A pressure gauge protection device

Abstract

This application discloses a pressure gauge protection device, relating to the field of pressure monitoring technology. The pressure gauge protection device includes an air pipe connected to a negative pressure chamber. The pressure gauge is connected to the negative pressure chamber via the air pipe. A filter screen is installed inside the air pipe, and an air blowing device is connected to the side wall of the air pipe. The air blowing port of the air blowing device is located between the filter screen and the pressure gauge, and the air blowing direction of the air blowing device is towards the filter screen. This prevents powder from entering the pressure gauge and improves the testing stability of the pressure gauge.

Description

Technical Field

[0001] This application relates to the field of pressure monitoring technology, and more specifically, to a pressure gauge protection device. Background Technology

[0002] In semiconductor device manufacturing, thin film deposition and substrate thin film deposition are indispensable core processes, widely used in key steps such as device isolation, passivation layer preparation, and dielectric layer filling. These processes are typically performed within a specific vacuum chamber. The stability of the chamber's negative pressure directly determines key performance indicators such as the deposition rate, uniformity, and density of the thin film, and has a decisive impact on the final electrical performance and reliability of the semiconductor device. Therefore, real-time and accurate monitoring of the chamber's negative pressure is a crucial technical means to ensure process stability.

[0003] The commonly used negative pressure monitoring solution in the industry involves connecting a pressure sensor to the pipeline within the chamber. The pressure sensor directly collects the pressure signal within the pipeline to reflect the actual negative pressure state of the chamber. However, during operation, a large amount of solid powdery reaction byproducts are generated in the exhaust gas. These powders deposit on the surface of the pressure sensor's sensing components, causing inaccurate pressure signal transmission and resulting in significant deviations in the pressure sensor readings, failing to accurately reflect the negative pressure state of the chamber. When the powder blockage reaches a certain level, the pressure sensor will completely fail, requiring a shutdown for disassembly and replacement. This shutdown interrupts continuous production, significantly reducing production efficiency. Furthermore, frequent pressure sensor replacements not only directly increase the procurement cost of spare parts but also incur additional capacity losses and process restart and debugging costs due to downtime, significantly increasing overall production costs. Utility Model Content

[0004] The purpose of this application is to provide a pressure gauge protection device that can prevent powder from entering the pressure gauge and improve the testing stability of the pressure gauge.

[0005] The embodiments of this application are implemented as follows: A pressure gauge protection device includes an air pipe connected to a negative pressure chamber, the pressure gauge being connected to the negative pressure chamber via the air pipe, a filter screen being disposed inside the air pipe, and an air blowing device being connected to the side wall of the air pipe, the air blowing port of the air blowing device being located between the filter screen and the pressure gauge, and the air blowing direction of the air blowing device being towards the filter screen.

[0006] Optionally, as one implementable method, the air blowing device includes an air source unit and an air blowing pipe connecting the air source unit and the air pipe, wherein the air source unit blows air to the filter screen through the air blowing pipe.

[0007] Optionally, as an implementable method, the extension direction of the air blowing tube is at an acute angle to the extension direction of the air pipe, and the included angle between the air blowing tube and the air pipe is 10°-30°.

[0008] Optionally, as an implementable approach, the blowing device further includes a control module electrically connected to the air source unit, the control module being used to control the blowing frequency of the blowing device.

[0009] Optionally, as one possible implementation, the airway includes a first airway and a second airway connected to each other, the first airway and the second airway being threadedly connected, and the filter screen being disposed between the first airway and the second airway.

[0010] Optionally, as an implementable method, the air tube is also provided with a one-way valve, which is located on the side of the air inlet near the pressure gauge.

[0011] Optionally, as an implementable method, the sidewall of the trachea is provided with a micro-airway communicating with the blowing tube, the blowing tube is connected to the trachea through the micro-airway, the micro-airway penetrates the sidewall of the trachea, and the airflow direction of the micro-airway is towards the filter.

[0012] Alternatively, as an implementable method, the angle between the micro-airway and the trachea is 10°-30°.

[0013] Alternatively, as an implementable method, the micro-airway includes a plurality of micro-airways, which are arranged around the sidewall of the trachea.

[0014] Alternatively, as an implementable method, an ultrasonic detector is also included, with the probe of the ultrasonic detector facing the filter for detection.

[0015] The beneficial effects of the embodiments of this application include: The pressure gauge protection device provided in this application includes an air pipe connected to a negative pressure chamber. The pressure gauge is connected to the negative pressure chamber through the air pipe. A filter screen is installed inside the air pipe, and an air blowing device is connected to the side wall of the air pipe. The air blowing port of the air blowing device is located between the filter screen and the pressure gauge, and the air blowing direction of the air blowing device is towards the filter screen. By installing a filter screen inside the air pipe, solid powdery reaction byproducts carried in the exhaust gas of the negative pressure chamber can be directly intercepted, preventing the powder from reaching the surface of the sensing component of the pressure gauge. This avoids the problem of pressure signal transmission obstruction caused by powder deposition, ensuring that the pressure gauge reading can accurately reflect the negative pressure state of the chamber, improving the accuracy of negative pressure monitoring, and providing a reliable guarantee for the stability of core processes such as semiconductor thin film deposition. By installing an air blowing device facing the filter screen between the filter screen and the pressure gauge, air can be blown onto the surface of the filter screen periodically or as needed, blowing the powder attached to the filter screen surface back into the negative pressure chamber or discharged with the exhaust gas. This effectively prevents the filter screen from being blocked by powder, avoiding monitoring failure or air pipe pressure problems caused by filter screen blockage. At the same time, because the powder on the surface of the filter screen is cleaned in time, the service life of the filter screen is greatly extended and the frequency of filter screen replacement is reduced. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is one of the structural schematic diagrams of the pressure gauge protection device provided in the embodiments of this application; Figure 2 This is a second schematic diagram of the pressure gauge protection device provided in the embodiments of this application.

[0018] Icons: 100-Pressure gauge protection device; 110-Air tube; 111-Miniature airway; 120-Pressure gauge; 130-Filter screen; 140-Blowing device; 141-Air source unit; 142-Blowing tube; 150-One-way valve; 160-Ultrasonic detector. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0021] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0023] Please refer to Figure 1 This embodiment provides a pressure gauge protection device 100, including an air pipe 110 connected to a negative pressure chamber, a pressure gauge 120 connected to the negative pressure chamber through the air pipe 110, a filter screen 130 disposed inside the air pipe 110, and an air blowing device 140 connected to the side wall of the air pipe 110. The air blowing port of the air blowing device 140 is located between the filter screen 130 and the pressure gauge 120, and the air blowing direction of the air blowing device 140 is towards the filter screen 130.

[0024] Specifically, the pressure gauge protection device 100 of this application includes an air pipe 110 for connecting to a negative pressure chamber. The pressure gauge 120 is connected to the negative pressure chamber through the air pipe 110 to achieve pressure monitoring. The key design feature is that a filter screen 130 is installed inside the air pipe 110 as a core component for powder interception. Simultaneously, an air blowing device 140 is connected to the side wall of the air pipe 110, and the air blowing port of the air blowing device 140 is precisely positioned between the filter screen 130 and the pressure gauge 120, with the air blowing direction towards the filter screen 130, forming a dual protection structure of "interception + reverse cleaning". It should be noted that when the equipment is suspended (such as during process breaks or batch changes), the air blowing device 140 is activated to blow the powder on the surface of the filter screen 130 back into the chamber and discharged with the exhaust gas, without affecting the normal production rhythm.

[0025] The pressure gauge protection device 100 provided in this application includes an air pipe 110 connected to a negative pressure chamber. A pressure gauge 120 is connected to the negative pressure chamber through the air pipe 110. A filter screen 130 is installed inside the air pipe 110, and an air blowing device 140 is connected to the side wall of the air pipe 110. The air blowing port of the air blowing device 140 is located between the filter screen 130 and the pressure gauge 120, and the air blowing direction of the air blowing device 140 is towards the filter screen 130. By installing a filter screen 130 inside the air pipe 110, solid powdery reaction byproducts carried in the exhaust gas of the negative pressure chamber can be directly intercepted, preventing the powder from reaching the surface of the sensing component of the pressure gauge 120. This avoids the problem of pressure signal transmission obstruction caused by powder deposition, ensuring that the reading of the pressure gauge 120 can truly reflect the negative pressure state of the chamber, improving the accuracy of negative pressure monitoring, and providing a reliable guarantee for the stability of core processes such as semiconductor thin film deposition. By installing an air blowing device 140 facing the filter 130 between the filter 130 and the pressure gauge 120, air can be blown onto the surface of the filter 130 periodically or as needed. This blows the powder adhering to the surface of the filter 130 back into the negative pressure chamber or discharged with the exhaust gas, effectively preventing the filter 130 from being clogged by powder and avoiding monitoring failure or pressure buildup in the air tube 110 caused by filter 130 clogging. At the same time, because the powder on the surface of the filter 130 is cleaned in a timely manner, the service life of the filter 130 is greatly extended, and the replacement frequency of the filter 130 is reduced.

[0026] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the air blowing device 140 includes an air source unit 141 and an air blowing pipe 142 connecting the air source unit 141 and the air pipe 110. The air source unit 141 blows air to the filter screen 130 through the air blowing pipe 142.

[0027] Specifically, the air blowing device 140 includes an air source unit 141 and an air blowing pipe 142. One end of the air blowing pipe 142 is sealed to the air source unit 141, and the other end is connected to the air pipe 110 and extends to the position inside the air pipe 110 corresponding to the filter screen 130. The gas generated by the air source unit 141 is directionally delivered to the surface of the filter screen 130 through the air blowing pipe 142, achieving targeted cleaning of the filter screen 130. This structure clearly defines the core components of the air blowing device 140, ensuring the stability and sealing of the airflow delivery, and providing a foundation for subsequent functional optimization.

[0028] In one possible embodiment of this application, such as Figure 1 As shown, the extension direction of the air blowing pipe 142 is at an acute angle to the extension direction of the air pipe 110, and the included angle between the air blowing pipe 142 and the air pipe 110 is 10°-30°.

[0029] Specifically, the extension direction of the air blowing pipe 142 is set at an acute angle to the extension direction of the air pipe 110, and the included angle is controlled within the range of 10°-30° (preferably 20°). This angle design has been verified by fluid simulation: the acute angle arrangement allows the airflow to obliquely impact the surface of the filter screen 130 along the tangent direction of the inner wall of the air pipe 110, which not only avoids the airflow rebound disturbance of the chamber pressure caused by vertical blowing, but also enhances the peeling force on the powder attached to the surface of the filter screen 130, especially for the cleaning effect of accumulated powder on the edge of the filter screen 130.

[0030] In one possible embodiment of this application, such as Figure 1 As shown, the air blowing device 140 also includes a control module electrically connected to the air source unit 141, which is used to control the air blowing frequency of the air blowing device 140.

[0031] Specifically, the control module integrates signal reception, logic judgment, and execution control functions. It can preset the blowing frequency parameters according to actual working conditions (such as once every 1-4 hours, with each blowing lasting 10-60 seconds), or dynamically adjust the frequency upon receiving external monitoring signals. The linkage design between the control module and the air source unit 141 enables precise control of the blowing operation, avoiding gas waste or untimely cleaning caused by blind blowing.

[0032] In one possible embodiment of this application, such as Figure 1 As shown, the trachea 110 includes a first trachea 110 and a second trachea 110 that are connected to each other. The first trachea 110 and the second trachea 110 are threaded together, and the filter screen 130 is disposed between the first trachea 110 and the second trachea 110.

[0033] Specifically, the air tube 110 adopts a segmented design, including a first air tube 110 and a second air tube 110 that cooperate with each other. The two are connected by threads for detachable fixation (e.g., the first air tube 110 has external threads and the second air tube 110 has internal threads, sealed with a sealing gasket). The filter 130 is clamped and fixed between the connecting end faces of the first air tube 110 and the second air tube 110. The threaded connection method combines reliable sealing with convenient disassembly and assembly. When the filter 130 needs to be replaced, only the two sections of the air tube 110 need to be unscrewed to remove the old filter 130, without having to disassemble the entire air tube 110 pipeline, greatly improving maintenance efficiency.

[0034] In one possible embodiment of this application, such as Figure 1 As shown, a one-way valve 150 is also provided on the air pipe 110. The one-way valve 150 is located on the side of the air outlet near the pressure gauge 120.

[0035] Specifically, the one-way valve 150 is directed from the air outlet to the filter screen 130, and shuts off in the reverse direction. The core function of the one-way valve 150 is to prevent the airflow from flowing backward due to negative pressure in the chamber during normal operation of the equipment (non-air blowing state), thus preventing residual powder or gas in the air pipe 110 from spreading towards the pressure gauge 120; at the same time, it prevents some airflow from flowing back to the pressure gauge 120 side due to pressure fluctuations during air blowing, further ensuring the cleanliness of the sensing components of the pressure gauge 120.

[0036] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the side wall of the trachea 110 is provided with a miniature airway 111 that communicates with the blowing tube 142. The blowing tube 142 is connected to the trachea 110 through the miniature airway 111. The miniature airway 111 penetrates the side wall of the trachea 110, and the airflow direction of the miniature airway 111 is towards the filter screen 130.

[0037] Specifically, a micro airway 111 is formed on the side wall of the air tube 110 corresponding to the air inlet. The micro airway 111 is a slender channel that penetrates the side wall of the air tube 110. The air inlet tube 142 is sealed and connected to the micro airway 111 by thread or welding. After being guided by the micro airway 111, the airflow is precisely directed towards the filter screen 130. The design of the micro airway 111 makes the connection between the air inlet tube 142 and the air tube 110 more compact, avoiding the air inlet tube 142 from directly extending into the air tube 110 and interfering with the main airflow. At the same time, the flow-limiting effect of the channel makes the blowing airflow more concentrated.

[0038] Furthermore, the angle between the micro airway 111 and the trachea 110 is 10°-30°.

[0039] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the micro airway 111 includes multiple micro airways, which are arranged around the side wall of the trachea 110.

[0040] Specifically, the multi-channel surround design allows airflow to simultaneously impact multiple points around the filter 130, creating a 360° cleaning effect without dead angles, thus solving the problem of local powder residue on the filter 130 when cleaning with a single air channel.

[0041] In one possible embodiment of this application, such as Figure 1 As shown, it also includes an ultrasonic detector 160, the probe of which is directed toward the filter 130 for detection.

[0042] Specifically, an ultrasonic detector 160 is added, with its probe fixed to the outside of the air tube 110 via a bracket, and the probe end precisely facing the surface of the filter 130. The ultrasonic detector 160 emits high-frequency sound waves and receives reflected waves. Based on the propagation time and amplitude changes of the reflected waves, it monitors the powder accumulation thickness on the surface of the filter 130 in real time. When the accumulation thickness exceeds a preset threshold, it can send a signal to the control module to trigger air blowing for cleaning. This design achieves visualized and precise monitoring of the filter 130's clogging status, providing data support for proactive maintenance.

[0043] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A pressure gauge protection device, characterized in that, The device includes an air tube connecting to a negative pressure chamber, a pressure gauge connected to the negative pressure chamber via the air tube, a filter screen installed inside the air tube, and an air blowing device connected to the side wall of the air tube. The air blowing port of the air blowing device is located between the filter screen and the pressure gauge, and the air blowing direction of the air blowing device is towards the filter screen.

2. The pressure gauge protection device according to claim 1, characterized in that, The air blowing device includes an air source unit and an air blowing pipe connecting the air source unit and the air pipe, wherein the air source unit blows air to the filter screen through the air blowing pipe.

3. The pressure gauge protection device according to claim 2, characterized in that, The extension direction of the air blowing tube is at an acute angle to the extension direction of the air pipe, and the included angle between the air blowing tube and the air pipe is 10°-30°.

4. The pressure gauge protection device according to claim 2, characterized in that, The air blowing device also includes a control module electrically connected to the air source unit, the control module being used to control the air blowing frequency of the air blowing device.

5. The pressure gauge protection device according to claim 1, characterized in that, The air pipe includes a first air pipe and a second air pipe that are connected to each other, the first air pipe and the second air pipe are threaded together, and the filter screen is disposed between the first air pipe and the second air pipe.

6. The pressure gauge protection device according to claim 1, characterized in that, The air pipe is also equipped with a one-way valve, which is located on the side of the air inlet near the pressure gauge.

7. The pressure gauge protection device according to claim 2, characterized in that, The sidewall of the air tube is provided with a micro airway that communicates with the air blowing tube. The air blowing tube is connected to the air tube through the micro airway. The micro airway penetrates the sidewall of the air tube, and the airflow direction of the micro airway is towards the filter.

8. The pressure gauge protection device according to claim 7, characterized in that, The angle between the micro-airway and the trachea is 10°-30°.

9. The pressure gauge protection device according to claim 7, characterized in that, The micro-airways include multiple micro-airways, which are arranged around the sidewall of the trachea.

10. The pressure gauge protection device according to claim 1, characterized in that, It also includes an ultrasonic detector, the probe of which is directed toward the filter for detection.

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