A new cage type multi-path structured light imaging mechanism

Abstract

The utility model discloses a novel cage type multi -way structure light imaging mechanism, including the cage type frame that constitutes by upper plate, lower plate and stand, and the coaxial setting camera and lens of frame, and the diagonal fixed block is equipped with in the upper plate corresponding lens position, and the lens outer periphery is fastened and is pasted through the top silk, the periphery of lens is configured at least two light machines, and each light machine is fixed between two stands through mounting panel, and the projection direction is aimed at detection area, mechanism integrated control card and host computer: control card electricity is connected light machine and camera, and the light machine timing is regulated and controlled when lighting and synchronism camera image acquisition, and the host computer receives camera image and carries out three -dimensional coordinate solution. Through cage type frame integration component, strengthen the integration of detection system, effectively reduce light machine, camera and lens relative position deviation, shorten the equipment setting time, improve the detection rhythm efficiency, reduce the calibration frequency, significantly increase the effective operation time of equipment, be applicable to the three -dimensional detection scene of high accuracy, high rhythm.

Description

Technical Field

[0001] This utility model belongs to the field of machine vision inspection technology, and relates to a novel cage-type high-stability multi-channel structured light imaging mechanism, which is particularly suitable for semiconductor 2.5D / 3D packaging inspection scenarios. It can quickly acquire high-precision three-dimensional information of objects through multi-channel structured light, meeting the requirements of inspection stability, cycle efficiency and long-term accuracy maintenance in automated production. Background Technology

[0002] Multi-path structured light imaging (MLI) simultaneously projects multiple beams of structured light with specific patterns (such as line lasers or coded light spots). Utilizing the deformation characteristics of the structured light on the object's surface, and combining this with triangulation principles, it rapidly calculates the object's three-dimensional coordinates. This is crucial for 2.5D / 3D packaging inspection in the semiconductor industry. As Moore's Law gradually becomes obsolete, the manufacturing cost of 5nm and below processes is rising sharply. Chip manufacturers are turning to "More than Moore" technologies, with TSMC's Wafer-Level System Integration (CoWAS) technology achieving a significant improvement in 3D packaging integration, placing higher demands on the accuracy and efficiency of packaging inspection.

[0003] like Figure 1 As shown, a typical structure of an existing multi-channel structured light imaging mechanism includes: an upper plate, a lower plate, a mounting plate, a camera, a lens, and a multi-channel structured light projector (hereinafter referred to as "optical mechanism"). The camera and lens are fixed to the upper plate, and multiple optical mechanisms are mounted on the lower plate via independent optical mechanism mounting blocks. The upper and lower plates are connected and fixed via the mounting plate. The entire detection head assembly needs to be mounted on a transverse module, which drives the reciprocating motion along the truss to adapt to different sized detection objects and camera field of view. However, it has the following problems: 1. High-frequency vibration causes measurement reference failure: When the detection head assembly moves with the transverse module, the loose structure of the upper and lower plates connected by the mounting plate is not rigid enough, which can easily cause mechanical resonance. This leads to continuous high-frequency micro-vibration of the camera, lens and optical engine, causing the optical components to deviate from the initial calibration posture, directly destroying the reference geometric relationship of triangulation, resulting in measurement accuracy decay or even failure. 2. Long system setup time slows down production cycle: Multi-channel structured light imaging requires shooting in a static state to ensure accuracy. However, due to the slow vibration decay of existing structures, a long "setup time" (the time it takes for the amplitude to decay to the allowable range) is required before shooting can start. In the continuous automated production of semiconductor packaging, this problem has become a fatal bottleneck to the production cycle. 3. High component position offset and maintenance costs: Long-term high-frequency vibration can cause irreversible displacement of the mounting positions of the optical engine fixing block, camera and lens. This not only affects the accuracy of each measurement, but also requires frequent recalibration of the detection head, shortening the effective working time of the equipment and significantly increasing after-sales maintenance costs. Utility Model Content

[0004] In view of the shortcomings of existing technologies, such as high-frequency vibration, long setting time, component misalignment and high maintenance cost, the purpose of this invention is to provide a novel cage-type high-stability multi-channel structured light imaging mechanism. By optimizing the structural design, the overall rigidity and integrity are enhanced, high-frequency vibration is suppressed, setting time is shortened, component position misalignment is reduced, calibration frequency is lowered, and the effective working time and production cycle of the equipment are improved.

[0005] The objective of this utility model is achieved through the following technical solution: A novel cage-type multi-path structured light imaging mechanism includes a cage-like frame composed of an upper plate, a lower plate, and columns. A camera and a lens are coaxially mounted on the cage-like frame. A diagonal fixing block is provided on the upper plate corresponding to the position of the lens. The diagonal fixing block is fastened to the upper plate by set screws and fits against the outer periphery of the lens. At least two optical engines are arranged around the lens. Each optical engine is fixed between two adjacent columns by an optical engine mounting plate. The projection direction of the optical engine is towards the detection area, and the optical axis of the optical engine forms a preset triangular measurement angle with the optical axis of the lens. The mechanism also includes a control card and a host computer. The control card is electrically connected to the optical engines and the camera, respectively, and is used to control the lighting sequence of the optical engines and the synchronous image acquisition of the camera. The host computer is electrically connected to the camera and is used to receive the images acquired by the camera and perform three-dimensional coordinate calculation.

[0006] As a further improvement of this utility model, the upper plate and the lower plate are arranged in parallel, and there are four columns, the top of which are fixedly connected to the four corners of the lower surface of the upper plate, and the bottom of which are fixedly connected to the four corners of the upper surface of the lower plate.

[0007] As a further improvement of this utility model, the number of optical engines is four, and the four optical engines are respectively mounted on four columns through four optical engine mounting plates.

[0008] As a further improvement of this utility model, a mounting plate is provided on one side of the cage frame, and a notch is left on the mounting plate for placing the optical machine.

[0009] As a further improvement of this utility model, the column is made of stainless steel or aerospace aluminum alloy, and the upper plate and lower plate are made of aerospace aluminum alloy.

[0010] As a further improvement of this utility model, the diagonal fixing block is a U-shaped structure, the open end of the U-shaped structure faces the lens, and the set screw is radially inserted along the side wall of the U-shaped structure and abuts against the outer periphery of the lens to limit the radial micro-displacement of the lens.

[0011] As a further improvement of this utility model, the preset triangulation measurement angle between the optical axis of the optical engine and the optical axis of the lens is 20°-45°. This angle is determined in advance by a standard calibration plate, and the accuracy of the standard calibration plate is not less than 0.001mm.

[0012] As a further improvement of this utility model, the mounting plate is provided with mounting holes for connecting with an external transverse module, the number of mounting holes is not less than four, and they are evenly distributed along the circumference of the mounting plate.

[0013] The above technical solution has the following beneficial effects: by integrating the camera, lens, and optical engine into a cage-like structural frame to form an "integrated cage structure", the structural rigidity and dynamic stability of the system are significantly improved. It effectively suppresses structural micro-displacement and fatigue deformation caused by long-term high-frequency vibration, ensures that key components always maintain their initial calibration position, thereby greatly reducing the accuracy decay problem caused by pose drift, and significantly reducing the frequency of repeated calibration during maintenance, thus improving the effective service life of the components. Attached Figure Description

[0014] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0015] The structures, proportions, sizes, etc. shown in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0016] Figure 1 This is a schematic diagram of the operating status of an existing multi-channel structured light imaging mechanism.

[0017] Figure 2 This is a three-dimensional schematic diagram of the present invention.

[0018] In the picture: 1. On the board; 2. Lower board; 3. Columns; 4. Camera; 5. Lens; 6. Optical mechanism; 7. Mounting plate. Detailed Implementation

[0019] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0020] First embodiment, such as Figure 2 As shown, a novel cage-type multi-path structured light imaging mechanism includes a cage-like frame composed of an upper plate 1, a lower plate 2, and columns 3. Specifically, the upper plate 1 and the lower plate 2 are arranged in parallel. There are four columns 3, with their top ends fixedly connected to the four corners of the lower surface of the upper plate 1, and their bottom ends fixedly connected to the four corners of the upper surface of the lower plate 2, forming a stable three-dimensional frame structure that effectively ensures the relative positional accuracy of each optical element during imaging. The columns 3 can be made of stainless steel or aerospace aluminum alloy, balancing strength and lightweight requirements. The upper plate 1 and the lower plate 2 are preferably made of aerospace aluminum alloy, which reduces the overall weight while ensuring structural rigidity, facilitating the integrated application of the equipment on a mobile platform.

[0021] A mounting plate 7 is provided on one side of the cage-like frame. The mounting plate 7 has a notch that matches the outline of the optical engine 6, facilitating its embedding and installation and achieving a compact layout. The mounting plate 7 also has at least four mounting holes evenly distributed circumferentially for reliable connection to an external transverse module, ensuring the stability and repeatability of the entire imaging mechanism during movement. In equivalent embodiments, the number of columns 3 can be appropriately increased or decreased according to structural strength requirements, for example, using six or eight columns to improve torsional resistance; the position of the mounting plate 7 can also be adjusted to other sides of the frame to accommodate installation spaces in different directions.

[0022] A camera 4 and a lens 5 are coaxially mounted on a cage-like frame. The camera 4 is fixed above the upper plate 1, and the lens 5 passes through the central hole of the upper plate 1 and extends downward. A diagonal fixing block is provided on the upper plate 1 corresponding to the position of the lens 5. This diagonal fixing block is fastened to the upper plate 1 by set screws and fits against the outer periphery of the lens 5 to limit the radial and axial displacement of the lens 5 and improve the stability of the optical system. At least two optical engines 6 are arranged around the lens 5. Each optical engine 6 is fixed between two adjacent columns 3 by an independent optical engine mounting plate. The mounting position can be adjusted in height and angle according to triangulation requirements. The projection direction of each optical engine 6 is towards a common detection area, and its optical axis forms a preset triangulation angle with the optical axis of the lens 5 to meet the geometric constraints of structured light 3D imaging.

[0023] Specifically, there are four optical engines 6, each mounted on one of the four corresponding columns 3 via four optical engine mounting plates. Each optical engine mounting plate can be connected to the column 3 using screws or pins to ensure a secure installation and easy disassembly and adjustment. In other equivalent embodiments, the number of optical engines 6 can also be set to three or six depending on the actual imaging requirements, and the number of columns should be increased or decreased accordingly to meet the installation requirements of the optical engines 6.

[0024] The diagonal fixing block adopts a U-shaped structure with its open end facing the lens 5. Threaded holes are provided on both sides of the U-shape. The set screw passes radially through the side wall and abuts against the outer periphery of the lens 5 to limit the radial micro-displacement of the lens 5 during use and improve the stability of the optical system.

[0025] The preset triangulation measurement angle formed between the optical axis of the optical engine 6 and the optical axis of the lens 5 is 20°–45°. This angle range takes into account both measurement accuracy and structural compactness. The specific value is determined in advance by standard calibration plate. The processing accuracy of the standard calibration plate is not less than 0.001mm to ensure the overall three-dimensional reconstruction accuracy of the system.

[0026] The imaging mechanism also includes a control card and a host computer. The control card is electrically connected to each of the optical engines 6 and the camera 4, respectively, to precisely control the lighting sequence of the optical engines 6 and synchronously trigger the camera 4 to acquire images, ensuring that the structured light pattern projection and image acquisition are strictly aligned in time, avoiding phase errors caused by motion or environmental interference. The host computer is connected to the camera 4 via a data cable, receives the multi-view structured light images acquired by the camera, and performs three-dimensional coordinate calculation based on a preset triangulation model and calibration parameters to reconstruct the surface morphology of the object being measured.

[0027] Working principle: During detection, the transverse module drives the cage mechanism of this utility model to move to the target detection position. The control card sends a command: the four optical engines 6 can be lit simultaneously or in a preset sequence to project a structured light pattern with a specific code onto the object surface; the camera 4 synchronously acquires the distorted structured light image modulated by the object surface and transmits the image data back to the host computer; the host computer runs image preprocessing, sub-pixel level light stripe center extraction, three-dimensional coordinate calculation (based on the principle of triangulation) and point cloud post-processing algorithm, and finally outputs the three-dimensional detection result of the object.

[0028] The overall structure of this utility model adopts a cage structure, which integrates the camera, lens and optical engine on the cage frame to form an "integrated cage structure". This significantly improves the structural rigidity and dynamic stability of the system, effectively suppresses structural micro-displacement and fatigue deformation caused by long-term high-frequency vibration, and ensures that key components always maintain their initial calibration position. This greatly reduces the accuracy decay caused by pose drift, and significantly reduces the frequency of repeated calibration during maintenance, thereby increasing the effective service life of the components.

[0029] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0030] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0031] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A novel cage-type multi-path structured light imaging mechanism, characterized in that, The system includes a cage-like frame consisting of an upper plate, a lower plate, and columns. A camera and a lens are coaxially mounted on the cage-like frame. A diagonal fixing block is positioned on the upper plate corresponding to the lens, and the diagonal fixing block is fastened to the upper plate by set screws and fits against the outer periphery of the lens. At least two optical engines are arranged around the lens, and each optical engine is fixed between two adjacent columns by an optical engine mounting plate. The projection direction of the optical engine is towards the detection area, and the optical axis of the optical engine forms a preset triangular measurement angle with the optical axis of the lens. The system also includes a control card and a host computer. The control card is electrically connected to the optical engines and the camera, and is used to control the lighting sequence of the optical engines and the synchronous image acquisition of the camera. The host computer is electrically connected to the camera and is used to receive the images acquired by the camera and perform three-dimensional coordinate calculations.

2. The novel cage-type multi-path structured light imaging mechanism according to claim 1, characterized in that, The upper plate and the lower plate are arranged in parallel. There are four columns, and their top ends are fixedly connected to the four corners of the lower surface of the upper plate, and their bottom ends are fixedly connected to the four corners of the upper surface of the lower plate.

3. The novel cage-type multi-path structured light imaging mechanism according to claim 2, characterized in that, The number of optical engines is four, and the four optical engines are respectively mounted on four columns via four optical engine mounting plates.

4. The novel cage-type multi-path structured light imaging mechanism according to claim 1, characterized in that, A mounting plate is provided on one side of the cage frame, and a notch is left on the mounting plate for placing the optical machine.

5. The novel cage-type multi-path structured light imaging mechanism according to claim 1, characterized in that, The column is made of stainless steel or aerospace aluminum alloy, and the upper and lower plates are made of aerospace aluminum alloy.

6. The novel cage-type multi-path structured light imaging mechanism according to claim 1, characterized in that, The diagonal fixing block has a U-shaped structure with the open end of the U-shaped structure facing the lens. The set screw is radially inserted along the side wall of the U-shaped structure and abuts against the outer periphery of the lens to limit the radial micro-displacement of the lens.

7. The novel cage-type multi-path structured light imaging mechanism according to claim 1, characterized in that, The preset triangulation angle between the optical axis of the optical engine and the optical axis of the lens is 20°-45°. This angle is determined in advance by a standard calibration plate with an accuracy of not less than 0.001mm.

8. The novel cage-type multi-path structured light imaging mechanism according to claim 1, characterized in that, The mounting plate is provided with mounting holes for connecting to an external transverse module. The number of mounting holes is not less than four and they are evenly distributed along the circumference of the mounting plate.

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