A sealing door of a vacuum drying tank and a vacuum drying equipment

Abstract

The utility model belongs to vacuum drying equipment technical field discloses a kind of sealing door and vacuum drying equipment of vacuum drying groove, and the sealing door of vacuum drying groove is used to seal groove body, and it includes tank cover, lifting mechanism, translation mechanism, sensing component and control component.When closing tank cover, first, tank cover is driven to move along first direction by translation mechanism, when tank cover moves to the position corresponding with groove body, sensing component is triggered and signal is transmitted to control component, control component controls translation mechanism to stop working, and tank cover is driven to move downward by lifting mechanism, to seal groove body.When opening tank cover, first, tank cover is driven to move upward by lifting mechanism, then tank cover is driven to move along first direction by translation mechanism, so that tank cover is far from the opening of groove body, to put semiconductor device into groove body.Tank cover is opened or closed by lifting mechanism and translation mechanism, and the automatic switch of tank cover can be realized.

Description

Technical Field

[0001] This utility model relates to the field of vacuum drying equipment technology, and in particular to a sealing door for a vacuum drying tank and a vacuum drying device. Background Technology

[0002] In the semiconductor device manufacturing process, semiconductor devices need to be dried. Because semiconductor devices have high requirements for the cleanliness of the drying environment, vacuum drying equipment is usually used to dry them. The semiconductor devices are placed in the vacuum drying tank of the vacuum drying equipment, and the vacuum drying tank is kept in a sealed state during drying to ensure the cleanliness of the vacuum drying tank.

[0003] In actual production processes, workers need to frequently and repeatedly open and close the lids of vacuum drying tanks. Because vacuum requirements must be met, the lids are usually quite thick and heavy, making them inconvenient for workers to operate. Furthermore, repeated opening and closing can cause misalignment between the lid and the tank body. Some vacuum drying tanks use a reciprocating mechanism to drive the lid's opening and closing, but the stability of this mechanism is poor, making it difficult to precisely control the lid's position, which in turn leads to misalignment between the lid and the tank body. This misalignment results in poor sealing, causing vacuum leakage. This not only affects drying efficiency but may also introduce contaminants, reducing the cleanliness of the vacuum drying tank and ultimately lowering the yield of semiconductor devices.

[0004] Therefore, there is an urgent need for a sealed door for a vacuum drying tank and a vacuum drying device to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this utility model is to provide a sealing door for a vacuum drying tank and a vacuum drying device. The sealing door of the vacuum drying tank can make the tank cover move stably and precisely control the movement position of the tank cover to ensure that the tank body is completely sealed.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] On one hand, a sealing door for a vacuum drying tank is provided, the sealing door of the vacuum drying tank being used to seal the tank body, the sealing door of the vacuum drying tank comprising:

[0008] A groove cover, used to seal the groove body;

[0009] A lifting mechanism is provided below the slot cover and is driven to be connected to the slot cover. The lifting mechanism can drive the slot cover to move in the vertical direction.

[0010] A translation mechanism is disposed on the side of the slot cover and driven to be connected to the slot cover. The translation mechanism can drive the slot cover to move along a first direction.

[0011] A sensing component is used to detect the position of the slot cover;

[0012] The control component is communicatively connected to the lifting mechanism, the translation mechanism, and the sensing component.

[0013] Optionally, the sensing component is a reed switch, which includes a magnet and a sensor. One of the magnet and the sensor is disposed on the slot cover, and the other is disposed on the slot body. The sensor is communicatively connected to the control component, and the magnet can trigger the sensor.

[0014] Optionally, the translation mechanism is a pneumatic cylinder, a hydraulic cylinder, or an electric push rod.

[0015] Optionally, the translation mechanism is slidably connected to the slot cover in the vertical direction.

[0016] Optionally, the sealing door of the vacuum drying tank further includes a connector, which is fixedly connected to the tank cover. The connector is provided with a sliding groove extending in a vertical direction, and the translation mechanism is provided with a sliding protrusion corresponding to the sliding groove. The sliding protrusion is slidably connected to the sliding groove.

[0017] Optionally, the sealing door of the vacuum drying tank further includes a guide assembly, and the lifting mechanism is connected to the guide assembly and can slide along the first direction.

[0018] Optionally, the guide assembly includes a slide rail and a slider, the slide rail extending along the first direction, the slider being slidably connected to the slide rail, and the lifting mechanism being connected to the slider.

[0019] Optionally, the side of the slot cover facing away from the lifting mechanism is provided with reinforcing ribs.

[0020] Optionally, at least two lifting mechanisms are provided, and the at least two lifting mechanisms are provided on the edge of the slot cover and are symmetrically arranged about the center of the slot cover.

[0021] On the other hand, a vacuum drying device is provided, including a vacuum pump, a heating device, a tank and a sealing door of the vacuum drying tank, wherein the vacuum pump is connected to the interior of the tank and the heating device is installed on the inner wall of the tank.

[0022] The beneficial effects of this utility model are:

[0023] This invention provides a sealing door for a vacuum drying tank and a vacuum drying device. The sealing door of the vacuum drying tank is used to seal the tank body and includes a tank cover, a lifting mechanism, a translation mechanism, a sensing component, and a control component. When closing the tank cover, the translation mechanism first drives the tank cover to move along a first direction. When the tank cover moves to a position corresponding to the tank body, the sensing component is triggered and transmits a signal to the control component. The control component controls the translation mechanism to stop working and drives the tank cover downward through the lifting mechanism to seal the tank body. When opening the tank cover, the lifting mechanism first drives the tank cover to move upward, and then the translation mechanism drives the tank cover to move along the first direction, moving the tank cover away from the opening of the tank body, thereby allowing semiconductor devices to be placed into the tank. The opening and closing of the tank cover by the lifting mechanism and the translation mechanism can realize the automatic opening and closing of the tank cover, which is convenient for operators. The lifting mechanism is set below the tank cover, pushing the tank cover up or pulling the tank cover down, making the movement of the tank cover more stable. The movement of the vacuum drying tank cover can be precisely controlled by the sensing and control components to ensure that the cover and the tank body are perfectly aligned, thereby completely sealing the tank body and improving the cleanliness of the vacuum drying tank. Attached Figure Description

[0024] Figure 1 This is one of the structural schematic diagrams of the sealing door of the vacuum drying tank provided in this embodiment of the utility model;

[0025] Figure 2 yes Figure 1 A magnified view of a section at point A in the middle;

[0026] Figure 3 This is the second schematic diagram of the structure of the sealing door of the vacuum drying tank provided in this embodiment of the utility model;

[0027] Figure 4 yes Figure 3 A magnified view of a section at point B in the middle.

[0028] In the picture:

[0029] 1. Slot cover; 11. Reinforcing rib; 2. Lifting mechanism; 3. Translation mechanism; 31. Cylinder; 32. Piston; 4. Connecting parts; 41. Slide groove; 5. Guide assembly; 51. Slide rail; 52. Slider; 53. Mounting plate. Detailed Implementation

[0030] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0031] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0034] like Figures 1 to 4 As shown, this embodiment provides a sealing door for a vacuum drying tank, used to seal the tank body. The sealing door of the vacuum drying tank includes a tank cover 1, a lifting mechanism 2, a translation mechanism 3, a sensing component, and a control component. The tank cover 1 is used to seal the tank body. The lifting mechanism 2 is located below the tank cover 1 and is driven and connected to the tank cover 1. The lifting mechanism 2 can drive the tank cover 1 to move in the vertical direction. The translation mechanism 3 is located to the side of the tank cover 1 and is driven and connected to the tank cover 1. The translation mechanism 3 can drive the tank cover 1 to move in a first direction. The sensing component is used to detect the position of the tank cover 1. The lifting mechanism 2, the translation mechanism 3, and the sensing component are all communicatively connected to the control component. Specifically, the first direction is... Figure 1 The X direction in the diagram refers to the first direction, which is a direction within the horizontal plane, and the vertical direction is... Figure 1 The Z-direction. The groove cover 1 is a rectangular plate structure, set along the horizontal direction.

[0035] When closing the tank cover 1, the translation mechanism 3 first drives the tank cover 1 to move along the first direction. When the tank cover 1 moves to the position corresponding to the tank body, the sensing component is triggered and transmits a signal to the control component. The control component controls the translation mechanism 3 to stop working and drives the tank cover 1 downward through the lifting mechanism 2 to seal the tank body. When opening the tank cover 1, the lifting mechanism 2 first drives the tank cover 1 to move upward, and then the translation mechanism 3 drives the tank cover 1 to move along the first direction, so that the tank cover 1 is away from the opening of the tank body, thereby allowing semiconductor devices to be placed into the tank. The lifting mechanism 2 and the translation mechanism 3 drive the tank cover 1 to open or close automatically, which can realize the automatic opening and closing of the tank cover 1 and facilitate the operation of the staff. The lifting mechanism 2 is set below the tank cover 1, pushing the tank cover 1 to rise or pulling the tank cover 1 to fall, so that the movement of the tank cover 1 is more stable. Through the sensing component and the control component, the movement position of the tank cover 1 can be precisely controlled to ensure that the tank cover 1 is completely aligned with the tank body, thereby completely sealing the tank body and improving the cleanliness of the vacuum drying tank.

[0036] Optionally, the sensing component is a reed switch, comprising a magnet and a sensor. One of the magnet and the sensor is disposed on the slot cover 1, and the other is disposed on the slot body. The sensor is communicatively connected to the control component, and the magnet can trigger the sensor. Specifically, the magnet is disposed on the slot cover 1, and the sensor is disposed on the slot body. When the slot cover 1 moves to a position corresponding to the slot body, the magnet triggers the sensor to generate a sensing signal, which is then transmitted to the control component. In other embodiments, the sensing component can also be a photoelectric switch.

[0037] Optionally, two sensing components are provided, one of which is used to detect the position of the slot cover 1 moving along the first direction, and the other is used to detect the position of the slot cover 1 moving along the vertical direction.

[0038] Optionally, the translation mechanism 3 is a pneumatic cylinder, a hydraulic cylinder, or an electric push rod. Taking a pneumatic cylinder as an example, the translation mechanism 3 includes a cylinder 31 and a piston 32. The cylinder 31 can drive the piston 32 to move along a first direction. The slot cover 1 is connected to the piston 32, and the piston 32 drives the slot cover 1 to reciprocate along the first direction.

[0039] To avoid interference between the translation mechanism 3 and the lifting mechanism 2, the translation mechanism 3 may optionally be slidably connected to the slot cover 1 in the vertical direction. When the lifting mechanism 2 drives the slot cover 1 to move in the vertical direction, the slot cover 1 can move relative to the translation mechanism 3.

[0040] Optionally, the sealing door of the vacuum drying tank also includes a connector 4, which is fixedly connected to the tank cover 1. The connector 4 is provided with a vertically extending groove 41, and the translation mechanism 3 is provided with a sliding protrusion corresponding to the groove 41, which is slidably connected to the groove 41. Specifically, the connector 4 includes a first connecting part and a second connecting part that are perpendicular to each other. The first connecting part is connected to the side of the tank cover 1 facing away from the lifting mechanism 2 by screws, and the connector 4 is located at the edge of the tank cover 1 along the first direction. The groove 41 is provided on the side of the second connecting part facing the piston 32, and the sliding protrusion is provided on the end of the piston 32 facing the groove 41.

[0041] Optionally, at least two lifting mechanisms 2 are provided, and these two lifting mechanisms 2 are located on the edge of the slot cover 1 and symmetrically arranged about the center of the slot cover 1, so that the slot cover 1 moves more smoothly in the vertical direction. Specifically, four lifting mechanisms 2 are provided, and the four lifting mechanisms 2 are located at the four corners of the rectangular slot cover 1. The four lifting mechanisms 2 work synchronously, thereby driving the slot cover 1 to move smoothly in the vertical direction. The lifting mechanisms 2 are fixedly connected to the slot cover 1 by screws, and when the slot cover 1 moves in the first direction, the lifting mechanisms 2 move synchronously with the slot cover 1. The lifting mechanism 2 can be a cylinder, a hydraulic cylinder, or an electric push rod.

[0042] Optionally, the sealing door of the vacuum drying tank also includes a guide assembly 5, and the lifting mechanism 2 is connected to the guide assembly 5 and can slide along the first direction. By setting the guide assembly 5, the smoothness of the tank cover 1 moving along the first direction and the accuracy of the moving position are improved.

[0043] Optionally, the guide assembly 5 includes a slide rail 51 and a slider 52. The slide rail 51 extends along a first direction, and the slider 52 is slidably connected to the slide rail 51. The lifting mechanism 2 is connected to the slider 52. Specifically, two guide assemblies 5 are provided, each guide assembly 5 corresponding to two lifting mechanisms 2. Each guide assembly 5 includes one slide rail 51 and two sliders 52 corresponding to the slide rail 51. The two slide rails 51 are spaced apart along a direction perpendicular to the first direction in the horizontal plane. The slider 52 is slidably connected to its corresponding slide rail 51. The guide assembly 5 also includes a mounting plate 53, which is fixedly connected to the side of the two corresponding sliders 52 facing away from the slide rail 51. The lifting mechanism 2 is fixedly connected to its corresponding mounting plate 53. In other embodiments, the guide assembly 5 can also be a guide shaft and a guide sleeve. The guide shaft extends along the first direction, the guide sleeve is fitted onto the guide shaft and slidably connected to the guide shaft, and the lifting mechanism 2 is fixedly connected to the guide sleeve.

[0044] Optionally, a reinforcing rib 11 is provided on the side of the slot cover 1 facing away from the lifting mechanism 2. The reinforcing rib 11 can enhance the structural strength of the slot cover 1, prevent the slot cover 1 from deforming, and ensure the flatness of the slot cover 1. Specifically, multiple reinforcing ribs 11 are provided and welded to the side of the slot cover 1 facing away from the lifting mechanism 2.

[0045] This embodiment also provides a vacuum drying device, which includes a vacuum pump, a heating device, a tank, and a sealed door for the vacuum drying tank. The vacuum pump is connected to the interior of the tank and is used to create a vacuum inside the sealed tank. The heating device is installed on the inner wall of the tank and is used to dry the semiconductor devices placed inside the tank. This vacuum drying device can precisely control the movement position of the tank cover 1, ensuring that the tank is completely sealed, improving the cleanliness inside the tank, and thus increasing the yield of semiconductor devices.

[0046] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A sealing door for a vacuum drying tank, wherein the sealing door of the vacuum drying tank is used to seal the tank body, characterized in that, The sealing door of the vacuum drying tank includes: A groove cover (1) is used to seal the groove body; Lifting mechanism (2), the lifting mechanism (2) is located below the slot cover (1) and is driven to be connected to the slot cover (1). The lifting mechanism (2) can drive the slot cover (1) to move in the vertical direction. Translation mechanism (3), the translation mechanism (3) is disposed on the side of the slot cover (1) and driven to be connected to the slot cover (1), the translation mechanism (3) can drive the slot cover (1) to move along a first direction; A sensing component for detecting the position of the slot cover (1); The control component, the lifting mechanism (2), the translation mechanism (3) and the sensing component are all communicatively connected to the control component.

2. The sealing door of the vacuum drying tank according to claim 1, characterized in that, The sensing component is a reed switch. The sensing component includes a magnet and a sensor. One of the magnet and the sensor is disposed on the slot cover (1) and the other is disposed on the slot body. The sensor is communicatively connected to the control component. The magnet can trigger the sensor.

3. The sealing door of the vacuum drying tank according to claim 1, characterized in that, The translation mechanism (3) is a cylinder, a hydraulic cylinder, or an electric push rod.

4. The sealing door of the vacuum drying tank according to claim 3, characterized in that, The translation mechanism (3) is slidably connected to the groove cover (1) in the vertical direction.

5. The sealing door of the vacuum drying tank according to claim 4, characterized in that, The sealing door of the vacuum drying tank also includes a connector (4), which is fixedly connected to the tank cover (1). The connector (4) is provided with a sliding groove (41) extending in the vertical direction. The translation mechanism (3) is provided with a sliding protrusion corresponding to the sliding groove (41), and the sliding protrusion is slidably connected to the sliding groove (41).

6. The sealing door of the vacuum drying tank according to claim 1, characterized in that, The sealing door of the vacuum drying tank also includes a guide assembly (5), and the lifting mechanism (2) is connected to the guide assembly (5) and can slide along the first direction.

7. The sealing door of the vacuum drying tank according to claim 6, characterized in that, The guide assembly (5) includes a slide rail (51) and a slider (52), the slide rail (51) extends along the first direction, the slider (52) is slidably connected to the slide rail (51), and the lifting mechanism (2) is connected to the slider (52).

8. The sealing door of the vacuum drying tank according to any one of claims 1-7, characterized in that, The groove cover (1) is provided with a reinforcing rib (11) on the side facing away from the lifting mechanism (2).

9. The sealing door of the vacuum drying tank according to any one of claims 1-7, characterized in that, At least two lifting mechanisms (2) are provided, and at least two lifting mechanisms (2) are provided on the edge of the slot cover (1) and are symmetrically arranged about the center of the slot cover (1).

10. A vacuum drying device, characterized in that, It includes a vacuum pump, a heating device, a tank, and a sealed door for a vacuum drying tank as described in any one of claims 1-9, wherein the vacuum pump is in communication with the interior of the tank, and the heating device is installed on the inner wall of the tank.

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