A seed holder for growing high quality silicon carbide crystals

Abstract

The utility model relates to the field of crystal growth, concretely relates to a seed crystal holder for growing high-quality silicon carbide crystal, which comprises a crucible, a crucible cover is detachably fixed on the top of the crucible, a seed crystal holder is installed on the crucible cover through a uniform crystallization assembly, the seed crystal holder is detachably installed on the uniform crystallization assembly through a plug-in assembly, and a seed crystal is adhered to the bottom of the seed crystal holder through an adhesive. The utility model has the beneficial effects that the seed crystal holder can rotate slowly, so that the gaseous Si2C, SiC2 and Si produced by the sublimation of SiC raw materials under heat can be uniformly transmitted to the seed crystal for crystallization, even if the heating of SiC raw materials is uneven, it does not affect the crystallization, and it is beneficial to the growth of high-quality silicon carbide crystal.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth, specifically to a seed crystal holder for growing high-quality silicon carbide crystals. Background Technology

[0002] During the growth of SiC crystals, SiC seed crystals are bonded to the seed crystal holder using an adhesive. During the bonding process, due to factors such as poor machining precision of the seed crystal holder surface and uneven adhesive bonding, some pores exist between the back of the seed crystal and the seed crystal holder. The difference in thermal conductivity between the pores and the high-temperature carbonized adhesive will lead to uneven temperature distribution on the back of the seed crystal. During crystal growth, by changing the size and shape of the heat dissipation holes in the upper insulation material of the graphite crucible, a certain temperature gradient is formed in the growth chamber. The SiC raw material is in the high-temperature zone, and the seed crystal is in the low-temperature zone. The temperature inside the crucible is raised to 2000-2300°C, causing the SiC raw material to sublimate. The gaseous phases Si2C, SiC2, and Si produced by sublimation are transported from the surface of the raw material to the low-temperature seed crystal under the action of the temperature gradient, crystallizing into a blocky crystal.

[0003] Conventional seed crystal holders used for growing silicon carbide crystals suffer from uneven heating of the SiC raw material. This results in the inability of the sublimated gaseous Si2C, SiC2, and Si to be uniformly transported to the low-temperature seed crystal, leading to uneven crystal crystallization and affecting the quality of seed crystal growth.

[0004] Therefore, it is necessary to invent a seed crystal holder for growing high-quality silicon carbide crystals. Utility Model Content

[0005] Therefore, this invention provides a seed crystal holder for growing high-quality silicon carbide crystals to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a seed crystal holder for growing high-quality silicon carbide crystals, comprising a crucible, a crucible cover detachably fixed to the top of the crucible, a seed crystal holder mounted on the crucible cover via a uniform crystallization assembly, the seed crystal holder being detachably mounted on the uniform crystallization assembly via a plug-in assembly, and a seed crystal adhered to the bottom of the seed crystal holder by an adhesive.

[0007] Preferably, the uniform crystallization component includes a speed reducer, the bottom of which is fixed at the center of the top of the crucible cover, and a servo motor is vertically fixed at the top of the speed reducer.

[0008] Preferably, the output shaft of the servo motor is fixedly connected to the input shaft of the reducer, and a rotating seat is fixed at the bottom end of the output shaft of the reducer.

[0009] Preferably, the plug-in assembly includes an opening groove, which is formed at the bottom of the rotating seat, and a plug-in block is fixed on the top of the seed crystal holder, the plug-in block being inserted into the opening groove.

[0010] Preferably, the plug-in assembly further includes a receiving groove, which is formed on the side end of the rotating seat, and a cover plate is fixed at the opening of the receiving groove.

[0011] Preferably, a pull rod passes through the center of the cover plate, and a sliding block is fixed at one end of the pull rod located in the receiving groove. The sliding block is slidably installed in the receiving groove.

[0012] Preferably, a return spring is fixed to the side end of the sliding block, and the end of the return spring away from the sliding block is fixed to the surface of the cover plate.

[0013] Preferably, the inner wall of the receiving groove has a through hole connected to the opening groove, the side end of the plug block has a slot, the side end of the sliding block is fixed with a pin, the pin passes through the through hole and is inserted into the slot.

[0014] The beneficial effects of this invention are as follows: by using the crucible, crucible cover, uniform crystallization component, seed crystal holder, insertion component, adhesive and seed crystal in combination, the seed crystal holder can rotate slowly, so that the gaseous Si2C, SiC2 and Si generated by the sublimation of SiC raw material can be uniformly transported to the seed crystal for crystallization. Even if the SiC raw material is heated unevenly, it will not affect the growth of high-quality silicon carbide crystals. Attached Figure Description

[0015] Figure 1 A structural cross-sectional view provided for this utility model; Figure 2 for Figure 1 Enlarged view of the structure at point A in the image; Figure 3 A schematic diagram of the internal structure of the crucible provided by this utility model; Figure 4 The main structural view provided for this utility model.

[0016] In the diagram: 1. Crucible; 2. Crucible lid; 3. Seed crystal holder; 4. Adhesive; 5. Seed crystal; 6. Reducer; 7. Servo motor; 8. Rotating seat; 9. Opening slot; 10. Insertion block; 11. Receiving slot; 12. Cover plate; 13. Pull rod; 14. Sliding block; 15. Return spring; 16. Through hole; 17. Slot; 18. Pin. Detailed Implementation

[0017] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0018] Please refer to the appendix. Figures 1-4 The present invention provides a seed crystal holder for growing high-quality silicon carbide crystals, including a crucible 1, a crucible cover 2 detachably fixed to the top of the crucible 1, a seed crystal holder 3 installed on the crucible cover through a uniform crystallization component, the seed crystal holder 3 detachably installed on the uniform crystallization component through a plug-in component, and a seed crystal 5 bonded to the bottom of the seed crystal holder 3 by an adhesive 4. The above structure is known to those skilled in the art and will not be described in detail. The uniform crystallization assembly includes a speed reducer 6, which is a transmission device for low speed and high torque. The speed reducer reduces the power of the high-speed motor by meshing a small gear on the input shaft with a large gear on the output shaft. The bottom of the speed reducer 6 is fixed at the center of the top of the crucible cover 2. A servo motor 7 is vertically fixed on the top of the speed reducer 6. The output shaft of the servo motor 7 is fixedly connected to the input shaft of the speed reducer 6. A rotating seat 8 is fixed at the bottom of the output shaft of the speed reducer 6. Specifically, under the speed reduction action of the speed reducer 6, when the servo motor 7 is running, it can drive the rotating seat 8 to rotate slowly inside the crucible. The insertion assembly includes an opening slot 9, which is located at the bottom of the rotating base 8. An insertion block 10 is fixed to the top of the seed crystal holder 3 and is inserted into the opening slot 9. The assembly also includes a receiving groove 11, located at the side of the rotating base 8. A cover plate 12 is fixed to the opening of the receiving groove 11, and a pull rod 13 passes through the center of the cover plate 12. A sliding block 14 is fixed to one end of the pull rod 13 located in the receiving groove 11. The sliding block 14 is slidably installed within the receiving groove 11. A return spring 15 is fixed to the side of the sliding block 14, and the end of the return spring 15 away from the sliding block 14 is fixed to the surface of the cover plate 12. A through hole 16 is provided on the inner wall of the receiving groove 11, communicating with the opening slot 9. A slot 17 is provided on the side of the 10, and a pin 18 is fixed on the side of the sliding block 14. The pin 18 passes through the through hole 16 and is inserted into the slot 17. Specifically, under the insertion action of the pin 18 and the slot 17, the insertion block 10 can be inserted and fixed on the rotating seat 8, so that the seed crystal holder 3 can be fixed and detachably fixed on the rotating seat 8. Therefore, when the servo motor 7 runs and drives the rotating seat 8 to rotate slowly, the seed crystal holder 3 and the seed crystal 5 can rotate slowly and synchronously. This allows the gaseous Si2C, SiC2 and Si generated by the thermal sublimation of SiC raw material to be uniformly transported to the seed crystal for crystallization. Even if the SiC raw material is heated unevenly, it will not affect the growth of high-quality silicon carbide crystals.

[0019] The usage process of this utility model is as follows: When in use, the operator can start the servo motor 7. Under the deceleration action of the reducer 6, the servo motor 7 can drive the rotating seat 8 to rotate slowly in the crucible, which can drive the seed crystal holder 3 and the seed crystal 5 to rotate slowly in sync. This allows the gaseous Si2C, SiC2 and Si generated by the thermal sublimation of SiC raw materials to be uniformly transported to the seed crystal for crystallization. Even if the SiC raw materials are not heated uniformly, it will not affect the growth of high-quality silicon carbide crystals. The operator only needs to pull the pull rod 13 to pull the pin 18 out of the slot 17 to disassemble the seed crystal holder 3. When the pull rod 13 is pulled, that is, when the sliding block 14 moves in the receiving groove 11, it will squeeze the return spring 15, causing the return spring 15 to undergo elastic deformation and generate elastic force. Under the action of this elastic force, when the operator releases the pull rod 13, the pin 18 can move in the opposite direction and insert into the slot 17, so that the seed crystal holder 3 can be installed. It is convenient to use.

[0020] The above description is merely a preferred embodiment of this utility model. Any person skilled in the art can modify this utility model or modify it into an equivalent technical solution using the technical solution described above. Therefore, any simple modifications or equivalent substitutions made based on the technical solution of this utility model are within the scope of protection claimed by this utility model.

Claims

1. A seed crystal holder for growing high-quality silicon carbide crystals, comprising a crucible (1), wherein a crucible lid (2) is detachably fixed to the top of the crucible (1), characterized in that: The crucible lid is fitted with a seed crystal holder (3) via a uniform crystallization assembly. The seed crystal holder (3) is detachably mounted on the uniform crystallization assembly via a plug-in assembly. The bottom of the seed crystal holder (3) is bonded with a seed crystal (5) via an adhesive (4).

2. The seed crystal holder for growing high-quality silicon carbide crystals according to claim 1, characterized in that: The uniform crystallization assembly includes a speed reducer (6), the bottom of which is fixed at the center of the top of the crucible cover (2), and a servo motor (7) is vertically fixed at the top of the speed reducer (6).

3. A seed crystal holder for growing high-quality silicon carbide crystals according to claim 2, characterized in that: The output shaft of the servo motor (7) is fixedly connected to the input shaft of the reducer (6), and a rotating seat (8) is fixed at the bottom of the output shaft of the reducer (6).

4. A seed crystal holder for growing high-quality silicon carbide crystals according to claim 3, characterized in that: The plug-in assembly includes an opening groove (9), which is located at the bottom of the rotating seat (8). A plug-in block (10) is fixed on the top of the seed crystal holder (3), and the plug-in block (10) is inserted into the opening groove (9).

5. A seed crystal holder for growing high-quality silicon carbide crystals according to claim 4, characterized in that: The plug-in assembly also includes a receiving groove (11), which is opened on the side of the rotating seat (8), and a cover plate (12) is fixed at the opening of the receiving groove (11).

6. A seed crystal holder for growing high-quality silicon carbide crystals according to claim 5, characterized in that: A pull rod (13) runs through the center of the cover plate (12). A sliding block (14) is fixed at one end of the pull rod (13) in the receiving groove (11). The sliding block (14) is slidably installed in the receiving groove (11).

7. A seed crystal holder for growing high-quality silicon carbide crystals according to claim 6, characterized in that: A reset spring (15) is fixed to the side end of the sliding block (14), and the end of the reset spring (15) away from the sliding block (14) is fixed to the surface of the cover plate (12).

8. A seed crystal holder for growing high-quality silicon carbide crystals according to claim 7, characterized in that: The inner wall of the receiving groove (11) is provided with a through hole (16), which is connected to the opening groove (9). The side end of the plug block (10) is provided with a slot (17), and the side end of the sliding block (14) is fixed with a pin (18). The pin (18) passes through the through hole (16) and is inserted into the slot (17).

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