An automatic leveling structure for excimer laser installation

Abstract

The utility model relates to excimer laser technical field, and disclose a kind of for excimer laser installation automatic leveling structure, by setting up laser assembly, mounting base, leveling screw rod, fastening screw rod and the structure, realize fast leveling, locking positioning, leveling screw rod is first installed to the screw hole A in the surface of mounting base corresponding, and tighten bolt, subsequently laser assembly is installed in the top surface of leveling screw rod, the rotation of the small ball in the inside leveling screw rod is used to adjust the parallelism of laser assembly of laser cavity, after leveling is completed, by fastening screw rod passes through laser assembly and is installed in the screw hole B on the surface of mounting base inside, laser assembly of laser cavity is locked with mounting base, reach working condition, played the effect of fast leveling, locking positioning.

Description

Technical Field

[0001] This utility model relates to the field of excimer laser technology, and in particular to an automatic leveling structure for excimer laser installation. Background Technology

[0002] Molecular lasers are high-power pulsed lasers that use a mixture of inert and halogen gases as their working medium. Due to their short wavelength, high energy, and excellent resolution, they are widely used in semiconductor lithography, medical surgery, and materials processing. The core of an excimer laser is its cavity module, which contains key components such as discharge electrodes, pre-ionization devices, gas circulation systems, and optical resonators. This module is heavy (tens to hundreds of kilograms) and requires regular maintenance (such as gas replacement, electrode cleaning, or optical window cleaning). When reinstalling after maintenance or adjusting the optical path for experimental needs, the spatial position and angle of the cavity must be precisely adjusted to ensure that the laser output direction and mode meet requirements.

[0003] In current technology, the common practice is to use lead screws and bolts, which are common to laser components, for leveling or to fix them to the mounting platform. These methods have significant drawbacks: they cannot effectively adjust the flatness of the laser components, causing the entire laser to fall short of its optimal operating condition. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides an automatic leveling structure for installing excimer lasers, which has the advantages of rapid installation, disassembly, and leveling, thus solving the problems mentioned in the background section.

[0005] This utility model provides the following technical solution: an automatic leveling structure for installing an excimer laser, including a laser assembly, a mounting base, a leveling screw, and a fastening screw. The laser assembly is located above the mounting base. The surface of the mounting base is uniformly provided with screw holes A in a triangular shape. The surface of the mounting base is also uniformly provided with screw holes B in a triangular shape, located on one side of screw hole A. The leveling screw is installed inside the screw hole A, and the fastening screw is installed inside the screw hole B, located on one side of the leveling screw.

[0006] With the above structural setup, the leveling screw is installed into the corresponding screw hole A on the surface of the mounting base and the bolt is tightened. Then, the laser assembly is installed on the top surface of the leveling screw. The parallelism of the laser assembly in the laser cavity is adjusted by rotating the small ball inside the leveling screw.

[0007] Preferably, the laser assembly is located at the top of the leveling screw, and the surface of the laser assembly has a sliding hole that matches the diameter of the fastening screw, and the fastening screw is slidably installed inside the sliding hole.

[0008] With the above structural setup, after leveling, the laser assembly of the laser cavity is locked to the mounting base by passing the fastening screw through the screw hole B on the surface of the mounting base, thus achieving a working state.

[0009] This utility model has the following advantages: 1. This automatic leveling structure for excimer laser installation achieves rapid leveling and locking positioning by setting up laser components, mounting base, leveling screws, and fastening screws. First, the leveling screw is installed into the corresponding screw hole A on the surface of the mounting base and the bolt is tightened. Then, the laser component is installed on the top surface of the leveling screw. The parallelism of the laser component in the laser cavity is adjusted by the rotation of the small ball inside the leveling screw. After leveling, the laser component in the laser cavity is locked to the mounting base by passing the fastening screw through the screw hole B on the surface of the mounting base, achieving a working state and achieving the effect of rapid leveling and locking positioning. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is an exploded view of the overall structure of this utility model; Figure 3 This is a schematic diagram of the mounting base structure of this utility model.

[0011] In the diagram: 1. Laser assembly; 2. Mounting base; 3. Leveling screw; 4. Fastening screw. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] Please see Figures 1-3 An automatic leveling structure for installing an excimer laser includes a laser assembly 1, a mounting base 2, a leveling screw 3, and a fastening screw 4. The laser assembly 1 is located above the mounting base 2. The surface of the mounting base 2 is uniformly provided with triangular screw holes A. The surface of the mounting base 2 is also uniformly provided with triangular screw holes B, which are located on one side of the screw holes A. The leveling screw 3 is installed inside the screw hole A, and the fastening screw 4 is installed inside the screw hole B, which is located on one side of the leveling screw 3.

[0014] Please see Figures 1-3The laser assembly 1 is located on top of the leveling screw 3. The surface of the laser assembly 1 is provided with a sliding hole that matches the diameter of the fastening screw 4. The fastening screw 4 is slidably installed inside the sliding hole.

[0015] The fastening screw 4 is installed inside the screw hole B by threads to fix the bottom surface of the laser assembly 1 to the top of the leveling screw 3, thereby achieving the effect of fixing the position of the laser assembly 1.

[0016] When using it, first install the leveling screw 3 into the corresponding screw hole A on the surface of the mounting base 2, and tighten the bolt; The laser assembly 1 of the laser cavity is then installed on the top surface of the leveling screw 3, and the parallelism of the laser assembly 1 of the laser cavity is adjusted by rotating the small ball inside the leveling screw 3. After leveling, the laser assembly 1 of the laser cavity is locked to the mounting base 2 by passing the fastening screw 4 through the screw hole B on the surface of the mounting base 2, thus achieving a working state.

Claims

1. An automatic leveling structure for installing an excimer laser, comprising a laser assembly (1), a mounting base (2), a leveling screw (3), and a fastening screw (4), characterized in that: The laser assembly (1) is located above the mounting base (2). The surface of the mounting base (2) is uniformly provided with screw holes A in a triangular shape. The surface of the mounting base (2) is uniformly provided with screw holes B in a triangular shape and located on one side of screw hole A. A leveling screw (3) is installed inside the screw hole A. A fastening screw (4) is installed inside the screw hole B and located on one side of the leveling screw (3).

2. The automatic leveling structure for excimer laser mounting according to claim 1, characterized in that: The laser assembly (1) is located on top of the leveling screw (3). The surface of the laser assembly (1) is provided with a sliding hole that matches the diameter of the fastening screw (4). The fastening screw (4) is slidably installed inside the sliding hole.

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