Mechanical arm detection device and semiconductor apparatus

Abstract

The utility model provides a kind of mechanical arm detection device and semiconductor equipment, mechanical arm detection device includes: support frame, the opening of the support frame is aligned with the entrance of a container, multiple substrates are placed in the container interval;Multiple detection units are arranged on the vertical beam of the support frame interval;The detection unit includes signal transmitter, signal receiver and signal processor, the signal transmitter emits optical signal from the vertical beam of one side of the support frame to the vertical beam of other side, the signal receiver receives the optical signal, and the signal processor judges whether deviation occurs in the process that a mechanical arm moves from the side of the support frame away from the container to the container according to the light intensity of the received optical signal.The technical scheme of the utility model can detect the deviation of the mechanical arm in time, thereby avoiding the abnormality of batch substrates.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor integrated circuit manufacturing, and in particular to a robotic arm detection device and semiconductor equipment. Background Technology

[0002] In semiconductor equipment, robotic arms are widely used to transport wafers. However, prolonged movement of the robotic arm can cause unpredictable deviations, leading to collisions or scratches between the robotic arm and the wafer during wafer retrieval.

[0003] Currently, the deviation of the robotic arm cannot be detected in time, resulting in a large number of damaged wafers. Utility Model Content

[0004] The purpose of this invention is to provide a robotic arm detection device and a semiconductor equipment, which enables timely detection of robotic arm deviation, thereby preventing batch substrate abnormalities.

[0005] To achieve the above objectives, this utility model provides a robotic arm detection device, including...

[0006] A support frame, the opening of which is aligned with the entrance of a container, wherein multiple substrates are placed at intervals inside the container;

[0007] Multiple detection units are spaced apart on the vertical beams of the support frame. Each detection unit includes a signal transmitter, a signal receiver, and a signal processor. The signal transmitter emits light signals from one vertical beam of the support frame to the other vertical beam. The signal receiver receives the light signals. The signal processor determines whether a robotic arm deviates from its position as it moves from the side of the support frame away from the container into the container, based on the intensity of the received light signals.

[0008] Optionally, the optical signal is an infrared laser or a visible laser.

[0009] Optionally, the number of detection units is the same as the number of substrates, with each group of detection units corresponding to one substrate.

[0010] Optionally, the height range of the optical signal emitted by the signal transmitter is the same as the thickness range of the corresponding substrate.

[0011] Optionally, the signal transmitter is disposed on a vertical beam on one side of the support frame, and the signal receiver and the signal processor are integrated and disposed on a vertical beam on the other side of the support frame.

[0012] Optionally, the signal transmitter, the signal receiver, and the signal processor are integrated and disposed on the vertical beam on one side of the support frame, and the signal receiver receives the light signal reflected back from the vertical beam on the other side of the support frame and / or the robotic arm.

[0013] Optionally, the robotic arm detection device further includes:

[0014] An alarm device is provided that issues an alarm signal when the signal processor determines that the robotic arm has deviated.

[0015] This utility model also provides a semiconductor device, including:

[0016] A container in which multiple substrates are placed at intervals;

[0017] The aforementioned robotic arm detection device;

[0018] A robotic arm moves from the side of the support frame away from the container into the container to remove the substrate.

[0019] Optionally, the container is a transfer box or a reaction chamber.

[0020] Optionally, the semiconductor device is a photolithography device, an etching device, a deposition device, or a chemical mechanical polishing device.

[0021] Compared with the prior art, the robotic arm detection device and the semiconductor device of this utility model have multiple detection units arranged at intervals on the vertical beams of the support frame. Each detection unit includes a signal transmitter, a signal receiver, and a signal processor. The signal transmitter emits light signals from one side of the vertical beam of the support frame to the other side. The signal receiver receives the light signals. The signal processor determines whether the robotic arm has deviated during its movement from the side of the support frame away from the container into the container based on the intensity of the received light signals. This allows the robotic arm to be detected before it contacts the substrate, avoiding collisions or scratches between the robotic arm and the substrate. The deviation of the robotic arm can be detected in a timely manner, thereby preventing batch substrate abnormalities. Attached Figure Description

[0022] Figure 1 This is a side view of a robotic arm detection device according to an embodiment of the present invention;

[0023] Figure 2 This is a front view of a robotic arm detection device according to an embodiment of the present invention;

[0024] Figure 3This is a schematic diagram of a robotic arm detection device according to an embodiment of the present invention, which detects the displacement of the robotic arm.

[0025] Among them, the appendix Figures 1-3 The annotations in the attached figures are explained as follows:

[0026] 10-Baseboard; 11-Container; 111-Support platform; 12-Support frame; 121-Opening; 13-Signal transmitter; 14-Signal receiver; 15-Signal processor; 16-Robotic arm; 161-Base. Detailed Implementation

[0027] To make the objectives, advantages, and features of this utility model clearer, the robotic arm detection device and semiconductor equipment proposed in this utility model will be described in further detail below. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the explanation of the objectives of the embodiments of this utility model.

[0028] One embodiment of this utility model provides a robotic arm detection device and a semiconductor device. The robotic arm detection device includes: a support frame, the opening of which is aligned with the entrance of a container, and multiple substrates placed at intervals inside the container; multiple detection units, spaced apart on the vertical beams of the support frame; each detection unit includes a signal transmitter, a signal receiver, and a signal processor. The signal transmitter emits light signals from one vertical beam of the support frame to the other vertical beam, the signal receiver receives the light signals, and the signal processor determines whether a robotic arm has deviated during its movement from the side of the support frame away from the container into the container based on the intensity of the received light signals.

[0029] The semiconductor device includes: a container in which multiple substrates are placed at intervals; the robotic arm detection device; and a robotic arm that moves from the side of the support frame away from the container into the container to remove the substrates.

[0030] See below. Figures 1-3 The robotic arm detection device and the semiconductor device provided in this embodiment are described in detail.

[0031] The opening 121 of the support frame 12 is aligned with the entrance of the container 11, and multiple substrates 10 are placed at intervals inside the container 11.

[0032] In one embodiment, the opening 121 of the support frame 12 has the same shape and size as the inlet of the container 11, for example, both being rectangular. In other embodiments, the opening 121 of the support frame 12 is larger than the inlet size of the container 11.

[0033] In one embodiment, the support frame 12 includes two opposing vertical beams and two opposing horizontal beams, the vertical beams being perpendicular to the horizontal beams and connected to form an opening 121. The horizontal beams are parallel to the base plate 10.

[0034] The container 11 has a support platform 111 on its opposite inner sidewall for supporting the substrate 10, which is placed horizontally in the container 11.

[0035] The robotic arm 16 moves from the side of the support frame 12 away from the container 11 into the container 11 to remove the substrate 10.

[0036] In one embodiment, the process of the robotic arm 16 removing the substrate 10 includes: on the side of the support frame 12 away from the container 11, the robotic arm 16 moves to a position flush with a set height below the substrate 10 to be removed (e.g., the midpoint between the substrate 10 to be removed and the substrate 10 below it); then, the robotic arm 16 continues to move through the opening 121 of the support frame 12 and enters the container 11; after the robotic arm 16 moves to the set height below the substrate 10 to be removed, the robotic arm 16 continues to move upward; after the robotic arm 16 moves to the point where its upper surface contacts the lower surface of the substrate 10 to be removed, the robotic arm 16 lifts the substrate 10 to be removed upward and moves the substrate 10 to be removed out of the container 11, thereby removing the substrate 10 to be removed.

[0037] In one embodiment, on the side of the support frame 12 away from the container 11, the robotic arm 16 moves to a position level with a predetermined height below the substrate 10 to be retrieved. This means that the end of the robotic arm 16 closest to the support frame 12 moves to a position level with a predetermined height below the substrate 10 to be retrieved. For example... Figure 3 The height at which AA' is shown.

[0038] In one embodiment, the container 11 is a transfer box, and the support frame 12 is located at the loading port of the semiconductor device housing. When a certain process needs to be performed on the substrate 10, the transfer box containing multiple substrates 10 is placed at the loading port of the housing, and the entrance of the transfer box is aligned with the opening 121 of the support frame 12, so that the robotic arm 16 can extend from the housing, pass through the opening 121 of the support frame 12, enter the transfer box to remove the substrate 10, and transfer the substrate 10 to the reaction chamber inside the housing to perform a certain process.

[0039] Alternatively, in another embodiment, the container 11 is a reaction chamber, the support frame 12 is disposed at the entrance of the reaction chamber, and the opening 121 of the support frame 12 is aligned with the entrance of the reaction chamber. After a certain process is performed on the substrate 10, the robotic arm 16 passes through the opening 121 from the side of the support frame 12 away from the reaction chamber and enters the reaction chamber to remove the substrate 10, and transfers the substrate 10 to the transfer box so that the transfer box can be used to transport the substrate 10 to the next process.

[0040] In one embodiment, the substrate 10 may be a wafer.

[0041] Multiple detection units are spaced apart on the vertical beams of the support frame 12. Each detection unit includes a signal transmitter 13, a signal receiver 14, and a signal processor 15. The signal transmitter 13 emits light signals from one vertical beam of the support frame 12 to the other vertical beam. The signal receiver 14 receives the light signals. The signal processor 15 determines whether a robotic arm 16 deviates during its movement from the side of the support frame 12 away from the container 11 into the container 11 based on the intensity of the received light signals.

[0042] In one embodiment, the offset refers to the tilting of the end of the robotic arm 16 near the support frame 12 relative to the surface parallel to the substrate 10, either upwards or downwards, on the side of the support frame 12 away from the container 11. Figure 3 The image shows a downward slope.

[0043] The signal receiver 14 is capable of detecting the real-time light intensity of the received optical signal.

[0044] In one embodiment, such as Figures 1-3 As shown, in the direction perpendicular to the substrate 10, the height range of the light signal emitted by the signal transmitter 13 is the same as the corresponding thickness range of the substrate 10. If the robotic arm 16 deviates, during the process of the robotic arm 16 moving from the side of the support frame 12 away from the container 11 into the container 11, when the robotic arm 16 passes through the opening 121 of the support frame 12, the robotic arm 16 will touch the light signal, that is, the robotic arm 16 blocks the light signal, so that the real-time light intensity of the light signal received by the signal receiver 14 is less than the initial light intensity of the light signal emitted by the signal transmitter 13.

[0045] In other embodiments, in a direction perpendicular to the substrate 10, the height range of the light signal emitted by the signal transmitter 13 is greater than the thickness range of the corresponding substrate 10, and less than the range between the positions of the horizontal (i.e., unoffset) robotic arm 16 when it enters above and below the corresponding substrate 10.

[0046] The signal processor 15 is configured with a set specification. If the difference between the initial light intensity and the real-time light intensity exceeds the set specification, the signal processor 15 determines that the robotic arm 16 has touched the light signal and determines that the robotic arm 16 has deviated.

[0047] In one embodiment, such as Figure 2 As shown, the signal transmitter 13 is mounted on a vertical beam on one side of the support frame 12, and the signal receiver 14 and the signal processor 15 are integrated and mounted on a vertical beam on the other side of the support frame 12. When the robotic arm 16 does not block the light signal or blocks only part of the light signal, the signal receiver 14 directly receives the light signal; when the robotic arm 16 blocks all of the light signal, the signal receiver 14 does not receive the light signal.

[0048] Alternatively, in another embodiment, the signal transmitter 13, the signal receiver 14, and the signal processor 15 are integrated and disposed on a vertical beam on one side of the support frame 12. The signal receiver 14 receives the light signal reflected from the vertical beam on the other side of the support frame 12 and / or the robotic arm. Specifically, if the robotic arm 16 does not block the light signal, the signal receiver 14 receives the light signal reflected from the vertical beam on the other side of the support frame 12; if the robotic arm 16 partially blocks the light signal, the signal receiver 14 receives the light signal reflected from both the robotic arm 16 and the vertical beam on the other side of the support frame 12; if the robotic arm 16 completely blocks the light signal, the signal receiver 14 receives the light signal reflected from the robotic arm 16.

[0049] In one embodiment, the number of detection units is the same as the number of substrates 10, and each group of detection units corresponds to one substrate 10, so that during the process of the robotic arm 16 picking up each substrate 10, the corresponding detection unit can be used to detect whether the robotic arm 16 has deviated.

[0050] In one embodiment, the optical signal is an infrared laser or a visible laser.

[0051] In one embodiment, the robotic arm detection device further includes an alarm (not shown) that issues an alarm signal when the signal processor 15 determines that the robotic arm 16 has deviated, thereby causing the robotic arm 16 to stop moving.

[0052] In one embodiment, the robotic arm detection device includes a plurality of alarms, the number of which is the same as the number of signal processors 15. The alarms are integrated with the signal processors 15, and the judgment result of each signal processor 15 is output to the corresponding alarm, so as to accurately determine which substrate 10 is being picked up when the robotic arm 16 deviates.

[0053] Alternatively, in another embodiment, the robotic arm detection device includes an alarm, and all judgment results from the signal processors 15 are output to the same alarm.

[0054] It should be noted that when the robotic arm 16 does not deviate and the robotic arm 16 carries the substrate 10 through the support frame 12, in order to prevent the substrate 10 from touching the light signal and causing a false alarm, the detection unit can be set to perform detection before the robotic arm 16 contacts the substrate 10 to be picked up, and the detection unit will not perform detection after the robotic arm 16 contacts the substrate 10 to be picked up.

[0055] In one embodiment, the semiconductor device further includes a base 161 for driving the robotic arm 16 to move. The base 161 may include components such as a base, connecting rods, and joints.

[0056] The semiconductor equipment can be photolithography equipment, etching equipment, deposition equipment, or chemical mechanical polishing equipment, etc.

[0057] As can be seen from the above, the robotic arm detection device and the semiconductor equipment provided by this utility model have multiple detection units arranged at intervals on the vertical beams of the support frame. Each detection unit includes a signal transmitter, a signal receiver, and a signal processor. The signal transmitter emits light signals from one side of the vertical beam of the support frame to the other side. The signal receiver receives the light signals. The signal processor determines whether a robotic arm has deviated during its movement from the side of the support frame away from the container into the container based on the intensity of the received light signals. This allows the robotic arm to be detected before it contacts the substrate, preventing collisions or scratches between the robotic arm and the substrate. The deviation of the robotic arm can be detected in a timely manner, thereby avoiding batch substrate abnormalities.

[0058] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A robotic arm detection device, characterized in that, include A support frame, the opening of which is aligned with the entrance of a container, wherein multiple substrates are placed at intervals inside the container; Multiple detection units are spaced apart on the vertical beams of the support frame. Each detection unit includes a signal transmitter, a signal receiver, and a signal processor. The signal transmitter emits light signals from one vertical beam of the support frame to the other vertical beam. The signal receiver receives the light signals. The signal processor determines whether a robotic arm deviates from its position as it moves from the side of the support frame away from the container into the container, based on the intensity of the received light signals.

2. The robotic arm detection device as described in claim 1, characterized in that, The optical signal is either infrared laser or visible laser.

3. The robotic arm detection device as described in claim 1, characterized in that, The number of detection units is the same as the number of substrates, and each group of detection units corresponds to one substrate.

4. The robotic arm detection device as described in claim 3, characterized in that, The height range of the optical signal emitted by the signal transmitter is the same as the thickness range of the corresponding substrate.

5. The robotic arm detection device as described in claim 1, characterized in that, The signal transmitter is mounted on a vertical beam on one side of the support frame, and the signal receiver and the signal processor are integrated and mounted on a vertical beam on the other side of the support frame.

6. The robotic arm detection device as described in claim 1, characterized in that, The signal transmitter, the signal receiver, and the signal processor are integrated and disposed on the vertical beam on one side of the support frame. The signal receiver receives the light signal reflected back from the vertical beam on the other side of the support frame and / or the robotic arm.

7. The robotic arm detection device as described in claim 1, characterized in that, The robotic arm detection device also includes: An alarm device is provided that issues an alarm signal when the signal processor determines that the robotic arm has deviated.

8. A semiconductor device, characterized in that, include: A container in which multiple substrates are placed at intervals; The robotic arm detection device as described in any one of claims 1 to 7; A robotic arm moves from the side of the support frame away from the container into the container to remove the substrate.

9. The semiconductor device as claimed in claim 8, characterized in that, The container is a transfer box or a reaction chamber.

10. The semiconductor device as claimed in claim 8, characterized in that, The semiconductor equipment is a photolithography device, etching device, deposition device, or chemical mechanical polishing device.

Images