A probe apparatus for semiconductor testing

Abstract

This utility model discloses a probe device for semiconductor testing, belonging to the technical field of test probe devices. It includes a test probe, a handle shell fixedly connected to the outer end of the test probe, a pair of pressing grooves on the outer end of the handle shell, a pressing block slidably connected within the pressing grooves, a circular groove on the lower end of the handle shell communicating with the pressing grooves, a protective shell slidably connected within the circular groove, and an iron block fixedly connected to the end of the protective shell near the pressing block. A magnet corresponding to the iron block is embedded in the end of the pressing block near the protective shell. This device, through the annular seal formed by the protective shell and silicone sheet, effectively isolates the probe from external foreign objects and dust when the device is idle, reducing test errors caused by contamination. Simultaneously, the protective shell falls rapidly under the action of gravity and the elastic force of the first spring, directly buffering the impact in case of accidental drop or collision, preventing damage to the probe tip from direct impact and significantly extending the probe's service life.

Description

Technical Field

[0001] This utility model relates to the field of test probe equipment technology, and more specifically, to a probe equipment for semiconductor testing. Background Technology

[0002] Probe equipment for semiconductor testing is a core tool for wafer-level testing and post-packaging testing. Its function is to enable electrical signal transmission and performance verification by contacting chip pins with high-precision probes.

[0003] Chinese Patent Announcement No. CN221595083U discloses a probe for testing semiconductor equipment components. This patent connects the probe to the semiconductor performance testing equipment via a wire, and then places the probe on the pin of the electronic component to achieve an electrical connection between the equipment and the electronic component, thereby enabling the measurement and tracking of the performance parameters of the electronic component. It is applicable to the pins of components with different packaging forms, has strong adaptability, simple structure, low manufacturing cost, and short manufacturing cycle, and can be manually operated, making it convenient to use.

[0004] However, if the probe in the aforementioned patent is not placed properly or falls from your hand to the ground during use, it may be damaged. Utility Model Content

[0005] 1. Technical problems to be solved

[0006] To address the problems existing in the prior art, the purpose of this utility model is to provide a probe device for semiconductor testing. It can effectively isolate the probe from external foreign objects and dust when the device is idle by using a protective shell and a silicone sheet in a ring-shaped seal, thereby reducing test errors caused by contamination. At the same time, the protective shell falls quickly under the action of gravity and the elastic force of the first spring, which can directly buffer the impact when the device is accidentally dropped or collided, preventing the probe tip from being damaged by direct impact and greatly extending the service life of the probe.

[0007] 2. Technical Solution

[0008] To solve the above problems, the present invention adopts the following technical solution.

[0009] A probe device for semiconductor testing includes a test probe. A handle shell is fixedly connected to the outer end of the test probe. A pair of pressing grooves are formed on the outer end of the handle shell. A pressing block is slidably connected in the pressing groove. A circular groove is formed at the lower end of the handle shell and is connected to the pressing groove. A protective shell is slidably connected in the circular groove. An iron block is fixedly connected to the end of the protective shell near the pressing block. A magnet corresponding to the iron block is embedded in the end of the pressing block near the protective shell. By pressing the pair of pressing blocks, they slide into the pressing groove, so that the magnet at the lower end of the pressing block corresponds to the protective shell. The magnet magnetically attracts and fixes the iron block, allowing the protective shell to be retracted into the circular groove for normal use of the test probe. After the magnet detaches from the magnetic attraction of the iron block, the protective shell falls under the action of gravity to wrap and protect the test probe.

[0010] Furthermore, a guide groove is provided on the inner wall of the circular groove, and a guide block is slidably connected in the guide groove. The guide block is fixedly connected to the protective shell, and a first spring is fixedly connected between the guide block and the inner wall of the guide groove. Through the elastic force of the first spring, after the magnet is released from the magnetic attraction of the iron block, the rebound force of the first spring pushes the guide block to drive the protective shell to fall quickly to protect the outer end of the test probe.

[0011] Furthermore, a fixing rod is fixedly connected to one end of the pressing block near the protective shell, and the fixing rod is slidably connected in the circular groove. A fixing block is fixedly connected to one end of the fixing rod near the protective shell. A fixing groove matching the fixing block is opened on one end of the protective shell near the fixing rod. As the pressing block slides out of the pressing groove to detach the magnet from the iron block, the fixing rod moves closer to the protective shell until the protective shell falls down and the fixing block engages with the fixing groove to prevent the equipment from falling vertically and impacting the protective shell to shrink, which could cause the end of the test probe to be damaged by collision.

[0012] Furthermore, an anti-slip pad is fixedly connected to the end of the pressing block away from the test probe. The surface of the anti-slip pad is provided with anti-slip texture. The anti-slip pad can increase friction and prevent the device from slipping out of the hand.

[0013] Furthermore, multiple silicone sheets are fixedly connected to the inner wall of the protective shell, and the multiple silicone sheets are arranged in a ring. The silicone sheets can seal the bottom of the protective shell when it is dropped to reduce the entry of foreign objects or dust.

[0014] Furthermore, a reset groove is provided on the inner wall of the pressing groove. A reset block is slidably connected in the reset groove and is fixedly connected to the pressing block. A second spring is fixedly connected between the reset block and the inner wall of the reset groove. When the pressing block is pressed into the groove, it causes the reset block to compress the second spring. At the same time, when the fixing rod is driven, the fixing block disengages from the fixing groove, and the magnet moves to the corresponding position of the protective shell to magnetically attract the iron block, pulling the protective shell into the circular groove. This causes the guide block to slide along the guide groove to compress the first spring, thereby using the test probe to test the semiconductor. After the pressing block is released, the second spring's rebound force pushes the reset block, causing the pressing block to slide out of the pressing groove. This causes the magnet to disengage from the iron block, and the protective shell quickly slides out of the circular groove to protect the test probe.

[0015] 3. Beneficial effects

[0016] Compared with existing technologies, the advantages of this utility model are:

[0017] (1) This solution can effectively isolate the contact between the probe and the external foreign objects and dust when the equipment is idle by using the protective shell and the silicone sheet in a ring-shaped seal, reducing the test error caused by contamination. At the same time, the protective shell falls quickly under the action of gravity and the elastic force of the first spring, which can directly buffer the impact when the equipment is accidentally dropped or collided, avoiding damage to the probe tip due to direct impact, and greatly extending the service life of the probe.

[0018] (2) In this solution, the pressing block is combined with the spring-driven automatic reset structure. The protective shell can be switched between retraction and extension with simple pressing. The engagement of the fixing block and the fixing groove can form a mechanical lock when the protective shell falls, avoiding the shrinkage of the protective shell and the exposure and damage of the probe due to accidents such as the vertical drop of the equipment, thus ensuring the stability of the protective state.

[0019] (3) In this scheme, the cooperation between the guide block and the guide groove ensures the linearity of the lifting and lowering movement of the protective shell and avoids jamming. The elastic force of the first spring and the second spring works together to ensure the response speed of the protective shell's opening and closing, and also reduces the rigid wear of mechanical parts through elastic buffering. The magnetic attraction and fixation of the magnet and the iron block provide a stable positioning force for the protective shell in the retracted state, ensuring that the probe does not shake during the test. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a front sectional view of the present invention;

[0022] Figure 3 For the present utility model Figure 2 Enlarged view of point A in the middle;

[0023] Figure 4For the present utility model Figure 2 Enlarged view at point B in the middle;

[0024] Figure 5 This is a protective state diagram of the present invention.

[0025] Explanation of the labels in the diagram:

[0026] 1. Test probe; 2. Handle housing; 3. Pressing block; 4. Protective housing; 5. Iron block; 6. Magnet; 7. Guide block; 8. First spring; 9. Fixing rod; 10. Fixing block; 11. Anti-slip pad; 12. Silicone sheet; 13. Reset block; 14. Second spring. Detailed Implementation

[0027] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0028] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] Example 1:

[0031] Please see Figures 1-4A probe device for semiconductor testing includes a test probe 1. A handle shell 2 is fixedly connected to the outer end of the test probe 1. A pair of pressing grooves are opened on the outer end of the handle shell 2. A pressing block 3 is slidably connected in the pressing groove. A circular groove is opened at the lower end of the handle shell 2 and is connected to the pressing groove. A protective shell 4 is slidably connected in the circular groove. An iron block 5 is fixedly connected to the end of the protective shell 4 near the pressing block 3. A magnet 6 corresponding to the iron block 5 is embedded in the end of the pressing block 3 near the protective shell 4. By pressing the pressing block 3, the protective shell 4 can be quickly stored through magnetic attraction. After releasing, the protective shell 4 can automatically fall down to wrap the test probe 1. The operation is simple and intuitive. It can quickly switch the protective state before and after testing, effectively avoiding the test probe 1 from being exposed to collisions and wear. At the same time, no additional locking parts are required, simplifying the equipment structure and improving the ease of use.

[0032] A guide groove is provided on the inner wall of the circular groove, and a guide block 7 is slidably connected in the guide groove. The guide block 7 is fixedly connected to the protective shell 4. A first spring 8 is fixedly connected between the guide block 7 and the inner wall of the guide groove. The protective shell 4 moves smoothly up and down along a fixed trajectory to avoid jamming or deviation during movement. The elastic force of the first spring 8 can quickly push the protective shell 4 to fall and reset after the magnet 6 is disengaged. Compared with simple gravity fall, the response is faster, further shortening the exposure time of the test probe 1. At the same time, the elastic buffer can reduce the rigid impact between the protective shell 4 and the handle shell 2, and extend the service life of the components.

[0033] A fixing rod 9 is fixedly connected to one end of the pressing block 3 near the protective shell 4, and the fixing rod 9 is slidably connected in the circular groove. A fixing block 10 is fixedly connected to one end of the fixing rod 9 near the protective shell 4. A fixing groove matching the fixing block 10 is opened on one end of the protective shell 4 near the fixing rod 9. By achieving mechanical locking and fixing when the protective shell 4 falls, it can effectively prevent the protective shell 4 from being forced to contract and causing the end of the test probe 1 to be exposed and damaged by collision when the equipment is accidentally dropped vertically or impacted. This significantly improves the stability of the protective state and provides more reliable protection for the test probe 1.

[0034] An anti-slip pad 11 is fixedly connected to the end of the pressing block 3 away from the test probe 1. The surface of the anti-slip pad 11 is provided with anti-slip texture. Through the anti-slip pad 11 and the anti-slip texture on the surface of the pressing block 3, the friction between the hand and the pressing block 3 can be increased, which not only makes it convenient to apply force when pressing, but also prevents the equipment from accidentally slipping off when holding the handle shell 2, avoiding damage to the test probe 1 or interruption of semiconductor testing due to the equipment falling, thus improving the stability of holding and operating the equipment.

[0035] Multiple silicone sheets 12 are fixedly connected to the lower inner wall of the protective shell 4, and the multiple silicone sheets 12 are arranged in a ring. The ring silicone sheets 12 on the lower inner wall of the protective shell 4 can seal the bottom opening when the protective shell 4 is closed, effectively preventing external dust and foreign objects from entering the interior of the protective shell 4 and contacting the tip of the test probe 1, reducing test errors caused by tip contamination. At the same time, the silicone sheets 12 are soft and will not damage the tip, thus taking into account both protection and safety.

[0036] A reset groove is provided on the inner wall of the pressing groove. A reset block 13 is slidably connected in the reset groove and is fixedly connected to the pressing block 3. A second spring 14 is fixedly connected between the reset block 13 and the inner wall of the reset groove. Through the cooperation of the reset groove, the reset block 13 and the second spring 14, the pressing block 3 can automatically slide out and reset after being pressed by means of the rebound force of the second spring 14, without the need for manual reset of the pressing block 3, which simplifies the operation steps. At the same time, during the reset process, the magnet 6 can be driven to accurately detach from the iron block 5, ensuring that the protective shell 4 can be ejected smoothly, realizing the pressing and storage and releasing of protection, further improving the convenience and continuity of the equipment.

[0037] Working principle:

[0038] The user operates by holding the handle housing 2 with anti-slip pads 11. When the test probe 1 needs to be used, the user presses the pressing block 3 in the pressing groove of the handle housing 2. The anti-slip texture of the anti-slip pads 11 increases the friction of the hand, making it easier to apply force. The pressing block 3 drives the reset block 13 to slide along the reset groove and compress the second spring 14. At the same time, the magnet 6 on the pressing block 3 moves towards one end of the protective housing 4 and attracts the iron block 5, thereby driving the protective housing 4 to rise and be stored along the circular groove. The protective housing 4 simultaneously drives the guide block 7 to slide along the guide groove and compress the first spring 8. At this time, the fixing rod 9 moves with the pressing block 3, and the fixing block 10 disengages from the fixing groove on the protective housing 4, exposing the test probe 1 for semiconductor testing. Test; After the test is completed, release the pressing block 3. The rebound force of the second spring 14 pushes the reset block 13 to reset the pressing block 3. The magnet 6 and the iron block 5 are separated from the magnetic attraction. The elastic force of the first spring 8 pushes the guide block 7 to drive the protective shell 4 to fall smoothly along the guide groove until the protective shell 4 covers the test probe 1. At the same time, the fixing rod 9 resets with the pressing block 3 and drives the fixing block 10 to engage in the fixing groove of the protective shell 4, realizing the stable locking of the protective shell 4. The annular silicone sheet 12 on the lower inner wall of the protective shell 4 seals the bottom opening to prevent dust and foreign objects from entering. The whole process realizes the rapid storage and automatic protection of the test probe 1 through the linkage of the mechanical structure. The operation is smooth and reliable.

[0039] The above description is merely a preferred embodiment of this utility model; however, the protection scope of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and its improved concept, should be included within the protection scope of this utility model.

Claims

1. A probe device for semiconductor testing, comprising a test probe (1), characterized in that: The test probe (1) is fixedly connected to a handle shell (2) at its outer end. A pair of pressing grooves are provided at the outer end of the handle shell (2). A pressing block (3) is slidably connected in the pressing groove. A circular groove is provided at the lower end of the handle shell (2), and the circular groove is connected to the pressing groove. A protective shell (4) is slidably connected in the circular groove. An iron block (5) is fixedly connected to one end of the protective shell (4) near the pressing block (3). A magnet (6) corresponding to the iron block (5) is embedded in one end of the pressing block (3) near the protective shell (4).

2. The probe device for semiconductor testing according to claim 1, characterized in that: The inner wall of the circular groove is provided with a guide groove, and a guide block (7) is slidably connected in the guide groove. The guide block (7) is fixedly connected to the protective shell (4), and a first spring (8) is fixedly connected between the guide block (7) and the inner wall of the guide groove.

3. A probe device for semiconductor testing according to claim 1, characterized in that: The pressing block (3) is fixedly connected to a fixing rod (9) at one end near the protective shell (4), and the fixing rod (9) is slidably connected in the circular groove. The fixing rod (9) is fixedly connected to a fixing block (10) at one end near the protective shell (4), and the protective shell (4) has a fixing groove that matches the fixing block (10) at one end near the fixing rod (9).

4. A probe device for semiconductor testing according to claim 1, characterized in that: The pressing block (3) is fixedly connected to an anti-slip pad (11) at the end away from the test probe (1), and the surface of the anti-slip pad (11) is provided with anti-slip texture.

5. A probe device for semiconductor testing according to claim 1, characterized in that: Multiple silicone sheets (12) are fixedly connected to the lower inner wall of the protective shell (4), and the multiple silicone sheets (12) are distributed in a ring shape.

6. A probe device for semiconductor testing according to claim 1, characterized in that: The inner wall of the pressing groove is provided with a reset groove, and a reset block (13) is slidably connected in the reset groove. The reset block (13) is fixedly connected to the pressing block (3), and a second spring (14) is fixedly connected between the reset block (13) and the inner wall of the reset groove.

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