A sample stage suitable for different sizes of samples

CN224788243UActive Publication Date: 2026-09-22QINGFANG TECHNOLOGY (JINAN) CO LTD
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Patent Information

Application Number
CN202522604731.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-09
Publication Date
2026-09-22
Estimated Expiration
2035-12-09

AI Technical Summary

Technical Problem

目前对光学器件样品测试时,通常需要将其固定在样品台上,但传统的样品台仅适配特定尺寸的样品,无法同时满足不同尺寸样品的测量需求,限制了测量的通用性;此外,在测试过程中样品通常具有空间移动需求,传统样品台上的样品多为固定设置,严重影响测试灵活性;另一方面,传统样品台容易引起样品接触面的污染,洁净度不符合要求

Benefits of technology

[0018]本申请的有益效果在于,采用调节转轴与竖直支架螺纹配合的机械结构,通过旋转调节转轴即可精确控制夹持臂的进退,实现第一样品夹具对不同规格样品的稳固夹紧与松开,提高多尺寸样品测量的通用性。并在导向柱的限位作用下,确保夹持臂得电平稳与直线运动,防止偏转,增强了夹持的可靠性;第一样品夹具设置在移动平台,移动平台通过X、Y、Z三个方向独立移动的设计,实现了样品在空间内的精确三维移动与定位,能够灵活适应各种检测或加工位置的需求,提升了设备的适用范围和操作精度,提高测量效率;通过样品台夹具与样品夹持,避免样品接触面的污染,提高了样品洁净度。

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Abstract

The application discloses a sample stage suitable for samples of different sizes, which comprises a base, a moving platform arranged on the base, a Z-axis platform movably arranged on the base along a Z axis, an X-axis platform movably arranged on the upper side of the Z-axis platform along an X axis, a Y-axis platform movably arranged on the upper side of the X-axis platform along a Y axis, a first sample clamp fixedly arranged on the Y-axis platform, vertical supports fixedly arranged on the two sides of the Y-axis platform, the two vertical supports being oppositely arranged, clamping arms arranged on the opposite sides of the vertical supports, side fixing grooves formed on the opposite sides of the clamping arms, and an adjusting shaft rotatably arranged on the vertical support, one end of the adjusting shaft penetrating through the vertical support and being rotatably connected with the clamping arm, and the adjusting shaft being threadedly connected with the vertical support. The application satisfies the measurement requirements of samples of different sizes through the adjustable sample clamp, increases the universality of the measurement of samples of different sizes, and improves the measurement efficiency. Through the sample stage clamp and the sample clamping, the contact surface of the sample is prevented from being polluted, and the cleanliness of the sample is improved.
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Description

Technical Field

[0001] This application relates to the field of sample testing technology, and in particular to a sample stage suitable for samples of different sizes. Background Technology

[0002] Optical devices are a crucial component of optical technology, and the measurement of their optical characteristics is a key step in evaluating and optimizing device performance. Currently, when testing optical device samples, they typically need to be fixed on a sample stage. However, traditional sample stages are only suitable for samples of specific sizes and cannot simultaneously meet the measurement needs of samples of different sizes, thus limiting the versatility of the measurement. Furthermore, samples often require spatial movement during testing, while samples on traditional sample stages are mostly fixed, severely impacting testing flexibility. On the other hand, traditional sample stages are prone to contamination of the sample contact surfaces, failing to meet cleanliness requirements.

[0003] Therefore, how to improve the versatility, flexibility, and high cleanliness of sample testing is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0004] The purpose of this application is to provide a sample stage suitable for samples of different sizes, which can realize the X, Y, and Z axis movement of the test sample to meet the spatial movement requirements of the sample during the test. It can also meet the measurement requirements of samples of different sizes through adjustable sample clamps, increase the versatility of multi-size sample measurement, and improve measurement efficiency. By clamping the sample with the sample stage clamps, contamination of the sample contact surface is avoided, thus improving the cleanliness of the sample.

[0005] To achieve the above objectives, this application provides a sample stage suitable for samples of different sizes, comprising:

[0006] Base;

[0007] A mobile platform, located on the base, includes a Z-axis platform movably mounted on the base along the Z-axis, an X-axis platform movably mounted on the upper side of the Z-axis platform along the X-axis, and a Y-axis platform movably mounted on the upper side of the X-axis platform along the Y-axis.

[0008] The first sample fixture is fixedly mounted on the Y-axis platform and includes two vertical supports fixedly mounted on both sides of the Y-axis platform. The two vertical supports are arranged opposite each other, and clamping arms are provided on opposite sides of the vertical supports. Side fixing grooves are opened on opposite sides of the clamping arms. An adjusting shaft is rotatably mounted on the vertical support. One end of the adjusting shaft passes through the vertical support and is rotatably connected to the clamping arm. The adjusting shaft is threadedly connected to the vertical support.

[0009] Optionally, the upper surface of the Y-axis platform is provided with a plug arm, and the upper surface of the plug arm is provided with a bottom fixing groove, the bottom fixing groove and the side fixing groove are located in the same vertical plane.

[0010] Optionally, the insertion arm is provided with an insertion hole for fixing and inserting a second sample clamp. The second sample clamp includes a support rod and a U-shaped frame at the end of the support rod. The cross-sectional profile of the support rod is adapted to the inner profile of the insertion hole, and the inner wall of the U-shaped frame is provided with a slot for clamping the sample.

[0011] Optionally, the plug arm is rotatably connected to the Y-axis platform, and the plug arm is provided with a locking mechanism for locking and opening / closing with the Y-axis platform.

[0012] Optionally, the vertical support is provided with a through guide post, which is slidably disposed relative to the vertical support along its axial direction. The guide post is parallel to the adjusting shaft and one end is fixedly connected to the clamping arm.

[0013] Optionally, the vertical support is provided with a plurality of parallel guide holes, and the guide post corresponds one-to-one with the guide hole and is slidably arranged.

[0014] Optionally, the side fixing groove and / or the bottom fixing groove are strip grooves or arc grooves, and the side fixing groove and / or the bottom fixing groove have smooth groove walls.

[0015] Optionally, the Z-axis platform is provided with a Z-axis guide rail extending along the Z-axis, and the base is provided with a Z-axis guide groove that slides with the Z-axis guide rail; a Z-axis adjustment shaft is rotatably provided on the base, a gear is provided on the Z-axis adjustment shaft, and a rack is provided on the Z-axis guide rail, so as to drive the Z-axis platform to move along the Z-axis.

[0016] Optionally, the upper surface of the Z-axis platform is provided with an X-axis guide rail extending along the X-axis, and the lower surface of the X-axis platform is provided with an X-axis guide groove that slides with the X-axis guide rail; a first fixing block is provided on the side of the Z-axis platform, and a first nut block is provided on the side of the X-axis platform; an X-axis adjusting shaft is rotatably provided on the first fixing block, and the X-axis adjusting shaft passes through the first fixing block and is threadedly connected to the first nut block.

[0017] Optionally, the upper surface of the X-axis platform is provided with a Y-axis guide rail extending along the Y-axis, and the lower surface of the Y-axis platform is provided with a Y-axis guide groove that slides with the Y-axis guide rail; a second fixing block is provided on the side of the X-axis platform, and a second nut block is provided on the side of the Y-axis platform; a Y-axis adjusting shaft is rotatably provided on the second fixing block, and the Y-axis adjusting shaft passes through the second fixing block and is threadedly connected to the second nut block.

[0018] The beneficial effects of this application are as follows: The mechanical structure, employing a threaded connection between an adjusting shaft and a vertical support, allows for precise control of the clamping arm's movement by rotating the adjusting shaft. This enables the first sample fixture to stably clamp and release samples of different specifications, improving the versatility of multi-size sample measurements. Furthermore, the guide post's limiting action ensures smooth and linear movement of the clamping arm, preventing deflection and enhancing clamping reliability. The first sample fixture is mounted on a moving platform, which, through its independent X, Y, and Z-direction movement design, achieves precise three-dimensional movement and positioning of the sample in space. This allows for flexible adaptation to various testing or processing positions, expanding the equipment's applicability and operational accuracy, and increasing measurement efficiency. The sample stage fixture, used to hold the sample, avoids contamination of the sample contact surface, improving sample cleanliness. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0020] Figure 1 A schematic diagram of a sample stage structure suitable for samples of different sizes, provided in an embodiment of this application;

[0021] Figure 2 A perspective view of a sample stage suitable for samples of different sizes, provided for embodiments of this application;

[0022] Figure 3 Another perspective view of the sample stage for samples of different sizes provided in the embodiments of this application;

[0023] Figure 4 This is a schematic diagram of the second sample fixture structure provided in an embodiment of this application.

[0024] In the diagram: 1-Base; 2-Z-axis platform; 3-X-axis platform; 4-Y-axis platform; 5-Vertical bracket; 6-Clamping arm; 7-Adjusting shaft; 8-Guide column; 9-Plug-in arm; 10-Z-axis adjusting shaft; 11-X-axis adjusting shaft; 12-Y-axis adjusting shaft; 13-X-axis guide rail; 14-Second fixing block; 15-Second nut block; 16-Y-axis guide rail; 17-Side fixing groove; 18-Bottom fixing groove; 19-Insertion hole; 20-First fixing block; 21-First nut block; 22-Support rod; 23-U-shaped frame; 24-Card slot. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] It should be noted that in this embodiment, the orientation or positional relationship indicated by terms such as "upper," "lower," "front," and "rear" is based on the orientation or positional relationship shown in the accompanying drawings. It is used only for the convenience of describing this application and for simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application. Furthermore, "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] To enable those skilled in the art to better understand the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] like Figure 1 and Figure 2 As shown, in this embodiment, a sample stage suitable for samples of different sizes is provided. The sample stage includes a base 1, a moving platform and a first sample clamp. The base 1 serves as a load-bearing structure, and its height can be designed according to actual needs. The moving platform is set on the base 1 and includes a Z-axis platform 2 movably mounted on the base 1 along the Z-axis, an X-axis platform 3 movably mounted on the upper side of the Z-axis platform 2 along the X-axis, and a Y-axis platform 4 movably mounted on the upper side of the X-axis platform 3 along the Y-axis.

[0029] The platform design, which allows independent movement in the X, Y, and Z directions, enables flexible movement of samples within space, significantly improving testing flexibility.

[0030] The first sample fixture is fixedly mounted on the Y-axis platform 4. The first sample fixture is used to hold the sample, thereby enabling the sample to move in three-dimensional space by the movement of the platform. The first sample fixture includes vertical supports 5 fixedly mounted on both sides of the Y-axis platform 4. The two vertical supports 5 are arranged opposite each other, or in other words, the two vertical supports 5 are located in the same vertical plane. A clamping arm 6 is provided on the opposite side of the two vertical supports 5, and a side fixing groove 17 is opened on the opposite side of the clamping arm 6. The two clamping arms 6 form a clamping space for holding the sample, and the sample edge is engaged by the side fixing groove 17 to ensure that the sample can be stably confined in the side fixing groove 17.

[0031] An adjusting shaft 7 is rotatably mounted on the vertical support 5. One end of the adjusting shaft 7 passes through the vertical support 5 and is rotatably connected to the clamping arm 6. The adjusting shaft 7 is threadedly connected to the vertical support 5. By adjusting the rotation of the adjusting shaft 7, it moves linearly along its axis under the action of the thread, thereby driving the clamping arm 6 forward or backward. Through the movement of the two clamping arms 6, samples of different sizes can be clamped, ensuring the versatility of multi-size sample measurement.

[0032] The adjusting shaft 7 is rotatably connected to the clamping arm 6 via a bearing. To prevent the side fixing groove 17 from rotating and damaging the clamped sample due to the rotation of the clamping arm 6, in this embodiment, a through guide post 8 is provided on the vertical support 5. The guide post 8 is slidably arranged relative to the vertical support 5 along its axial direction. The guide post 8 is parallel to the adjusting shaft 7 and one end is fixedly connected to the clamping arm 6. When the adjusting shaft 7 drives the clamping arm 6 to move, the clamping arm 6 can only move along the axial direction of the guide post 8 or the adjusting shaft 7 under the limitation of the guide post 8, ensuring the smooth and linear movement of the clamping arm 6, avoiding deflection, and enhancing the reliability of clamping.

[0033] Multiple parallel guide holes are provided on the vertical support 5, and multiple guide posts 8 correspond one-to-one with the guide holes and slide in fit, thereby restricting the clamping arm 6 to move only along the axial direction of the guide post 8.

[0034] In summary, this application employs a mechanical structure with a threaded connection between the adjusting shaft 7 and the vertical support 5. By rotating and adjusting the shaft 7, the forward and backward movement of the clamping arm 6 can be precisely controlled, enabling the first sample fixture to stably clamp and release samples of different specifications, thus improving the versatility of multi-size sample measurement. Furthermore, the guide post 8 ensures the smooth and linear movement of the clamping arm 6, preventing deflection and enhancing clamping reliability. The first sample fixture is mounted on a moving platform, which, through its independent X, Y, and Z-direction movement design, achieves precise three-dimensional movement and positioning of the sample in space. This allows for flexible adaptation to various testing or processing positions, improving the applicability and operational accuracy of the equipment, and enhancing the flexibility and efficiency of multi-size sample measurement. The sample stage fixture clamps the sample, preventing contamination of the sample contact surface and improving sample cleanliness.

[0035] A connector arm 9 is provided on the upper surface of the Y-axis platform 4. A bottom fixing groove 18 is provided on the upper surface of the connector arm 9. The bottom fixing groove 18 and the side fixing groove 17 are located in the same vertical plane. The bottom fixing groove 18 on the connector arm 9 and the side fixing groove 17 of the first sample fixture are designed to be coplanar, forming a "double insurance" mechanism for simultaneously positioning and clamping the bottom and side of the sample, and forming a stable structure for triangular support of the sample, which can effectively ensure the clamping stability of the sample.

[0036] Furthermore, the insertion arm 9 is also provided with an insertion hole 19 for fixing and inserting the second sample clamp, please refer to... Figure 4 The second sample fixture includes a support rod 22 and a U-shaped frame 23 located at the end of the support rod 22. The cross-sectional profile of the support rod 22 is adapted to the inner profile of the insertion hole 19, thereby ensuring that the support rod 22 can be stably inserted into the insertion hole 19. It should be noted that the inner wall of the U-shaped frame 23 is provided with a slot 24 for holding the sample, ensuring that the sample can be matched with the slot 24 that is adapted to the profile, so that the sample is stably fixed on the second sample fixture.

[0037] The second sample fixture can have various specifications, specifically in the different specifications of the U-shaped frame 23, to hold samples of different sizes. The support rods 22 of the second sample fixtures of different specifications are the same, so that the second sample fixtures of different specifications can be stably inserted into the socket 19.

[0038] However, in practical applications, due to factors such as assembly and machining errors, the size of the support rod 22 should be slightly smaller than the size of the insertion hole 19 to ensure smooth insertion into the insertion hole 19 during installation, while also ensuring a certain level of fitting accuracy to avoid measurement errors. Additionally, rubber or other fillers can be added inside the insertion hole 19 to ensure the overall stability of the second sample fixture after the support rod 22 is inserted, preventing tilting or instability.

[0039] Furthermore, the insertion arm 9 can also be rotatably connected to the Y-axis platform 4 via bearings. When the second sample fixture is inserted into the insertion hole 19, the rotation angle of the sample on the second sample fixture can be changed by rotating the insertion arm 9, thereby realizing multi-angle measurement of the sample according to the actual situation. After the insertion arm 9 is rotated to the target angle, the insertion arm 9 can be locked onto the Y-axis platform 4 by the locking mechanism on the insertion arm 9 to ensure the stability of the sample measurement.

[0040] The locking mechanism can be a locking pin installed on the plug arm 9. The locking pin is threaded to the plug arm 9, and its end can contact and press against the Y-axis platform 4, thereby generating a clamping force to lock the plug arm 9 onto the Y-axis platform 4.

[0041] In some embodiments, the side fixing groove 17 and / or the bottom fixing groove 18 are strip-shaped grooves or arc-shaped grooves. Different groove structures can be selected according to the outer contour of the sample, which will not be described in detail here. Since the groove walls of the side fixing groove 17 and the bottom fixing groove 18 need to contact the sample, in order to avoid damage to the sample by the groove walls, the side fixing groove 17 and / or the bottom fixing groove 18 can have smooth groove walls. The diameter or width of the groove wall in contact with the sample should be as small as possible to reduce the contact area with the sample and reduce friction and contamination to the sample. The materials of the clamping arm 6 and / or the plug arm 9 include, but are not limited to, polytetrafluoroethylene (PTFE), polyetheretherketone (PEEK), or Grinova H (a high-performance material suitable for high-temperature environments), etc., and different materials can be selected according to the actual situation, which will not be elaborated here.

[0042] For large samples, gently place the sample on the first sample holder to avoid bumping it. Rotate the adjusting shaft 7 to make the side fixing groove 17 firmly clamp the sample. After placement, check whether the sample is installed firmly to avoid sample movement during subsequent movement. For small samples, select the second sample holder. After fixing the second sample holder in the insertion hole 19 of the clamping arm 6, carefully place the small sample in the U-shaped frame 23 of the second sample holder. The sample is fixed by the slot 24.

[0043] The Z-axis platform 2 is equipped with a Z-axis guide rail (not shown in the figure) extending along the Z-axis. The base 1 has a Z-axis guide groove (not shown in the figure) that slides with the Z-axis guide rail, which restricts the Z-axis platform 2 to move only along the Z-axis, which is vertical. A Z-axis adjusting shaft 10 is rotatably mounted on the base 1. The Z-axis adjusting shaft 10 has a gear, and the Z-axis guide rail has a rack. When the Z-axis adjusting shaft 10 is rotated, the rack can be driven to move along the Z-axis, thereby driving the Z-axis platform 2 to move along the Z-axis. The Z-axis adjusting shaft 10 is rotatably connected to the base 1 via bearings.

[0044] The upper surface of the Z-axis platform 2 is provided with an X-axis guide rail 13 extending along the X-axis, and the lower surface of the X-axis platform 3 is provided with an X-axis guide groove that slides with the X-axis guide rail 13, which can restrict the movement of the X-axis platform 3 only along the X-axis, where the X-axis is the direction in the horizontal plane; please refer to Figure 3 The Z-axis platform 2 has a first fixed block 20 on its side, and the X-axis platform 3 has a first nut block 21 on its side. An X-axis adjusting shaft 11 is rotatably mounted on the first fixed block 20. The X-axis adjusting shaft 11 passes through the first fixed block 20 and is threadedly connected to the first nut block 21 to form a screw-nut structure. The X-axis adjusting shaft 11 can be rotatably connected to the first fixed block 20 through a bearing. When the X-axis adjusting shaft 11 rotates, it drives the first nut block 21 to move under the action of the screw-nut mechanism, thereby realizing the movement of the X-axis platform 3 in the X-axis direction.

[0045] The upper surface of the X-axis platform 3 is provided with a Y-axis guide rail 16 extending along the Y-axis, and the lower surface of the Y-axis platform 4 is provided with a Y-axis guide groove that slides with the Y-axis guide rail 16, which can restrict the movement of the Y-axis platform 4 only along the Y-axis. The Y-axis is the direction perpendicular to the X-axis in the horizontal plane; please refer to Figure 2 The X-axis platform 3 has a second fixed block 14 on its side, and the Y-axis platform 4 has a second nut block 15 on its side. A Y-axis adjusting shaft 12 is rotatably mounted on the second fixed block 14. The Y-axis adjusting shaft 12 passes through the second fixed block 14 and is threadedly connected to the second nut block 15, forming a screw-nut structure. The Y-axis adjusting shaft 12 can be rotatably connected to the second fixed block 14 via a bearing. When the Y-axis adjusting shaft 12 rotates, it drives the second nut block 15 to move under the action of the screw-nut mechanism, thereby realizing the movement of the Y-axis platform 4 in the Y-axis direction.

[0046] In this application, the adjustment shaft 7, Z-axis adjustment shaft 10, Y-axis adjustment shaft 12 and X-axis adjustment shaft 11 shall be equipped with a knob structure at the end for easy rotation, so as to facilitate manual direct drive of their rotation.

[0047] The mobile platform of this application consists of three layers, which are slidably connected by guide rails and grooves and can move independently. The rotation of the X-axis adjustment axis 11 and Y-axis adjustment axis 12 drives the mobile platform to move horizontally, while the Z-axis adjustment axis 10 drives the sample stage to move vertically. This allows for flexible movement of the sample on the mobile platform in space, and the three axes do not interfere with each other during movement, maintaining good spatial stability of the sample during testing. Furthermore, considering the positional stability of the mobile platform after adjustment, locking mechanisms can be configured on the X-axis adjustment axis 11, Y-axis adjustment axis 12, and Z-axis adjustment axis 10. The locking force of locking pins achieves mechanical locking of the corresponding rotating axes, ensuring the positional stability of the mobile platform.

[0048] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0049] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. A sample stage suitable for samples of different sizes, characterized in that, include: Base (1); The mobile platform is located on the base (1) and includes a Z-axis platform (2) movably located on the base (1) along the Z-axis, an X-axis platform (3) movably located on the upper side of the Z-axis platform (2) along the X-axis, and a Y-axis platform (4) movably located on the upper side of the X-axis platform (3) along the Y-axis. The first sample fixture is fixedly mounted on the Y-axis platform (4) and includes vertical supports (5) fixedly mounted on both sides of the Y-axis platform (4). The two vertical supports (5) are arranged opposite to each other, and clamping arms (6) are provided on opposite sides of the vertical supports (5). Side fixing grooves (17) are opened on opposite sides of the clamping arms (6). An adjusting shaft (7) is rotatably mounted on the vertical support (5). One end of the adjusting shaft (7) passes through the vertical support (5) and is rotatably connected to the clamping arm (6). The adjusting shaft (7) is threadedly connected to the vertical support (5).

2. The sample stage suitable for samples of different sizes according to claim 1, characterized in that, The upper surface of the Y-axis platform (4) is provided with a plug arm (9), and the upper surface of the plug arm (9) is provided with a bottom fixing groove (18). The bottom fixing groove (18) and the side fixing groove (17) are located in the same vertical plane.

3. The sample stage suitable for samples of different sizes according to claim 2, characterized in that, The plug arm (9) is provided with a plug hole (19) for fixing the second sample clamp. The second sample clamp includes a support rod (22) and a U-shaped frame (23) at the end of the support rod (22). The cross-sectional profile of the support rod (22) is adapted to the inner profile of the plug hole (19). The inner wall of the U-shaped frame (23) is provided with a slot (24) for clamping the sample.

4. The sample stage suitable for samples of different sizes according to claim 3, characterized in that, The plug arm (9) is rotatably connected to the Y-axis platform (4), and the plug arm (9) is provided with a locking mechanism that locks and opens / closes with the Y-axis platform (4).

5. The sample stage suitable for samples of different sizes according to claim 1, characterized in that, The vertical support (5) is provided with a through guide post (8), which slides relative to the vertical support (5) along its axial direction. The guide post (8) is parallel to the adjusting shaft (7) and one end is fixedly connected to the clamping arm (6).

6. The sample stage suitable for samples of different sizes according to claim 5, characterized in that, The vertical support (5) is provided with multiple parallel guide holes, and the guide post (8) corresponds to each of the guide holes and is slidably set.

7. The sample stage suitable for samples of different sizes according to claim 2, characterized in that, The side fixing groove (17) and / or the bottom fixing groove (18) are strip grooves or arc grooves, and the side fixing groove (17) and / or the bottom fixing groove (18) have smooth groove walls.

8. The sample stage suitable for samples of different sizes according to any one of claims 1-7, characterized in that, The Z-axis platform (2) is provided with a Z-axis guide rail extending along the Z-axis, and the base (1) is provided with a Z-axis guide groove that slides with the Z-axis guide rail; the base (1) is provided with a Z-axis adjustment shaft (10) rotatably, the Z-axis adjustment shaft (10) is provided with a gear, and the Z-axis guide rail is provided with a rack, so as to drive the Z-axis platform (2) to move along the Z-axis.

9. The sample stage suitable for samples of different sizes according to claim 8, characterized in that, The upper surface of the Z-axis platform (2) is provided with an X-axis guide rail (13) extending along the X-axis, and the lower surface of the X-axis platform (3) is provided with an X-axis guide groove that slides with the X-axis guide rail (13); the side of the Z-axis platform (2) is provided with a first fixing block (20), and the side of the X-axis platform (3) is provided with a first nut block (21). An X-axis adjusting shaft (11) is rotatably provided on the first fixing block (20), and the X-axis adjusting shaft (11) passes through the first fixing block (20) and is threadedly connected to the first nut block (21).

10. The sample stage suitable for samples of different sizes according to claim 8, characterized in that, The upper surface of the X-axis platform (3) is provided with a Y-axis guide rail (16) extending along the Y-axis, and the lower surface of the Y-axis platform (4) is provided with a Y-axis guide groove that slides with the Y-axis guide rail (16); the side of the X-axis platform (3) is provided with a second fixing block (14), and the side of the Y-axis platform (4) is provided with a second nut block (15). The second fixing block (14) is rotatably provided with a Y-axis adjusting shaft (12), and the Y-axis adjusting shaft (12) passes through the second fixing block (14) and is threadedly connected to the second nut block (15).