An inspection device with off-line vision guidance

Abstract

The utility model discloses a semiconductor industry detection equipment technical field's detection device with offline visual guidance function, include: motion platform and be located on the clamping subassembly, detection probe subassembly and camera subassembly of motion platform, detection probe subassembly and camera subassembly independent drive, camera subassembly includes two -dimensional drive subassembly and is located on the visual component of two -dimensional drive subassembly mobile end, and this application carries out alignment identification to needle point and circuit board before testing through camera subassembly, is used for the path planning of detection probe subassembly, in the testing process, camera subassembly evades to one side non - testing area offline, makes camera subassembly not with detection probe subassembly together in the process of detection moves, and the structural device also has simplified, and each axle load quality has reduced, and the overall dynamic performance has been promoted, has improved the test efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor industry testing equipment, specifically to a testing device with offline visual guidance function. Background Technology

[0002] Flying probe testing equipment uses movable probes to test the electrical performance of PCB boards. Flying probe testing equipment typically contains 4-8 probe measurement head systems with precise independent motion control; these probe measurement head systems can move at high speed in three-dimensional space; during testing, the probes sequentially and precisely contact the test pads and vias on the PCB board, thereby testing the components on the unit under test (UUT) one by one. Existing flying probe testing devices equip each test probe system with an independent CCD camera to achieve real-time online rapid alignment and to view the condition of specific test points or pads. This real-time online detection and vision-guided structural design requires one camera for each probe measurement head system, which increases the cost of the equipment. Most current horizontal flying probe testing devices use an x+r+z structure motion combination. When each probe measurement head system is equipped with a vision hardware system to follow in real time, it increases the load on the r-axis. Utility Model Content

[0003] The purpose of this invention is to provide a detection device with offline visual guidance function, which solves the problems existing in the current flying needle detection device.

[0004] The present invention achieves the above objectives through the following technical solution: a detection device with offline visual guidance function, comprising: a motion platform and a clamping component, a detection probe component and a camera component disposed on the motion platform, wherein the detection probe component and the camera component are driven independently; The camera component includes a two-dimensional driving component and a vision component disposed on the mobile end of the two-dimensional driving component. The detection probe assembly includes a driving device and a probe measurement component disposed on the moving end of the driving device.

[0005] Preferably, the motion platform includes a base, a column on top of the base, a crossbeam on the column, a shock-absorbing seat at the bottom of the base, a frame at the bottom of the shock-absorbing seat, and shock-absorbing support feet on the frame.

[0006] Preferably, the detection device further includes a control component, which includes a rear electrical cabinet component, a front electrical cabinet component, a top electrical cabinet component, a signal excitation acquisition component, and an industrial control computer component.

[0007] Preferably, there are two sets of the detection probe assembly and the camera assembly, and the two sets of the detection probe assembly and the two sets of the camera assembly are respectively located on the upper and lower sides of the clamping assembly. The driving device includes two parallel probe X-axis guide rails and two guide components mounted on the probe X-axis guide rails, with the probe measurement component mounted on the guide components.

[0008] Preferably, the guiding assembly includes a probe X-axis stage mounted on the probe X-axis guide rail, a probe X-axis feedback component mounted on the motion platform, a probe X-axis drive component for moving the probe X-axis stage, a probe X-axis drag chain between the probe X-axis stage and the motion platform, a probe R-axis drive component mounted on the probe X-axis stage, a probe Z-axis frame mounted on the probe R-axis drive component, a probe Z-axis guide rail and a probe Z-axis feedback component mounted on the probe Z-axis frame, a cantilever mounted on the probe Z-axis guide rail, and a probe Z-axis drive component for moving the cantilever. The probe measurement assembly includes a probe assembly mounted on the cantilever.

[0009] Preferably, the probe R-axis drive is an integrated DD motor, and the probe Z-axis drive is a voice coil motor.

[0010] Preferably, the probe's X-axis carrier is provided with a flexible drag chain.

[0011] Preferably, the two-dimensional drive assembly includes a camera X-axis guide rail and a camera X-axis feedback device mounted on the motion platform, a camera X-axis stage mounted on the camera X-axis guide rail, a camera X-axis drive device for moving the camera X-axis stage, a camera X-axis cable chain between the camera X-axis stage and the motion platform, a camera Y-axis frame mounted on the camera X-axis stage, a camera Y-axis guide rail and a camera Y-axis feedback device mounted on the camera Y-axis frame, a camera Y-axis support stage mounted on the camera Y-axis guide rail, a camera Y-axis cable chain between the camera X-axis stage and the camera Y-axis support stage, and a camera Y-axis drive device for moving the camera Y-axis support stage.

[0012] Preferably, the vision component includes a camera Z-axis frame mounted on a camera Y-axis support platform, a slider mounted on the camera Z-axis frame, a camera Z-axis drive for driving the slider to move, and a vision component mounted on the slider.

[0013] Preferably, the camera X-axis guide rail is a probe X-axis guide rail.

[0014] Preferably, the driving component is used to replace the slider. The camera Z-axis driving component is a stepper motor. The driving component includes a lead screw on the output shaft of the stepper motor, a sliding nut on the lead screw, and a fixed seat on the sliding nut and connected to the vision component.

[0015] The beneficial effects of this utility model are as follows: 1. Before testing, the camera assembly performs alignment identification of the probe tip and circuit board, which is used for path planning of the detection probe assembly. During the test, the camera assembly is offline and avoids moving to a non-test area on one side, so that the camera assembly does not move with the detection probe assembly during the test. Compared with traditional online camera inspection equipment, the offline camera eliminates the vision hardware system of each measuring head system, simplifies the structure, reduces the load mass of each axis, improves the overall power performance, improves the test efficiency, reduces the control burden, reduces the impact of inertial jitter, lowers the requirements for power drive control performance, and saves manufacturing costs. 2. The obstacle avoidance processing of the algorithm is reduced, making path planning easier and saving motion control time. The camera component adopts independent x+y motion combination control of motion form, which greatly improves the accuracy of camera recognition and positioning, thereby improving the measurement accuracy of the whole machine. It can test smaller pads, and ultimately improves the stability of measurement and the accuracy and reliability of data. It reduces the number and scale of wiring for each probe head measurement system, greatly reducing the spatial difficulty of wiring and the mutual interference between cables. 3. The designed camera's Z-axis miniature electric adjustment device moves the entire vision system to a suitable working distance to automatically adapt to different plate thicknesses. The miniature electric system is integrated into the machine's control system, and the system commands the electric device to directly drive the vision system to the corresponding working height. This improves the compatibility of the inspection equipment with different plate thicknesses, increases inspection efficiency, facilitates adjustment, and ensures good safety. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the detection device of this utility model; Figure 2 This is a front view of the detection device of this utility model; Figure 3 This is a side view of the detection device of this utility model; Figure 4 This is a rear view of the detection device of this utility model; Figure 5 This is a schematic diagram of the connection structure between the guide assembly and the probe measurement assembly of this utility model; Figure 6 This utility model Figure 5 Enlarged schematic diagram of the structure at point A in the middle; Figure 7 This is a schematic diagram of the motion platform structure of this utility model; Figure 8 This is a schematic diagram of the connection structure between the motion platform and the camera assembly of this utility model; Figure 9This is a schematic diagram of the connection structure between the two-dimensional driving component and the vision component of this utility model; Figure 10 This utility model Figure 7 Enlarged schematic diagram of the structure at point B; Figure 11 This utility model Figure 10 Enlarged schematic diagram of the structure at point C; Figure 12 This is a schematic diagram of the drive component structure of this utility model.

[0017] In the diagram: 1. Motion platform; 101. Base; 102. Column; 103. Crossbeam; 104. Vibration damping seat; 105. Frame; 106. Vibration damping support foot; 2. Clamping assembly; 3. Detection probe assembly; 301. Guide assembly; 3011. Probe X-axis drive; 3012. Probe X-axis cable chain; 3013. Probe X-axis guide rail; 3014. Probe X-axis feedback component; 3015. Probe X-axis stage; 302. Probe measurement assembly; 3021. Probe R-axis drive; 3022. Probe Z-axis drive; 3023. Flexible cable chain; 3024. Probe Z-axis frame; 3025. Probe Z-axis guide rail; 3026. Cantilever; 3027. Probe assembly; 3028. Probe Z-axis feedback component; 4. Camera assembly; 401. Two-dimensional drive assembly; 4011. 4012. Camera X-axis drive component; 4013. Camera X-axis cable chain; 4014. Camera X-axis stage; 4015. Camera X-axis feedback component; 4016. Camera Y-axis guide rail; 4017. Camera Y-axis frame; 4018. Camera Y-axis support stage; 40171. Camera Y-axis guide rail; 40172. Camera Y-axis drive component; 4018. Camera Y-axis cable chain; 4019. Camera Y-axis feedback component; 402. Vision assembly; 4021. Camera Z-axis frame; 4022. Camera Z-axis drive component; 4023. Slider; 4024. Vision component; 4025. Sliding nut; 4026. Lead screw; 4027. Fixing base; 5. Rear electrical cabinet assembly; 6. Front electrical cabinet assembly; 7. Top electrical cabinet assembly; 8. Signal excitation and acquisition assembly; 9. Industrial control computer assembly; 10. Anti-collision block. Detailed Implementation

[0018] The present application will now be described in further detail with reference to the accompanying drawings. It should be noted that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.

[0019] Example 1 Please see Figure 1 , Figure 2 , Figure 3 and Figure 4 A detection device with offline visual guidance function includes: a motion platform 1, on which a clamping component 2, a detection probe component 3, a camera component 4 and a control component are provided; there are two sets of detection probe components 3 and two sets of camera components 4, which are respectively located on the upper and lower sides of the clamping component 2; the camera component 4 includes a two-dimensional driving component 401 and a vision component 402 disposed on the moving end of the two-dimensional driving component 401; the detection probe component 3 includes a driving device and a probe measurement component 302 disposed on the moving end of the driving device.

[0020] It should be noted that the clamping component 2 is used to fix the PCB board to be inspected. The two-dimensional driving component 401 drives the vision component 402 to move along the X and Y axes to identify the PCB board (to identify the alignment between the probe tip and the PCB board and to confirm the spatial position of the probe tip and the PCB board). After completion, the two-dimensional driving component 401 drives the vision component 402 to reset. The control component plans the path according to the information detected by the vision component 402, and then controls the detection probe component 3 to perform the test on the PCB board according to the planned path.

[0021] In this embodiment, as a further optimization, please refer to... Figure 2 , Figure 5 and Figure 6 The driving device includes two probe X-axis guide rails 3013, two guide components 301 mounted on the probe X-axis guide rails 3013, and probe measuring components 302 mounted on the guide components 301. The two probe X-axis guide rails 3013 are parallel to each other and mounted on the motion platform 1 (the two probe X-axis guide rails 3013 are above the motion platform 1 and below the motion platform 1). There are four probe measuring components 302 on the upper and lower sides of the clamping component 2. The four probe measuring components 302 are arranged symmetrically at an angle to each other. The detection ends of the four probe measuring components 302 on the upper side face downwards, and the detection ends of the four probe measuring components 302 on the lower side face upwards. The guide assembly 301 includes a probe X-axis stage 3015 slidably mounted on the probe X-axis guide rail 3013, a probe X-axis feedback component 3014 mounted on the motion platform 1, a probe X-axis drive component 3011 (such as a linear motor, used to drive the probe X-axis stage 3015 to move) mounted on the motion platform 1 and connected to the probe X-axis stage 3015, a probe X-axis drag chain 3012 between the probe X-axis stage 3015 and the motion platform 1, a probe R-axis drive component 3021 mounted on the probe X-axis stage 3015, a probe Z-axis frame 3024 mounted on the probe R-axis drive component 3021, and a probe X-axis support frame 3024 mounted on the probe X-axis stage 3015. The probe Z-axis guide rail 3025 and probe Z-axis feedback component 3028 are mounted on the Z-axis frame 3024, the cantilever 3026 is mounted on the probe Z-axis guide rail 3025, and the probe Z-axis drive component 3022 (used to drive the cantilever 3026 to move) is mounted on the probe Z-axis frame 3024 and connected to the cantilever 3026. The probe measurement assembly 302 includes a probe assembly 3027 mounted on the cantilever 3026. The entire detection probe assembly 3 is designed to be relatively simple, without the hardware layout of related camera vision, making the movement more convenient and the interference effect smaller. This is more conducive to probe measurement path planning, reduces obstacle avoidance algorithm processing, and saves analysis and control time.

[0022] It should be noted that the probe X-axis cable chain 3012 is a dual cable chain, with two cables running in parallel. One cable chain carries high-voltage electricity, while the other carries low-voltage electricity, achieving a strong-weak separation arrangement and reducing electromagnetic compatibility issues.

[0023] In this embodiment, as a further optimization, please refer to... Figure 6 The probe R-axis drive 3021 is an integrated DD motor with high-precision angular resolution motion accuracy. This direct-drive torque motor greatly improves the rotational motion control accuracy of the R-axis and is also the key to the accuracy of the entire probe testing system. The probe Z-axis drive 3022 is a voice coil motor, which is suitable for high-frequency dynamic motion and precise force control.

[0024] In this embodiment, as a further optimization, please refer to... Figure 6 A flexible drag chain 3023 is provided on the X-axis stage 3015 of the probe; in order to better organize the circuit of the detection probe assembly 3, a flexible drag chain 3023 protection system is arranged for the organization and protection of the circuit.

[0025] In this embodiment, as a further optimization, please refer to... Figure 7 , Figure 8 , Figure 9 , Figure 10 and Figure 11The two-dimensional drive assembly 401 includes a camera X-axis guide rail 4015 and a camera X-axis feedback component 4014 mounted on the motion platform 1; a camera X-axis stage 4013 slidably mounted on the camera X-axis guide rail 4015; a camera X-axis drive component 4011 (such as a linear motor, used to drive the camera X-axis stage 4013 to move) mounted on the motion platform 1 and connected to the camera X-axis stage 4013; a camera X-axis cable chain 4012 between the camera X-axis stage 4013 and the motion platform 1; a camera Y-axis frame 4016 mounted on the camera X-axis stage 4013; a camera Y-axis guide rail 40171 and a camera Y-axis feedback component 4019 mounted on the camera Y-axis frame 4016; and a camera Y-axis support stage 4017 slidably mounted on the camera Y-axis guide rail 40171. The camera Y-axis drag chain 4018 is located between the camera X-axis stage 4013 and the camera Y-axis stage 4017, and the camera Y-axis drive component 40172 (such as a linear motor, used to drive the camera Y-axis stage 4017 to move) is located on the camera Y-axis frame 4016 and connected to the camera Y-axis stage 4017. The vision component 402 includes a camera Z-axis frame 4021 located on the camera Y-axis stage 4017, a slider 4023 located on the camera Z-axis frame 4021, a camera Z-axis drive component 4022 (such as a linear motor, used to drive the slider 4023 to move up and down) located on the camera Z-axis frame 4021 and connected to the slider 4023, and a vision component 4024 located on the slider 4023. The vision component 4024 includes a camera, a lens and a light source.

[0026] It should be noted that there are two camera components 4, located on the upper and lower sides of the clamping component 2 respectively. The two camera components 4 have an x+y motion form, which can take full-coverage images of the measurement area with the camera, and align the probe tip of the lower probe measurement system before the measurement board works. Traditional online vision-guided positioning function components follow the probe head measurement system with a mixed x+r degree of freedom motion combination. Translation and rotational motions are dynamically coupled, and the coordinated control of linear velocity and angular velocity needs to be considered. The control accuracy of the rotation axis is usually lower than that of the translation axis, and the influence of rotation on position needs to be considered. The offline vision alignment system of this application has an independent x+y linear translation degree of freedom combination motion form. The motion of each axis is independent and can be controlled individually. The linear interpolation algorithm is simple and direct. This motion combination form greatly improves the camera position motion control accuracy, reduces the position error of pixel recognition, and thus improves the accuracy of vision-guided positioning.

[0027] It should also be noted that the camera Y-axis frame 4016 is an aluminum alloy structure with a single-sided stiffener arrangement. This structure greatly reduces weight and the load on the camera motion system while ensuring frame rigidity. The camera assembly 4 adopts a direct-drive structure design, making the equipment structure more compact, saving space, and reducing weight. This reduces the assembly complexity and debugging difficulty of the equipment. It avoids noise and vibration generated by mechanical transmissions such as gear meshing and belt friction, reducing vibration interference to equipment detection. This direct-drive motion structure, coupled with the closed-loop control of the feedback component, greatly improves the position motion control accuracy and comprehensively enhances the overall motion performance, featuring high precision, high speed, high reliability, and high efficiency. At the same time, the camera Y-axis bearing platform 4017 has flexible functional expansion capabilities. The activity can be easily achieved by adding components such as laser programmers and displacement sensors to the camera's Y-axis support platform 4017. For example, automated laser marking can be performed at the detection point to facilitate subsequent tracking and differentiation of the problematic circuit board. By deploying displacement sensors, the entire area of ​​the circuit board can be measured at the beginning of the test to obtain a precise value of the warping degree of the entire board. Then, through data processing, relevant algorithms are generated to perform dynamic compensation on the Z-axis during the measurement process, improving the contact accuracy of the probe and improving the accuracy and reliability of data acquisition. At the same time, the relative displacement in the Z-axis can precisely control the contact force to protect the circuit board from scratches, increasing the functionality of the whole machine and meeting customer needs. Anti-collision blocks 10 are installed on the left side of the motion platform 1 and the right side of the camera assembly 4 (e.g., Figure 8 (As shown), used for the protection of offline camera motion systems.

[0028] In this embodiment, as a further optimization, please refer to... Figure 12 The slider 4023 is replaced by a drive assembly. The camera Z-axis drive component 4022 is a stepper motor. The drive assembly includes a lead screw 4026 on the output shaft of the stepper motor, a sliding nut 4025 on the lead screw 4026, and a fixed seat 4027 on the sliding nut 4025. The fixed seat 4027 is connected to the vision component 4024 through an intermediate connecting plate. The stepper motor is fixed to the camera Z-axis frame 4021 through a motor connecting plate. The stepper motor drives the lead screw 4026 to rotate, causing the sliding nut 4025 to drive the fixed seat 4027 and the vision component 4024 up or down, so that the vision component 4024 moves to a suitable working distance to automatically adapt to PCB boards of different thicknesses and ensure the quality of image information acquisition.

[0029] It should be noted that the stepper motor has a closed-loop position feedback encoder function, which makes the displacement control more precise. The shaft end of the lead screw is inserted into the rotary bearing and connected to the inner ring of the bearing through the shaft clip.

[0030] In this embodiment, as a further optimization, please refer to... Figure 9 The camera X-axis guide rail 4015 is the probe X-axis guide rail 3013; the camera X-axis guide rail 4015 of the camera assembly 4 adopts one of the two probe X-axis guide rails 3013 in the detection probe assembly 3, and uses the probe X-axis guide rail 3013 in the detection probe assembly 3 as the guide system of the x-axis of the camera assembly 4, which avoids the structural redundancy and complexity of arranging in a separate space, simplifies the structure, compresses the length and width dimensions of the overall frame structure, and saves costs.

[0031] In this embodiment, as a further optimization, please refer to... Figure 7 The motion platform 1 includes a base 101, two columns 102 respectively located on the top sides of the base 101, a crossbeam 103 located on the top of the two columns 102, a shock-absorbing seat 104 located at the bottom of the base 101, a frame 105 located at the bottom of the shock-absorbing seat 104, and shock-absorbing support feet 106 located at the bottom of the frame 105.

[0032] In this embodiment, as a further optimization, please refer to... Figure 1 , Figure 2 , Figure 3 and Figure 4 The control components include a rear electrical cabinet assembly 5, a front electrical cabinet assembly 6, a top electrical cabinet assembly 7, a signal excitation acquisition assembly 8, and an industrial control computer assembly 9. The top electrical cabinet assembly 7 is used for motion control measurement of the four upper measuring head systems, while the front and rear electrical cabinet assemblies are used for motion control measurement of the four lower measuring head systems.

[0033] It should be noted that the feedback components (probe X-axis feedback component 3014, probe Z-axis feedback component 3028, camera X-axis feedback component 4014, camera Y-axis feedback component 4019) designed above can be grating rulers, used to detect the movement position and feed it back to the control system to ensure accurate movement.

[0034] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A detection device with offline visual guidance function, characterized in that, include: The motion platform (1) and the clamping assembly (2), the detection probe assembly (3) and the camera assembly (4) disposed on the motion platform (1), wherein the detection probe assembly (3) and the camera assembly (4) are driven independently; The camera component (4) includes a two-dimensional driving component (401) and a vision component (402) disposed on the mobile end of the two-dimensional driving component (401). The detection probe assembly (3) includes a driving device and a probe measurement assembly (302) disposed on the moving end of the driving device.

2. The detection device with offline visual guidance function according to claim 1, characterized in that, The motion platform (1) includes a base (101), a column (102) on top of the base (101), a crossbeam (103) on the column (102), a shock-absorbing seat (104) at the bottom of the base (101), a frame (105) at the bottom of the shock-absorbing seat (104), and shock-absorbing support feet (106) on the frame (105).

3. The detection device with offline visual guidance function according to claim 1, characterized in that, The detection device also includes a control component, which includes a rear electrical cabinet component (5), a front electrical cabinet component (6), a top electrical cabinet component (7), a signal excitation acquisition component (8), and an industrial control computer component (9).

4. The detection device with offline visual guidance function according to claim 1, characterized in that, The detection probe assembly (3) and the camera assembly (4) each have two sets, and the two sets of detection probe assemblies (3) and the two sets of camera assemblies (4) are respectively located on the upper and lower sides of the clamping assembly (2); The driving device includes two parallel probe X-axis guide rails (3013) and two guide components (301) disposed on the probe X-axis guide rails (3013), and the probe measurement component (302) is disposed on the guide component (301).

5. A detection device with offline visual guidance function according to claim 4, characterized in that, The guiding assembly (301) includes a probe X-axis stage (3015) mounted on the probe X-axis guide rail (3013), a probe X-axis feedback element (3014) mounted on the motion platform (1), a probe X-axis drive element (3011) for driving the probe X-axis stage (3015) to move, a probe X-axis cable chain (3012) between the probe X-axis stage (3015) and the motion platform (1), and a probe R-axis drive element (302) mounted on the probe X-axis stage (3015). 1) A probe Z-axis frame (3024) mounted on the probe R-axis drive (3021), a probe Z-axis guide rail (3025) and a probe Z-axis feedback component (3028) mounted on the probe Z-axis frame (3024), a cantilever (3026) mounted on the probe Z-axis guide rail (3025), and a probe Z-axis drive (3022) for driving the cantilever (3026) to move. The probe measurement assembly (302) includes a probe assembly (3027) mounted on the cantilever (3026).

6. A detection device with offline visual guidance function according to claim 5, characterized in that, The probe R-axis drive (3021) is an integrated DD motor, and the probe Z-axis drive (3022) is a voice coil motor.

7. A detection device with offline visual guidance function according to claim 5, characterized in that, The probe X-axis stage (3015) is equipped with a flexible drag chain (3023).

8. A detection device with offline visual guidance function according to claim 4, characterized in that, The two-dimensional drive assembly (401) includes a camera X-axis guide rail (4015) and a camera X-axis feedback component (4014) mounted on the motion platform (1), a camera X-axis stage (4013) mounted on the camera X-axis guide rail (4015), a camera X-axis drive component (4011) for driving the camera X-axis stage (4013) to move, a camera X-axis cable chain (4012) between the camera X-axis stage (4013) and the motion platform (1), and a drive component (4011) mounted on the camera X-axis stage (4013). The camera includes a Y-axis frame (4016), a camera Y-axis guide rail (40171) and a camera Y-axis feedback device (4019) mounted on the camera Y-axis frame (4016), a camera Y-axis support platform (4017) mounted on the camera Y-axis guide rail (40171), a camera Y-axis cable chain (4018) between the camera X-axis support platform (4013) and the camera Y-axis support platform (4017), and a camera Y-axis drive device (40172) for moving the camera Y-axis support platform (4017).

9. A detection device with offline visual guidance function according to claim 8, characterized in that, The vision component (402) includes a camera Z-axis frame (4021) mounted on a camera Y-axis support platform (4017), a slider (4023) mounted on the camera Z-axis frame (4021), a camera Z-axis drive (4022) for driving the slider (4023) to move, and a vision component (4024) mounted on the slider (4023).

10. A detection device with offline visual guidance function according to claim 8, characterized in that, The camera X-axis guide rail (4015) is the probe X-axis guide rail (3013).

11. A detection device with offline visual guidance function according to claim 8, characterized in that, The slider (4023) is replaced by the drive assembly. The camera Z-axis drive (4022) is a stepper motor. The drive assembly includes a lead screw (4026) on the output shaft of the stepper motor, a sliding nut (4025) on the lead screw (4026), and a fixed seat (4027) on the sliding nut (4025) and connected to the vision component (4024).

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