A spray disc shape change detection device

Abstract

The utility model discloses a kind of spray disc shape deformation detection devices, spray disc shape deformation detection device includes: support seat, the top of support seat has a support surface;Rotary drive unit, rotary drive unit is set in the center position of support surface;Supporting disc, the bottom of supporting disc is connected in the driving end of rotary drive unit;And distance detection unit, distance detection unit is set on the top disc surface of supporting disc, distance detection unit is used to obtain the distance value between the different position of spray disc and supporting disc spray surface.It uses laser probe to carry out distance detection to spray disc surface, and drives laser probe to rotate by rotary drive unit, completes complete detection to spray surface, finally obtains deformation detection result according to detection value fitting.Compared with existing detection mode, the application uses non-contact detection, and detection process does not need to be taken off from machine platform spray disc, can realize nondestructive testing, and detection is convenient and accurate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment testing technology, and in particular to a spray disc deformation detection device. Background Technology

[0002] In semiconductor manufacturing processes, such as PECVD (Plasma Chemical Vapor Deposition), the spray disk is a key component. The reactive gases involved in thin film deposition are uniformly distributed through a fine array of micropores on the spray disk surface, ultimately growing a uniform thin film on the wafer surface. The spray disk's effectiveness in distributing the reactive gases significantly impacts the quality of the thin film deposition on the wafer surface. However, in existing technologies, the spray disk is prone to deformation. A deformed spray disk affects the gas flow direction, leading to poor coverage and the formation of an uneven plasma field. This results in suboptimal film growth, accompanied by variations in uniformity, thickness, and stress.

[0003] To detect the deformation of the spray plate, the existing technology generally uses a coordinate measuring machine (CMM). However, when the CMM is used to test the spray plate, the spray plate needs to be removed from the machine. Furthermore, the measurement of the spray plate is a contact measurement, which poses a risk of scratching the surface of the spray plate. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a spray disc deformation detection device to solve the technical problem that the existing detection device, which uses contact detection, is prone to scratching the spray disc.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An embodiment of this utility model provides a spray disc deformation detection device, which includes:

[0007] A support base, the top of which has a support surface;

[0008] A rotary drive unit is disposed at the center of the support surface;

[0009] A support disk, the bottom of which is connected to the drive end of the rotary drive unit; and

[0010] A distance detection unit is disposed on the top surface of the support plate. The distance detection unit is used to obtain the distance values ​​between different positions of the spray surface of the spray plate and the support plate. The distance detection unit is a non-contact detection unit.

[0011] The distance detection unit includes several evenly distributed distance detection modules.

[0012] The distance detection modules are linearly and equally spaced on the top surface of the support disk.

[0013] The support disk is a support disc, and the distance detection module is distributed along the diameter direction of the support disc.

[0014] The distance detection module is a laser rangefinder transceiver.

[0015] The rotary drive unit is a drive motor.

[0016] The support base is further provided with a base at its bottom, and a leveling component is provided between the base and the support base. The leveling component is used to adjust the support plate and the spray plate to be tested to enter a parallel state.

[0017] The leveling assembly includes a first lifting drive unit, a second lifting drive unit, and a third lifting drive unit, which are distributed on the top surface of the base at equal central angles.

[0018] The first lifting drive unit, the second lifting drive unit, and the third lifting drive unit have the same structure, each including a leveling motor and an encoder. The encoder is used to receive external control signals and control the rotation of the leveling motor.

[0019] Secondly, embodiments of this utility model also provide a detection method, which is performed by the spray disc deformation detection device as described in any of the above claims, and includes the following steps:

[0020] Move the spray disc deformation detection device to the area below the spray disc inside the process chamber;

[0021] The distance detection unit is activated to detect the first distance value between the device and the spray plate at the first position.

[0022] The rotary drive unit is activated to drive the support plate to rotate 90°, and the distance detection unit detects the second distance value between the support plate and the spray plate again.

[0023] Based on the first distance value and the second distance value, the leveling component drives the support seat to rise and fall so that the spray surfaces of the support plate and the spray plate enter a parallel state.

[0024] The distance detection unit is activated to obtain the first detection value of the spray surface of the spray plate;

[0025] The support disk is driven to rotate by a rotation drive unit, and a second detection value is obtained by a distance detection unit;

[0026] The rotary drive unit drives the support disk to rotate multiple times, and corresponding detection values ​​are obtained at different positions of the spray disk.

[0027] The first detection value, the second detection value, and the detection value are fitted together to obtain the surface deformation detection result of the spray plate.

[0028] This invention discloses a spray plate deformation detection device. It employs a laser detector to measure the distance to the spray plate surface and a rotary drive unit to rotate the laser detector, completing the full detection of the spray surface. Finally, the deformation detection result is obtained by fitting the detected values. Compared to existing detection methods, this application uses non-contact detection, and the detection process does not require removing the spray plate from the machine, enabling non-destructive testing that is convenient and accurate.

[0029] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model, it can be implemented according to the contents of the specification. In order to make the above and other objects, features and advantages of this utility model more obvious and easy to understand, the following are preferred embodiments, which are described in detail below. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the spray plate deformation detection device and the detection status of the spray plate and heating plate according to an embodiment of the present invention.

[0031] Figure 2 This is a simplified structural diagram of the spray disc deformation detection device according to an embodiment of the present invention.

[0032] Figure 3 This is a flowchart of the spray disc deformation detection method of this utility model.

[0033] Explanation of reference numerals in the attached figures:

[0034] Base 2, rotation drive unit 3, support plate 6, support assembly 11, heating plate assembly 12, first lifting drive unit 51, second lifting drive unit 52, third lifting drive unit 53, distance detection module 71. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0037] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0039] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral molding; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0041] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0042] In semiconductor manufacturing processes, such as PECVD (Plasma Chemical Vapor Deposition), the spray plate is a key component. The reactive gases involved in thin film deposition are uniformly distributed through a dense array of micropores on the spray plate's surface, ultimately growing a uniform thin film on the wafer surface. The spray plate's effectiveness in distributing the reactive gases significantly impacts the quality of the deposited thin film. However, in existing technologies, the spray plate is prone to deformation. A deformed spray plate affects the gas flow direction, leading to poor coverage and an uneven plasma field, resulting in suboptimal film growth with variations in uniformity, thickness, and stress. Current technologies typically use coordinate measuring machines (CMMs) to detect spray plate deformation. However, this requires removing the spray plate from the machine, and the contact measurement method carries the risk of scratching the spray plate surface.

[0043] To address the aforementioned issues, this embodiment discloses a spray disc deformation detection device.

[0044] Please see Figures 1 to 2 The invention discloses a spray disc deformation detection device, which includes:

[0045] Support base 4, the top of which has a support surface;

[0046] Rotation drive unit 3, wherein the rotation drive unit 3 is disposed at the center position of the support surface;

[0047] Support plate 6, the bottom of which is connected to the drive end of the rotary drive unit 3; and

[0048] Distance detection unit 7 is disposed on the top surface of the support plate 6. The distance detection unit 7 is used to obtain the distance values ​​between different positions of the spray surface of the spray plate 8 and the support plate 6.

[0049] In this embodiment, the spray disc deformation detection device includes at least a support base 4, a rotary drive unit 3, a support disc 6, and a distance detection unit 7. The housing of the rotary drive unit 3 is fixedly connected to the support base 4, the drive end of the rotary drive unit 3 is fixedly connected to the support disc 6, and the distance detection unit 7 is connected to the top surface of the support disc 6. The distance detection unit 7 is a non-contact distance detection unit.

[0050] The spray plate 8 is directly opposite to and coaxially arranged with the heating plate below it. The heating plate includes a support component 11 and a heating plate component 12 connected to the top of the support component 11.

[0051] When inspecting the spray surface of the spray plate 8, first ensure that the probe of the distance detection unit 7 is parallel to the spray surface of the spray plate 8. Then, the rotation drive unit 3 rotates sequentially according to the set angle, and the distance detection unit 7 obtains the distance detection value at the corresponding position. After the distance detection unit 7 rotates one revolution, all the detected distance values ​​are fitted to obtain the fitted surface of the spray surface of the spray plate 8. The fitted surface can be used to determine whether the spray plate 8 has deformed. If it has deformed, it needs to be replaced; otherwise, it can continue to be used.

[0052] To ensure that the spray surfaces of the distance detection unit 7 and the spray plate 8 are parallel, this can be indirectly determined by judging the relative position of the support plate 6 and the spray plate 8. Clearly, determining whether the support plate 6 is parallel to the spray plate 8 is simpler and more convenient than determining it through the distance detection unit 7.

[0053] It should be noted that, in order to accurately fit the deformation of the spray surface of the spray plate 8, the distance detection unit 7 includes several detection units, each of which is evenly distributed so as to cover the entire spray surface of the spray plate 8, thereby improving the detection accuracy.

[0054] In this embodiment, the distance detection unit 7 includes several evenly distributed distance detection modules 71. Each distance detection module 71 has a signal transmitting end and a signal receiving end. When a signal emitted from the signal transmitting end hits the spray surface of the spray disk 8, it is reflected by the spray surface and received by the corresponding signal receiving end. The distance value between the distance detection module 71 and the spray disk 8 can be obtained based on the signal travel distance or travel time. The several distance detection modules 71 can be integrated or can be several independent transceiver modules evenly distributed on the top surface of the support disk 6. For example, the several distance detection modules 71 can be rectangularly or linearly distributed with reference to the diameter direction of the spray disk 8.

[0055] In this embodiment, the distance detection modules 71 are linearly and equally spaced on the top surface of the support disk 6. The support disk 6 can be a circular disk structure, with a disk surface size comparable to the spray surface size of the spray disk 8. The linearly distributed distance detection modules 71 can cover the diameter or radius of the circular disk. If the distance detection modules 71 only cover the radius, the rotation drive unit 3 needs to drive the support disk 6 to rotate one full turn. If the distance detection modules 71 cover the diameter of the support disk 6, the rotation drive unit 3 only needs to drive the support disk 6 to rotate half a turn.

[0056] Preferably, the support disk 6 is a support disc, and the distance detection module 71 is distributed along the diameter direction of the support disc and covers the entire diameter path, thereby reducing the driving range of the rotation drive unit 3 and saving detection time.

[0057] In this embodiment, the distance detection module 71 is a laser ranging transceiver. Laser ranging has advantages such as high precision, non-contact operation, and anti-interference, making it particularly suitable for the precision manufacturing of semiconductor equipment.

[0058] It is understood that, in other embodiments, the distance detection module 71 may also employ other detectors with signal reflection characteristics, such as microwave and infrared detectors.

[0059] The rotary drive unit 3 is a drive motor. The drive motor is also equipped with a controller and a host computer. The host computer sends detection signals, and the controller controls the rotary drive unit 3 to perform rotary drive actions.

[0060] Please refer to it again. Figure 1 and Figure 2 The detection process of the spray plate deformation detection device in this embodiment is as follows: First, a precision conveying mechanism such as a robotic arm is used to send the detection device, consisting of a support base 4, a rotary drive unit 3, a support plate 6, and a distance detection unit 7, into the thin film deposition process chamber of the semiconductor. Specifically, it is moved to the position directly below the spray plate 8, and it is necessary to confirm that the support plate 6 and the spray plate 8 are in a parallel state. Then, the rotary drive unit 3 is controlled to drive the support plate 6 to rotate according to a set rotation angle. Simultaneously, the distance detection unit 7 detects the distance values ​​at different positions. Finally, all the detected distance values ​​are fitted to obtain the spray surface detection curve of the spray plate 8. The deformation of the spray plate 8 can be determined by fitting the image.

[0061] Please refer to it again. Figure 2 Due to the accuracy requirements for detecting the spray plate 8, it is generally difficult to ensure that the support plate 6 and the spray surface of the spray plate 8 are in a parallel state when the detection device is moved to the process chamber by a robot to detect the spray plate. Therefore, the spray plate deformation detection device in this embodiment further adds an initial parallel state adjustment mechanism for the support plate 6.

[0062] Specifically, the bottom of the support base 4 is also provided with a base 2, and a leveling component is provided between the base 2 and the support base 4. The leveling component is used to adjust the support plate 6 and the spray plate 8 to be tested to enter a parallel state.

[0063] The leveling assembly includes a first lifting drive unit 51, a second lifting drive unit 52, and a third lifting drive unit 53, which are distributed at equal central angles on the top surface of the base 2. To simplify the structure of the base 2 and the support 4, both are disc-shaped structures, and the base 2 and support 4 are coaxially arranged. Similarly, the support 4 is also coaxial with the support disk 6. The driving end of the rotary drive unit 3 is located at the center of the support disk 6, and the bottom of the rotary drive unit 3 is fixedly connected to the center of the support 4.

[0064] The first lifting drive unit 51, the second lifting drive unit 52, and the third lifting drive unit 53 have the same structure, each including a leveling motor and an encoder. The encoder is used to receive external control signals (instructions from a host computer or controller) and control the rotation of the leveling motor.

[0065] After the spray plate deformation detection device of this embodiment is moved into the process cavity, the two distance detection modules 71 at the outermost end of the distance detection unit 7 are first activated to obtain the distance value with the spray plate 8. Then, the rotation drive unit 3 drives the support plate 6 to rotate 90 degrees and detects the distance value again. If the distance values ​​detected before and after are the same, it is determined that the support plate 6 and the spray plate 8 are parallel to each other and no adjustment is required. Otherwise, the height values ​​that need to be adjusted by the first lifting drive unit 51, the second lifting drive unit 52 and the third lifting drive unit 53 can be calculated based on the two detected distance values. The precise height adjustment can be achieved by controlling the number of rotations of the motor by the encoder.

[0066] Please see Figure 3 The present invention also provides a detection method, which is performed by the spray disc deformation detection device described in any of the above claims, and includes the following steps:

[0067] Step S100: Move the spray plate deformation detection device to below the spray plate 8 in the process chamber; the spray plate deformation detection device can be moved to the process chamber of the semiconductor thin film deposition equipment by a transfer mechanism such as a robot.

[0068] Step S200: Start the distance detection unit 7 to detect the first distance value between the spray plate and the first position; specifically, the distance value between the two in the current state can be detected only by the distance detection module 71 located at the outermost end of the distance detection unit 7.

[0069] Step S300: Start the rotation drive unit 3 to drive the support disk 6 to rotate 90°, and the distance detection unit 7 will detect the second distance value between the support disk 6 and the spray disk 8 again.

[0070] Step S400: Based on the first distance value and the second distance value, the leveling component drives the support base 4 to rise and fall so that the spray surfaces of the support plate 6 and the spray plate 8 enter a parallel state; wherein, the support base 4, the rotary drive unit 3 and the support plate 6 can adopt an auxiliary fixing mechanism, and the three are in a stable and synchronous adjustment state, and the position of the support plate 6 can be changed synchronously by adjusting the support base 4.

[0071] Step S500: Start the distance detection unit 7 to obtain the first detection value of the spray surface of the spray plate 8;

[0072] Step S600: The support disk 6 is driven to rotate by the rotation drive unit 3, and the second detection value is obtained by the distance detection unit 7; the rotation angle can be selected according to the actual accuracy requirements, and it is generally advisable to select 1-30 degrees.

[0073] Step S700: The rotation drive unit 3 drives the support disk 6 to rotate multiple times, and obtains the detection values ​​of different positions of the spray disk 8 accordingly; the support disk 6 is driven to rotate multiple times until the surface distance detection of the entire spray disk 8 is completed, so as to obtain the full view of the spray disk 8.

[0074] In steps S200 to S700, since the spray surface of the spray disk 8 is provided with a micro-hole array, when the detection signal is directed toward the micro-hole, the signal will not be reflected or the reflection will be obviously abnormal. At this time, this part of the signal can be removed by the algorithm.

[0075] Step S800: Fit the first detection value, the second detection value, and the detection value to obtain the surface deformation detection result of the spray plate, that is, fit the distance lattice into a surface. By fitting the surface, it can be quickly determined whether the spray surface of the spray plate 8 has deformed.

[0076] The spray plate deformation detection device in this embodiment uses a laser detector to detect the distance to the spray plate surface, and drives the laser detector to rotate through a rotation drive unit to complete the detection of the entire spray surface. Finally, the deformation detection result is obtained by fitting the detection values. Compared with existing detection methods, this application adopts non-contact detection, and the detection process does not require removing the spray plate from the machine, which can achieve non-destructive testing, and the detection is convenient and accurate.

[0077] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A spray disc deformation detection device, characterized in that, include: A support base, the top of which has a support surface; A rotary drive unit is disposed at the center of the support surface; A support plate, the bottom of which is connected to the drive end of the rotary drive unit; as well as A distance detection unit is disposed on the top surface of the support plate. The distance detection unit is used to obtain the distance values ​​between different positions of the spray surface of the spray plate and the support plate. The distance detection unit is a non-contact detection unit.

2. The spray disc deformation detection device according to claim 1, characterized in that, The distance detection unit includes several evenly distributed distance detection modules.

3. The spray disc deformation detection device according to claim 2, characterized in that, The distance detection modules are linearly and equally spaced on the top surface of the support disk.

4. The spray disc deformation detection device according to claim 3, characterized in that, The support disk is a support disc, and the distance detection modules are distributed along the diameter of the support disc.

5. The spray disc deformation detection device according to claim 2, characterized in that, The distance detection module is a laser rangefinder transceiver.

6. The spray disc deformation detection device according to claim 1, characterized in that, The rotary drive unit is a drive motor.

7. The spray disc deformation detection device according to any one of claims 1 to 6, characterized in that, The bottom of the support base is also provided with a base, and a leveling component is provided between the base and the support base. The leveling component is used to adjust the support plate and the spray plate to be tested to enter a parallel state.

8. The spray disc deformation detection device according to claim 7, characterized in that, The leveling assembly includes a first lifting drive unit, a second lifting drive unit, and a third lifting drive unit, wherein the first lifting drive unit, the second lifting drive unit, and the third lifting drive unit are distributed on the top surface of the base at equal central angles.

9. The spray disc deformation detection device according to claim 8, characterized in that, The first lifting drive unit, the second lifting drive unit, and the third lifting drive unit have the same structure, each including: a leveling motor and an encoder. The encoder is used to receive external control signals and control the rotation of the leveling motor.

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