core pulling device

Abstract

The application relates to the technical field of polycrystalline silicon sample core extraction equipment and discloses a core extraction device, which is used for polycrystalline silicon sample core extraction treatment, the polycrystalline silicon sample comprises a metal core body and a polycrystalline silicon main body wrapped around the metal core body, and the core extraction device comprises a mounting table, the mounting table is provided with a mounting surface, a clamping mechanism, the clamping mechanism is arranged on the mounting surface and is used for clamping the polycrystalline silicon main body, a core extraction mechanism, the core extraction mechanism is slidably arranged on the mounting surface along a first direction, the core extraction mechanism and the clamping mechanism are arranged at intervals in the first direction, and the core extraction mechanism comprises a shell and a clamping assembly, the shell is provided with a cavity, and the clamping assembly is arranged in the cavity and is used for clamping the metal core body, and a driving mechanism, the driving mechanism is connected with the core extraction mechanism and is used for driving the core extraction mechanism to move along the first direction. Therefore, the metal core body in the polycrystalline silicon sample can be extracted through the core extraction device, the extraction stability is good, the reliability is high, and the risk of polycrystalline silicon main body fragmentation damage can be reduced.

Description

Technical Field

[0001] This application relates to the field of polycrystalline silicon sample core-pulling equipment, and in particular to a core-pulling device. Background Technology

[0002] Currently, in the preparation process of semiconductor-grade polycrystalline silicon, polycrystalline silicon samples produced in short cycles can be tested to meet the requirements for detecting impurities in semiconductor-grade polycrystalline silicon. Specifically, a special metal core needs to be heated in a reactor while raw materials are introduced into the reactor, allowing polycrystalline silicon to be deposited on the metal core. When testing of the semiconductor-grade polycrystalline silicon is required, the metal core needs to be extracted from the polycrystalline silicon substrate for testing.

[0003] In related technologies, metal cores are usually extracted using tools such as files and pliers, which can lead to metal core breakage, polycrystalline silicon body fragmentation, and cracks in the polycrystalline silicon body, making it impossible to further test and analyze the polycrystalline silicon body. Utility Model Content

[0004] This application aims to at least address one of the technical problems existing in the prior art. To this end, one object of this application is to provide a core-pulling device for extracting metal cores from polycrystalline silicon samples, which offers high reliability and reduces the risk of damage to the polycrystalline silicon substrate.

[0005] According to an embodiment of this application, a core-pulling device is used to extract cores from a polycrystalline silicon sample. The polycrystalline silicon sample includes a metal core and a polycrystalline silicon body covering the periphery of the metal core. The core-pulling device includes: a mounting platform having a mounting surface; a clamping mechanism disposed on the mounting surface and used to clamp the polycrystalline silicon body; a core-pulling mechanism slidably disposed on the mounting surface along a first direction, the core-pulling mechanism and the clamping mechanism being spaced apart in the first direction, and the core-pulling mechanism including a housing and a clamping assembly, the housing having a cavity, the clamping assembly being disposed in the cavity and used to clamp the metal core; and a driving mechanism connected to the core-pulling mechanism and used to drive the core-pulling mechanism to move along the first direction.

[0006] According to the embodiments of this application, the core-pulling device can clamp and cooperate with the polycrystalline silicon body in the polycrystalline silicon sample through the clamping mechanism, clamp and cooperate with the metal core in the polycrystalline silicon sample through the core-pulling mechanism, and drive the core-pulling mechanism through the driving mechanism to realize the core-pulling process of the polycrystalline silicon sample. The core-pulling process has high reliability and good stability, and can effectively prevent problems such as metal core breakage and polycrystalline silicon body fragmentation, thereby improving the core-pulling success rate of polycrystalline silicon samples.

[0007] According to some embodiments of this application, the housing has a through hole communicating with the cavity and for the metal core to pass through. The clamping assembly includes: a clamping caliper disposed in the cavity and selectively clamping the metal core; a driving block disposed adjustablely in the cavity along the first direction, the driving block having a guide channel opposite to the through hole in the first direction and for the metal core to pass through, and the driving block driving the clamping caliper to clamp the metal core; and a driving part fixed to the housing and for driving the driving block to move along the first direction.

[0008] According to some embodiments of this application, the clamping caliper includes: a connecting spring, one end of which is fixed to the housing; and a caliper body connected to the other end of the connecting spring. The caliper body is located circumferentially outside the metal core through which the drive block passes, and the caliper body is used to drive the drive block. The caliper body can move closer to the metal core under the drive of the drive block, and the connecting spring stores energy.

[0009] According to some embodiments of this application, the clamping caliper includes multiple sets of connecting springs and the caliper body, and the multiple sets of connecting springs and the caliper body are evenly arranged on the circumferential outer side of the metal core.

[0010] According to some embodiments of this application, the drive block is formed with a drive surface, the drive surface is gradually widened on the side away from the through hole, and the drive surface is disposed opposite to the caliper body in the first direction; wherein, the drive surface is adapted to press against the caliper body when the drive block moves away from the through hole in the first direction, and is used to drive the caliper body to move towards the metal core side.

[0011] According to some embodiments of this application, the housing is provided with a shaft segment extending along the first direction, and the end of the drive block away from the through hole is provided with a rotating gear. The rotating gear has an internal thread and is threadedly engaged with the shaft segment. The drive unit is constructed as a drive motor, and the output end of the drive motor is provided with a drive gear. The drive gear meshes with the rotating gear, and the rotating gear is adapted to drive the drive block to translate along the first direction.

[0012] According to some embodiments of this application, the clamping mechanism includes: a lower pressure plate, which is fixedly disposed on the mounting surface and has a first limiting groove that opens to the side away from the mounting surface; an upper pressure plate, which is disposed opposite to the lower pressure plate in the vertical direction and has a second limiting groove that opens to the side of the lower pressure plate, the second limiting groove being disposed opposite to the first limiting groove and used to limit the polycrystalline silicon body respectively; and a drive seat, which is fixedly connected to the lower pressure plate and used to drive the upper pressure plate to move in the vertical direction.

[0013] According to some embodiments of this application, the first limiting groove has an arc-shaped cross-section at any position in the first direction; the second limiting groove has an arc-shaped cross-section at any position in the first direction.

[0014] According to some embodiments of this application, the first limiting groove is provided with a first buffer; and / or, the second limiting groove is provided with a second buffer.

[0015] According to some embodiments of this application, the mounting platform is provided with a guide rail, the guide rail extends along the first direction, and the core-pulling mechanism slides in cooperation with the guide rail.

[0016] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a front view schematic diagram of a core-pulling device according to an embodiment of this application; Figure 2 This is a top view schematic diagram of a core-pulling device according to an embodiment of this application; Figure 3 This is a schematic diagram of a clamping mechanism according to an embodiment of this application; Figure 4 This is a cross-sectional schematic diagram of a core-pulling device according to an embodiment of this application; Figure 5 This is a schematic diagram of the structure of a polycrystalline silicon sample according to an embodiment of this application.

[0018] Figure label: Core-pulling device 100; polycrystalline silicon sample 200; polycrystalline silicon body 201; metal core 202; Mounting platform 1; Mounting surface 11; Guide rail 12; Clamping mechanism 2; upper pressure plate 21; second limiting groove 211; second buffer 212; lower pressure plate 22; first limiting groove 221; first buffer 222; drive seat 23; Core pulling mechanism 3; cavity 301; through hole 302; housing 31; clamping assembly 32; clamping caliper 321; connecting spring 3211; caliper body 3212; drive block 322; drive surface 3221; limiting section 3222; limiting flange 3223; guide channel 3224; drive part 323; shaft section 324; rotating gear 325; drive gear 326; Drive mechanism 4. Detailed Implementation

[0019] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0020] The following is for reference. Figures 1-4 Describes a core-pulling device 100 according to an embodiment of this application.

[0021] The core-pulling device 100 is used to extract the polycrystalline silicon sample 200. The polycrystalline silicon sample 200 includes a metal core 202 and a polycrystalline silicon body 201 covering the outer periphery of the metal core 202. The core-pulling device 100 is used to extract the metal core 202 from the polycrystalline silicon body 201 to obtain an independent polycrystalline silicon body 201.

[0022] Understandably, during the preparation of semiconductor-grade polysilicon, the polysilicon sample 200 produced using a short-cycle process can be tested to meet the requirements for detecting impurities in the semiconductor-grade polysilicon. Specifically, a special metal core (i.e., the aforementioned metal core 202) needs to be heated in a reactor, and raw materials are introduced into the reactor so that a polysilicon substrate 201 can be deposited on the metal core 202. When testing of the semiconductor-grade polysilicon is required, the metal core 202 needs to be extracted from the polysilicon substrate 201 for testing.

[0023] In related technologies, the metal core 202 is usually extracted using tools such as files and pliers, which can lead to the metal core 202 breaking, the polycrystalline silicon body 201 shattering, or the polycrystalline silicon body 201 developing cracks, making it impossible to further test and analyze the polycrystalline silicon body 201.

[0024] The core-pulling device 100 according to an embodiment of this application includes: a mounting platform 1, a clamping mechanism 2, a core-pulling mechanism 3, and a driving mechanism 4.

[0025] The mounting platform 1 serves as the mounting carrier for the clamping mechanism 2, the core-pulling mechanism 3, and the driving mechanism 4. The mounting platform 1 has a mounting surface 11, and the clamping mechanism 2 is disposed on the mounting surface 11. The clamping mechanism 2 is used to clamp the polysilicon body 201 to clamp and fix the polysilicon sample 200 at the clamping mechanism 2, so as to facilitate the core-pulling process of the polysilicon sample 200.

[0026] Furthermore, the core-pulling mechanism 3 is slidably disposed on the mounting surface 11 along the first direction. The core-pulling mechanism 3 and the clamping mechanism 2 are spaced apart in the first direction, so that the core-pulling mechanism 3 is arranged corresponding to the clamping mechanism 2 in the first direction, so that the polycrystalline silicon sample 200 clamped and fixed on the clamping mechanism 2 can correspond to the core-pulling mechanism 3.

[0027] The core-pulling mechanism 3 includes a housing 31 and a clamping assembly 32. The housing 31 has a cavity 301, and the clamping assembly 32 is disposed within the cavity 301. The clamping assembly 32 is used to clamp the metal core 202, thereby clamping and fixing the metal core 202 through the core-pulling mechanism 3. Simultaneously, a driving mechanism 4 is connected to the core-pulling mechanism 3 and is used to drive the core-pulling mechanism 3 to move along a first direction, thereby driving the core-pulling mechanism 3 to move and extract the metal core 202.

[0028] It is understood that the core-pulling device 100 in this application can be used to perform core-pulling processing on a polycrystalline silicon sample 200 with a portion of the metal core 202 exposed. That is, before performing the core-pulling processing operation on the metal core 202 by the aforementioned core-pulling device 100, a portion of the polycrystalline silicon body 201 can be cut off from the metal core 202 by a cutting process, thereby exposing a portion of the metal core 202, so that the core-pulling mechanism 3 can be clamped and engaged with the exposed metal core 202.

[0029] It should be noted that the overall diameter of the polycrystalline silicon sample 200 is typically 20mm ± 3mm, the diameter of the metal core 202 is 3mm ± 0.5mm, and the total length of the polycrystalline silicon sample 200 is 300mm ± 10mm. When it is necessary to cut the polycrystalline silicon sample 200, it can be circumferentially cut using a cutting device (such as a saw blade) to allow part of the polycrystalline silicon body 201 (e.g., a polycrystalline silicon body 201 with a length of 30mm ± 5mm) to be removed from the metal core 202, thereby exposing part of the metal core 202.

[0030] The aforementioned "circumferential cutting" refers to cutting the polycrystalline silicon body 201 circumferentially around the metal core 202 to remove a shorter section (e.g., 30mm ± 5mm) of the polycrystalline silicon body 201 from the metal core 202. It is understood that because the cutting creates a shorter section of the polycrystalline silicon body 201, removing this section from the metal core 202 is easier, preventing breakage or damage to the polycrystalline silicon body 201 during the removal process.

[0031] Combination Figures 1-4 Describe the core-pulling process of the core-pulling device 100 according to an embodiment of this application: First, the polysilicon body 201 is clamped by the clamping mechanism 2 to fix the polysilicon body 201 and the metal core 202 located at the center of the polysilicon body 201 to the mounting platform 1. Next, the exposed metal core 202 segment in the polycrystalline silicon sample 200 is inserted into the core-pulling mechanism 3 and clamped and fixed by the core-pulling mechanism 3, so that the core-pulling mechanism 3 and the metal core 202 are clamped and fixed. Finally, the drive mechanism 4 drives the core-pulling mechanism 3 to move away from the clamping mechanism 2 along the first direction, so as to drive the metal core 202 to move through the core-pulling mechanism 3 and realize the extraction process of the metal core 202.

[0032] According to the embodiments of this application, the core-pulling device 100 can clamp and cooperate with the polycrystalline silicon body 201 in the polycrystalline silicon sample 200 through the clamping mechanism 2, clamp and cooperate with the metal core 202 in the polycrystalline silicon sample 200 through the core-pulling mechanism 3, and drive the core-pulling mechanism 3 through the driving mechanism 4, so as to realize the core-pulling process of the polycrystalline silicon sample 200 by the core-pulling device 100. The core-pulling process has high reliability and good stability, and can effectively prevent problems such as the metal core 202 breaking and the polycrystalline silicon body 201 cracking, thereby improving the core-pulling success rate of the polycrystalline silicon sample 200.

[0033] like Figure 4 As shown, in some embodiments of this application, the housing 31 is formed with a through hole 302, which communicates with the cavity 301 and is used for the metal core 202 to pass through, so that the metal core 202 can pass through the housing 31 and extend into an area suitable for clamping and engaging with the clamping assembly 32.

[0034] Furthermore, the clamping assembly 32 includes a clamping caliper 321, a drive block 322, and a drive unit 323. The clamping caliper 321 is disposed within the cavity 301 and can selectively clamp the metal core 202. The drive block 322 is disposed within the cavity 301 in a position adjustable along a first direction. A guide channel 3224 is formed at the drive block 322, which is disposed opposite to the through hole 302 in the first direction. The guide channel 3224 allows the metal core 202 to pass through, so that the metal core 202 extends into a position suitable for engaging with the clamping caliper 321. The drive block 322 is used to drive the clamping caliper 321 to clamp the metal core 202.

[0035] The drive unit 323 is fixedly mounted on the housing 31, and the drive unit 323 is used to drive the drive block 322 to move along the first direction, so as to drive the clamping caliper 321 to move by adjusting the position of the drive block 322, thereby realizing the clamping action of the clamping caliper 321 on the metal core 202.

[0036] It is understandable that in the core-pulling mechanism 3, the clamping caliper 321 is used to clamp and cooperate with the metal core 202. The clamping caliper 321 is used in the housing 31 to cooperate with the drive block 322 so that the drive block 322 drives the clamping caliper 321 to move, thereby realizing the clamping caliper 321 clamping the metal core 202.

[0037] like Figure 4 As shown, in a further embodiment of this application, the clamping caliper 321 includes a connecting spring 3211 and a caliper body 3212. One end of the connecting spring 3211 is connected and fixed to the housing 31, and the caliper body 3212 is connected to the other end of the connecting spring 3211, thereby suspending the caliper body 3212 in the housing 31 through the connecting spring 3211.

[0038] The caliper body 3212 is located on the circumferential outer side of the metal core 202 through which the drive block 322 passes, and the caliper body 3212 is used to drive and cooperate with the drive block 322. The caliper body 3212 can move closer to the metal core 202 under the drive of the drive block 322 and connect to the spring 3211 to store energy.

[0039] Specifically, when the drive block 322 does not drive the clamping caliper 321, the caliper body 3212 is positioned to avoid the metal core 202 under the drive of the connecting spring 3211; when the drive block 322 drives the clamping caliper 321, the caliper body 3212 moves towards the side closer to the metal core 202 to clamp and fix the metal core 202 through the caliper body 3212, and when the drive block 322 drives the clamping caliper 321 to move, the connecting spring 3211 stores energy and has a driving force to drive the caliper body 3212 to move away from the metal core 202, so that the connecting spring 3211 can drive the caliper body 3212 to reset when the drive block 322 is released.

[0040] In some embodiments of this application, the clamping caliper 321 includes multiple sets of connecting springs 3211 and caliper bodies 3212. These multiple sets of connecting springs 3211 and caliper bodies 3212 are evenly arranged on the circumferential outer side of the metal core 202 to clamp the metal core 202, thereby improving the clamping reliability of the clamping caliper 321 on the metal core 202 and ensuring uniform force distribution on the metal core 202 in the circumferential direction. The "multiple sets of connecting springs 3211 and caliper bodies 3212" can be two, three, four, etc.

[0041] like Figure 4 As shown, in some embodiments of this application, the drive block 322 is formed with a drive surface 3221. The drive surface 3221 is gradually expanded towards the side away from the through hole 302, and the drive surface 3221 is disposed opposite to the caliper body 3212 in a first direction, so that the drive surface 3221 can be arranged correspondingly to the caliper body 3212. When the drive block 322 moves along the first direction, the drive surface 3221 can abut and cooperate with the caliper body 3212, thereby driving the caliper body 3212 to move.

[0042] The driving surface 3221 is adapted to press against the caliper body 3212 when the driving block 322 moves away from the through hole 302 along the first direction, and the driving surface 3221 is used to drive the caliper body 3212 to move towards the metal core 202, so that the caliper body 3212 can clamp the metal core 202.

[0043] Reference Figure 4 As shown, the caliper body 3212 is constructed with a tapered structure, so that the shape of the caliper body 3212 matches the shape of the drive surface 3221, thereby ensuring the contact area between the caliper body 3212 and the drive block 322, improving the driving stability of the drive block 322 on the caliper body 3212, and enabling the caliper body 3212 to reliably and stably maintain the clamping state of the metal core 202.

[0044] It is understandable that the drive surface 3221 can be arranged to correspond to multiple sets of clamping calipers 321 at the same time, so that multiple sets of clamping calipers 321 can be driven simultaneously by a drive block 322.

[0045] In some embodiments of this application, the housing 31 is provided with a shaft segment 324 extending in a first direction, and the end of the drive block 322 away from the through hole 302 is provided with a rotating gear 325. The rotating gear 325 has an internal thread and is threadedly engaged with the shaft segment 324. The drive part 323 is configured as a drive motor, and the output end of the drive motor is provided with a drive gear 326. The drive gear 326 meshes with the rotating gear 325, and the rotating gear 325 is adapted to drive the drive block 322 to translate in the first direction.

[0046] It is understandable that the drive block 322 cannot rotate within the cavity 301. With the threaded engagement between the rotating gear 325 and the shaft segment 324, the drive block 322 can be driven to translate in the first direction. In other words, the drive block 322 and the rotating gear 325 are equivalent to sliders, and the shaft segment 324 is a lead screw. Through the threaded engagement between the rotating gear 325 and the shaft segment 324, the drive block 322 can be adjusted to translate in the first direction.

[0047] It should be noted that during the position adjustment process, the drive block 322 can avoid other components (such as connecting spring 3211) in the cavity 301 to prevent the drive block 322 from interfering with the structure or components in the cavity 301, thus ensuring the reliability of the position adjustment of the drive block 322.

[0048] In some embodiments of this application, a limiting segment 3222 is provided on the drive block 322. The limiting segment 3222 can be fitted with the through hole 302. The end of the limiting segment 3222 can guide the metal core 202 to extend into the guide channel 3224. A limiting flange 3223 is provided on the limiting segment 3222. The limiting flange 3223 protrudes outward along the radial direction of the limiting segment 3222. The limiting flange 3223 can be fitted with the inner wall surface of the housing 31 to limit the movement stroke of the drive block 322 in the cavity 301.

[0049] Furthermore, the limiting segment 3222 can also fit and cooperate with the inner peripheral wall of the through hole 302, so that the through hole 302 can play a limiting and guiding role in the translational movement of the limiting edge in the first direction, ensuring the stability of the drive block 322 during the position adjustment process.

[0050] like Figure 3As shown, in some embodiments of this application, the clamping mechanism 2 includes a lower pressure plate 22 and an upper pressure plate 21. The lower pressure plate 22 is fixed on the mounting surface 11 and has a first limiting groove 221 that opens to the side away from the mounting surface 11. The upper pressure plate 21 is arranged opposite to the lower pressure plate 22 in the vertical direction and has a second limiting groove 211 that opens to the side of the lower pressure plate 22. The second limiting groove 211 is arranged opposite to the first limiting groove 221 and is used to limit the polysilicon body 201 respectively.

[0051] Furthermore, the drive seat 23 is fixedly connected to the lower pressure plate 22, and the drive seat 23 is used to drive the upper pressure plate 21 to move in the vertical direction to adjust the distance between the upper pressure plate 21 and the lower pressure plate 22 in the vertical direction, thereby realizing the clamping action of the clamping mechanism 2 on the polycrystalline silicon body 201.

[0052] It is understandable that during the clamping process of the polysilicon body 201 by the clamping mechanism 2, the polysilicon sample 200 can be first arranged in the first limiting groove 221 in the lower pressure plate 22 so that the polysilicon sample 200 can be supported and positioned by the lower pressure plate 22, and then the upper pressure plate 21 can be driven to move downward so that the polysilicon sample 200 can be clamped by the upper pressure plate 21, thereby clamping and fixing the polysilicon body 201.

[0053] The first limiting groove 221 and the second limiting groove 211 can limit the polycrystalline silicon body 201. The contact area between the first limiting groove 221 and the second limiting groove 211 and the polycrystalline silicon body 201 is large, which can avoid problems such as breakage due to stress concentration at the polycrystalline silicon body 201 and make the polycrystalline silicon body 201 uniformly stressed in the circumferential direction.

[0054] It should be noted that the driving method of the upper pressure plate 21 may include, but is not limited to, hydraulic drive, motor drive, etc., as long as it can realize the vertical position adjustment of the upper pressure plate 21 relative to the lower pressure plate 22.

[0055] In a further embodiment of this application, the cross-section of the first limiting groove 221 at any position in the first direction is arc-shaped, so that the shape of the first limiting groove 221 can be adapted to the shape of the polysilicon body 201, ensuring the matching effect between the first limiting groove 221 and the polysilicon body 201, and helping to improve the limiting effect of the first limiting groove 221 on the polysilicon body 201; the cross-section of the second limiting groove 211 at any position in the first direction is arc-shaped, so that the shape of the second limiting groove 211 can be adapted to the shape of the polysilicon body 201, ensuring the matching effect between the second limiting groove 211 and the polysilicon body 201, and helping to improve the limiting effect of the second limiting groove 211 on the polysilicon body 201.

[0056] like Figure 3As shown, in some embodiments of this application, a first buffer 222 is provided in the first limiting groove 221 to protect the polysilicon body 201, so as to prevent the polysilicon body 201 from breaking due to stress between it and the lower pressure plate 22, thereby improving the protection effect of the polysilicon body 201; a second buffer 212 is provided in the second limiting groove 211 to protect the polysilicon body 201, so as to prevent the polysilicon body 201 from breaking due to stress between it and the upper pressure plate 21, thereby improving the protection effect of the polysilicon body 201.

[0057] The first buffer 222 and the second buffer 212 can be constructed as polyurethane material components to achieve crystallization protection for the polycrystalline silicon body 201.

[0058] In some embodiments of this application, the mounting platform 1 is provided with a guide rail 12, which extends along a first direction, and the core-pulling mechanism 3 slides with the guide rail 12 to guide the movement of the core-pulling mechanism 3 through the guide rail 12, thereby improving the stability of the core-pulling mechanism 3 during the position adjustment process.

[0059] In some embodiments of this application, the core-pulling device 100 further includes a ring-cutting device configured to be liftable or detachable on the mounting platform 1, and the ring-cutting device is used to perform a ring-cutting operation on the polysilicon sample 200 in order to remove a small section of the polysilicon body 201 from the polysilicon sample 200, thereby exposing a portion of the metal core 202.

[0060] It should be noted that the cutting method of the circumferential cutting device is well known to those skilled in the art and is not specifically limited here.

[0061] In some embodiments of this application, the drive mechanism 4 may be configured as either a drive motor or a drive cylinder.

[0062] In some embodiments of this application, the connecting spring 3211 can be constructed as a metal spring, such as a high-strength steel sheet.

[0063] In some embodiments of this application, the metal core 202 is constructed as a tantalum wire.

[0064] According to the embodiment of this application, the core-pulling device 100 can clamp the polysilicon body 201 through the clamping mechanism 2 and clamp and fix the metal core 202 through the clamping mechanism 2, thereby driving the clamping mechanism 2 to extract the metal core 202 through the driving mechanism 4, so as to realize the core-pulling operation of the polysilicon sample 200.

[0065] In the process of driving the core-pulling mechanism 3 through the driving mechanism 4, the core-pulling mechanism 3 can be driven at a first preset speed, and then driven at a second preset speed after the metal core 202 is pulled out. For example, the first preset speed is 1 μm / s and the second preset speed is 5 mm / s.

[0066] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0067] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0068] In the description of this application, "multiple" means two or more.

[0069] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0070] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0071] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0072] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A core-pulling device, characterized in that, The core-pulling device is used for core-pulling processing of a polycrystalline silicon sample (200), the polycrystalline silicon sample (200) comprising a metal core (202) and a polycrystalline silicon body (201) covering the outer periphery of the metal core (202), the core-pulling device comprising: Mounting platform (1), the mounting platform (1) having mounting surface (11); A clamping mechanism (2) is provided on the mounting surface (11) and is used to clamp the polysilicon body (201). A core-pulling mechanism (3) is slidably disposed on the mounting surface (11) along a first direction. The core-pulling mechanism (3) and the clamping mechanism (2) are spaced apart in the first direction. The core-pulling mechanism (3) includes a housing (31) and a clamping assembly (32). The housing (31) has a cavity (301). The clamping assembly (32) is disposed in the cavity (301) and is used to clamp the metal core (202). A driving mechanism (4) is connected to the core-pulling mechanism (3) and is used to drive the core-pulling mechanism (3) to move along the first direction.

2. The core-pulling device according to claim 1, characterized in that, The housing (31) has a through hole that communicates with the cavity (301) and allows the metal core (202) to pass through. The clamping assembly (32) includes: Clamping caliper (321), the clamping caliper (321) is disposed in the cavity (301) and can selectively clamp the metal core (202). A drive block (322) is adjustablely disposed in the cavity (301) along the first direction. The drive block (322) has a guide channel (3224) that is disposed opposite to the through hole in the first direction and is used for the metal core (202) to pass through. The drive block (322) is used to drive the clamping caliper (321) to clamp the metal core (202). A drive unit (323) is fixed on the housing (31) and is used to drive the drive block (322) to move along the first direction.

3. The core-pulling device according to claim 2, characterized in that, The clamping caliper (321) includes: A connecting spring (3211) is provided, one end of which is fixed to the housing (31). A caliper body (3212) is connected to the other end of the connecting spring (3211); The caliper body (3212) is located on the circumferential outer side of the metal core (202) through which the drive block (322) passes, and the caliper body (3212) is used to drive and cooperate with the drive block (322). The caliper body (3212) can move closer to the metal core (202) under the drive of the drive block (322), and the connecting spring (3211) stores energy.

4. The core-pulling device according to claim 3, characterized in that, The clamping caliper (321) includes multiple sets of connecting springs (3211) and the caliper body (3212), which are evenly arranged on the circumferential outer side of the metal core (202).

5. The core-pulling device according to claim 3, characterized in that, The drive block (322) has a drive surface (3221) which is gradually widened toward the side away from the through hole, and the drive surface (3221) is opposite to the caliper body (3212) in the first direction; The driving surface (3221) is adapted to press against the caliper body (3212) when the driving block (322) moves away from the through hole along the first direction, and is used to drive the caliper body (3212) to move towards the metal core (202).

6. The core-pulling device according to claim 2, characterized in that, The housing (31) is provided with a shaft segment (324) extending along the first direction. The drive block (322) is provided with a rotating gear (325) at one end away from the through hole. The rotating gear (325) has an internal thread and is threadedly engaged with the shaft segment (324). The drive unit (323) is configured as a drive motor, and the output end of the drive motor is provided with a drive gear (326). The drive gear (326) meshes with the rotating gear (325), and the rotating gear (325) is adapted to drive the drive block (322) to translate along the first direction.

7. The core-pulling device according to claim 1, characterized in that, The clamping mechanism (2) includes: The lower pressure plate (22) is fixed on the mounting surface (11) and the lower pressure plate (22) has a first limiting groove (221) that opens to the side away from the mounting surface (11). An upper pressure plate (21) is arranged opposite to the lower pressure plate (22) in the vertical direction, and the upper pressure plate (21) has a second limiting groove (211) that opens to the side of the lower pressure plate (22). The second limiting groove (211) is arranged opposite to the first limiting groove (221) and is used to limit the polycrystalline silicon body (201). The drive seat is fixedly connected to the lower pressure plate (22) and is used to drive the upper pressure plate (21) to move in the vertical direction.

8. The core-pulling device according to claim 7, characterized in that, The first limiting groove (221) has an arc-shaped cross-section at any position in the first direction; The second limiting groove (211) has an arc-shaped cross-section at any position in the first direction.

9. The core-pulling device according to claim 7, characterized in that, The first limiting groove (221) is provided with a first buffer (222); And / or, the second limiting groove (211) is provided with a second buffer (212).

10. The core-pulling device according to claim 1, characterized in that, The mounting platform (1) is provided with a guide rail (12), which extends along the first direction, and the core-pulling mechanism (3) slides in cooperation with the guide rail (12).

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