Pressure maintaining leak detection device for semiconductor cooling apparatus

Abstract

The utility model provides a pressure -maintaining leak detection device of semiconductor cooling equipment, including equipment flange, pipeline flange, one side of equipment flane is detachably connected with pipeline flange, and the equipment flange, pipeline flange between clamping have sealing washer, one side fixedly connected with pressure bearing pipeline of pipeline flange, the end fixedly connected with end seal of pressure bearing pipeline, the bottom fixedly connected with high -strength inflation port of pressure bearing pipeline. The utility model's advantage lies in: can realize the following purposes: whole cycle leak monitoring: through the cooperation of pressure bearing pipeline and fixed needle, realizes the pressure state whole process visualization monitoring from production to before installation, avoids the blind area of traditional method only relying on terminal detection. Risk and cost double reduction: pre -leakage detection before shipment can intercept above leakage hidden danger, reduces the equipment downtime loss of customer after installation due to leakage. Fixed needle mark design does not need professional tool, and customer can judge equipment state quickly, reduces communication and operation cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor cooling equipment testing technology, and in particular to a pressure holding and leak detection device for semiconductor cooling equipment. Background Technology

[0002] The cooling equipment used in the semiconductor industry uses a special and expensive refrigerant. Leaks in this system can cause significant direct economic losses and lead to downtime for customer mainframes and production shutdowns.

[0003] Traditional equipment cannot withstand pressure due to the inability of water tanks and pipes to detect leaks under high pressure.

[0004] Leaks that occur during equipment transportation due to vibration or other reasons cannot be guaranteed. Utility Model Content

[0005] The purpose of this invention is to at least solve one of the aforementioned technical defects.

[0006] Therefore, one objective of this utility model is to propose a pressure-holding and leak detection device for semiconductor cooling equipment, so as to solve the problems mentioned in the background art and overcome the shortcomings of the prior art.

[0007] To achieve the above objectives, one embodiment of the present invention provides a pressure holding and leak detection device for semiconductor cooling equipment, including an equipment flange and a pipe flange, wherein a pipe flange is detachably connected to one side of the equipment flange, and a sealing gasket is sandwiched between the equipment flange and the pipe flange. A pressure-bearing pipe is fixedly connected to one side of the pipe flange, and an end seal is fixedly connected to the end of the pressure-bearing pipe. The bottom of the pressure-bearing pipeline is fixedly connected to a high-strength air inlet, and the port of the high-strength air inlet is detachably connected to an air seal. A pressure gauge is fixedly connected to the top of the pressure-bearing pipeline, and the pressure gauge detects the internal pressure of the pressure-bearing pipeline and equipment. A pointer is movably connected to the surface of the pressure gauge, and a fixing rod is fixedly connected to the side of the pressure gauge dial. A fixing pin is movably connected to the end of the fixing rod, the fixing pin pointing to the scale of the pressure gauge, and a pin is fixedly connected to the end of the fixing rod. A fastener is threaded onto the pin and tightened onto the end of the fixing pin.

[0008] Preferably, the equipment flange and the pipe flange are made of cast iron, and the sealing gasket sandwiched between the equipment flange and the pipe flange is made of rubber.

[0009] The above technical solution involves designing the system to be pressure-resistant, that is, selecting pressure-resistant pipelines, filling them with inert gas, and using pressure changes to confirm whether a leak has occurred.

[0010] Pressure-bearing pipelines and their characteristics: thicker walls to withstand higher pressures.

[0011] Higher material strength: High-strength alloy steel, stainless steel or special plastics (such as PE100, PVC-U) are usually used to ensure that the material does not deform or crack under high pressure.

[0012] More stringent connection methods are employed, such as welding and flange connections, to ensure sealing and strength.

[0013] Device structure: Sealed connection assembly: The equipment flanges and pipe flanges are made of cast iron and are detachably connected by bolts, with clamped rubber sealing gaskets to ensure the airtightness of the interface.

[0014] The pressure-bearing pipeline is welded and fixed to the pipeline flange, and the end is welded and sealed to form a semi-closed pressure-bearing cavity with a design pressure resistance of ≥10 bar.

[0015] Inflation and pressure monitoring components: The high-strength inflation port is located at the bottom of the pressure-bearing pipeline and is used to fill with 5 bar nitrogen gas. After inflation, it is sealed by the port seal.

[0016] The pressure gauge is fixed to the top of the pressure-bearing pipeline to monitor the internal pressure in real time; its dial has a movable pointer.

[0017] Fixed needle adjustment mechanism: The fixed rod is welded to the side of the pressure gauge, and the end is connected to the fixed needle through a pin and a washer nut, which can lock the initial pressure value position.

[0018] Preferably, in any of the above embodiments, the end seal is welded to the pressure-bearing pipeline, and the high-strength inlet is used to fill in inert gas.

[0019] Operating principle: Design the equipment piping to withstand pressure of 10 bar or more, and to be semi-completely sealed.

[0020] Fill with nitrogen at 5 bar.

[0021] Connect the pressure gauge and mark the position of the pressure gauge pointer.

[0022] The equipment and pressure gauge were shipped together to the installation site.

[0023] Before installation, check the pressure gauge to ensure it has the factory-set pressure and that the equipment is leak-free.

[0024] Preferably, in any of the above schemes, the pressure gauge's detection end detects the internal pressure of the pressure-bearing pipeline and equipment.

[0025] Preferably, of any of the above embodiments, the pointer may also be referred to as a moving needle, and the fixed rod is bonded or welded to the side of the pressure gauge dial.

[0026] Pre-shipment pressure testing and leak detection process: Pre-pressurized seal: Nitrogen gas at 5 bar is injected into the pressurized pipelines and equipment through a high-strength inlet to avoid the risk of oxidation by utilizing the stability of the inert gas.

[0027] After sealing, let it stand for 24 hours. If the pressure gauge reading does not drop, it is determined that there is no leakage.

[0028] Pressure marking and locking: Adjust the fixing pin to the initial pressure position of the pointer (e.g., 5 bar), tighten the washer nut to fix the angle, and form the factory pressure reference.

[0029] Pressurized transportation: The equipment and pressure gauge are shipped as a whole and remain in pressure-maintaining condition until the customer's site, during which time the pressure-bearing pipeline is kept sealed.

[0030] Leakage detection before on-site installation Intuitive pressure comparison: Check if the pressure gauge pointer deviates from the factory value marked on the fixed needle.

[0031] If the pointer reading drops, it indicates a leak occurred during transportation or storage and the device needs to be returned to the factory for repair; if there is no deviation, the seal is satisfactory.

[0032] Secondary verification: The pipe flanges and equipment flanges are detachable and can be connected to an external leak detector for retesting, ensuring double verification of reliability.

[0033] Preferably, in any of the above solutions, the angle of the fixing pin is lockable, the fixing pin is movably connected to the pin, and the fastener is specifically a washer nut.

[0034] Full lifecycle leak monitoring By combining pressure-bearing pipelines with fixed pins, the pressure status can be monitored in a visual manner throughout the entire process from production to installation, avoiding the blind spots of traditional methods that rely solely on terminal detection.

[0035] Risk and cost reduction Pre-shipment leak detection can intercept more than 90% of potential leaks, reducing equipment downtime losses caused by leaks after installation.

[0036] The fixed pin marking design requires no special tools, allowing customers to quickly determine the status of the equipment and reduce communication and maintenance costs.

[0037] High reliability structure The combination of cast iron flange and rubber gasket is pressure-resistant and corrosion-resistant; the welded end seal and the locking mechanism with a washer nut ensure that the pressure reference does not deviate under transportation vibration.

[0038] Assemble the device, purge with nitrogen to 5 bar and lock the fixing pin.

[0039] Record the pressure value before shipment and avoid severe vibration during transportation.

[0040] The customer can complete the initial leak detection within minutes by comparing the position of the pointer with that of the fixed pin on-site.

[0041] Compared with the prior art, the advantages and beneficial effects of this utility model are as follows: The pressure-holding and leak-detection device for this semiconductor cooling equipment, through the coordinated arrangement of pressure-bearing pipes, end seals, high-strength air inlets, port seals, pressure gauges, pointers, fixing rods, fixing pins, pins, and fasteners, can achieve the following objectives: Full lifecycle leak monitoring: By combining pressure-bearing pipelines with fixed pins, the pressure status can be monitored in a visual manner throughout the entire process from production to installation, avoiding the blind spots of traditional methods that rely solely on terminal detection.

[0042] Both risk and cost reduction: Pre-shipment leak detection can intercept more than 90% of potential leaks, reducing equipment downtime losses caused by leaks after installation.

[0043] The fixed pin marking design requires no special tools, allowing customers to quickly determine the status of the equipment and reduce communication and maintenance costs.

[0044] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0045] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a first-view structural schematic diagram of the present invention; Figure 2 This is a structural schematic diagram of the present invention from a second perspective; Figure 3 This is a structural schematic diagram of the present invention from a third-view perspective; Figure 4 This utility model Figure 2 A magnified structural diagram of point A in the middle.

[0046] In the diagram: 1-Equipment flange, 2-Pipe flange, 3-Pressure pipe, 4-End seal, 5-High-strength inflation port, 6-Sealing port, 7-Pressure gauge, 8-Pointer, 9-Fixing rod, 10-Fixing pin, 11-Pin, 12-Fastener. Detailed Implementation

[0047] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0048] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0049] like Figure 1-4 As shown, the pressure holding and leak detection device of this semiconductor cooling equipment includes an equipment flange 1 and a pipe flange 2. The pipe flange 2 is detachably connected to one side of the equipment flange 1, and a sealing gasket is sandwiched between the equipment flange 1 and the pipe flange 2. A pressure-bearing pipe 3 is fixedly connected to one side of the pipe flange 2, and an end seal 4 is fixedly connected to the end of the pressure-bearing pipe 3. The bottom of the pressure-bearing pipe 3 is fixedly connected to a high-strength air inlet 5, and the port of the high-strength air inlet 5 is detachably connected to an inlet seal 6. A pressure gauge 7 is fixedly connected to the top of the pressure-bearing pipeline 3. The pressure gauge 7 detects the internal pressure of the pressure-bearing pipeline 3 and the equipment. A pointer 8 is movably connected to the surface of the pressure gauge 7, and a fixing rod 9 is fixedly connected to the side of the dial of the pressure gauge 7. A fixing pin 10 is movably connected to the end of the fixing rod 9. The fixing pin 10 points to the scale of the pressure gauge 7. A pin 11 is fixedly connected to the end of the fixing rod 9. A fastener 12 is threaded onto the pin 11 and is fastened to the end of the fixing pin 10.

[0050] Example 1: The equipment flange 1 and the pipe flange 2 are made of cast iron, and the sealing gasket sandwiched between the equipment flange 1 and the pipe flange 2 is made of rubber. The system is designed to be pressure-resistant, i.e., a pressure-resistant pipe 3 is selected and filled with inert gas. Leakage is detected by monitoring pressure changes.

[0051] 3. Features of pressure-bearing pipelines: thicker walls to withstand higher pressures.

[0052] Higher material strength: High-strength alloy steel, stainless steel or special plastics (such as PE100, PVC-U) are usually used to ensure that the material does not deform or crack under high pressure.

[0053] More stringent connection methods are employed, such as welding and flange connections, to ensure sealing and strength.

[0054] Example 2: Device Structure: Sealed connection assembly: Equipment flange 1 and pipe flange 2 are made of cast iron and are detachably connected by bolts, with a clamped rubber sealing gasket to ensure the airtightness of the interface.

[0055] The pressure-bearing pipe 3 is welded and fixed to the pipe flange 2, and the end seal 4 is welded and sealed at the end to form a semi-closed pressure-bearing cavity with a design pressure resistance ≥10 bar.

[0056] Inflation and pressure monitoring components: The high-strength inflation port 5 is located at the bottom of the pressure-bearing pipe 3 and is used to fill in 5 bar of nitrogen gas. After inflation, it is sealed by the port seal 6.

[0057] Pressure gauge 7 is fixed to the top of pressure-bearing pipe 3 to detect internal pressure in real time; its dial is equipped with a movable pointer 8.

[0058] Fixed needle adjustment mechanism: The fixed rod 9 is welded to the side of the pressure gauge 7, and its end is connected to the fixed needle 10 via a pin 11 and a washer nut 12, which can lock the initial pressure value position. The end seal 4 is welded to the pressure-bearing pipeline 3, and the high-strength air inlet 5 is used to fill in inert gas. The detection end of the pressure gauge 7 detects the pressure of the pressure-bearing pipeline 3 and the internal pressure of the equipment. The pointer 8, also known as the moving needle, is bonded or welded to the side of the dial of the pressure gauge 7 via the fixed rod 9. The angle of the fixed needle 10 can be locked, and the fixed needle 10 is movably connected to the pin 11. The fastener 12 is specifically a washer nut.

[0059] The working principle of this utility model is as follows: Operating principle: Design the equipment piping to withstand pressure of 10 bar or more, and to be semi-completely sealed.

[0060] Fill with nitrogen at 5 bar.

[0061] Connect the pressure gauge and mark the position of the pressure gauge pointer.

[0062] The equipment and pressure gauge were shipped together to the installation site.

[0063] Before installation, check the pressure gauge to ensure it has the factory-set pressure and that the equipment is leak-free.

[0064] Another way to operate: Pre-shipment pressure testing and leak detection process: Pre-pressurized seal: Nitrogen gas at 5 bar is introduced into the pressure-bearing pipeline 3 and the equipment through the high-strength gas inlet 5, utilizing the stability of the inert gas to avoid the risk of oxidation.

[0065] After sealing, let it stand for 24 hours. If the pressure gauge reading does not drop, it is determined that there is no leakage.

[0066] Pressure marking and locking: Adjust the fixing pin 10 to the initial pressure position of pointer 8 (e.g., 5 bar), tighten the washer nut 12 to fix the angle, and form the factory pressure reference.

[0067] Pressurized transportation: The equipment and pressure gauge are shipped as a whole and remain in pressure-maintained until the customer's site, during which time the pressure-bearing pipeline 3 is kept sealed.

[0068] 2. Leakage detection before on-site installation Intuitive pressure comparison: Check if the pointer 8 of pressure gauge 7 deviates from the factory value marked on the fixed needle 10.

[0069] If the pointer reading drops, it indicates a leak occurred during transportation or storage and the device needs to be returned to the factory for repair; if there is no deviation, the seal is satisfactory.

[0070] Secondary verification: The detachable pipe flange 2 and equipment flange 1 are connected to an external leak detector for retesting to ensure dual verification of reliability.

[0071] Another way to operate: Assemble the device, purge with nitrogen to 5 bar and lock the fixing pin 10.

[0072] Record the pressure value before shipment and avoid severe vibration during transportation.

[0073] The customer can complete the initial leak detection within 5 minutes by comparing the position of pointer 8 with that of fixed pin 10 on-site.

[0074] Compared with the prior art, the present invention has the following advantages: The pressure-holding and leak-detection device of this semiconductor cooling equipment, through the coordinated arrangement of pressure-bearing pipe 3, end seal 4, high-strength air inlet 5, outlet seal 6, pressure gauge 7, pointer 8, fixing rod 9, fixing pin 10, pin 11, and fastener 12, can achieve the following objectives: Full lifecycle leak monitoring: By combining the pressure-bearing pipe 3 with the fixed needle 10, the pressure status can be visualized and monitored throughout the entire process from production to installation, avoiding the blind spots of traditional methods that rely solely on terminal detection.

[0075] Both risk and cost reduction: Pre-shipment leak detection can intercept more than 90% of potential leaks, reducing equipment downtime losses caused by leaks after installation.

[0076] The fixed pin 10 marking design requires no special tools, allowing customers to quickly determine the status of the equipment and reduce communication and maintenance costs.

Claims

1. A pressure-holding and leak-detection device for semiconductor cooling equipment, characterized in that, Includes equipment flange (1) and pipe flange (2), with pipe flange (2) detachably connected to one side of equipment flange (1), and a sealing gasket sandwiched between equipment flange (1) and pipe flange (2); A pressure-bearing pipe (3) is fixedly connected to one side of the pipe flange (2), and an end seal (4) is fixedly connected to the end of the pressure-bearing pipe (3). The bottom of the pressure-bearing pipe (3) is fixedly connected to a high-strength air inlet (5), and the port of the high-strength air inlet (5) is detachably connected to an air seal (6). A pressure gauge (7) is fixedly connected to the top of the pressure-bearing pipeline (3), and the pressure gauge (7) detects the pressure inside the pressure-bearing pipeline (3) and the equipment. The pressure gauge (7) is movably connected to a pointer (8), and a fixing rod (9) is fixedly connected to the side of the dial of the pressure gauge (7). The fixed rod (9) is movably connected to a fixed pin (10), which points to the scale of the pressure gauge (7). A pin (11) is fixedly connected to the end of the fixed rod (9), and a fastener (12) is threaded onto the pin (11). The fastener (12) is tightened onto the end of the fixed pin (10).

2. The pressure-holding and leak-detection device for semiconductor cooling equipment as described in claim 1, characterized in that: The equipment flange (1) and pipe flange (2) are made of cast iron, and the sealing gasket sandwiched between the equipment flange (1) and pipe flange (2) is made of rubber.

3. The pressure-holding and leak-detection device for semiconductor cooling equipment as described in claim 2, characterized in that: The end seal (4) is welded to the pressure-bearing pipeline (3), and the high-strength gas inlet (5) is used to fill in inert gas.

4. The pressure-holding and leak-detection device for semiconductor cooling equipment as described in claim 3, characterized in that: The pressure gauge (7) detects the pressure inside the pressure-bearing pipeline (3) and equipment.

5. The pressure-holding and leak-detection device for semiconductor cooling equipment as described in claim 4, characterized in that: The pointer (8) can also be called the moving needle, and the fixed rod (9) is bonded or welded to the side of the dial of the pressure gauge (7).

6. The pressure-holding and leak-detection device for semiconductor cooling equipment as described in claim 5, characterized in that: The angle of the fixing pin (10) is lockable, the fixing pin (10) is movably connected to the pin (11), and the fastener (12) is specifically a washer nut.

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