Probe resistance tester

Abstract

The utility model relates to the technical field of semiconductor detection discloses a kind of probe resistance tester. The probe resistance tester includes support, connecting arm, mounting seat, several counterweights and probe, one end of connecting arm is movably arranged in support along vertical direction, and the other end of connecting arm is vertically slidingly cooperated with mounting seat;Counterweight is detachably arranged in mounting seat;Probe is arranged in mounting seat. The probe resistance tester can realize the accurate control of the relative position between probe and wafer, not only significantly improve the accuracy of measurement result, effectively avoid the occurrence of wafer damage phenomenon of probe, but also can realize the detection of different thickness wafer, expand the versatility of the probe resistance tester.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor testing technology, and in particular relates to a probe resistance tester. Background Technology

[0002] A probe resistance meter is a specialized device used to test the resistivity and sheet resistance of materials such as semiconductors and conductive thin films. It is widely used in semiconductor manufacturing, new energy development, and scientific research. Taking a four-probe resistance meter as an example, its core measurement principle is to contact the wafer under test with four collinear probes arranged at equal intervals. A DC current is applied to the two outer probes, while the voltage drop is collected by the two inner probes. Finally, the wafer resistance value is calculated based on Ohm's law.

[0003] In existing technologies, the four probes of a four-probe resistance tester are typically mounted at the end of a cantilevered robotic arm. However, due to the weight of the robotic arm itself, part of the load is directly transferred to the four probes. When the wafer to be tested is thick, the probes, under the additional pressure of the robotic arm, can easily penetrate into the wafer, damaging its original structure and directly interfering with the accuracy of the measurement results. Furthermore, the spacing between the probes and the wafer mount in existing devices is mostly fixed, lacking a flexible adjustment mechanism. This prevents adaptive adjustments based on the actual thickness of the wafer being tested, limiting the applicability of the equipment.

[0004] Therefore, there is an urgent need for a probe resistance tester to solve the above problems. Utility Model Content

[0005] To address the shortcomings of existing technologies, the purpose of this invention is to provide a probe resistance tester that can precisely control the relative position between the probe and the wafer. This not only significantly improves the accuracy of measurement results and effectively avoids probe damage to the wafer, but also enables the testing of wafers of different thicknesses, thus expanding the versatility of the probe resistance tester.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A probe resistance tester is provided, characterized in that it includes:

[0008] Support;

[0009] The connecting arm and the mounting base are provided. One end of the connecting arm is movably mounted on the support in the vertical direction, and the other end of the connecting arm is vertically slidably engaged with the mounting base.

[0010] Several counterweights, which can be detachably mounted on the mounting base;

[0011] The probe is mounted on the mounting base.

[0012] Optionally, the probe resistance tester also includes a drive unit mounted on the support, the output end of which is connected to the connecting arm for driving the connecting arm to move vertically.

[0013] Optionally, the probe resistance tester also includes a transmission cam, the output end of the drive component is connected to the transmission cam to drive the transmission cam to rotate; the connecting arm is slidably connected to the transmission cam along the circumferential outer wall of the transmission cam, and the transmission cam drives the connecting arm to move vertically.

[0014] Optionally, the connecting arm is equipped with a rotatable rotating wheel, which rolls in conjunction with the transmission cam.

[0015] Optionally, the mounting base is provided with a second slide groove extending in the vertical direction, and the other end of the connecting arm is provided with a second slider that slides in cooperation with the second slide groove.

[0016] Optionally, the mounting base is provided with a limiting part, which is located at the lower end of the second slide groove, and the second slider can slide to contact the limiting part.

[0017] Optionally, the mounting base is provided with a connector, and the counterweight is provided with a connection hole, through which the counterweight is inserted into or detached from the connector;

[0018] Alternatively, the mounting base may have a mounting slot, within which the counterweight can be confined.

[0019] Optionally, one of the support and the connecting arm is provided with a first sliding groove extending in a vertical direction, and the other of the support and the connecting arm is provided with a first slider, the first slider slidingly engaging with the first sliding groove.

[0020] Optionally, an upper anti-detachment component is provided on the support or connecting arm. The upper anti-detachment component is located above the first sliding groove, and the first slider can slide to contact the upper anti-detachment component.

[0021] And / or, a lower anti-detachment component is provided on the support or connecting arm, the lower anti-detachment component is located below the first sliding groove, and the first slider can slide to contact the lower anti-detachment component.

[0022] Optionally, the probe resistance tester also includes a support that is movably disposed on the support in the horizontal direction, the support having a detection position that can be moved to below the probe, the support being used to support the wafer to be tested.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] This invention provides a probe resistance tester. The counterweight and mounting base are detachably connected. When the counterweight is connected, its weight acts on the mounting base; when separated, the mounting base is no longer subjected to the counterweight's weight. The connecting arm slides vertically with the mounting base, ensuring that the arm's weight no longer acts on the base. At this point, the load on the mounting base is its own weight plus the weight of the connected counterweights. Therefore, the load on the mounting base can be precisely adjusted by increasing or decreasing the number of counterweights. Precise adjustment of the load on the mounting base allows for precise adjustment of the contact depth between the probe and the wafer, ensuring accurate wafer detection without the probe penetrating the wafer. When the connecting arm moves vertically on the support, it moves the probe along with the mounting base, allowing the probe to contact wafers of different thicknesses. During this process, the mounting base, under its load, slides relative to the connecting arm to its downward sliding limit on the connecting arm. Once the probe has just made contact with the wafer, the reverse thrust generated by the wafer causes the probe to slide the mounting base upwards relative to the connecting arm, further preventing the probe from penetrating the wafer and damaging its structure. Compared to existing technologies, the probe resistance tester provided by this invention can achieve precise control of the relative position between the probe and the wafer by increasing or decreasing the number of counterweights. This not only significantly improves the accuracy of the measurement results and effectively avoids probe damage to the wafer, but also enables the testing of wafers of different thicknesses, expanding the versatility of the probe resistance tester. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the probe resistance tester provided in an embodiment of the present invention;

[0026] Figure 2 A side view of the probe resistance tester provided in an embodiment of this utility model;

[0027] Figure 3 A schematic diagram of the connecting arm, driving component, transmission cam, and mounting base of the probe resistance tester provided in this embodiment of the utility model;

[0028] Figure 4 Exploded view of the mounting base and connecting arm of the probe resistance tester provided in an embodiment of this utility model;

[0029] Figure 5 A side view of the mounting base and connecting arm of the probe resistance tester provided in an embodiment of this utility model.

[0030] in:

[0031] 1. Support; 11. Base plate; 12. Support component; 121. First slide groove; 122. Upper anti-detachment component; 123. Lower anti-detachment component;

[0032] 2. Connecting arm; 21. First slider; 22. Second slider;

[0033] 3. Mounting base; 31. Second slide groove; 32. Connector;

[0034] 4. Counterweights;

[0035] 5. Probe;

[0036] 61. Driving component; 62. Transmission cam; 63. Rotating wheel;

[0037] 7. Support seat;

[0038] 8. Guide rail. Detailed Implementation

[0039] It should be understood that in the description of this utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0040] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0041] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0042] like Figures 1 to 5 As shown, this embodiment provides a probe resistance tester that can achieve precise control of the relative position between the probe 5 and the wafer. This not only significantly improves the accuracy of the measurement results and effectively avoids the phenomenon of the probe 5 damaging the wafer, but also enables the detection of wafers of different thicknesses, expanding the versatility of the probe resistance tester.

[0043] See Figure 1 and Figure 2 The probe resistance tester includes a support 1, a connecting arm 2, a mounting base 3, several counterweights 4, and a probe 5. One end of the connecting arm 2 is movably mounted on the support 1 in the vertical direction, and the other end of the connecting arm 2 is vertically slidably engaged with the mounting base 3. The counterweights 4 are detachably mounted on the mounting base 3. The probe 5 is mounted on the mounting base 3.

[0044] The probe resistance tester provided in this embodiment has a detachable connection between the counterweight 4 and the mounting base 3. When the counterweight 4 is connected to the mounting base 3, its weight acts on the mounting base 3. When the counterweight 4 is separated from the mounting base 3, the mounting base 3 is no longer subjected to the weight of the counterweight 4. The connecting arm 2 slides vertically with the mounting base 3, so that the weight of the connecting arm 2 no longer acts on the mounting base 3. At this time, the load on the mounting base 3 is the sum of its own weight and the weight of the several counterweights 4 connected to it. Therefore, the load on the mounting base 3 can be precisely adjusted by increasing or decreasing the number of counterweights 4 on the mounting base 3. By precisely adjusting the load on the mounting base 3, the contact depth between the probe 5 on the mounting base 3 and the wafer can be precisely adjusted, ensuring that the probe 5 can accurately detect the wafer and that the probe 5 will not penetrate into the wafer. When the connecting arm 2 moves vertically on the support 1, the connecting arm 2 can move the probe 5 together through the mounting base 3, so that the probe 5 can move to contact wafers of different thicknesses. During this process, the mounting base 3, under its load, will slide relative to the connecting arm 2 to its downward sliding limit position on the connecting arm 2. After the probe 5 moves to the state where it just contacts the wafer, the reverse thrust generated by the wafer will cause the probe 5 to drive the mounting base 3 to slide upward relative to the connecting arm 2, which helps to further prevent the probe 5 from penetrating into the wafer and damaging its structure. Compared with the prior art, the probe resistance tester provided in this embodiment can achieve precise control of the relative position between the probe 5 and the wafer by increasing or decreasing the number of counterweights 4. This not only significantly improves the accuracy of the measurement results and effectively avoids the phenomenon of the probe 5 damaging the wafer, but also enables the detection of wafers of different thicknesses, expanding the versatility of the probe resistance tester.

[0045] In this embodiment, the weights of the several counterweights 4 can be the same or different. When the weights of the several counterweights 4 are the same, the load on the mounting base 3 can only be adjusted by increasing or decreasing the number of counterweights 4 on the mounting base 3; when the weights of the several counterweights 4 are different, the load on the mounting base 3 can be adjusted not only by increasing or decreasing the number of counterweights 4 on the mounting base 3, but also by changing the weight of the counterweights 4, making the adjustment more flexible.

[0046] For example, see Figure 3 The probe resistance tester provided in this embodiment is a four-probe resistance tester, wherein four probes 5 are provided on the mounting base 3.

[0047] Optionally, see Figure 3 The probe resistance tester also includes a drive unit 61 set on the support 1. The output end of the drive unit 61 is connected to the connecting arm 2 and is used to drive the connecting arm 2 to move vertically, which helps to improve the automation of probe 5 position adjustment.

[0048] In this embodiment, see Figure 3 The probe resistance tester also includes a transmission cam 62. The output end of the drive component 61 is connected to the transmission cam 62 to drive the transmission cam 62 to rotate. The connecting arm 2 is slidably connected to the transmission cam 62 along its circumferential outer wall. The transmission cam 62 drives the connecting arm 2 to move vertically. The transmission cam 62 has a variable cross-section structure. When the connecting arm 2 contacts the side wall of the transmission cam 62 with a larger cross-sectional diameter, the vertical position of the connecting arm 2 will be higher; when the connecting arm 2 contacts the side wall of the transmission cam 62 with a smaller cross-sectional diameter, the vertical position of the connecting arm 2 will be lower. Therefore, during the rotation of the transmission cam 62, the connecting arm 2 will contact different positions around the circumference of the transmission cam 62, and the transmission cam 62 can drive the connecting arm 2 to move vertically.

[0049] Specifically, see Figure 3 Connecting arm 2 along the first direction ( Figure 3 Extending in the X direction, the output end of the drive unit 61 extends along the second direction (in the X direction), and the output end of the drive unit 61 extends in the second direction (in the X direction). Figure 3 Extending in the Y direction, the transmission cam 62 rotates around the output end of the drive member 61.

[0050] For example, see Figure 3 The transmission cam 62 is a disc cam with an elliptical cross-section, and the diameter of the first end of the transmission cam 62 is smaller than the diameter of its second end. The first and second ends are the two ends of the major axis of the elliptical transmission cam 62. It should be noted that in other embodiments, the transmission cam 62 can also be other irregularly shaped cams, as long as it has at least two different diameters to enable the connecting arm 2 to perform lowering and raising movements.

[0051] Specifically, see Figure 3 The connecting arm 2 is equipped with a rotatable rotating wheel 63, which rolls in engagement with the transmission cam 62. When the driving component 61 drives the transmission cam 62 to rotate, the transmission cam 62 drives the rotating wheel 63 to rotate and slide along its circumference, causing the rotating wheel 63 to move the connecting arm 2 vertically. Simultaneously, the rotation of the rotating wheel 63 reduces the friction between it and the transmission cam 62, decreasing the wear between the connecting arm 2 and the transmission cam 62, and extending the service life of both.

[0052] For example, the drive element 61 is a motor.

[0053] In other embodiments, the driving member 61 includes a linear driving unit, the output end of which is connected to the connecting arm 2 to directly drive the connecting arm 2 to move vertically.

[0054] For example, the linear drive unit uses a cylinder, and the piston shaft of the cylinder extends vertically and is directly connected to the connecting arm 2.

[0055] Optionally, see Figure 4 One of the support 1 and the connecting arm 2 is provided with a first sliding groove 121 extending in the vertical direction, and the other of the support 1 and the connecting arm 2 is provided with a first slider 21. The first slider 21 slides in cooperation with the first sliding groove 121 so that the connecting arm 2 can move vertically relative to the support 1 and reduce the friction between the support 1 and the connecting arm 2.

[0056] In this embodiment, see Figure 4 An upper anti-detachment component 122 is provided on the support 1 or the connecting arm 2. The upper anti-detachment component 122 is located above the first slide groove 121. The first slider 21 can slide to contact the upper anti-detachment component 122 to prevent the first slider 21 from detaching from the first slide groove 121, thereby limiting the highest position of the connecting arm 2 on the support 1 and improving the reliability of the connecting arm 2 on the support 1.

[0057] Specifically, see Figure 4 The first slide groove 121 is disposed on the support 1, the first slider 21 is disposed on the connecting arm 2, and the upper anti-detachment component 122 is disposed on the support 1. The upper anti-detachment component 122 has an L-shaped structure, and the first slider 21 can slide upward to contact the upper anti-detachment component 122.

[0058] In other embodiments, see Figure 4 A lower anti-detachment component 123 is provided on the support 1 or the connecting arm 2. The lower anti-detachment component 123 is located below the first slide groove 121. The first slider 21 can slide to contact the lower anti-detachment component 123 to prevent the first slider 21 from disengaging from the first slide groove 121, thereby limiting the lowest position of the connecting arm 2 on the support 1 and further improving the reliability of the connecting arm 2 on the support 1.

[0059] Specifically, the first slide groove 121 is disposed on the support 1, the first slider 21 is disposed on the connecting arm 2, and the lower anti-detachment component 123 is disposed on the support 1 and located below the connecting arm 2.

[0060] In other embodiments, the first slide groove 121 is disposed on the connecting arm 2, the first slider 21 is disposed on the support 1, and the upper anti-detachment component 122 and the lower anti-detachment component 123 are both disposed on the connecting arm 2.

[0061] Optionally, see Figure 4The mounting base 3 is provided with a second sliding groove 31 extending in the vertical direction, and the other end of the connecting arm 2 is provided with a second slider 22 that slides in cooperation with the second sliding groove 31, so as to realize the sliding connection between the other end of the connecting arm 2 and the mounting base 3.

[0062] In this embodiment, a limiting part is provided on the mounting base 3. The limiting part is located at the lower end of the second slide groove 31, and the second slider 22 can slide to contact the limiting part to prevent the second slider 22 from disengaging from the second slide groove 31, thus ensuring the reliability of the connection between the connecting arm 2 and the mounting base 3. During the process of the connecting arm 2 driving the mounting base 3 to move vertically and during the measurement of wafer resistance, the second slider 22 is in contact with the limiting part.

[0063] For example, the limiting part is the lower groove wall of the second groove 31.

[0064] In an optional embodiment, see [link to relevant documentation] Figure 5 The mounting base 3 is equipped with a connector 32, which has a connecting hole (not shown in the figure). The counterweight 4 is inserted into or detached from the connector 32 through the connecting hole. When the connector 32 is inserted into the connecting hole, the counterweight 4 abuts against the mounting base 3; when the connector 32 is detached from the connecting hole, the counterweight 4 separates from the mounting base 3. The counterweight 4 and the mounting base 3 are balanced by a plug-in connection, which is convenient and quick to operate.

[0065] Specifically, see Figure 1 The counterweight 4 includes a cylindrical counterweight block with a connecting hole. The connector 32 includes a vertically extending connector shaft that can pass through the connecting hole to connect the counterweight 4 to the mounting base 3. Furthermore, the connector shaft can pass through multiple connecting holes of the counterweight 4 simultaneously. When it is necessary to separate the counterweight 4 from the mounting base 3, the counterweight 4 is moved upwards until the connector shaft disengages from the connecting hole.

[0066] In another alternative embodiment, the mounting base 3 is provided with a mounting groove, and the counterweight 4 can be confined within the mounting groove to achieve the connection between the counterweight 4 and the mounting base 3.

[0067] Specifically, the counterweight 4 is placed in the mounting groove, and the groove wall of the mounting groove can restrict the position of the counterweight 4 on the mounting base 3, thus realizing the connection between the counterweight 4 and the mounting base 3; the counterweight 4 is removed from the mounting groove through the groove opening, thus realizing the separation between the counterweight 4 and the mounting base 3.

[0068] Optionally, see Figure 1 and Figure 2The probe resistance tester also includes a support 7 movably disposed horizontally on the support 1. The support 7 has a detection position that can be moved to below the probe 5, and the support 7 is used to support the wafer to be tested. When the support 7 moves the wafer to be tested to the detection position, the probe 5 can test the wafer; when the support 7 moves horizontally away from the probe 5, the wafer can be placed on or removed from the support 7, which helps to avoid accidental contact with the probe 5 when picking up or placing the wafer, and extends the service life of the probe 5.

[0069] In this embodiment, see Figure 1 The support 1 is provided with a guide rail 8 extending in the horizontal direction, and the support 7 is movably mounted on the guide rail 8.

[0070] Specifically, the guide rail 8 includes a lead screw, a support 7 is threadedly connected to the lead screw, and a motor is mounted on the support 1. The output end of the motor is connected to the lead screw to drive the lead screw to rotate, and the lead screw drives the support 7 to move along its axial direction. This configuration helps to improve the stability of the movement of the support 7, allowing the wafer to move more smoothly and accurately on the support 1, thus ensuring the wafer inspection effect.

[0071] Optionally, see Figure 1 The support 1 includes a base plate 11 and a support member 12 disposed on the base plate 11. The connecting arm 2 is movably connected to the support member 12, and the support seat 7 is movably disposed on the base plate 11.

[0072] Specifically, the first slide groove 121, the upper anti-detachment component 122, and the lower anti-detachment component 123 are all provided on the support component 12.

[0073] The above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. A probe resistance tester, characterized in that, include: Support (1); A connecting arm (2) and a mounting base (3) are provided. One end of the connecting arm (2) is movably disposed on the support (1) in the vertical direction, and the other end of the connecting arm (2) is vertically slidably engaged with the mounting base (3). Several counterweights (4) are detachably disposed on the mounting base (3); The probe (5) is disposed on the mounting base (3).

2. The probe resistance tester according to claim 1, characterized in that, The probe resistance tester also includes a drive unit (61) disposed on the support (1). The output end of the drive unit (61) is connected to the connecting arm (2) and is used to drive the connecting arm (2) to move vertically.

3. The probe resistance tester according to claim 2, characterized in that, The probe resistance tester also includes a transmission cam (62), the output end of the drive member (61) is connected to the transmission cam (62) and is used to drive the transmission cam (62) to rotate; the connecting arm (2) is slidably connected to the transmission cam (62) along the circumferential outer wall of the transmission cam (62), and the transmission cam (62) drives the connecting arm (2) to move vertically.

4. The probe resistance tester according to claim 3, characterized in that, The connecting arm (2) is provided with a rotatable rotating wheel (63), which is in rolling cooperation with the transmission cam (62).

5. The probe resistance tester according to claim 1, characterized in that, The mounting base (3) is provided with a second sliding groove (31) extending in the vertical direction, and the other end of the connecting arm (2) is provided with a second slider (22) that slides in cooperation with the second sliding groove (31).

6. The probe resistance tester according to claim 5, characterized in that, The mounting base (3) is provided with a limiting part, which is located at the lower end of the second slide groove (31), and the second slider (22) can slide to contact the limiting part.

7. The probe resistance tester according to claim 1, characterized in that, The mounting base (3) is provided with a connector (32), and the counterweight (4) is provided with a connection hole. The counterweight (4) is inserted into or detached from the connector (32) through the connection hole. Alternatively, the mounting base (3) is provided with a mounting groove, and the counterweight (4) can be confined within the mounting groove.

8. The probe resistance tester according to claim 1, characterized in that, One of the support (1) and the connecting arm (2) is provided with a first sliding groove (121) extending in the vertical direction, and the other of the support (1) and the connecting arm (2) is provided with a first slider (21), which slides in cooperation with the first sliding groove (121).

9. The probe resistance tester according to claim 8, characterized in that, An upper anti-detachment component (122) is provided on the support (1) or the connecting arm (2). The upper anti-detachment component (122) is located above the first slide groove (121), and the first slider (21) can slide to contact the upper anti-detachment component (122). And / or, the support (1) or the connecting arm (2) is provided with a lower anti-detachment component (123), the lower anti-detachment component (123) is located below the first slide groove (121), and the first slider (21) can slide to contact the lower anti-detachment component (123).

10. The probe resistance tester according to any one of claims 1-9, characterized in that, The probe resistance tester also includes a support (7) that is movably disposed on the support (1) in the horizontal direction. The support (7) has a detection position that can be moved to below the probe (5). The support (7) is used to support the wafer to be tested.

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