Semiconductor duct flexible heating tape

Abstract

The utility model relates to a kind of semiconductor pipeline flexible heating band, comprising: inner flexible layer, outer flexible layer, heating wire and fixing device, the edge of inner flexible layer and the edge of outer flexible layer are fixedly connected, installation cavity is formed between the inner flexible layer and outer flexible layer, the heating wire is located inside installation cavity, the fixing device is used to fix the both ends of outer flexible layer. The utility model uses flexible heating band to wrap pipeline, heating wire heats pipeline, improve the temperature of pipeline inner wall, reduce the deposition fruit and crystallization of semiconductor gas, prevent pipeline blockage;Flexible heating band can be bent and deformed to adapt to curved and inclined pipeline, increase the adhesion with pipeline, strong adaptability;Temperature control device controls the temperature of heating wire, so as to keep the temperature of pipeline in a range interval, with as low as possible power consumption to achieve the best anti-clogging effect.

Description

Technical Field

[0001] This utility model relates to the field of pipeline heating, and in particular to a flexible heating strip for semiconductor pipelines. Background Technology

[0002] In existing semiconductor gas transport processes (such as the pipeline between the main unit and the vacuum pump), if the pipeline temperature is low, semiconductor gas may deposit or crystallize on the inner wall of the pipeline. After a period of use, dust and crystals will accumulate on the inner wall of the pipeline, increasing pipeline resistance and even causing pipeline blockage. Utility Model Content

[0003] The present invention aims to solve the above problems by providing a flexible heating belt for semiconductor pipelines, which solves the problem of semiconductor gas clogging the pipelines.

[0004] A flexible heating strip for semiconductor pipes includes: an inner flexible layer, an outer flexible layer, a heating wire, and a fixing device. The edges of the inner flexible layer and the outer flexible layer are fixedly connected. An installation cavity is formed between the inner flexible layer and the outer flexible layer. The heating wire is located inside the installation cavity. The fixing device is used to fix both ends of the outer flexible layer.

[0005] Preferably, the heating wire is fixedly connected to the inner flexible layer and / or the outer flexible layer; the inner flexible layer and the outer flexible layer are rectangular.

[0006] Preferably, the inner flexible layer includes a first Teflon fiberglass cloth and a second Teflon fiberglass cloth, the first Teflon fiberglass cloth and the second Teflon fiberglass cloth are bonded together and fixedly connected, and the first Teflon fiberglass cloth is in contact with the heating wire.

[0007] Preferably, the outer flexible layer comprises an insulating fiberglass blanket and a Teflon-coated fabric, wherein the insulating fiberglass blanket and the Teflon-coated fabric are bonded together and fixedly connected, and the insulating fiberglass blanket is in contact with the heating wire.

[0008] Preferably, it also includes a flexible tube that passes through the outer flexible layer and is fixedly connected to the outer flexible layer.

[0009] Preferably, it further includes a first power line and a second power line, with both ends of the heating wire contacting and fixedly connected to the first power line and the second power line, respectively, and the first power line and the second power line passing through a flexible tube.

[0010] Preferably, it also includes a temperature switch, a temperature detection device, and a temperature control device. The temperature switch is connected in series with the heating wire, the temperature detection device is located inside the mounting cavity, and the wires of the temperature switch and the temperature detection device pass through a flexible tube and are electrically connected to a temperature control device outside the mounting cavity.

[0011] Preferably, it also includes a fuse, which is connected in series with the heating wire.

[0012] Preferably, it also includes a fixing cloth, the fixing device being a Velcro fastener, the fixing device comprising a hook side and a loop side, the hook side being fixedly connected to one end of the outer side of the outer flexible layer, the fixing cloth being fixedly connected to the other end of the outer side of the outer flexible layer, and the loop side being fixedly connected to the inner side of the fixing cloth.

[0013] Preferably, the heating wire is an S-shaped wire that bends back and forth.

[0014] This invention has the following advantages: a flexible heating band is used to wrap the pipe, and an electric heating wire heats the pipe, increasing the temperature of the inner wall of the pipe, reducing the deposition and crystallization of semiconductor gas, and preventing pipe blockage; the flexible heating band can be bent and deformed to adapt to curved and inclined pipes, increasing the fit with the pipe and making it highly adaptable; the temperature control device controls the temperature of the electric heating wire, thereby keeping the pipe temperature within a certain range, achieving the best anti-blocking effect with the lowest possible power consumption. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0016] Figure 1 : A three-dimensional structural diagram of the dissected part of this utility model; Figure 2 : A top view of the structure of this utility model when it is not fixed; Figure 3 : A front view of the structure of this utility model when it is fixed. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and examples: The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0018] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. like Figures 1 to 3 As shown, a flexible heating strip for semiconductor pipes includes: an inner flexible layer 1, an outer flexible layer 2, a heating wire 3, and a fixing device 7. The edges of the inner flexible layer 1 and the outer flexible layer 2 are fixedly connected, and a mounting cavity 300 is formed between the inner flexible layer 1 and the outer flexible layer 2. The heating wire 3 is located inside the mounting cavity 300, and the fixing device 7 is used to fix both ends of the outer flexible layer 2. It should be noted that the heating wire 3 is flexible.

[0020] Preferably, the inner flexible layer 1 and the outer flexible layer 2 can be sewn together with sewing thread.

[0021] Preferably, the heating wire 3 is fixedly connected to the inner flexible layer 1 and / or the outer flexible layer 2; the inner flexible layer 1 and the outer flexible layer 2 are rectangular.

[0022] Preferably, the inner flexible layer 1 includes a first Teflon fiberglass cloth 11 and a second Teflon fiberglass cloth 12, which are bonded together and fixedly connected. The first Teflon fiberglass cloth 11 is in contact with the heating wire 3. The Teflon fiberglass cloth serves as insulation.

[0023] Preferably, the outer flexible layer 2 includes an insulating fiberglass blanket 21 and a Teflon-coated fabric 22, which are bonded and fixedly connected. The insulating fiberglass blanket 21 is in contact with the heating wire 3 and serves to insulate against heat, reducing heat loss from the heating wire 3. The insulating fiberglass blanket 21 and the Teflon-coated fabric 22 provide insulation.

[0024] Preferably, it also includes a flexible tube 8, which passes through the outer flexible layer 2 and is fixedly connected to the outer flexible layer 2. The flexible tube 8 serves to protect the internal wires.

[0025] Preferably, it also includes a first power line 31 and a second power line 32, with both ends of the heating wire 3 in contact with and fixedly connected to the first power line 31 and the second power line 32 respectively, and the first power line 31 and the second power line 32 passing through the flexible tube 8.

[0026] Preferably, such as Figure 3 As shown, the system also includes a temperature switch 4, a temperature detection device 6, and a temperature control device 9. The temperature switch 4 is connected in series with the heating wire 3. The temperature detection device 6 is located inside the mounting cavity 300. The wires of the temperature switch 4 and the temperature detection device 6 pass through the flexible tube 8 and are electrically connected to the temperature control device 9 outside the mounting cavity 300. The temperature control device 9 receives the temperature detected by the temperature detection device 6, compares it with a preset temperature, and controls the on / off state or power of the heating wire 3 to bring it to the preset temperature. For example, the heat output of the heating wire can be changed by altering the on / off time ratio of the temperature switch 4.

[0027] like Figure 2 As shown, the outer flexible layer 2 is fixedly connected to the three flexible tubes 8. Figure 2 The upper and lower flexible tubes 8 respectively allow the first power line 31 and the second power line 32 to pass through. Figure 2 The flexible tube 8 in the middle position allows the wires of the temperature switch 4 and the temperature detection device 6 to pass through.

[0028] Preferably, it also includes a fuse 5, which is connected in series with the heating wire 3.

[0029] Preferably, it also includes a fixing cloth 10, the fixing device 7 is a Velcro, the fixing device 7 includes a hook side 71 and a loop side 72, the hook side 71 is fixedly connected to one end of the outer side of the outer flexible layer 2, the fixing cloth 10 is fixedly connected to the other end of the outer side of the outer flexible layer 2, and the loop side 72 is fixedly connected to the inner side of the fixing cloth 10.

[0030] More preferably, such as Figure 2 As shown, the fixing device 7 includes multiple hook surfaces 71 and rough surfaces 72, with each hook surface 71 and rough surface 72 corresponding to the other. The inner flexible layer 1 and the outer flexible layer 2 form a notch 100 between two adjacent hook surfaces 71, and a gap corresponding to the notch 100 is formed between two adjacent fixing fabrics 10.

[0031] It should be noted that the fixing device 7 is not limited to Velcro, but can also be existing detachable connection structures such as clamps and buckles.

[0032] Preferably, the heating wire 3 is an S-shaped wire that bends back and forth.

[0033] Working principle: During operation, the heating band is wrapped around the outside of the pipe 200, with the outer side of the inner flexible layer 1 (i.e., the side away from the mounting cavity 300) adhering to the outer wall of the pipe 200. Then, the rough surface 72 is attached to the outside of the hook surface 71, thereby fixing and tightening the two ends of the heating band to the outer wall of the pipe 200.

[0034] When the heating wire 3 is energized, it generates heat, which passes through the inner flexible layer 1 and is transferred to the pipe 200, thereby heating the entire pipe 200 and raising the inner wall of the pipe 200 to between 100°C and 200°C. The high temperature of the inner wall of the pipe 200 can reduce the deposition of dust in the semiconductor gas on the inner wall of the pipe 200 and also prevent the semiconductor gas from crystallizing on the inner wall of the pipe 200, thus preventing the pipe 200 from becoming blocked.

[0035] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A flexible heating strip for semiconductor pipes, characterized in that, include: The inner flexible layer (1), the outer flexible layer (2), the heating wire (3) and the fixing device (7) are fixedly connected at the edge of the inner flexible layer (1) and the edge of the outer flexible layer (2). An installation cavity (300) is formed between the inner flexible layer (1) and the outer flexible layer (2). The heating wire (3) is located inside the installation cavity (300). The fixing device (7) is used to fix the two ends of the outer flexible layer (2).

2. The flexible heating strip for semiconductor pipes according to claim 1, characterized in that: The heating wire (3) is fixedly connected to the inner flexible layer (1) and / or the outer flexible layer (2); the inner flexible layer (1) and the outer flexible layer (2) are rectangular.

3. The flexible heating strip for semiconductor pipes according to claim 1, characterized in that: The inner flexible layer (1) includes a first Teflon fiberglass cloth (11) and a second Teflon fiberglass cloth (12). The first Teflon fiberglass cloth (11) and the second Teflon fiberglass cloth (12) are bonded together and fixedly connected. The first Teflon fiberglass cloth (11) is in contact with the heating wire (3).

4. The flexible heating strip for semiconductor pipes according to claim 1, characterized in that: The outer flexible layer (2) includes a heat-insulating fiberglass blanket (21) and a Teflon-coated cloth (22), which are bonded and fixedly connected, and the heat-insulating fiberglass blanket (21) is in contact with the heating wire (3).

5. The flexible heating strip for a semiconductor pipe according to claim 1, characterized in that: It also includes a flexible tube (8), which passes through the outer flexible layer (2) and is fixedly connected to the outer flexible layer (2).

6. The flexible heating strip for a semiconductor pipe according to claim 5, characterized in that: It also includes a first power line (31) and a second power line (32), the two ends of the heating wire (3) are in contact with and fixedly connected to the first power line (31) and the second power line (32) respectively, and the first power line (31) and the second power line (32) pass through the flexible tube (8).

7. The flexible heating strip for a semiconductor pipe according to claim 5, characterized in that: It also includes a temperature switch (4), a temperature detection device (6) and a temperature control device (9). The temperature switch (4) is connected in series with the heating wire (3). The temperature detection device (6) is located inside the mounting cavity (300). The wires of the temperature switch (4) and the temperature detection device (6) pass through the flexible tube (8) and are electrically connected to the temperature control device (9) outside the mounting cavity (300).

8. The flexible heating strip for semiconductor pipes according to claim 1, characterized in that: It also includes a fuse (5), which is connected in series with the heating wire (3).

9. The flexible heating strip for a semiconductor pipe according to claim 1, characterized in that: It also includes a fixing cloth (10), the fixing device (7) is a Velcro, the fixing device (7) includes a hook side (71) and a loop side (72), the hook side (71) is fixedly connected to one end of the outer side of the outer flexible layer (2), the fixing cloth (10) is fixedly connected to the other end of the outer side of the outer flexible layer (2), and the loop side (72) is fixedly connected to the inner side of the fixing cloth (10).

10. A flexible heating strip for semiconductor pipes according to claim 1, characterized in that: The heating wire (3) is an S-shaped wire that bends back and forth.

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