A laser mounting fine adjustment base

Abstract

The utility model relates to excimer laser technical field, and disclose a kind of laser installation fine adjustment pedestal, and the fine adjustment to laser cavity position is realized to structure such as setting two-layer platform, right-handed connecting block, left-handed connecting block, cavity connecting piece, screw rod etc., by rotating screw rod, right-handed thread, left-handed thread drive right-handed connecting block and left-handed connecting block to move horizontally, when right-handed connecting block and left-handed connecting block move to close direction, right-handed connecting block and left-handed connecting block are located on the surface of two-layer connecting plate top rail by slider assembly A and slide, right-handed connecting block and left-handed connecting block are extruded to cavity connecting piece by slider assembly B simultaneously, make cavity connecting piece rise along the wedge surface of slider assembly B, the fine adjustment of cavity connecting piece height position, simultaneously, cavity connecting piece is connected with auxiliary crank between fixed block A, can eliminate certain sliding clearance, make the movement of cavity connecting piece more stable, played the effect of position fine adjustment.

Description

Technical Field

[0001] This utility model relates to the field of excimer laser technology, and in particular to a laser mounting fine-tuning base. Background Technology

[0002] Excimer lasers, due to their high energy, short pulse, and ultraviolet wavelength characteristics, are commonly used in precision manufacturing (such as semiconductors, OLED annealing, and medical device manufacturing) and scientific research experiments. Therefore, the requirements for optical path collimation and focal spot position are extremely high. Consequently, the stability and reliability of the laser's installation are also crucial. The external optical path system is typically a multi-stage system of focusing mirrors, reflecting mirrors, polarizing mirrors, etc., working together with unidirectional adjustment (the installation angle of each subsequent mirror is affected by the light reflected from the previous mirror). During the initial assembly and debugging phase of the laser equipment, a significant amount of time is often spent adjusting each optical component to its theoretically designed position. Therefore, after the optical path system is assembled and debugged, to ensure its accuracy and stability, after the optical path components are securely installed, an optical path support is erected to seal and isolate the optical path system, preventing external influences.

[0003] Laser operation generates heat, causing minor deformations in the mechanical structure and potentially misaligning the optical path. Furthermore, after any maintenance operation, the optical path requires recalibration. However, adjusting the optical path system is cumbersome and the system is typically sealed and isolated. Therefore, fine-tuning the position of the light source within the device itself simplifies the workflow and ensures the consistency and stability of the optical path system. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a laser mounting fine-tuning base, which has the advantages of fine-tuning position and avoiding displacement, thus solving the problems mentioned in the background art.

[0005] This utility model provides the following technical solution: a laser mounting fine-tuning base, comprising a first-layer platform and a second-layer platform. The first-layer platform includes a base plate and a linear slide rail. The linear slide rail is fixedly installed at the top center of the base plate, and linear sliders are symmetrically slidably installed on the outer ring of the top of the linear slide rail. A layer of fixing connecting blocks is fixedly installed at one corner of the base plate. The second-layer platform includes two connecting plates, which are fixedly installed on the top of the linear sliders. Two layers of fixing connecting blocks are fixedly installed on one side of the top of the second-layer platform, close to the first-layer fixing connecting block. A lead screw is provided on one side of the second-layer platform.

[0006] The above structural design divides the entire system into two layers. The first-layer platform controls the left and right movement of the control equipment, while the second-layer platform controls the up and down adjustments of the control equipment. The second-layer platform is mounted on a linear slider above the first-layer platform and is driven by a rotating adjusting bolt to move along the linear guide rail on the first-layer platform.

[0007] Preferably, the second-layer fixed connecting block has a threaded hole inside, the second-layer platform is movably installed with an adjusting bolt inside the first-layer fixed connecting block, and the surface of the first-layer fixed connecting block has a countersunk clearance hole, the end of the adjusting bolt is located in the countersunk clearance hole, and the other end of the adjusting bolt is threadedly installed inside the threaded hole of the second-layer fixed connecting block.

[0008] With the above structural design, the axial position of the adjusting bolt on the first-layer fixed connecting block is restricted, and at the same time, under the transmission of the screw threads, the entire second-layer platform will be displaced at the top of the first-layer platform.

[0009] Preferably, the top of the two-layer connecting plate is symmetrically provided with guide rails, and a slider assembly A is slidably installed on the outer ring of the top of the guide rails. A right-handed connecting block is fixedly connected to the top of the slider assembly A on one side, and a left-handed connecting block is fixedly connected to the top of the slider assembly A on the other side. A slider assembly B is fixedly connected above the top of the right-handed and left-handed connecting blocks. A cavity connector is movably connected to the top of the slider assembly B, and the slider assembly B and the cavity connector are also slidably connected through the guide rails.

[0010] With the above structural setup, when the right-hand connecting block and the left-hand connecting block move closer together, the slider assembly B drives the cavity connector to make a slight upward adjustment, thereby achieving vertical position adjustment.

[0011] Preferably, a fixing block A is fixedly installed at the top corner of the second-layer connecting plate and is located symmetrically to the second-layer fixing connecting block. A fixing block B is fixedly installed on the bottom surface of the cavity connector on one side of the slider assembly B. An auxiliary crank is connected to one side of the fixing block A and the other side of the fixing block B.

[0012] With the above structural setup, the second-layer connecting plate achieves a certain transmission effect between the auxiliary crank and the cavity connecting component. However, due to the design of the cavity connecting component, a certain sliding gap can be eliminated, making it more stable.

[0013] Preferably, one side of the lead screw has a right-hand thread on its outer ring, which is threaded into the inside of a right-hand connecting block. The right-hand thread and the right-hand connecting block are threadedly matched. The other side of the lead screw has a left-hand thread on its outer ring, which is symmetrical to the right-hand thread. The left-hand thread is threaded into the inside of a left-hand connecting block, and the left-hand thread and the left-hand connecting block are threadedly matched. Locking nuts are threaded onto both sides of the left-hand connecting block on the outer ring of the left-hand thread.

[0014] With the above structural setup, since the outer ring of the left-hand thread is located on both sides of the left-hand connecting block and locking nuts are installed, after adjusting the positions of the first-layer platform and the second-layer platform, the position of the entire second-layer platform is fixed by the left-hand thread.

[0015] This utility model has the following advantages: 1. The laser is equipped with a fine-tuning base. Through a structure consisting of a two-layer platform, a right-hand connecting block, a left-hand connecting block, a cavity connector, and a lead screw, the position of the laser cavity can be finely adjusted. By rotating the lead screw, the right-hand and left-hand connecting blocks move laterally via the right-hand and left-hand threads. As the right-hand and left-hand connecting blocks move closer together, they slide on the top guide rail surface of the two-layer connecting plate via slider assembly A. Simultaneously, the right-hand and left-hand connecting blocks press against the cavity connector via slider assembly B, causing the cavity connector to rise along the wedge surface of slider assembly B, thus achieving fine-tuning of the height of the cavity connector. Furthermore, an auxiliary crank connects the cavity connector to the fixed block A, eliminating some sliding gaps and making the movement of the cavity connector more stable, achieving the effect of fine-tuning the position.

[0016] 2. This laser is equipped with a fine-tuning base. Through the combined use of a first-layer platform, a second-layer platform, and lead screws, the laser's position can be adjusted. This effectively avoids inherent stability issues in laser installation, such as instability caused by an excessively long laser cavity, stress on the mounting base, or limitations in the flatness of the equipment's placement, leading to uneven laser placement or vibrations during operation due to gaps in the support surfaces. Furthermore, it facilitates convenient fine-tuning and calibration of the optical path during subsequent maintenance, avoiding the significant workload required for adjusting the entire optical path. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the single-layer platform structure of this utility model; Figure 3 This is a schematic diagram of the two-layer platform structure of this utility model.

[0018] In the diagram: 1. First-layer platform; 11. Base plate; 12. Linear slide rail; 13. Linear slider; 14. First-layer fixed connecting block; 2. Second-layer platform; 21. Second-layer connecting plate; 22. Second-layer fixed connecting block; 23. Adjusting bolt; 24. Slider assembly A; 25. Right-hand connecting block; 26. Left-hand connecting block; 27. Slider assembly B; 28. Cavity connector; 29. ​​Fixed block A; 210. Auxiliary crank; 3. Lead screw; 31. Right-hand thread; 32. Left-hand thread; 33. Locking nut. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figures 1-2 A laser mounting fine-tuning base includes a first platform 1 and a second platform 2. The first platform 1 includes a base plate 11 and a linear slide rail 12. The linear slide rail 12 is fixedly installed at the top center of the base plate 11. A linear slider 13 is symmetrically slidably installed on the outer ring of the top of the linear slide rail 12. A first-layer fixing connecting block 14 is fixedly installed on one side corner of the base plate 11. The second platform 2 includes a second-layer connecting plate 21. The second-layer connecting plate 21 is fixedly installed on the top of the linear slider 13. A second-layer fixing connecting block 22 is fixedly installed on one side of the top of the second platform 2, close to the first-layer fixing connecting block 14. A lead screw 3 is provided on one side of the second platform 2.

[0021] In this design, the device is divided into two layers. The first-layer platform 1 controls the left and right movement of the device, while the second-layer platform 2 controls the up and down fine-tuning of the device's position. The second-layer platform 2 is mounted on the linear slider 13 above the first-layer platform 1 and is driven by the rotation of the adjusting bolt 23 to move along the linear guide rail 12 on the first-layer platform 1.

[0022] Please see Figures 1-3 The second-layer fixed connecting block 22 has a threaded hole inside. The second-layer platform 2 is located inside the first-layer fixed connecting block 14 and an adjusting bolt 23 is movably installed. The surface of the first-layer fixed connecting block 14 has a countersunk clearance hole. The end of the adjusting bolt 23 is located in the countersunk clearance hole, and the other end of the adjusting bolt 23 is threaded inside the threaded hole of the second-layer fixed connecting block 22. After rotating the adjusting bolt 23, the axial position of the adjusting bolt 23 on the first-layer fixed connecting block 14 is restricted. At the same time, under the transmission of the screw threads, the entire second-layer platform 2 will be displaced at the top of the first-layer platform 1.

[0023] Please see Figures 1-3 The top of the second-layer connecting plate 21 is symmetrically provided with guide rails. A slider assembly A24 is slidably installed on the outer ring of the top of the guide rails. A right-handed connecting block 25 is fixedly connected to the top of one side of the slider assembly A24, and a left-handed connecting block 26 is fixedly connected to the top of the other side of the slider assembly A24. A slider assembly B27 is fixedly connected above the top of the right-handed connecting block 25 and the left-handed connecting block 26. A cavity connector 28 is movably connected to the top of the slider assembly B27. The slider assembly B27 and the cavity connector 28 are also slidably connected through the guide rails.

[0024] The right-hand connecting block 25 and the left-hand connecting block 26 are moved on the guide rail by the slider assembly A24, so that the right-hand connecting block 25 and the left-hand connecting block 26 drive the cavity connecting piece 28 to move through the slider assembly B27. When the right-hand connecting block 25 and the left-hand connecting block 26 move closer together, the slider assembly B27 drives the cavity connecting piece 28 to make a slight upward adjustment, thereby achieving vertical position adjustment.

[0025] Please see Figures 1-3 A fixing block A29 is fixedly installed at the top corner of the second-layer connecting plate 21 and is located symmetrically to the second-layer fixed connecting block 22. A fixing block B is fixedly installed on the bottom surface of the cavity connector 28 on one side of the slider assembly B27. An auxiliary crank 210 is connected to the fixing block A29 and the fixing block B. The second-layer connecting plate 21 achieves a certain transmission effect with the cavity connector 28 through the auxiliary crank 210. However, due to the design of the cavity connector 28, a certain sliding gap can be eliminated, making it more stable.

[0026] Please see Figures 1-3 One side of the lead screw 3 has a right-hand thread 31 on its outer ring. The right-hand thread 31 is threaded into the inside of the right-hand connecting block 25. The right-hand thread 31 and the right-hand connecting block 25 are threadedly matched. The other side of the lead screw 3 has a left-hand thread 32 on its outer ring, which is symmetrical to the right-hand thread 31. The left-hand thread 32 is threaded into the inside of the left-hand connecting block 26. The left-hand thread 32 and the left-hand connecting block 26 are threadedly matched. Locking nuts 33 are threadedly fitted on both sides of the left-hand connecting block 26 on the outer ring of the left-hand thread 32.

[0027] By rotating the lead screw 3, the lead screw 3 drives the right-hand connecting block 25 and the left-hand connecting block 26 to move in opposite directions through the right-hand thread 31 and the left-hand thread 32. The right-hand connecting block 25 and the left-hand connecting block 26 move synchronously, allowing them to move closer and further away at the same time. As the right-hand connecting block 25 and the left-hand connecting block 26 move closer, the cavity connecting piece 28 is displaced upward by a certain amount due to the sliding action of the slider assembly B27, thereby adjusting the height of the cavity connecting piece 28.

[0028] Since the outer ring of the left-hand thread 32 is located on both sides of the left-hand connecting block 26, the locking nuts 33 are installed. After adjusting the positions of the first-layer platform 1 and the second-layer platform 2, the position of the entire second-layer platform 2 is fixed by the left-hand thread 32.

[0029] Working principle: When in use, the laser cavity is fixed on the top of the cavity connector 28. When the horizontal displacement needs to be adjusted, the adjusting bolt 23 is turned so that the adjusting bolt 23 drives the second-layer fixed connecting block 22 to move in a certain direction through the thread. The second-layer fixed connecting block 22 is fixedly connected to the second-layer connecting plate 21, which drives the second-layer platform 2 as a whole to move laterally through the linear slider 13 on the top outer ring of the linear slide rail 12, thereby realizing the horizontal displacement of the laser cavity. When the vertical position of the laser cavity needs to be fine-tuned, the lead screw 3 is rotated. The lead screw 3 drives the right-hand connecting block 25 and the left-hand connecting block 26 to move laterally through the right-hand thread 31 and the left-hand thread 32. When the right-hand connecting block 25 and the left-hand connecting block 26 move closer together, they slide on the top guide rail surface of the second-layer connecting plate 21 through the slider assembly A24. At the same time, the right-hand connecting block 25 and the left-hand connecting block 26 squeeze the cavity connector 28 through the slider assembly B27, causing the cavity connector 28 to rise along the wedge surface of the slider assembly B27, thereby achieving fine-tuning of the height position of the cavity connector 28. Meanwhile, an auxiliary crank 210 is connected between the cavity connector 28 and the fixed block A29, which can eliminate a certain sliding gap and make the movement of the cavity connector 28 more stable.

Claims

1. A laser mounting fine-tuning base, comprising a first-layer platform (1) and a second-layer platform (2), characterized in that: The first-layer platform (1) includes a base plate (11) and a linear slide rail (12). The linear slide rail (12) is fixedly installed in the middle of the top of the base plate (11). A linear slider (13) is symmetrically slidably installed on the outer ring of the top of the linear slide rail (12). A first-layer fixed connecting block (14) is fixedly installed on one side corner of the base plate (11). The second-layer platform (2) includes a second-layer connecting plate (21). The second-layer connecting plate (21) is fixedly installed on the top of the linear slider (13). A second-layer fixed connecting block (22) is fixedly installed on one side of the top of the second-layer platform (2) and close to the first-layer fixed connecting block (14). A lead screw (3) is provided on one side of the second-layer platform (2).

2. The laser mounting fine-tuning base according to claim 1, characterized in that: The second-layer fixed connecting block (22) has a threaded hole inside. The second-layer platform (2) is located inside the first-layer fixed connecting block (14) and an adjusting bolt (23) is movably installed. The surface of the first-layer fixed connecting block (14) has a countersunk clearance hole. The end of the adjusting bolt (23) is located in the countersunk clearance hole, and the other end of the adjusting bolt (23) is threaded inside the threaded hole of the second-layer fixed connecting block (22).

3. The laser mounting fine-tuning base according to claim 2, characterized in that: The top of the second-layer connecting plate (21) is symmetrically provided with guide rails. A slider assembly A (24) is slidably installed on the outer ring of the top of the guide rails. A right-handed connecting block (25) is fixedly connected to the top of the slider assembly A (24) on one side, and a left-handed connecting block (26) is fixedly connected to the top of the slider assembly A (24) on the other side. A slider assembly B (27) is fixedly connected above the top of the right-handed connecting block (25) and the left-handed connecting block (26). A cavity connector (28) is movably connected to the top of the slider assembly B (27). The slider assembly B (27) and the cavity connector (28) are also slidably connected through the guide rails.

4. A laser mounting fine-tuning base according to claim 3, characterized in that: A fixing block A (29) is fixedly installed at the top corner of the second-layer connecting plate (21) and is located at the symmetrical position of the second-layer fixed connecting block (22). A fixing block B is fixedly installed on the bottom surface of the cavity connector (28) on one side of the slider assembly B (27). An auxiliary crank (210) is connected to the fixing block A (29) on one side and the fixing block B on the other side.

5. A laser mounting fine-tuning base according to claim 4, characterized in that: The lead screw (3) has a right-hand thread (31) on one side of its outer ring. The right-hand thread (31) is threaded into the inside of the right-hand connecting block (25). The right-hand thread (31) and the right-hand connecting block (25) are threadedly matched. The lead screw (3) has a left-hand thread (32) on the other side of its outer ring. The left-hand thread (32) is threaded into the inside of the left-hand connecting block (26). The left-hand thread (32) and the left-hand connecting block (26) are threadedly matched. Locking nuts (33) are threaded onto both sides of the left-hand connecting block (26) on the outer ring of the left-hand thread (32).

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