A kind of detects camera piece, multi-camera detection assembly and wafer vision detection system

Abstract

The utility model discloses a kind of detection camera parts, multi-camera detection assembly and wafer vision detection system, detection camera part includes camera, lens barrel, filter wheel and objective lens sequentially arranged along Z direction, and objective lens is centrally distributed relative to lens barrel, the middle part of filter wheel has protruding drive motor, and drive motor is protruded in the side of filter wheel close to objective lens to avoid and lens barrel produce position interference. Since objective lens is distributed in the middle part of lens barrel corresponding end relative to lens barrel, and filter wheel is eccentrically arranged relative to lens barrel and objective lens, by placing filter wheel between lens barrel and objective lens, so that the diameter of lens in filter wheel can be relatively reduced, so that the diameter of filter wheel can also be reduced, and by placing the drive motor in the middle part of filter wheel in the side of filter wheel close to objective lens, so that drive motor can be as close to objective lens as possible, so that the diameter of entire filter wheel is further significantly reduced, so that the size of filter wheel is significantly reduced.

Description

Technical Field

[0001] This utility model belongs to the field of wafer inspection technology, and particularly relates to an inspection camera device, a multi-camera inspection assembly, and a wafer vision inspection system. Background Technology

[0002] During wafer inspection, each display chip on the wafer needs to be inspected individually. The standard wafer size is 8 inches (about 203 mm) and 12 inches (about 305 mm). However, the physical size of the inspection camera is relatively large, so usually only a single inspection camera can be used to complete the image inspection.

[0003] During the testing process, approximately several hundred display chips (such as...) are distributed on a 4-inch wafer. Figure 1 As shown in the image, an 8-inch wafer contains more display chips. If a single inspection camera is used for inspection, the average inspection time for each display chip exceeds 20 seconds, resulting in a complete inspection time of nearly 2 hours for a 4-inch wafer, nearly 8 hours for an 8-inch wafer, and even longer for a 12-inch wafer, leading to low overall inspection efficiency.

[0004] The main reason for the large physical size of a single inspection camera is the large size of the filter wheel. When multiple inspection cameras are brought together for inspection, interference occurs between the filter wheels of the multiple cameras, and the multiple objective lenses are relatively dispersed, making it difficult to inspect multiple chips on the wafer at the same time. Utility Model Content

[0005] To solve the above-mentioned technical problems, one of the objectives of this utility model is to provide a detection camera device with a simple structure and relatively small physical size.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: a detection camera component, comprising a camera, a lens barrel, a filter wheel, and an objective lens arranged sequentially along the Z direction, wherein the objective lens is centrally distributed relative to the lens barrel, and the filter wheel has a protruding drive motor in the middle, wherein the drive motor protrudes from the side of the filter wheel near the objective lens to avoid positional interference with the lens barrel.

[0007] The beneficial effects of the above-mentioned technical solution of this utility model are as follows: Since the objective lens is located in the middle of the corresponding end of the lens barrel, by placing the filter wheel between the lens barrel and the objective lens, the diameter of the lens inside the filter wheel can be relatively reduced, thereby further reducing the diameter of the filter wheel. By protruding the drive motor in the middle of the filter wheel from the side of the filter wheel near the objective lens, this unconventional setting, where the drive motor protrudes above the filter wheel (i.e., near the lens barrel), allows the drive motor to be as close as possible to the objective lens (avoiding positional interference with the lens barrel), thus significantly reducing the diameter of the entire filter wheel. This results in a significant reduction in the size of the filter wheel.

[0008] The above-mentioned technical solution of this utility model can be further improved as follows: Furthermore, the filter wheel edge has a near side and a far side relative to the central axis of the lens barrel, the lens barrel has four sides, wherein the second side of the lens barrel faces the far side, the first side and the second side of the lens barrel are arranged opposite to each other, and the third side and the fourth side of the lens barrel are arranged opposite to each other; Optical components are provided on the second and / or third surfaces of the lens barrel. The optical components are any one of photoelectric ranging devices, spectrometers, or light sources.

[0009] The beneficial effects of the above-mentioned further technical solution are as follows: Since the filter wheel is eccentrically distributed relative to the lens barrel, the edge of the filter wheel has a near side and a far side relative to the central axis of the lens barrel. The near side is the side of the filter wheel edge closest to the central axis of the lens barrel, and the far side is the side of the filter wheel edge furthest from the central axis of the lens barrel. The lens barrel has a first surface, a second surface, a third surface, and a fourth surface relative to the filter wheel. Given that the first surface is closest to the near side of the filter wheel, the second surface is closest to the far side of the filter wheel, and the third and fourth surfaces are centered on the edge of the filter wheel, and since the second and third surfaces have more space at the filter wheel to assemble optical components, the optical components on the lens barrel are preferentially placed on the second and third surfaces, and should be placed on the first surface as much as possible. That is, the orientation corresponding to the first surface and / or the fourth surface of the lens barrel on the detection camera component is used as the near side to be close to the other detection camera components. Thus, when there are multiple detection camera components and they are clustered together, the convergence between multiple objectives is higher.

[0010] The second objective of this invention is to provide a multi-camera inspection component with a compact structure that can simultaneously inspect wafers of 12 inches and above.

[0011] To achieve the above objectives, the technical solution of this utility model is as follows: A multi-camera detection component, characterized in that it includes multiple detection camera components, and the number of detection camera components is not less than 2; The plurality of the detection camera components are at least in a converged state; The detection camera device includes: A camera, lens barrel, filter wheel, and objective lens are arranged sequentially along the Z-axis, with the objective lens centered relative to the lens barrel. The filter wheel has a protruding drive motor in the middle, and the drive motor protrudes from the side of the filter wheel closest to the objective lens to avoid positional interference with the lens barrel.

[0012] The beneficial effects of the above-mentioned technical solution of this utility model are as follows: by setting the position of the filter wheel drive motor, the size of a single inspection camera is made as small as possible. When multiple inspection camera components are in a convergent state, the distance between multiple camera lenses can be significantly reduced, thereby making the structure more compact and facilitating the simultaneous inspection of multiple chips on the wafer.

[0013] To achieve the above objectives, the technical solution of this utility model is as follows: The filter wheel edge has a near side and a far side relative to the central axis of the lens barrel. The lens barrel has four sides, wherein the second side of the lens barrel faces the far side, the first and second sides of the lens barrel are arranged opposite to each other, and the third and fourth sides of the lens barrel are arranged opposite to each other. Optical components are provided on the second and / or third surfaces of the lens barrel. The optical components are any one of photoelectric ranging devices, spectrometers, or light sources. The beneficial effects of the above-mentioned technical solution of this utility model are as follows: by setting at least two detection camera components, and when these detection camera components are converged, the optical components on each detection camera component avoid the adjacent detection camera component, so that when these detection camera components are converged, the convergence degree between multiple objective lenses is higher, thereby enabling simultaneous detection of wafers of 12 inches and above.

[0014] The above-mentioned technical solution of this utility model can be further improved as follows: Furthermore, in any two adjacent detection camera devices, the side of each lens barrel closest to the other lens barrel is designated as the first surface or the fourth surface.

[0015] The beneficial effect of the above-mentioned further technical solution is that when the first and fourth surfaces of each detection camera are close to the two adjacent detection camera components, the convergence of the multiple objectives is higher when the entire multi-camera detection assembly is converged.

[0016] Furthermore, the detection camera has two components, and when the two detection camera components are in a converged state, the two lens barrels are arranged side by side, and the first surfaces of the two lens barrels are close to each other.

[0017] The beneficial effect of the above further technical solution is: this minimizes the spacing between the two objective lenses when the two detection camera components are gathered.

[0018] Further, there are three detection camera components; When the three detection camera components are in a gathered state in an "L" shape, the first surface and the fourth surface of the lens barrel at the corner are respectively close to the first surfaces of the other two lens barrels; Alternatively, when the three detection camera components are in a gathered state in a triangular shape, the first surfaces of the three detection camera components are close to each other.

[0019] The beneficial effect of the above further technical solution is: this enables the gathering degree among the three objective lenses to be optimal when the three detection camera components are gathered, no matter they are distributed in an "L" shape or a triangular shape.

[0020] Further, when there are four detection camera components and the four detection camera components are in a gathered state, the four detection camera components are arranged in a grid shape, and the first surface or the fourth surface of two adjacent lens barrels are close to each other.

[0021] The beneficial effect of the above further technical solution is: this enables the gathering degree among the four objective lenses to be optimal when the four detection camera components are gathered.

[0022] Further, it also comprises a moving assembly, a plurality of said detection camera components are all arranged at the driving end of said moving assembly, and said moving assembly is used for driving the plurality of detection camera components to switch to a spread state or a gathered state.

[0023] The beneficial effect of the above further technical solution is: this enables the plurality of detection camera components to gather or spread under the driving of the moving assembly, the plurality of detection camera components can detect the wafer simultaneously when gathered, and facilitates the loading and unloading operation of the wafer when spread.

[0024] Further, two detection camera components are provided, the moving assembly comprises a moving unit, two said detection camera components are arranged at the driving end of said moving unit, and said moving unit is used for driving the two detection camera components to move synchronously or independently in at least one direction among the X direction, Y direction and Z direction.

[0025] The beneficial effect of the above further technical solution is: this enables when there are two detection camera components, both of them can be arranged on one moving unit, so that the moving unit drives the two detection camera components to move synchronously or independently; if the two detection camera components move synchronously, they are always in a gathered state and there is no spread state.

[0026] Furthermore, the detection camera is provided with 2-4 units, and the moving assembly includes two moving units. The two moving units are distributed at intervals along the Y direction. Each moving unit is provided with one or two detection camera units at its driving end. Each moving unit is used to drive up to two detection camera units on it to move synchronously or independently along at least one of the X, Y and Z directions.

[0027] The beneficial effect of the above-mentioned further technical solution is that by setting two moving units, each of which is equipped with at least one and at most two detection cameras, the moving unit with two detection cameras can drive the two detection cameras on it to move synchronously or independently, thus making the movement of multiple detection cameras more flexible.

[0028] Furthermore, the moving unit includes a linear drive and a moving member. The linear drive is arranged along the X direction, and the moving member is disposed at the driving end of the linear drive. The driving end of the moving member constitutes the driving end of the moving unit. The linear drive is used to drive the moving member thereon to move along the X direction, and the moving member is used to drive the detection camera thereon to move along the Y and / or Z directions.

[0029] The beneficial effect of the above-mentioned further technical solution is that it simplifies the structure of the entire mobile unit and provides excellent mobility.

[0030] Furthermore, the moving component is a single-axis slide or a two-dimensional dual-axis slide; and / or the linear drive component is a single-acting or dual-acting linear motor or linear screw module.

[0031] The beneficial effects of the above-mentioned further technical solution are: its structure is simple, and when the linear drive has a double mover, two moving parts can be set on it as needed. At this time, only one detection camera is set at the drive end of each moving part.

[0032] Furthermore, the multi-camera inspection component is used for wafer inspection.

[0033] The third objective of this invention is to provide a compact wafer vision inspection system that can simultaneously and efficiently inspect wafers of 12 inches and above using multiple inspection cameras.

[0034] To achieve the above objectives, the technical solution of this utility model is as follows: a wafer vision inspection system, including the multi-camera inspection component as described above.

[0035] The beneficial effects of the above-mentioned technical solution of this utility model are as follows: after optimizing the size of the structure of a single inspection camera, the arrangement of multiple inspection camera components when they are brought together is optimized, so that the convergence degree of multiple objective lenses of multiple inspection camera components is better when they are brought together. Thus, up to four inspection camera components can be used to inspect wafers of 12 inches and above simultaneously, thereby significantly improving the inspection efficiency. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the structure of a detection camera in the prior art; Figure 2 This is a schematic diagram of the optical path during the detection of a camera device in the prior art; Figure 3 This is a front view of the objective lens end of a detection camera component in the prior art; Figure 4 This is a front view of a filter wheel in the prior art; Figure 5 This is a front view of the eyeglass frame, filter, and drive motor in the prior art; Figure 6 This is a schematic diagram of a filter wheel positioned between the lens barrel and the objective lens in the prior art. Figure 7 This is an elevation view of the detection camera component in an embodiment of this utility model; Figure 8 This is a side view of the detection camera component in an embodiment of the present invention; Figure 9 This is a schematic diagram of the optical path of the detection camera in an embodiment of this utility model; Figure 10 This is a front view of the objective lens end of the detection camera component in this embodiment of the present invention; Figure 11 This is one of the schematic diagrams showing the two detection camera components converging in an embodiment of this utility model; Figure 12 This is the second schematic diagram of the two detection camera components converging in an embodiment of this utility model; Figure 13 This is one of the schematic diagrams showing the three detection camera components converging in an embodiment of this utility model; Figure 14 This is the second schematic diagram of the three detection camera components converging in an embodiment of this utility model; Figure 15 This is a schematic diagram of the four detection camera components when they converge in an embodiment of this utility model; Figure 16 This is a schematic diagram showing the distribution of the four detection camera components relative to the wafer when they are brought together in an embodiment of this utility model; Figure 17This is a schematic diagram of two detection camera components matching one moving unit in an embodiment of the present invention; Figure 18 This is a schematic diagram of two detection camera components matching two moving units in an embodiment of the present invention; Figure 19 This is a schematic diagram of three detection camera components matching two moving units in an embodiment of the present invention; Figure 20 This is a schematic diagram of four detection cameras matching two moving units in an embodiment of the present invention; Figure 21 This is a schematic diagram of one of the two moving units in this embodiment of the present invention, wherein the linear drive is a double mover and the two moving units are matched.

[0037] In the diagram: 1. Detection camera component; 11. Camera; 12. Lens barrel; 121. Tube lens; 122. Flared section; 13. Filter wheel; 131. Drive motor; 132. Light passage; 133. Frame; 134. Filter; 14. Objective lens; 15. Optical components; 16. Beam splitter; 2. Moving assembly; 21. Moving unit; 211. Linear drive component; 212. Moving component; 3. Wafer; 31. Display chip. Detailed Implementation

[0038] Introduction to existing technologies: like Figures 1-3 As shown, the detection camera 1 in the prior art mainly includes a camera 11, a filter wheel 13, a lens barrel 12 and an objective lens 14 arranged sequentially along the Z direction. The camera 11, lens barrel 12 and objective lens 14 are all coaxially distributed, while the filter wheel 13 is eccentrically distributed relative to the camera 11 and lens barrel 12 (mainly because the light-transmitting hole 132 on the filter wheel 13 is eccentrically distributed). The light-transmitting hole 132 is coaxially distributed with the camera 11 and lens barrel 12.

[0039] like Figure 4 and Figure 5 As shown, the filter wheel 13 has the following structure: a light-transmitting hole 132 is provided at the edge of the filter wheel 13, and a coaxially distributed protruding drive motor 131 is provided in the middle of the filter wheel 13. The drive motor 131 is used to drive the lens frame 133 inside the filter wheel 13 to rotate so as to switch the filter 134 to align with the light-transmitting hole 132.

[0040] Figure 5 The dotted circle in the middle represents the circular outline at the edge of the frame 133.

[0041] like Figure 1 and Figure 2As shown, the imaging beam diverges and then converges onto the image sensor of the camera 11 under the action of the inner barrel mirror 121 of the lens barrel 12. In the prior art, the filter wheel 13 is located between the lens barrel 12 and the camera 11. This results in the imaging beam having a larger cross-sectional size at the end of the lens barrel 12 closest to the camera 11 (i.e., the light-emitting end of the lens barrel 12). Therefore, the upper end of the lens barrel 12 is widened to form a widened section 122. Since the size of the camera 11 itself is not small, the single filter 134 must have a large size to allow the imaging beam to pass through completely. As the size of the filter 134 increases, and in order to avoid interference between the drive motor 131 and the lens barrel 12 or the camera 11, the size of the frame 133 must be increased (larger diameter). This results in the entire detection camera 1 having a large projection surface in the plane formed by the X and Y directions. The edge of the projection surface is the edge of the filter wheel 13. Therefore, the size of the filter wheel 13 determines the physical size of the detection camera 1.

[0042] The tube lens 121 inside the tube lens 12 is existing technology and will not be described in detail here.

[0043] The physical size of the detection camera 1 can be considered as its projected area in the plane formed by the X and Y directions.

[0044] In the existing technology, it is precisely because the physical size of the inspection camera 1 is large that even when two inspection camera 1s are placed side by side, the two objective lenses 14 can only be vertically aligned with the 12-inch wafer 3, and thus only a single inspection camera 1 can perform inspection work on the 12-inch wafer 3.

[0045] like Figures 1-3 As shown, in the prior art, since there is sufficient clearance between the edge of the filter wheel 13 and the outer edge of the lens barrel 12, when the optical component 15 needs to be added outside the lens barrel 12 on the detection camera component 1, the optical component 15 can be flexibly arranged, and the impact on the physical size of the detection camera component 1 is not significant (the projection surfaces of the optical component 15 in the X and Y directions can be covered by the projection surfaces of the filter wheel 13).

[0046] like Figure 6As shown, in the prior art, the filter wheel 13 is also placed between the lens barrel 12 and the objective lens 14. While reducing the size of the filter 134, the size of the lens frame 133 is also reduced, and thus the size of the filter wheel 13 is ultimately reduced, thereby achieving the purpose of reducing the physical size of the inspection camera 1. However, the drive motor 131 on the filter wheel 13 is protruding on the side close to the lens barrel 12. At this time, the drive motor 131 and the lens barrel 12 will interfere, thus limiting the reduction of the size of the lens frame 133, and consequently limiting the reduction of the physical size of the inspection camera 1. Even if the drive motor 131 is in contact with the lens barrel, it is still difficult to meet the need for four inspection cameras 1 to simultaneously inspect a 12-inch wafer.

[0047] This application makes further improvements and optimizations based on the aforementioned prior art, the specific contents of which are as follows: like Figure 7 and Figure 9 As shown, this application provides a detection camera device 1, including a camera 11, a lens barrel 12, a filter wheel 13 and an objective lens 14 arranged sequentially along the Z direction, wherein the objective lens 14 is centrally distributed relative to the lens barrel 12, and the filter wheel 13 has a protruding drive motor 131 in the middle, and the drive motor 131 protrudes from the side of the filter wheel 13 near the objective lens 14 to avoid positional interference with the lens barrel 12. Since the objective lens 14 is located in the middle of the corresponding end of the lens barrel 12, and the filter wheel 13 is eccentrically positioned relative to the lens barrel 12 and the objective lens 14, by placing the filter wheel 13 between the lens barrel 12 and the objective lens 14, the diameter of the lens inside the filter wheel 13 can be relatively reduced, thereby reducing the diameter of the filter wheel 13. Furthermore, by placing the drive motor 131 in the middle of the filter wheel 13 on the side of the filter wheel 13 closer to the objective lens 14, the drive motor 131 can be as close to the objective lens 14 as possible (avoiding positional interference with the lens barrel 12), thereby further significantly reducing the diameter of the entire filter wheel 13 (i.e., significantly reducing the size of the filter wheel 13).

[0048] like Figure 7 and Figure 9 As shown, in this embodiment, there are two operations to reduce the size of the filter wheel 13, as detailed below: One approach is to modify the filter wheel 13 to be located between the lens barrel 12 and the objective lens 14. Since the cross-sectional size of the imaging beam at the light-inlet end of the lens barrel 12 (that is, the end of the lens barrel 12 close to the objective lens 14) is significantly smaller than its cross-sectional size at the light-outlet end, the filter wheel 13 is modified to be located between the lens barrel 12 and the objective lens 14. This allows the use of a smaller diameter filter 134, thereby reducing the diameter of the frame 133 to a certain extent. Secondly, the drive motor 131 is positioned on the side of the filter wheel 13 close to the objective lens 14. This allows the drive motor 131 to be positioned close to the objective lens 14, thereby reducing the distance between the drive motor 131 and the objective lens 14 (without any interference from the lens barrel 12). This further reduces the diameter of the lens frame 133, resulting in a significant reduction in the overall size of the filter wheel 13 compared to existing technologies.

[0049] Since the size of the end face of the lens barrel 12 is larger than the size of the end face of the objective lens 14, if the drive motor 131 is located on the side closer to the lens barrel 12, the minimum diameter of the frame 133 must be such that the drive motor 131 fits into the lens barrel 12. However, if the drive motor 131 is located on the side closer to the objective lens 14, the minimum diameter of the frame 133 only needs to fit into the objective lens 14 (it can be seen that the diameter of the frame 133 corresponding to the latter is smaller).

[0050] The above optimizations are all relative to the existing technology without changing the size of the camera 11, lens barrel 12 and objective lens 14. It is the superposition of the above two operations that makes the physical size of the detection camera 1 in this embodiment significantly smaller than that of the existing technology. In the existing technology, the side length or diameter of the filter wheel 13 is 210mm, while in this embodiment, the side length or diameter of the filter wheel 13 is reduced to 144mm (the reduction exceeds 30%).

[0051] like Figure 10 As shown, in one embodiment of this application, the filter wheel 13 has a near-distance side and a far-distance side relative to the lens barrel 12. The first surface of the lens barrel 12 is close to the near-distance side, and the second surface of the lens barrel 12 is close to the far-distance side. The first surface and the second surface of the lens barrel 12 are arranged opposite to each other, and the third surface and the fourth surface of the lens barrel 12 are arranged opposite to each other. In this embodiment, if an optical component 15 needs to be added to the outer periphery of the lens barrel 12, the optical component 15 is preferably arranged on the second surface and / or the third surface of the lens barrel 12. The optical component 15 is any one of a photoelectric ranging device, a spectrometer, or a light source. It should be noted that if both the second surface and the third surface of the lens barrel 12 are provided with optical components 15, then the second surface and the third surface can be provided with different optical components. For example, the second surface is provided with a spectrometer, and the third surface is provided with a photoelectric ranging device, such as a laser rangefinder.

[0052] In this embodiment, when the lens barrel 12 is equipped with an optical component 15, a beam splitter 16 needs to be matched at the corresponding position inside the lens barrel 12. The beam splitter 16 is a dichroic mirror or a semi-transparent mirror. Taking the optical component 15 as an example, the photoelectric ranging device is used to emit a ranging beam into the lens barrel. The ranging beam is coaxially reflected by the corresponding beam splitter 16 (at this time, the beam splitter 16 is a dichroic mirror or a semi-transparent mirror. When the beam splitter 16 is a dichroic mirror, it has a transmission effect on the imaging beam and a reflection effect on the ranging beam) and then directed to the surface of the wafer 3 through the objective lens 14. The beam is then reflected back to the photoelectric ranging device by the wafer 3, thus obtaining the distance between the surface of the wafer 3 and the lens barrel 12.

[0053] Of course, when the optical component 15 is a spectrometer, the corresponding beam splitter 16 is a semi-transparent and semi-reflective mirror, which is used to split the light beam passing through it inside the lens barrel 12 into two parts, one part of which is transmitted to the camera 11, and the other part is reflected to the spectrometer outside the lens barrel 12.

[0054] The optical component 15 described in this embodiment is existing technology and will not be elaborated here.

[0055] In one embodiment of this application, the filter wheel and the first, second, third, and fourth surfaces of the lens barrel 12 are respectively oriented as side A, side B, side C, and side D (corresponding to A, B, C, and D in the accompanying drawings). Side A of the filter wheel is closest to the central axis of the objective lens / lens barrel, and is the near-distance side of the filter wheel. Side B is farthest from the central axis of the objective lens / lens barrel, and is the far-distance side of the filter wheel. Sides C and D are equidistant from the center of the objective lens / lens barrel. See again. Figure 7 The right side of the lens barrel 12 is the second side, facing the B side of the filter wheel, which is the far side; while the left side of the lens barrel 12 is the first side opposite to the second side, close to the A side of the filter wheel, which is the near side; the back of the lens barrel 12 is the third side, facing the C side of the filter wheel, and the front is the fourth side, facing the D side of the filter wheel.

[0056] In one embodiment of this application, the optical component 15 is preferably disposed on the second surface, and secondarily on the third or fourth surface. Similarly, the orientation corresponding to the first surface of the lens barrel 12 on the detection camera component 1 is preferentially used as the proximity side to approach the other detection camera components 1, and secondly, the orientation corresponding to the third or fourth surface of the lens barrel 12 on the detection camera component 1 where no optical component is disposed is selected as the proximity side to approach the other detection camera components 1. The orientation corresponding to the second surface of the lens barrel 12 on the detection camera component 1 is not used as the proximity side to approach the other detection camera components 1. This results in a higher degree of convergence among the multiple objective lenses 14 when there are multiple detection camera components 1 that are clustered together.

[0057] For ease of understanding, in one embodiment of this application, the second and / or third surfaces of the lens barrel 12 are preferably used to set the optical components, while the orientation corresponding to the first and / or fourth surfaces of the lens barrel 12 on the detection camera 1 is preferably taken as the near side.

[0058] In one embodiment of this application, the optical components are disposed on the lens barrel 12 in a manner that is prior art.

[0059] Since both the camera 11 and the optical component 15 have certain dimensions, in this embodiment, by reducing the size of the filter wheel 13, it may cause the boundaries of the camera 11 and the optical component 15 to protrude beyond the boundary of the filter wheel 13 in the orthogonal projection plane of the entire detection camera 1 in the X or Y direction. Since the optical component 15 is not on the near side, the effect of it protruding beyond the boundary of the filter wheel 13 in the projection plane can be ignored. When the camera 11 is assembled at the upper end of the lens barrel 12, its second surface must face the B side, and the back side of the second surface, the first surface, is close to the A side.

[0060] like Figure 10 As shown, in one embodiment of this application, the distances from the edge of the filter wheel 13 at the four directions AD to the center of the light-transmitting hole 132 are L1, L2, L3 and L4, respectively, where L1 < L3 = L4 < L2. If the position of the camera 11 corresponding to side A protrudes outside the filter wheel 13, the distance from that side of the camera 11 to the center of the light-transmitting hole 132 is L5, where L1 < L5 < L3 is preferred.

[0061] like Figure 4 As shown, in one embodiment of this application, the filter wheel 13 can be circular or approximately square (with rounded corners at the four corners). Figure 4 The dashed circle in the middle represents the boundary outline when the filter wheel 13 is circular.

[0062] like Figures 11-15As shown, another aspect of the present application provides a multi-camera detection assembly, which includes a plurality of detection camera members 1 described in Embodiment 1, and the number of the detection camera members 1 is not less than 2; the plurality of detection camera members 1 have at least a gathered state; and when the plurality of detection camera members 1 are in the gathered state, the optical assembly 15 is not located between any two adjacent detection camera members 1. By arranging 2 to 4 detection camera members 1, and when these detection camera members 1 are gathered, the optical assembly 15 on each detection camera member 1 avoids the adjacent detection camera members, so that when these detection camera members 1 are gathered, the gathering degree among the plurality of objective lenses 14 is higher, and thus the display chips 31 on a 12-inch wafer 3 can be detected at the same time. Specifically, among any two adjacent detection camera members 1, a side of each lens barrel 12 close to the other lens barrel 12 is a first surface or a fourth surface.

[0063] Of course, for a 12-inch wafer, the number of the detection camera members in this embodiment is preferably 2 to 4. Meanwhile, since the number of the detection camera members 1 is only 2 to 4, the distribution pattern thereof is limited. When at most the first surface and the fourth surface of each detection camera member 1 are close to two adjacent detection camera members, the gathering degree of the plurality of objective lenses 14 can be higher when the entire multi-camera detection assembly is gathered.

[0064] As Figure 11 and Figure 12 shown, in an embodiment of the present application, when there are two detection camera members 1, and the two detection camera members 1 are in the gathered state, the two lens barrels 12 are distributed side by side, and the first surfaces of the two lens barrels 12 are close to each other. This minimizes the spacing between the two objective lenses 14 when the two detection camera members 1 are gathered.

[0065] As Figure 13 shown, in an embodiment of the present application, when there are three detection camera members 1; when the three detection camera members 1 are in an L-shaped distribution in the gathered state, the first surface and the fourth surface of the lens barrel 12 at the corner are respectively close to the first surfaces of the other two lens barrels; as Figure 14 shown, or when the three detection camera members 1 are in a triangular distribution in the gathered state, the first surfaces of the three detection camera members 1 are close to each other. In this way, whether the three detection camera members 1 are distributed in an L-shape or a triangular shape when gathered, the gathering degree among the three objective lenses 14 is optimal.

[0066] As Figure 15As shown, in one embodiment of this application, when there are four detection camera elements 1, and the four detection camera elements 1 are in a convergent state, the four detection camera elements 1 form a "field" shape, and the first or fourth surfaces of two adjacent lens barrels 12 are close to each other. This ensures that the convergence degree between the four objective lenses 14 is optimal when the four detection camera elements 1 are converged.

[0067] like Figure 16 As shown, when the four inspection camera components 1 are in the converged state, all four objective lenses 14 can be vertically aligned with the central region of the 12-inch wafer 3.

[0068] like Figures 17-21 As shown, a third aspect of this application provides a multi-camera inspection assembly with a moving assembly 2, based on the above description. Multiple inspection cameras 1 are disposed at the driving end of the moving assembly 2, which drives the multiple inspection cameras 1 to switch between a dispersed state and a converged state. This allows the multiple inspection cameras 1 to converge or disperse under the drive of the moving assembly 2. When converged, the multiple inspection cameras 1 can simultaneously inspect the wafer 3, while when dispersed, it facilitates the loading and unloading of the wafer 3.

[0069] like Figure 17 As shown, in one embodiment of this application, two detection camera devices 1 are provided, and the moving assembly 2 includes a moving unit 21. The driving end of the moving unit 21 is provided with two detection camera devices 1. The moving unit 21 is used to drive the two detection camera devices 1 to move synchronously or independently along at least one of the X, Y, and Z directions. In this way, when there are two detection camera devices 1, they can both be provided on one moving unit 21, so that the moving unit 21 can drive the two detection camera devices 1 to move synchronously or independently. If the two detection camera devices 1 move synchronously, they are always in a converged state and there is no dispersed state.

[0070] in, Figures 12-15 The dashed line indicates that the detection camera 1 on both sides is respectively set on different moving units 21.

[0071] like Figures 18-21As shown, in one embodiment of this application, 2-4 detection cameras 1 are provided, and the moving assembly 2 includes two moving units 21. The two moving units 21 are spaced apart along the Y direction. Each moving unit 21 has one or two detection cameras 1 at its driving end. Each moving unit 21 is used to drive up to two detection cameras 1 thereon to move synchronously or independently along at least one of the X, Y, and Z directions. By providing two moving units 21, each moving unit 21 can provide at least one and at most two detection cameras 1. The moving unit 21 with two detection cameras 1 can drive the two detection cameras 1 thereon to move synchronously or independently, thus making the movement of multiple detection cameras 1 more flexible.

[0072] like Figures 17-21 As shown, in one embodiment of this application, the moving unit 21 includes a linear drive member 211 and a moving member 212. The linear drive member 211 is disposed along the X-direction, and the moving member 212 is disposed at the driving end of the linear drive member 211. The driving end of the moving member 212 constitutes the driving end of the moving unit 21. The linear drive member 211 drives the moving member 212 thereon to move along the X-direction, and the moving member 212 drives the detection camera member 1 thereon to move along the Y-direction and / or Z-direction. This makes the structure of the entire moving unit 21 simple and provides excellent mobility.

[0073] In one embodiment of this application, the moving part 212 is a single-axis slide or a two-dimensional dual-axis slide; and / or the linear drive 211 is a single-acting or dual-acting linear motor or linear screw module. Its structure is simple, and when the linear drive 211 has dual actins, two moving parts 212 can be considered to be set on it as needed. In this case, only one detection camera 1 is set at the drive end of each moving part 212.

[0074] In one embodiment of this application, when there are two linear drive units 211, both linear drive units 211 can be single-acting linear motors or linear screw modules, or both can be double-acting linear motors or linear screw modules, or there can be one single-acting linear motor and one double-acting linear motor.

[0075] In summary, the preferred option is, such as Figures 17-21 As shown, when the moving unit 21 has two detection camera components 1, the two detection camera components 1 on the moving unit 21 will bring the first surfaces of the lens barrel 12 closer to each other when they are brought together. When the moving unit 21 has only one detection camera component 1, the detection camera component 1 on the moving unit 21 will bring the first surface of the lens barrel 12 closer to the first or fourth surface of the other lens barrel 12 when it is brought together.

[0076] In one embodiment of the present application, as Figures 17-21 illustrated, each moving member 212 may be provided with one detection camera 1, or may be provided with two detection cameras 1, and the number of the moving members 212 is not greater than the number of the detection cameras 1.

[0077] As Figure 21 illustrated, when the linear driving member 211 has double sliders, one moving member 212 is disposed at each driving end thereof, and only one detection camera 1 is disposed on each moving member 212.

[0078] As Figures 17-20 illustrated, when the linear driving member 211 has a single slider, one moving member 212 can be disposed at the driving end thereof, and one or two detection cameras 1 can be disposed on the moving member 212 at this time; alternatively, two moving members 212 can also be disposed at the driving end thereof, and one detection camera 1 is disposed on each moving member 212 at this time.

[0079] As Figure 16 illustrated, when the multi-camera detection assembly performs visual inspection on a wafer 3, the wafer 3 is placed flat in a plane formed by an X direction and a Y direction, and when the plurality of detection cameras 1 are in a gathered state, they are spaced apart from the wafer 3 along the Z direction; when the multi-camera detection assembly is in a spread state, the plurality of detection cameras 1 all avoid the wafer 3.

[0080] As Figure 19 and Figure 21 illustrated, in this embodiment, the positional relationship of the plurality of detection cameras 1 in the gathered state is not fixed, and at this time, the detection cameras 1 on different moving members 212 can move independently to perform visual inspection on the display chips 31 respectively according to preset trajectories. For example, when there are three detection cameras 1 in this embodiment, the three detection cameras 1 distributed in an "L" shape or a "triangular" shape can be two temporary states of the three detection cameras 1 in the gathered state.

[0081] Calculated based on a 12-inch wafer, the detection duration using a single detection camera 1 is T, while the detection duration using two detection cameras 1 is 0.6003T, and the detection duration using four detection cameras 1 is 0.3079T.

[0082] A fourth aspect of the present application provides a wafer visual inspection system, comprising the multi-camera detection assembly as described above. After optimizing the size of the structure of a single detection camera 1, and then optimizing the arrangement mode of a plurality of detection cameras 1 when gathered, the gathering degree of a plurality of objective lenses 14 when the plurality of detection cameras 1 are gathered is overall optimized, so that up to four detection cameras 1 can synchronously detect a wafer 3 of 12 inches or larger, thereby significantly improving the detection efficiency.

[0083] In this embodiment, all other aspects not described in detail regarding the wafer vision inspection system can be considered as prior art.

[0084] In this embodiment, the on-wafer display chip 31 is lit up during detection, and the light emitted by each display chip 31 serves as the light source for visual detection.

Claims

1. A detection camera component, characterized in that, The system includes a camera (11), a lens barrel (12), a filter wheel (13), and an objective lens (14) arranged sequentially along the Z direction. The objective lens (14) is centered relative to the lens barrel (12). The filter wheel (13) has a protruding drive motor (131) in the middle, and the drive motor (131) protrudes from the side of the filter wheel (13) near the objective lens (14) to avoid positional interference with the lens barrel (12).

2. The detection camera device according to claim 1, characterized in that... The filter wheel (13) has a near side and a far side relative to the central axis of the lens barrel (12). The lens barrel (12) has four sides, wherein the second side of the lens barrel (12) faces the far side, the first side and the second side of the lens barrel (12) are arranged opposite to each other, and the third side and the fourth side of the lens barrel (12) are arranged opposite to each other. An optical component (15) is provided on the second and / or third surface of the lens tube (12), and the optical component (15) is any one of a photoelectric ranging device, a spectrometer or a light source.

3. A multi-camera detection component, characterized in that, It includes multiple detection camera components (1), and the number of detection camera components (1) is not less than 2; The plurality of the detection camera components (1) are at least in a convergent state; The detection camera device (1) includes: A camera (11), a lens barrel (12), a filter wheel (13), and an objective lens (14) are arranged sequentially along the Z direction. The objective lens (14) is centered relative to the lens barrel (12). The filter wheel (13) has a protruding drive motor (131) in the middle. The drive motor (131) protrudes from the side of the filter wheel (13) near the objective lens (14) to avoid positional interference with the lens barrel (12).

4. The multi-camera detection component according to claim 3, characterized in that, The filter wheel (13) has a near side and a far side relative to the central axis of the lens barrel (12). The lens barrel (12) has four sides, wherein the second side of the lens barrel (12) faces the far side, the first side and the second side of the lens barrel (12) are arranged opposite to each other, and the third side and the fourth side of the lens barrel (12) are arranged opposite to each other. An optical component (15) is provided on the second and / or third surface of the lens tube (12), and the optical component (15) is any one of a photoelectric ranging device, a spectrometer or a light source; When multiple detection camera devices (1) are in a converged state, the optical component (15) is not located between any two adjacent detection camera devices (1).

5. The multi-camera detection component according to claim 4, characterized in that, The side of each of the lens tubes (12) in any two adjacent detection camera components (1) that is closer to the other lens tube (12) is the first surface or the fourth surface.

6. The multi-camera detection component according to claim 5, characterized in that, The detection camera (1) has two components, and when the two detection camera components (1) are in a converged state, the two lens tubes (12) are arranged side by side, and the first surfaces of the two lens tubes (12) are close to each other.

7. The multi-camera detection component according to claim 5, characterized in that, The detection camera (1) has three; When the three detection camera components (1) are in an "L" shape in a converged state, the first and fourth surfaces of the lens tube (12) at the corner are close to the first surfaces of the other two lens tubes (12); Alternatively, when the three detection camera members (1) are in a gathered state in a "pin-shaped" arrangement, the first surfaces of the three detection camera members (1) are close to each other.

8. The multi-camera detection component according to claim 5, characterized in that, When there are four detection camera members (1), and the four detection camera members (1) are in the gathered state, the four detection camera members (1) are arranged in a "field-shaped" configuration, and the first surfaces or the fourth surfaces of every two adjacent lens barrels (12) are close to each other.

9. The multi-camera detection component according to claim 4, characterized in that, It further comprises a moving assembly (2), a plurality of the detection camera members (1) are all arranged at the driving end of the moving assembly (2), and the moving assembly (2) is used for driving the plurality of detection camera members (1) to switch to a spread state or a gathered state.

10. The multi-camera detection component according to claim 9, characterized in that, Two detection camera members (1) are provided, the moving assembly (2) comprises one moving unit (21), two detection camera members (1) are arranged at the driving end of the moving unit (21), and the moving unit (21) is used for driving the two detection camera members (1) to move synchronously or independently along at least one of the X direction, the Y direction and the Z direction.

11. The multi-camera detection component according to claim 9, characterized in that, 2 to 4 detection camera members (1) are provided, the moving assembly (2) comprises two moving units (21), the two moving units (21) are distributed at intervals along the Y direction, one or two detection camera members (1) are arranged at the driving end of each moving unit (21), and each moving unit (21) is used for driving at most two detection camera members (1) thereon to move synchronously or independently along at least one of the X direction, the Y direction and the Z direction.

12. The multi-camera detection assembly according to claim 11, characterized in that, The moving unit (21) comprises a linear driving member (211) and a moving member (212), the linear driving member (211) is arranged along the X direction, the moving member (212) is arranged at the driving end of the linear driving member (211), the driving end of the moving member (212) constitutes the driving end of the moving unit (21), the linear driving member (211) is used for driving the moving member (212) thereon to move along the X direction, and the moving member (212) is used for driving the detection camera member (1) thereon to move along the Y direction and / or Z direction.

13. The multi-camera detection component according to claim 12, characterized in that, The moving member (212) is a single-axis sliding table or a two-dimensional double-axis sliding table; and / or the linear driving member (211) is a linear motor with a single mover or double movers or a linear screw module.

14. The multi-camera detection component according to claim 3, characterized in that, The multi-camera detection assembly is used for wafer detection.

15. A wafer vision inspection system, characterized in that, It comprises the multi-camera detection assembly according to any one of claims 3 to 14.

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