specific embodiment of this utility model; Figure 2 This is a schematic diagram of the structural principle of the lifting component in a specific embodiment of this utility model; Figure 3 This is a schematic diagram of the structural principle of the rotating component in a specific embodiment of this utility model; Figure 4 This is a schematic diagram illustrating the structural principle of the sealing assembly and the pull rod assembly in a specific embodiment of this utility model; Legend: 100, Lifting assembly; 200, Rotating assembly; 300, Sealing assembly; 400, Tie rod assembly; 500, Graphite boat; 600, Mounting bracket; 101, Lifting motor; 102, First synchronous belt; 103, First pulley; 104, Lead screw assembly; 105, Slide rail pair; 201, Rotary motor; 202, Reducer; 203, Second synchronous belt; 204, Rotary bearing; 205, Second pulley; 301, O-ring seal; 302, Sealing pressure ring; 303, Sleeve; 304, Housing; 305, Connecting port; 401, Inner tie rod; 402, Outer tie rod; 601, Mounting side plate; 602, Mounting base plate; 603, First mounting plate; 604, First connecting plate; 605, Second mounting plate; 606, Second connecting plate; 607, Third mounting plate. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0018] In the description of this utility model, it should be understood that the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0020] Example like Figure 1 and Figure 3As shown, the multi-dimensional motion device for liquid phase epitaxy equipment of this utility model includes: a lifting assembly 100, a rotating assembly 200, a sealing assembly 300, a pull rod assembly 400, and a graphite boat 500. The graphite boat 500 is used to load the process wafer to realize the entry and exit of the process wafer in the liquid phase epitaxy equipment. The pull rod assembly 400 includes an inner pull rod 401 and an outer pull rod 402 nested together. The lower parts of both the inner pull rod 401 and the outer pull rod 402 are connected to the graphite boat 500 through graphite pins. A sealing assembly 300 is provided at the nested connection between the top of the outer pull rod 402 and the inner pull rod 401. The sealing assembly 300 is used to realize a dynamic sealing connection between the inner pull rod 401 and the outer pull rod 402. The upper part of the inner pull rod 401 is connected to the lifting assembly 100. The lifting assembly 100 is used to drive the pull rod assembly 400 to rise and fall, thereby driving the graphite boat 500 to rise and fall to enter and exit the mother liquor, realizing the coating of the process wafer. The upper part of the outer tie rod 402 is connected to the rotating assembly 200, which drives the tie rod assembly 400 to rotate, thereby causing the graphite boat 500 to rotate and agitate the mother liquor.

[0021] In this embodiment, the multidimensional motion device also includes a mounting frame 600, on which the lifting component 100 and the rotating component 200 are all fixed. The rotation of the pull rod 400 drives the rotation of the graphite boat 500. After the graphite boat 500 rotates, descends, and is immersed in the mother liquor, it will rotate and stir the molten mother liquor. This makes the solute distribution inside the mother liquor more uniform and allows each epitaxial wafer to have more full contact with the mother liquor, thereby improving the uniformity and consistency of the epitaxial wafer.

[0022] Since the inner tie rod 401 and the outer tie rod 402 move frequently, lubricating grease is applied between the inner tie rod 401 and the outer tie rod 402 to prevent wear and achieve lubrication.

[0023] In this embodiment, a tie rod assembly 400 is formed by nested inner tie rods 401 and outer tie rods 402. The bottoms of both inner tie rods 401 and outer tie rods 402 are connected to the graphite boat 500. The inner tie rod 401 is also connected to the lifting assembly 100. Driven by the lifting assembly 100, the graphite boat 500 is raised and lowered to enter and exit the mother liquor. The outer tie rod 402 is also connected to the rotating assembly 200. Driven by the rotating assembly 200, the graphite boat 200 is rotated to agitate the mother liquor, ensuring that the graphite boat 500 is completely immersed in the mother liquor. Simultaneously, the molten mother liquor is stirred, thereby improving the uniformity and consistency of the epitaxial wafer. This invention expands the structural design of the boat movement assembly in liquid phase epitaxy equipment, realizing multi-dimensional boat movement, enabling the equipment to have high-precision lifting and rotating motion functions, and improving the film thickness uniformity and temperature control stability of the equipment process.

[0024] like Figure 2As shown, the lifting assembly 100 includes a lifting motor 101, a first synchronous transmission assembly, a lead screw assembly 104, and a slide rail pair 105. It is understood that the lead screw assembly 104 and the slide rail pair 105 can both adopt conventional configurations in the art, and will not be described in detail here. The mounting bracket 600 includes a mounting side plate 601, a first mounting plate 603, a first connecting plate 604, and a second mounting plate 605. The slide rail pair 105 is vertically mounted on the mounting side plate 601. The first connecting plate 604 is connected and fixed to the slider in the slide rail pair 105, and the slider is slidably mounted on the slide rail in the slide rail pair 105, thus achieving a slidable connection between the first connecting plate 604 and the slide rail pair 105. The lead screw assembly 104 and the inner pull rod 401 are both connected through bearings on the first connecting plate 604 to ensure that the lead screw assembly 104 and the inner pull rod 401 can move synchronously. Both the first mounting plate 603 and the second mounting plate 605 are horizontally mounted on the mounting side plate 601. The lifting motor 101 is mounted on the first mounting plate 603. One end of the lead screw assembly 104 is connected to the lifting motor 101 via the first synchronous transmission assembly, and the other end of the lead screw assembly 104 is rotatably connected to the second mounting plate 605. When the lifting motor 101 drives the lead screw assembly 104 to rotate, the first connecting plate 604 drives the inner pull rod 401 to reciprocate up and down along the slide rail pair 105 to realize the lifting of the graphite boat 500.

[0025] Furthermore, the first synchronous transmission assembly includes a first synchronous belt 102 and a first pulley 103. The two first pulleys 103 are respectively connected to the lead screw assembly 104 and the lifting motor 101. The first synchronous belt 102 is used to connect the two first pulleys 103 to achieve stable transmission of lifting driving force and ensure that the graphite boat 500 smoothly enters and exits the mother liquor.

[0026] like Figure 3 As shown, the rotating assembly includes a rotary motor 201, a reducer 202, a second synchronous transmission assembly, and a rotary bearing 204. The mounting bracket 600 includes a horizontally arranged mounting base plate 602. The output end of the rotary motor 201 is connected to the reducer 202, which is mounted on the mounting base plate 602. One end of the second synchronous transmission assembly is connected to the reducer 202, and the other end is connected to the rotary bearing 204, which is nested around the outer circumference of the outer tie rod 402. When the rotary motor 201 drives the rotary bearing 204 and the outer tie rod 402 to rotate via the reducer 202, the graphite boat 500 rotates.

[0027] Furthermore, the second synchronous transmission assembly includes a second synchronous belt 203 and a second pulley 205. The two second pulleys 205 are respectively connected to the rotary bearing 204 and the rotary motor 201. The second synchronous belt 203 is used to connect the two second pulleys 205 to achieve smooth transmission of rotational driving force and ensure that the graphite boat 500 agitates the mother liquor at a uniform speed.

[0028] like Figure 3 As shown, the mounting bracket 600 also includes a second connecting plate 606 and a third mounting plate 607. The second connecting plate 606 is connected to the third mounting plate 607 and the mounting base plate 602 respectively. The third mounting plate 607 and the mounting base plate 602 are parallel to each other. The sealing assembly 300 is disposed on the third mounting plate 607.

[0029] like Figure 4 As shown, the sealing assembly 300 includes a sealing ring 302, a sleeve 303, and a housing 304 arranged sequentially from the inside to the outside. Multiple O-rings 301 are vertically arranged between the sealing ring 302 and the sleeve 303, and between the sleeve 303 and the housing 304. The O-rings 301 have good wear resistance. Specifically, the sealing ring 302 is nested around the outer circumference of the inner tie rod 401. The sleeve 303 passes through the second connecting plate 606 and the third mounting plate 607. The upper part of the sleeve 303 is nested around the outer circumference of the sealing ring 302, and the lower part of the sleeve 303 is nested around the outer circumference of the outer tie rod 402. Multiple O-rings 301 are provided between the sleeve 303 and the outer tie rod 402. The seal between the inner tie rod 401 and the outer tie rod 402 is a dynamic seal. By adopting a multiple O-ring structure, the problem of seal failure due to wear of the sealing rings is avoided.

[0030] Furthermore, the top of the outer casing 304 is sealed to the outer periphery of the sleeve 303, and the bottom of the outer casing 304 is sealed to the third mounting plate 607. A connection port 305 is provided on the side of the outer casing 304, which is connected to a vacuum pump via a pipe to achieve vacuuming inside the sealing assembly 300. The sealing assembly 300 is connected to the vacuum pump via an air pipe to provide a stable vacuum between the multiple O-ring seals 301 and the sealing pressure ring 302. By detecting the vacuum pressure, the sealing performance of the multiple O-ring seals 301 is determined, and the necessary alarm information is provided to the equipment.

[0031] The multi-dimensional motion device for the liquid phase epitaxy equipment in this embodiment uses a multi-axis linkage method to realize the vertical linear motion and rotational motion of the graphite boat 500. While ensuring the connection sealing and reliability, it realizes precise motion control of the graphite boat 500 in multiple dimensions under no-load and full-load conditions, so as to adapt to the positioning requirements of the graphite boat 500 in different process stages and improve the safety of the equipment.

[0032] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A multi-dimensional motion device for liquid phase epitaxy equipment, characterized in that, include: The assembly comprises a lifting component (100), a rotating component (200), a sealing component (300), a pull rod component (400), and a graphite boat (500), wherein the graphite boat (500) is used to load the process sheet; the pull rod component (400) includes a nested inner pull rod (401) and an outer pull rod (402), the lower parts of which are connected to the graphite boat (500), and a sealing component (300) is provided at the nested connection between the top of the outer pull rod (402) and the inner pull rod (401). The component (300) is used to achieve a dynamic sealing connection between the inner tie rod (401) and the outer tie rod (402); the upper part of the inner tie rod (401) is connected to the lifting assembly (100), which is used to drive the tie rod assembly (400) to lift and lower, thereby driving the graphite boat (500) to lift and lower to enter and exit the mother liquor, so as to achieve coating of the process sheet; the upper part of the outer tie rod (402) is connected to the rotating assembly (200), which is used to drive the tie rod assembly (400) to rotate, thereby driving the graphite boat (500) to rotate to stir the mother liquor.

2. The multi-dimensional motion device for liquid phase epitaxy equipment according to claim 1, characterized in that, The multidimensional motion device also includes a mounting frame (600), on which the lifting component (100) and the rotating component (200) are both mounted and fixed.

3. The multi-dimensional motion device for liquid phase epitaxy equipment according to claim 2, characterized in that, The lifting assembly (100) includes a lifting motor (101), a first synchronous transmission assembly, a lead screw assembly (104), and a slide rail pair (105); the mounting bracket (600) includes a mounting side plate (601), a first mounting plate (603), a first connecting plate (604), and a second mounting plate (605); the slide rail pair (105) is vertically mounted on the mounting side plate (601), the first connecting plate (604) is slidably connected to the slide rail pair (105), and the lead screw assembly (104) and the inner tie rod (401) are both mounted through the first connecting plate (604); the first mounting side plate (601) includes a lifting motor (101), a first synchronous transmission assembly, a lead screw assembly (104), and a slide rail pair (105); the first mounting side plate (600) includes a lifting side plate (601), a first synchronous transmission assembly, a lead screw assembly (104), and a slide rail pair (105). The mounting plate (603) and the second mounting plate (605) are both horizontally mounted on the mounting side plate (601). The lifting motor (101) is mounted on the first mounting plate (603). One end of the lead screw assembly (104) is connected to the lifting motor (101) through the first synchronous transmission assembly, and the other end of the lead screw assembly (104) is rotatably connected to the second mounting plate (605). When the lifting motor (101) drives the lead screw assembly (104) to rotate, the first connecting plate (604) drives the inner pull rod (401) to reciprocate up and down along the slide rail pair (105) to realize the lifting of the graphite boat (500).

4. The multidimensional motion device for liquid phase epitaxy equipment according to claim 3, characterized in that, The first synchronous transmission assembly includes a first synchronous belt (102) and a first pulley (103). The two first pulleys (103) are respectively connected to the lead screw assembly (104) and the lifting motor (101). The first synchronous belt (102) is used to connect the two first pulleys (103) to realize the transmission of lifting driving force.

5. The multi-dimensional motion device for liquid phase epitaxy equipment according to claim 2, characterized in that, The rotating assembly (200) includes a rotary motor (201), a second synchronous transmission assembly, and a rotary bearing (204); the mounting frame (600) includes a mounting base plate (602), and the rotary motor (201) is mounted on the mounting base plate (602); one end of the second synchronous transmission assembly is connected to the rotary motor (201), and the other end of the second synchronous transmission assembly is connected to the rotary bearing (204). The rotary bearing (204) is nested on the outer periphery of the outer tie rod (402). When the rotary motor (201) drives the rotary bearing (204) and the outer tie rod (402) to rotate, the graphite boat (500) is rotated.

6. The multi-dimensional motion device for liquid phase epitaxy equipment according to claim 5, characterized in that, The second synchronous transmission assembly includes a second synchronous belt (203) and a second pulley (205). The two second pulleys (205) are respectively connected to a rotary bearing (204) and a rotary motor (201). The second synchronous belt (203) is used to connect the two second pulleys (205) to realize the transmission of rotational driving force.

7. The multidimensional motion device for liquid phase epitaxy equipment according to claim 5, characterized in that, The mounting bracket (600) further includes a second connecting plate (606) and a third mounting plate (607). The second connecting plate (606) is connected to the third mounting plate (607) and the mounting base plate (602) respectively. The third mounting plate (607) and the mounting base plate (602) are parallel to each other. The sealing component (300) is disposed on the third mounting plate (607).

8. The multidimensional motion device for liquid phase epitaxy equipment according to claim 7, characterized in that, The sealing assembly (300) includes a sealing ring (302), a sleeve (303), and a housing (304) arranged sequentially from the inside to the outside. Multiple O-rings (301) are provided vertically between the sealing ring (302) and the sleeve (303), and between the sleeve (303) and the housing (304). The sealing ring (302) is nested around the outer periphery of the inner pull rod (401). The upper part of the sleeve (303) is nested around the outer periphery of the sealing ring (302), and the lower part of the sleeve (303) is nested around the outer periphery of the outer pull rod (402). Multiple O-rings (301) are provided between the sleeve (303) and the outer pull rod (402).

9. The multidimensional motion device for liquid phase epitaxy equipment according to claim 8, characterized in that, The top of the outer shell (304) is sealed to the outer periphery of the sleeve (303), the bottom of the outer shell (304) is sealed to the third mounting plate (607), and the side of the outer shell (304) is provided with a connection port (305). The connection port (305) is connected to a vacuum pump through a pipe to realize vacuuming inside the sealing assembly (300).

10. The multidimensional motion device for a liquid phase epitaxy apparatus according to any one of claims 1 to 9, characterized in that, Lubricating grease is applied between the inner tie rod (401) and the outer tie rod (402) to achieve lubrication.

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