A chip calibration device

Abstract

The utility model discloses a kind of chip calibration devices, including helmholtz coil, including center point, center point is used to place chip;Helmholtz coil includes support platform;Fixed seat, fixed in support platform, and along the axial extension of helmholtz coil;Gauss meter, including the handle and probe of being connected, probe extends along the axial of helmholtz coil, and the end of probe away from handle is used to be set in the directly above of chip;Displacement component is connected with fixed seat;Displacement component is connected with the handle of gauss meter, and displacement component is used to drive the handle of gauss meter relative helmholtz coil along height direction and the axial movement of helmholtz coil, to make the probe of gauss meter relative chip along height direction and the axial movement of helmholtz coil.The utility model can realize the accurate calibration of chip sensitivity, and it is convenient to operate, and high efficiency.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a chip calibration device. Background Technology

[0002] In the field of chip calibration, especially in the calibration process of magnetic field sensing chips, there are always key issues affecting calibration accuracy and efficiency, which restrict the stable performance of chips and the promotion of mass production applications.

[0003] On the one hand, chip calibration is prone to bias, leading to certain errors in test results. On the other hand, existing testing processes rely on manual or semi-automated data processing using tools such as Excel, which is not only cumbersome and prone to human error, but also difficult to adapt to the rapid calibration needs of large batches of chips. This results in a prolonged testing cycle, low production efficiency, and hinders the large-scale production and application of chips.

[0004] Therefore, in order to address the problems of insufficient accuracy and low efficiency in the chip calibration process, there is an urgent need for a technical solution that can reduce the impact of chip bias and improve the efficiency of test analysis, so as to improve the overall performance of chip calibration. Utility Model Content

[0005] The purpose of this invention is to solve the problems of insufficient accuracy and low efficiency in traditional chip calibration schemes. This invention provides a chip calibration device that can accurately calibrate and standardize chip sensitivity, and is easy to operate and highly efficient.

[0006] To address the aforementioned technical problems, this utility model discloses a chip calibration device, comprising a Helmholtz coil with a center point for placing a chip; the Helmholtz coil includes a support platform; a mounting base fixed to the support platform and extending along the axial direction of the Helmholtz coil; a gaussmeter including a connected handle and a probe, the probe extending along the axial direction of the Helmholtz coil, with one end of the probe away from the handle positioned directly above the chip; and a displacement assembly connected to the mounting base. The displacement assembly is connected to the handle of the gaussmeter, and is used to move the handle of the gaussmeter relative to the Helmholtz coil along the height direction and the axial direction of the Helmholtz coil, thereby causing the probe of the gaussmeter to move relative to the chip along the height direction and the axial direction of the Helmholtz coil.

[0007] Using the above technical solution, the Helmholtz coil generates a highly uniform magnetic field environment when energized. The chip to be calibrated is placed at the center point of the Helmholtz coil, ensuring it is located in the position with the best magnetic field uniformity. The displacement component drives the gaussmeter probe to achieve precise adjustment in both axial and height directions, ensuring the optimal measurement distance. This allows the gaussmeter to measure the actual field strength data at the chip's location, providing benchmark data to verify the accuracy of the magnetic field generation. The chip measures the magnetic field of different intensities generated by the Helmholtz coil under different currents, obtaining the chip's output data under different magnetic field intensities and comparing it with the benchmark data of the actual field strength measured by the gaussmeter. This allows operators to optimize and adjust the chip's circuit parameters or sensor structure based on the difference between the chip's measurement data and the actual magnetic field value measured by the gaussmeter, thus achieving chip calibration.

[0008] On the other hand, the chip can also measure the constant magnetic field generated by the Helmholtz coil when its own current changes, thereby obtaining the chip's output data under different self-current conditions and the actual field strength reference data measured by the gaussmeter. This allows staff to optimize and adjust the chip's circuit parameters or sensor structure based on the difference between the chip's measurement data and the actual magnetic field value measured by the gaussmeter, thus achieving chip calibration.

[0009] In summary, the chip calibration device of this application utilizes a Helmholtz coil to generate a known magnetic field, and a gaussmeter provides reference data to verify the accuracy of the magnetic field generation. By measuring the magnetic field strength of the chip under different magnetic field strengths or when its own current changes, the corresponding output data is obtained and compared with the gaussmeter reference data. The circuit parameters or sensor structure of the chip can be optimized and adjusted, which can achieve accurate calibration and adjustment of chip sensitivity. Moreover, it is convenient to operate and highly efficient.

[0010] According to another specific embodiment of the present invention, the displacement component includes:

[0011] The first component is used to move the handle of the gaussmeter relative to the Helmholtz coil along the axial direction of the Helmholtz coil, so that the probe of the gaussmeter moves relative to the chip along the axial direction of the Helmholtz coil.

[0012] The second component is used to move the handle of the gaussmeter relative to the Helmholtz coil in the height direction, so that the probe of the gaussmeter moves relative to the chip in the height direction.

[0013] By adopting the above technical solution, axial movement allows the probe to be precisely adjusted in the direction of the central axis of the Helmholtz coil to adjust the horizontal distance between it and the chip, avoiding measurement errors caused by horizontal offset; vertical movement supports precise adjustment of the vertical distance between the probe and the chip, which can avoid contact damage and ensure the best measurement accuracy.

[0014] According to another specific embodiment of the present invention, the fixing base includes a slide groove extending axially along the Helmholtz coil, the slide groove including an open end penetrating one end of the fixing base; the first component includes: a first slider slidably connected to the slide groove along the axial direction of the Helmholtz coil; the first slider being connected to the handle of the gaussmeter; the first slider including a first threaded hole extending axially along the Helmholtz coil; a first screw, a portion of the first screw extending into the first threaded hole and threadedly engaging with the first threaded hole; a first positioning seat fixed to the open end of the slide groove, the first screw being rotatably connected to the first positioning seat about its axial direction; the first positioning seat is used to restrict the first screw from moving axially along the Helmholtz coil.

[0015] According to another specific embodiment of the present invention, the first screw is fitted with a first sleeve, the first sleeve including a first limiting part and a second limiting part spaced apart in its axial direction; the first positioning seat includes a first connecting hole, the first screw passes through the first connecting hole, the first limiting part and the second limiting part of the first sleeve are respectively located on both sides of the axial direction of the first connecting hole, and the first limiting part and the second limiting part can respectively abut against the two end faces of the first positioning seat to restrict the first screw from moving along the axial direction of the Helmholtz coil.

[0016] Using the above technical solution, the first limiting part and the second limiting part can respectively abut against the two end faces of the first positioning seat to restrict the first screw from moving axially along the Helmholtz coil. At the same time, the first screw is threaded into the first threaded hole, so that the first screw rotates relative to the first positioning seat, and the first slider will move axially along the Helmholtz coil. The handle of the gaussmeter connected to the first slider and the probe move synchronously along the axial direction of the Helmholtz coil, thereby adjusting the horizontal distance between the end of the probe and the chip to ensure the optimal measurement distance.

[0017] According to another specific embodiment of the present invention, a first turntable is provided at one end of the first sleeve.

[0018] Using the above technical solution, the first turntable is easy for workers to rotate, driving the first sleeve and the first screw connected to it to rotate.

[0019] According to another specific embodiment of the present invention, the second component includes: a second slider connected to the handle of the gaussmeter; the second slider includes a second threaded hole extending along the height direction; a second screw extending along the height direction, a portion of the second screw extending into the second threaded hole and threadedly engaging with the second threaded hole; a second positioning seat fixedly connected to the first slider, the second screw being rotatably connected to the second positioning seat about its axial direction; the second positioning seat is used to restrict the movement of the second screw along the height direction.

[0020] According to another specific embodiment of the present invention, the first slider includes a clearance groove, the opening of which is disposed directly opposite the second slider along the height direction, so that the second slider can move relative to the first slider along the height direction.

[0021] According to another specific embodiment of the present invention, the second screw is fitted with a second sleeve, the second sleeve including a third limiting part and a fourth limiting part spaced apart in its axial direction; the second positioning seat includes a second connecting hole, the second screw passes through the second connecting hole, the third limiting part and the fourth limiting part of the second sleeve are respectively located on both sides of the axial direction of the second connecting hole, and the third limiting part and the fourth limiting part can respectively abut against the two end faces of the second positioning seat to restrict the movement of the second screw in the height direction.

[0022] Using the above technical solution, the third and fourth limiting parts can respectively abut against the two end faces of the second positioning seat to restrict the movement of the second screw in the height direction. At the same time, the second screw is threaded into the second threaded hole, so that the second screw can be rotated relative to the second positioning seat, and the second slider will move in the height direction. The handle and probe of the gaussmeter connected to the second slider move synchronously in the height direction, thereby adjusting the vertical distance between the probe and the chip, which can avoid contact damage and ensure the optimal measurement distance.

[0023] According to another specific embodiment of the present invention, a second turntable is provided at one end of the second sleeve.

[0024] The above technical solution makes it easy for workers to rotate the second turntable, which in turn drives the second sleeve and the second screw connected to it to rotate.

[0025] According to another specific embodiment of the present invention, it further includes: a support base disposed on one side of the fixed base, and one end of the support base extending into the center point of the Helmholtz coil in a direction perpendicular to the axial direction of the Helmholtz coil; the fixed base is provided with a receiving groove, and one end of the support base extends into the receiving groove; a circuit board fixed to the support base; the circuit board is used to fix the chip.

[0026] Using the above technical solution, the support extends into the center point of the Helmholtz coil in a direction perpendicular to the axial direction of the Helmholtz coil, so as to ensure that the chip on it is located at the center point of the Helmholtz coil. Attached Figure Description

[0027] Figure 1 A three-dimensional representation of the chip calibration device according to an embodiment of the present invention is shown. Figure 1 ;

[0028] Figure 2 A cross-sectional view of a Helmholtz coil according to an embodiment of the present invention is shown;

[0029] Figure 3 A three-dimensional representation of the chip calibration device according to an embodiment of the present invention is shown. Figure 2 The Helmholtz coil is not shown.

[0030] Figure 4 A perspective view of the fixing base according to an embodiment of the present utility model is shown;

[0031] Figure 5 A three-dimensional representation of the chip calibration device according to an embodiment of the present invention is shown. Figure 3 The Helmholtz coil and the mounting base are not shown.

[0032] Figure 6 A cross-sectional view of a chip calibration device according to an embodiment of the present invention is shown;

[0033] Figure 7 A three-dimensional representation of the chip calibration device according to an embodiment of the present invention is shown. Figure 4 The Helmholtz coil and support are not shown. Detailed Implementation

[0034] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Although the description of this utility model will be presented in conjunction with preferred embodiments, this does not mean that the features of this utility model are limited to this embodiment. On the contrary, the purpose of describing the utility model in conjunction with the embodiments is to cover other options or modifications that may be derived based on the claims of this utility model. To provide a deep understanding of this utility model, many specific details will be included in the following description. This utility model may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this utility model, some specific details will be omitted in the description. It should be noted that, without conflict, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0035] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0036] In the description of this embodiment, it should be noted that the terms "upper", "lower", "inner", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0037] The terms “first”, “second”, etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0038] In the description of this embodiment, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment based on the specific circumstances.

[0039] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0040] refer to Figure 1 This application provides a chip calibration device 100, including a Helmholtz coil 200, a mounting base 300, a gaussmeter 400, and a displacement assembly 500. It is understood that the Helmholtz coil 200 is as follows: Figure 2 The diagram shows two circular coils with identical radii and number of turns, arranged coaxially with a spacing d equal to the radius r. Figure 1 and Figure 2 The device consists of coils 210 and 220 as shown. It should be noted that since the coils have inner and outer coils, the radius *r* refers to the distance from the center of the coil to the midpoint between the inner and outer coils, and the spacing *d* refers to the axial distance between the midpoints Q1 of coil 210 and Q2 of coil 220. When currents of the same magnitude and direction are passed through coils 210 and 220, a uniform magnetic field can be generated along their axis O.

[0041] The Helmholtz coil 200 includes a center point A for placing the chip 10. Those skilled in the art will understand that the center point A of the Helmholtz coil 200 refers to two coaxial circular coils (…). Figure 1 and Figure 2 The magnetic field uniformity is optimal at the midpoint of the axial direction of coils 210 and 220 (as shown). For example, chip 10 is an OH191 chip.

[0042] like Figure 1 and Figure 3 As shown, the aforementioned mounting base 300 includes a fixed portion 310 and a guide portion 320 connected together. The fixed portion 310 is cuboid in shape and is fixedly connected to the support platform 203 of the Helmholtz coil 200. The guide portion 320 is semi-cylindrical and coaxial with the Helmholtz coil 200. A portion of the guide portion 320 is located outside the central through-hole 202 of the Helmholtz coil 200, and another portion extends into the central through-hole 202 of the Helmholtz coil 200. The arcuate surface of the guide portion 320 fits against the inner wall of the central through-hole 202 of the Helmholtz coil 200. This ensures coaxiality between the guide portion 320 and the central through-hole 202 of the Helmholtz coil 200, effectively reducing installation eccentricity errors and improving the positioning accuracy of the magnetic field uniformity area. Furthermore, it increases the contact area between the mounting base 300 and the central through-hole 202 of the Helmholtz coil 200, reducing the risk of displacement caused by vibration or external forces and enhancing the mechanical stability of the overall structure.

[0043] like Figure 3 As shown, the gaussmeter 400 described above includes a handle 410 and a probe 420 connected to each other. The probe 420 extends along the axial direction X of the Helmholtz coil 200. One end of the probe 420 away from the handle 410 is positioned directly above the chip 10 to accurately capture the magnetic field strength at the location of the chip 10.

[0044] In this embodiment, the gaussmeter 400 also includes a display (not shown) to display the field strength value measured by the probe 420 in real time.

[0045] The aforementioned displacement component 500 is connected to the handle 410 of the gaussmeter 400. The displacement component 500 is used to drive the handle 410 of the gaussmeter 400 to move relative to the Helmholtz coil 200 along the height direction Z and the axial direction X of the Helmholtz coil 200, so that the probe 420 of the gaussmeter 400 can move relative to the chip 10 along the height direction Z and the axial direction X of the Helmholtz coil 200. Specifically, the axial X movement allows the probe 420 to be precisely adjusted in the direction of the central axis of the Helmholtz coil 200 to adjust its horizontal distance from the chip 10, avoiding measurement errors caused by horizontal offset; the height direction Z movement supports the precise adjustment of the vertical distance between the probe 420 and the chip 10, which can avoid contact damage and ensure optimal measurement accuracy.

[0046] Using the above technical solution, the chip calibration device 100 of this application generates a highly uniform magnetic field environment through the Helmholtz coil 200. The chip 10 to be calibrated is placed at the center point A of the Helmholtz coil 200, ensuring that it is located at the position with the best magnetic field uniformity. The displacement component 500 drives the probe 420 of the gaussmeter 400 to achieve precise adjustment of two degrees of freedom in the axial X and height Z directions, ensuring the optimal measurement distance. Thus, the gaussmeter 400 can measure the actual field strength data at the location of the chip 10 to provide reference data to verify the accuracy of the magnetic field generation.

[0047] Chip 10 measures the magnetic fields of different intensities generated by the Helmholtz coil 200 under different currents. This allows for the acquisition of output data from chip 10 under varying magnetic field strengths, compared to the actual field strength reference data measured by the gaussmeter 400. This enables operators to optimize the circuit parameters or sensor structure of chip 10 based on the difference between the measured data and the actual magnetic field value measured by the gaussmeter 400. In other words, by generating a magnetic field of known strength and direction using the Helmholtz coil 200, chip 10 can operate under different magnetic field environments, allowing for the measurement of the difference between its output and the actual magnetic field value. Based on this data, calibration curves or mathematical models are established to compensate for nonlinear errors, ensuring that chip 10 outputs more accurate magnetic field measurements across its entire range – thus achieving chip 10 calibration. Simultaneously, by utilizing the directionally adjustable magnetic field of the Helmholtz coil 200 (i.e., changing the current direction of the coil), the response of chip 10 to the magnetic field direction is checked, correcting its direction measurement error and ensuring that chip 10 can accurately measure the direction and magnitude of the magnetic field.

[0048] On the other hand, chip 10 can also measure the constant magnetic field generated by the Helmholtz coil 200 while its own current changes, thereby obtaining the output data of chip 10 under different self-current conditions and the actual field strength reference data measured by gaussmeter 400. That is, keeping the current of Helmholtz coil 200 constant, a constant magnetic field is generated. At the same time, chip 10 is energized, changing the current of chip 10, chip 10 measures the magnetic field generated by Helmholtz coil 200, and compares the measurement data of chip 10 with the actual magnetic field value measured by gaussmeter 400. Based on the difference between the measurement data of chip 10 and the actual magnetic field value measured by gaussmeter 400, the circuit parameters or sensor structure of chip 10 are optimized and adjusted to achieve chip 10 calibration.

[0049] In summary, the magnetic field sensitivity of chip 10 may vary from person to person, and the accuracy of its measurement direction is also crucial. The sensitivity of chip 10 can be calibrated and adjusted using the precise magnetic field generated by the Helmholtz coil 200.

[0050] Illustratively, the magnetic field intensity and direction of the Helmholtz coil 200 can be controlled by a control unit and computer software, and the Helmholtz coil 200 is driven by a power amplifier to generate a corresponding magnetic field. The Gauss meter 400 provides reference data to verify the accuracy of magnetic field generation. The chip 10 measures the magnetic field generated by the Helmholtz coil 200, and feeds the measurement data back to the computer. The computer compares the measurement data with a theoretical magnetic field value, establishes a calibration curve or a mathematical model, thereby compensating for nonlinear errors.

[0051] The chip calibration apparatus 100 of the present application can not only meet the conventional calibration requirements in the laboratory, but also can analyze and calibrate the chips 10 returned by customers, it has high portability, and can provide timely technical support on the customer's site to quickly respond to customer demands.

[0052] As shown in Figure 3 above, the displacement assembly 500 includes a first component 510, which is configured to drive the handle 410 of the Gauss meter 400 to move relative to the Helmholtz coil 200 along the axial direction X of the Helmholtz coil 200, so that the probe 420 of the Gauss meter 400 moves relative to the chip 10 along the axial direction X of the Helmholtz coil 200, so as to accurately adjust the horizontal spacing and ensure the optimal measurement distance, thus enabling the Gauss meter 400 to measure the actual field intensity data at the position of the chip 10.

[0053] Specifically, as shown in Figure 4 above, the fixing base 300 includes a sliding chute 321, the sliding chute 321 extends along the axial direction X of the Helmholtz coil 200, and the sliding chute 321 includes an open end 322 penetrating one end of the fixing base 300. Illustratively, the sliding chute 321 is arranged at an end of the guide portion 320 of the fixing base 300 away from the fixing portion 310, and extends along the axial direction X of the Helmholtz coil 200 to a set distance. The projection of the sliding chute 321 on the axial direction X of the Helmholtz coil 200 is in an inverted "convex" shape, that is, the sliding chute 321 includes a middle sliding channel 321a and sliding tables 321b symmetrically arranged on both sides of the width direction Y thereof, and the upper surfaces of the sliding tables 321b are higher than the bottom wall of the middle sliding channel 321a, thereby it can also be said that a stepped structure is formed inside the sliding chute 321.

[0054] Correspondingly, as shown in Figures 3 to 5 above, the first component 510 includes a first sliding block 520, a first screw rod 530 and a first positioning base 540. Wherein, the first sliding block 520 is located in the sliding chute 321 and is slidably connected with the sliding chute 321. Illustratively, as shown in Figure 5 above, the bottom of the first sliding block 520 is also in an inverted "convex" shape, which is adapted to the shape of the sliding chute 321, so as to realize reliable sliding connection between the first sliding block 520 and the sliding chute 321, achieve high-precision guiding, and avoid lateral offset.

[0055] Furthermore, as Figure 6 As shown, the slide groove 321 is provided with a positioning protrusion 330 to achieve the positioning and buffering function of the first slider 520.

[0056] like Figure 3 , Figure 5 and Figure 6 As shown, the first slider 520 is connected to the handle 410 of the gaussmeter 400; the first slider 520 includes a first threaded hole 522a, which extends along the axial direction X of the Helmholtz coil 200.

[0057] Exemplarily, the first slider 520 includes a support plate 521 and a connecting block 522 connected together, wherein the support plate 521 extends along the height direction Z and is connected to the handle 410 of the gaussmeter 400. The connecting block 522 is provided with a first threaded hole 522a. A portion of the first screw 530 extends into the first threaded hole 522a and is threadedly engaged with the first threaded hole 522a.

[0058] The first positioning seat 540 is fixed to the opening end 322 of the slide groove 321, and the first screw 530 is rotatably connected to the first positioning seat 540 around its axial direction (i.e., the axial direction X of the Helmholtz coil 200); the first positioning seat 540 is used to restrict the movement of the first screw 530 along the axial direction X of the Helmholtz coil 200. Exemplarily, the first positioning seat 540 is plate-shaped and is fixedly connected to the end of the guide portion 320 of the fixed seat 300.

[0059] Specifically, a first sleeve 531 is provided on the outer sleeve of the first screw 530. The first sleeve 531 includes a first limiting part 532 and a second limiting part 533 spaced apart in its axial direction. The first positioning seat 540 includes a first connecting hole 541. The first screw 530 passes through the first connecting hole 541. The first limiting part 532 and the second limiting part 533 of the first sleeve 531 are located on both sides of the axial direction X of the first connecting hole 541, and the first limiting part 532 and the second limiting part 533 can respectively abut against the two end faces of the first positioning seat 540 to restrict the movement of the first screw 530 along the axial direction X of the Helmholtz coil 200.

[0060] For example, both the first limiting part 532 and the second limiting part 533 are disc-shaped, and their outer diameter is larger than the inner diameter of the first connecting hole 541. As a result, the first limiting part 532 and the second limiting part 533 cannot pass through the first connecting hole 541, thus forming an axial X-limiting of the first screw 530.

[0061] Understandably, the first limiting part 532 and the second limiting part 533 can respectively abut against the two end faces of the first positioning seat 540 to restrict the first screw 530 from moving along the axial direction X of the Helmholtz coil 200. At the same time, the first screw 530 is threaded into the first threaded hole 522a, so that the first screw 530 rotates relative to the first positioning seat 540, and the first slider 520 will move along the axial direction X of the Helmholtz coil 200. The handle 410 and the probe 420 of the gaussmeter 400 connected to the first slider 520 move synchronously along the axial direction X of the Helmholtz coil 200, thereby adjusting the horizontal distance between the free end of the probe 420 and the chip 10 to ensure the optimal measurement distance.

[0062] Furthermore, a first turntable 534 is provided at one end of the first sleeve 531. The cross-sectional area of ​​the first turntable 534 is larger than that of the first sleeve 531, which makes it easier for the operator to rotate the first turntable 534 and drive the first sleeve 531 and the first screw 530 connected thereto to rotate.

[0063] In this embodiment, the axial X-movement of the handle 410 and probe 420 of the gaussmeter 400 is achieved by the engagement of the first screw 530 with the first threaded hole 522a of the first slider 520. It is understood that in other embodiments, the axial X-movement of the handle 410 and probe 420 of the gaussmeter 400 can also be achieved in other ways, such as by an electric actuator.

[0064] like Figure 5 As shown, the displacement component 500 further includes a second component 550. The second component 550 is used to drive the handle 410 of the gaussmeter 400 to move relative to the Helmholtz coil 200 along the height direction Z, so that the probe 420 of the gaussmeter 400 moves relative to the chip 10 along the height direction Z. This supports precise adjustment of the height direction Z distance between the probe 420 and the chip 10, avoiding contact damage and ensuring the optimal measurement distance. In this embodiment, the second component 550 has a structure that is substantially the same as the first component 510.

[0065] Specifically, the second component 550 includes a second slider 560, a second screw 570, and a second positioning seat 580. The second slider 560 is connected to the handle 410 of the gaussmeter 400. Exemplarily, while the support plate 521 and connecting block 522 of the first slider 520 of the aforementioned first component 510 are connected at their bottoms, they are spaced apart in the axial direction X, thereby forming an upward-opening clearance groove 523 between the support plate 521 and the connecting block 522, allowing the second slider 560 to move vertically relative to the first slider 520 to enter and exit the clearance groove 523. In other words, the spacing between the support plate 521 and the connecting block 522 provides clearance space for the vertical movement of the second slider 560.

[0066] like Figure 5and Figure 6 As shown, the second slider 560 includes a second threaded hole 561 that extends along the height direction Z. A portion of the second screw 570 extends into the second threaded hole 561 and is threadedly engaged with it. The second positioning seat 580 is used to restrict the movement of the second screw 570 along the height direction Z.

[0067] Specifically, the second positioning seat 580 is fixed to the top of the support plate 521 of the first slider 520, and the second screw 570 extends along the height direction Z. The second screw 570 is rotatably connected to the second positioning seat 580 around its axial direction (i.e., the height direction Z). That is, the first slider 520 and the second slider 560 are connected by the second screw 570 and the second positioning seat 580. For example, the second positioning seat 580 is convex in shape, and the handle 410 of the gaussmeter 400 passes through the second slider 560 and the support plate 521 of the first slider 520, thereby facilitating the up-and-down movement of the handle 410 and the probe 420 of the gaussmeter 400 by moving the second slider 560.

[0068] It is understandable that, since the second slider 560 is connected to the first slider 520, the axial movement of the first slider 520 will cause the second screw 570, the second positioning seat 580, the second slider 560, the handle 410 of the gaussmeter 400 and the probe 420 connected to it to move axially in the X direction.

[0069] Furthermore, such as Figure 7 As shown, the support plate 521 of the first slider 520 has an elongated hole 521a extending along the height direction Z, through which the handle 410 of the gaussmeter 400 passes. The length of the elongated hole 521a in the height direction Z is greater than the outer diameter of the handle 410 of the gaussmeter 400, that is, it is greater than or equal to the stroke of the handle 410 of the gaussmeter 400 in the height direction Z. Thus, the elongated hole 521a facilitates the up-and-down movement of the handle 410 of the gaussmeter 400 under the action of the second slider 560, and avoids restricting the up-and-down movement of the handle 410 of the gaussmeter 400 because the handle 410 passes through the support plate 521 of the first slider 520 and the hole on the support plate 521 is too small.

[0070] like Figure 5 and Figure 6As shown, a second sleeve 571 is fitted over the second screw 570. The second sleeve 571 includes a third limiting portion 572 and a fourth limiting portion 573 spaced apart along its axial direction (corresponding to the height direction Z). The second positioning seat 580 includes a second connecting hole 581, through which the second screw 570 passes. The third limiting portion 572 and the fourth limiting portion 573 of the second sleeve 571 are located on opposite sides of the axial direction of the second connecting hole 581, and can respectively abut against the two end faces of the second positioning seat 580 to restrict the movement of the second screw 570 along the height direction Z. For example, the third limiting portion 572 and the fourth limiting portion 573 are both disc-shaped, with an outer diameter larger than the inner diameter of the second connecting hole 581. Therefore, the third limiting portion 572 and the fourth limiting portion 573 cannot pass through the second connecting hole 581, thus limiting the height direction Z of the second screw 570.

[0071] Understandably, the third limiting part 572 and the fourth limiting part 573 can respectively abut against the two end faces of the second positioning seat 580 to restrict the movement of the second screw 570 in the height direction Z. At the same time, the second screw 570 is threaded into the second threaded hole 561, so that the second screw 570 rotates relative to the second positioning seat 580, and the second slider 560 will move in the height direction Z. The handle 410 and the probe 420 of the gaussmeter 400 connected to the second slider 560 move synchronously in the height direction Z, thereby adjusting the vertical distance between the probe 420 and the chip 10, which can avoid contact damage and ensure the optimal measurement distance.

[0072] Furthermore, a second turntable 574 is provided at one end of the second sleeve 571. The cross-sectional area of ​​the second turntable 574 is larger than that of the second sleeve 571, which makes it easier for the operator to rotate the second turntable 574 and drive the second sleeve 571 and the second screw 570 connected thereto to rotate.

[0073] In this embodiment, the movement of the handle 410 and probe 420 of the gaussmeter 400 in the height direction Z is achieved by the cooperation of the second screw 570 with the second threaded hole 561 of the second slider 560. It is understood that in other embodiments, the movement of the handle 410 and probe 420 of the gaussmeter 400 in the height direction Z can also be achieved by other means, such as an electric actuator.

[0074] refer to Figures 1 to 5 The chip calibration device 100 also includes a support base 600 for supporting the chip 10 at the center point A of the Helmholtz coil 200.

[0075] Specifically, the support base 600 is located on one side of the fixed base 300 in the width direction Y and is fixed to the support platform 203 of the Helmholtz coil 200. One end of the support base 600 extends into the Helmholtz coil 200 in a direction perpendicular to the axial direction X of the Helmholtz coil 200 (i.e., the width direction Y of the fixed base 300). A circuit board 700 is fixed on the support base 600, and the chip 10 is fixed to the circuit board 700. That is, the support base 600 is positioned along the width direction Y of the fixed base 300 at the midpoint of the distance between the two coils of the Helmholtz coil 200, to ensure that the chip 10 it supports is located at the center point A of the Helmholtz coil 200.

[0076] like Figure 4 and Figure 7 As shown, the guide portion 320 of the fixed base 300 is provided with a receiving groove 323, which extends along the direction perpendicular to the axial direction X of the Helmholtz coil 200 (that is, the width direction Y of the fixed base 300), and one end of the support base 600 extends into the receiving groove 323.

[0077] For example, such as Figure 7 As shown, the receiving groove 323 is provided with a positioning protrusion 324, and the support 600 is provided with a corresponding positioning hole (not shown in the figure). When the support 600 slides into the receiving groove 323, the positioning protrusion 324 is inserted into the positioning hole on the support 600 to limit the continued sliding of the support 600.

[0078] Although the present invention has been illustrated and described with reference to certain preferred embodiments, those skilled in the art should understand that the above description is a further detailed explanation of the present invention in conjunction with specific embodiments, and should not be construed as limiting the specific implementation of the present invention to these descriptions. Those skilled in the art can make various changes in form and detail, including some simple deductions or substitutions, without departing from the spirit and scope of the present invention.

Claims

1. A chip calibration device, characterized in that, include: A Helmholtz coil, including a center point for placing a chip; The Helmholtz coil includes a support platform; A mounting base is fixed to the support platform and extends along the axial direction of the Helmholtz coil; A gaussmeter includes a connected handle and a probe, the probe extending along the axial direction of the Helmholtz coil, with one end of the probe away from the handle positioned directly above the chip; A displacement assembly is connected to the fixed base; the displacement assembly is connected to the handle of the gaussmeter, and the displacement assembly is used to drive the handle of the gaussmeter to move relative to the Helmholtz coil in the height direction and the axial direction of the Helmholtz coil, so that the probe of the gaussmeter moves relative to the chip in the height direction and the axial direction of the Helmholtz coil.

2. The chip calibration device as described in claim 1, characterized in that, The displacement component includes: The first component is used to move the handle of the gaussmeter relative to the Helmholtz coil along the axial direction of the Helmholtz coil, so that the probe of the gaussmeter moves relative to the chip along the axial direction of the Helmholtz coil. The second component is used to move the handle of the gaussmeter relative to the Helmholtz coil in the height direction, so that the probe of the gaussmeter moves relative to the chip in the height direction.

3. The chip calibration device as described in claim 2, characterized in that, The mounting base includes a groove that extends axially along the Helmholtz coil and includes an open end that passes through one end of the mounting base. The first component includes: A first slider is slidably connected to the groove along the axial direction of the Helmholtz coil; the first slider is connected to the handle of the gaussmeter; the first slider includes a first threaded hole extending along the axial direction of the Helmholtz coil. A first screw, a portion of which extends into the first threaded hole and is threadedly engaged with the first threaded hole; A first positioning seat is fixed to the open end of the slide groove, and the first screw is rotatably connected to the first positioning seat around its axial direction; the first positioning seat is used to restrict the first screw from moving axially along the Helmholtz coil.

4. The chip calibration device as described in claim 3, characterized in that, The first screw is fitted with a first sleeve, which includes a first limiting part and a second limiting part spaced apart in its axial direction; The first positioning seat includes a first connecting hole, the first screw passes through the first connecting hole, and the first limiting part and the second limiting part of the first sleeve are respectively located on both sides of the axial direction of the first connecting hole. The first limiting part and the second limiting part can respectively abut against the two end faces of the first positioning seat to restrict the first screw from moving along the axial direction of the Helmholtz coil.

5. The chip calibration apparatus as described in claim 4, characterized in that, The first sleeve has a first turntable at one end.

6. The chip calibration apparatus as described in claim 3, characterized in that, The second component includes: A second slider is connected to the handle of the gaussmeter; the second slider includes a second threaded hole that extends along the height direction; The second screw extends along the height direction, and a portion of the second screw extends into the second threaded hole and is threadedly engaged with the second threaded hole. The second positioning seat is fixedly connected to the first slider, and the second screw is rotatably connected to the second positioning seat around its axial direction; the second positioning seat is used to restrict the movement of the second screw along the height direction.

7. The chip calibration apparatus as described in claim 6, characterized in that, The first slider includes a clearance groove, the opening of which is positioned directly opposite the second slider along the height direction, so that the second slider can move relative to the first slider along the height direction.

8. The chip calibration apparatus as described in claim 6 or 7, characterized in that, The second screw is fitted with a second sleeve, which includes a third limiting part and a fourth limiting part spaced apart in its axial direction; The second positioning seat includes a second connecting hole, the second screw passes through the second connecting hole, and the third limiting part and the fourth limiting part of the second sleeve are respectively located on both sides of the axial direction of the second connecting hole, and the third limiting part and the fourth limiting part can respectively abut against the two end faces of the second positioning seat to restrict the movement of the second screw in the height direction.

9. The chip calibration apparatus as described in claim 8, characterized in that, The second sleeve has a second turntable at one end.

10. The chip calibration apparatus as described in claim 1, characterized in that, Also includes: A support base is provided on one side of the fixed base, and one end of the support base extends into the center point of the Helmholtz coil in a direction perpendicular to the axial direction of the Helmholtz coil; the fixed base is provided with a receiving groove, and one end of the support base extends into the receiving groove. A circuit board is fixed to the support base; the circuit board is used to fix the chip.

Images