A replacement plate tank valve

Abstract

This application discloses a replacement valve for a drum valve, relating to the field of valve technology, used to solve the problem of difficulty in replacing the original vacuum valve of the P5000ETCH cavity. It includes: a valve body with a through-hole in the middle, the hole connecting to a sealing cavity in the middle of the valve body; annular grooves one and two on the upper and lower end faces of the valve body, respectively, arranged sequentially around the through-hole; a connecting part at the bottom of the valve body, the end face of which is on the same plane as the two end faces of the valve body, and an installation groove at the end of the connecting part, the sealing cavity connecting the installation groove and the through-hole. The outer wall of the valve body is an arc-shaped structure centered on the through-hole, with a groove on the outer wall, the groove having an arc-shaped groove in the middle and inclined grooves at both ends; the length of the connecting part is the same as the diameter of the outer wall of the valve body, and connecting holes are provided at both ends of the connecting part. Three connecting holes are provided on the left end of the connecting part, located on both sides and the end of the inclined groove, and one connecting hole is provided on the right end of the connecting part, located at the end of the inclined groove.

Description

Technical Field

[0001] This utility model relates to the field of valve technology, and in particular to a replacement plate valve. Background Technology

[0002] In the field of vacuum-assisted processes in semiconductor manufacturing, vacuum valves are core components that ensure process stability and product quality. Their precision, durability, and adaptability to ultra-clean vacuum environments are crucial. AMAT's P5000ETCH multi-chamber parallel microcontroller processing system must maintain a constant pressure and cleanliness within the central vacuum transfer chamber during operation. This requires vacuum valves to reliably isolate the chamber from the preceding pipeline vacuum system. However, due to the discontinuation of production of the original vacuum valve for the P5000 ETCH chamber over time, and given the high value of the equipment itself, there is an urgent need to continue using it. However, existing plate valves on the market have significant size differences from the original products, making it difficult to find suitable replacement parts when the original vacuum plate valve malfunctions. Therefore, a new replacement drum valve is needed to solve the problem of the original vacuum valve in the P5000 ETCH chamber being difficult to replace. Utility Model Content

[0003] The purpose of this application is to provide a new replacement drum valve that can solve the problem of the difficulty in replacing the original vacuum valve in the P5000 ETCH chamber.

[0004] To achieve the above objectives, the embodiments of this application adopt the following technical solutions: include: The valve body has a through-hole in the middle, which connects to the sealing cavity in the middle of the valve body. The upper and lower end faces of the valve body are respectively provided with annular groove 1 and annular groove 2, which are arranged in sequence around the through-hole. The bottom of the valve body is provided with a connecting part, the end face of which is on the same plane as the two end faces of the valve body. The end of the connecting part is provided with a mounting groove, and the sealing cavity connects the mounting groove and the through-hole. The outer wall of the valve body is an arc-shaped structure with the through-hole as the center. The outer wall of the valve body is provided with a groove, the middle of which is an arc-shaped groove and the two ends are inclined grooves. The length of the connecting part is the same as the diameter of the outer wall of the valve body. The two ends of the connecting part are provided with connecting holes 1. The left end of the connecting part is provided with three connecting holes 1, which are adjacent to the two sides and the end of the inclined groove, respectively. The right end of the connecting part is provided with one connecting hole 1, which is located at the end of the inclined groove.

[0005] Furthermore, the walls of annular groove one and annular groove two are polished.

[0006] Furthermore, the inner surface of the sealed cavity is provided with an anti-corrosion coating.

[0007] Furthermore, the inner walls of the connecting hole and the mounting hole are threaded.

[0008] Furthermore, the connection between the inclined groove and the arc groove is rounded.

[0009] Furthermore, the valve body is made of high-strength stainless steel.

[0010] Furthermore, the mounting groove is equipped with positioning protrusions.

[0011] Furthermore, the connecting part and the valve body are integrally formed.

[0012] Furthermore, the depth of the groove does not exceed one-third of the valve body wall thickness.

[0013] Furthermore, the mounting hole is used to achieve connection and fixation with the insert valve.

[0014] The technical effects are as follows: A butterfly valve and molecular pump connection plate are used in the etching chamber of a multi-chamber equipment platform. The molecular pump connection plate is provided with a sealing groove, which corresponds to an annular groove. A positioning ring is provided in the middle of the plate, and the shape of the positioning ring corresponds to the annular groove. A part of the positioning ring is located on the inner wall of the molecular connection plate. A second connection hole is also provided at the edge of the end face of the molecular connection pump for connecting and fixing to the butterfly pump with bolts and nuts. This allows the existing plate valve to be applied to the P5000ETCH chamber by modification, solving the problem of the difficulty in replacing the original vacuum valve of the P5000ETCH chamber. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the replacement plate valve of this utility model.

[0016] Figure 2 This is a cross-sectional schematic diagram of the replacement plate valve of this utility model.

[0017] Figure 3 This is a schematic diagram of the connecting plate of the replacement barrel valve of this utility model.

[0018] Figure 4 This is a schematic diagram of the molecular pump and butterfly valve that replace the plate valve of this utility model.

[0019] Figure 5 This utility model replaces the original plate valve 102.

[0020] In the attached diagram: 1. Valve body, 2. Groove, 3. Connecting part, 4. Annular groove one, 5. Annular groove two, 6. Connecting plate, 7. Positioning ring, 8. Bolt, 9. Butterfly valve; Sealed cavity, 102, original plate barrel valve; 201. Arc-shaped groove; 202. Inclined groove; 301. Connecting hole one; 302. Mounting groove; 303. Fixing hole. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clear and complete, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of this utility model, and are merely used to explain the embodiments of this utility model. They are not intended to limit the embodiments of this utility model. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0022] In the description of this utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," and "horizontal," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "a," "first," "second," "third," "fourth," "fifth," and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] For purposes of simplicity and illustration, the principles of the embodiments are described primarily by way of example. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and structures have not been described in detail to avoid unnecessarily obscuring these embodiments. Furthermore, all embodiments can be used in combination with each other.

[0025] Example

[0026] like Figure 1 , Figure 2 and Figure 3 As shown, in this embodiment, the original vacuum valve used for the P5000 ETCH cavity is discontinued, and the P5000 equipment is of high value. The original vacuum plate valve is also discontinued, making it impossible to replace it after a problem occurs. The following device can solve this problem: A replacement drum valve includes: a valve body 1, with a through-hole in the middle of the valve body 1 for connecting the cavity to a piping system; annular groove 4 and annular groove 5 are respectively provided on the upper and lower end faces of the valve body 1, the annular groove 4 and annular groove 5 being arranged concentrically around the through-hole for sealing with external components; a connecting part 3 is provided at the bottom of the valve body 1, the end face of the connecting part 3 being on the same plane as the two end faces of the valve body 1, and the end of the connecting part 3 being provided with a mounting groove 302 for mounting. The groove 302 is used to install auxiliary sealing or transmission components; a sealing cavity 101 is provided inside the valve body 1, one end of the sealing cavity 101 is connected to the mounting groove 302, and the other end is connected to the circular hole, which is used to construct a vacuum sealing channel; the outer wall of the valve body 1 is an arc-shaped structure with the through circular hole as the center, and a groove 2 is provided on the outer wall of the valve body 1. The middle part of the groove 2 is an arc-shaped groove 201, and the two ends are inclined grooves 202. The arc-shaped groove 201 is used to adapt to the deformation generated when the valve plate moves, and the inclined grooves 202 are used to disperse the edge stress of the valve body 1; The length of the connecting part 3 is the same as the outer diameter of the valve body 1. The two ends of the connecting part 3 are provided with connecting holes 1. The left end of the connecting part 3 is provided with three connecting holes 1, which are adjacent to the two sides and the end of the inclined groove 202 respectively. The right end of the connecting part 3 is provided with one connecting hole 1, which is located at the end of the inclined groove 202. The different number and positions of the connecting holes 1 are used to prevent misassembly during assembly. The end edge of the connecting part 3 is provided with mounting holes 303. Two mounting holes 303 are provided on the left side and one on the right side. The mounting holes 303 are used to communicate and fix with the insert valve. The mounting groove 302 is a strip groove. The depth of the annular groove 1 4 and the annular groove 2 5 is the same. The length of the connecting part 3 is equal to the outer diameter of the valve body 1. The annular groove 1 4 and the annular groove 2 5 are arranged around the circular hole in sequence on the upper and lower end faces of the valve body 1. The mounting hole 303 is used to achieve a stable communication and fixation with the insert valve.

[0027] Specifically, the walls of annular groove 4 and annular groove 5 are polished to improve sealing performance.

[0028] Specifically, the inner surface of the sealing cavity 101 is provided with an anti-corrosion coating to enhance the durability of the sealing cavity 101.

[0029] Specifically, the inner walls of connecting hole 1 and mounting hole 303 are threaded to facilitate fixed connection by bolts.

[0030] Specifically, the connection between the inclined groove 202 and the arc groove 201 adopts a rounded transition to reduce stress concentration.

[0031] Specifically, the valve body 1 is made of high-strength stainless steel to ensure its strength and corrosion resistance.

[0032] Specifically, the mounting slot 302 is equipped with a positioning protrusion for precise positioning with the assembly components.

[0033] Specifically, the width of the annular groove 4 should be no less than 5mm to ensure a good sealing effect.

[0034] Specifically, the connecting part 3 and the valve body 1 are integrally formed, which improves the overall structural strength.

[0035] Specifically, the depth of the groove 2 does not exceed one-third of the wall thickness of the valve body 1, so as to ensure the strength of the valve body 1 while meeting the functional requirements.

[0036] Specifically, mounting hole 303 is used to achieve connection and fixation with the insert valve.

[0037] like Figures 4 to 5 As shown, this plate valve is applied to the butterfly valve 9 and molecular pump connecting plate 6 of the etched chamber of the P5000 ETCH multi-chamber equipment platform. It replaces the original plate valve 102. The molecular pump connecting plate 6 is provided with a sealing groove, which corresponds to the annular groove 5. A positioning ring 7 is provided in the middle of the plate. The shape of the positioning ring 7 corresponds to the annular groove 4. A part of the positioning ring 7 is provided on the inner wall of the molecular pump connecting plate 6. A second connection hole is also provided at the edge of the end face of the molecular pump connecting plate 6 for connecting and fixing to the butterfly pump 9 with bolts 8 and nuts. Thus, by modifying the existing original plate valve 102 of GATE VALVE (12140-PA44-0001) to be used in the P5000 ETCH chamber, the problem of the difficulty in replacing the original vacuum valve of the P5000 ETCH chamber is solved.

[0038] Different connection holes 301 and mounting holes 303 are provided to prevent incorrect installation. An arc groove 201 is provided to adapt to the deformation requirements of the valve plate during movement and reduce the risk of modification. An inclined groove 202 is provided to disperse edge stress. The length dimensions of the outer side of the valve body 1 and the connecting part 3 are set to make the dimensions of the valve body 1 compatible with those of the molecular pump connecting plate 6.

[0039] Although the illustrative specific embodiments of this application have been described above to enable those skilled in the art to understand this application, this application is not limited to the scope of the specific embodiments. For those skilled in the art, all applications utilizing the concept of this application are protected as long as various variations are within the spirit and scope of this application as defined and determined by the appended claims.

Claims

1. A replacement plate valve, characterized in that, include: The valve body has a through circular hole in the middle, which is used to connect to the sealing cavity in the middle of the valve body; The upper and lower end faces of the valve body are respectively provided with an annular groove one and an annular groove two, and the annular groove one and annular groove two are arranged in sequence around the through hole as the center. The valve body has a connecting part at the bottom, the end face of the connecting part is on the same plane as the two end faces of the valve body, the end of the connecting part has a mounting groove, and the sealing cavity connects the mounting groove and the circular hole; The outer wall of the valve body is an arc-shaped structure with the through hole as the center. The outer wall of the valve body is provided with a groove, the middle of which is an arc-shaped groove and the two ends are inclined grooves. The length of the connecting part is the same as the outer diameter of the valve body. The two ends of the connecting part are provided with a connecting hole. The left end of the connecting part is provided with three connecting holes, which are respectively adjacent to the two sides and the end of the inclined groove. The right end of the connecting part is provided with a connecting hole, which is located at the end of the inclined groove.

2. A replacement plate valve according to claim 1, characterized in that, The walls of the annular groove one and annular groove two are polished.

3. A replacement plate valve according to claim 1, characterized in that, The inner surface of the sealed cavity is provided with an anti-corrosion coating.

4. A replacement plate valve according to claim 2, characterized in that, The inner walls of the connecting hole and the mounting hole are threaded.

5. A replacement plate valve according to claim 1, characterized in that, The connection between the inclined groove and the arc-shaped groove is rounded.

6. A replacement plate valve according to claim 1, characterized in that, The valve body is made of high-strength stainless steel.

7. A replacement plate valve according to claim 1, characterized in that, The mounting groove is provided with a positioning protrusion.

8. A replacement plate valve according to claim 1, characterized in that, The connecting part and the valve body are integrally formed.

9. A replacement plate valve according to claim 1, characterized in that, The depth of the groove does not exceed one-third of the valve body wall thickness.

10. A replacement plate valve according to claim 4, characterized in that, The mounting hole is used to achieve connection and fixation with the insert valve.

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