A lens adjustment device

Abstract

The utility model discloses a lens adjusting device, the lens adjusting device includes the surface for installing lens, and respectively with the first end surface and the second end surface of surface perpendicular each other respectively set in the both ends of surface. First top pull structure sets up on the mounting plate, and is located the face side of the first end surface of lens adjusting device. The adjusting plate is arranged on the surface of mounting plate, and is located the face side of the first end surface of lens adjusting device, and the adjusting plate is movably connected with first top pull structure, and first top pull structure is configured to allow the adjusting plate to rotate along the axis perpendicular to the surface of mounting plate. The adapter plate is arranged on the surface of adjusting plate, and the surface of adapter plate is formed as the surface of lens adjusting device. Second top pull structure sets up on the surface of adapter plate, and second top pull structure is configured to allow the adapter plate to rotate along the axis perpendicular to the first end surface. The utility model can avoid lens adjustment string and occupy small space, is favorable to the installation and adjustment efficiency, is especially suitable for the installation and adjustment of larger lens.

Description

Technical Field

[0001] This utility model relates to the field of optical assembly technology, specifically to a lens adjustment device. Background Technology

[0002] In semiconductor measurement equipment, especially precision thin-film measurement equipment used to measure various thin-film parameters and subtle changes (such as film thickness, refractive index, stress, etc.) in semiconductor manufacturing processes, advanced non-contact spectral measurement technology is typically employed. Due to the high measurement accuracy, higher requirements are placed on the sensitivity, applicability, and stability of the equipment. To better meet the equipment requirements, integrated lenses are often designed. However, integrated lenses are relatively large and heavy, which places higher demands on the lens assembly and adjustment methods.

[0003] Furthermore, existing lenses are limited by small light-sealing spaces and limited installation locations, often requiring adapters to be transferred to external areas for mounting and adjustment. However, existing lens adapters are bulky and cumbersome during installation and adjustment, increasing hidden costs and hindering product competitiveness. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a lens adjustment device to improve the adjustment efficiency and save assembly space.

[0005] To achieve the above and other related objectives, this utility model provides a lens adjustment device, which includes a surface for mounting a lens, and a first end face and a second end face respectively disposed at both ends of the surface and perpendicular to each other; the lens adjustment device includes:

[0006] Mounting plate;

[0007] The first top-pull structure is mounted on the mounting plate and located on the side of the first end face of the lens adjustment device;

[0008] An adjustment plate is disposed on the surface of the mounting plate, on the side of the first end face of the lens adjustment device. The adjustment plate is movably connected to a first top-pull structure, which is configured to allow the adjustment plate to rotate along an axis perpendicular to the surface of the mounting plate.

[0009] An adapter plate is disposed on the surface of the adjustment plate, and the surface of the adapter plate forms the surface of the lens adjustment device;

[0010] A second top-pull structure is disposed on the surface of the adapter plate, and the second top-pull structure is configured to allow the adapter plate to rotate along an axis perpendicular to the first end face.

[0011] Optionally, on the side of the second end face of the lens adjustment device, a positioning structure is provided on the adjustment plate. The positioning structure extends from the adjustment plate to the adapter plate in a direction parallel to the second end face to limit the position of the adapter plate based on the position of the adjustment plate.

[0012] Optionally, the adjustment plate is provided with a first fixing structure, which is used to fix the adjustment plate to the mounting plate when the adjustment plate is rotated to the desired position.

[0013] Optionally, the adapter plate is provided with a second fixing structure, which is used to fix the adapter plate to the adjusting plate when the adapter plate is adjusted to the required position.

[0014] Optionally, at least two first pull structures are provided at intervals on the mounting plate.

[0015] Optionally, the first push-pull structure includes an adjusting block, a first push-out structure, and a first pull-back structure. The adjusting block is fixedly mounted on the mounting plate, and the first push-out structure and the first pull-back structure are mounted on the adjusting block. The set screw of the movable first push-out structure pushes the adjusting plate out through the push-out hole on the adjusting block. The set screw of the second pull-back structure is connected to the adjusting plate, and the set screw of the movable second pull-back structure pulls the adjusting plate back through the pull-back hole on the adjusting block.

[0016] Optionally, the second push-pull structure includes a second push-out structure and a second pull-back structure. The push screw of the movable second push-out structure pushes out the adjustment plate through the push-out hole on the adapter plate to make the adapter plate move away from the adjustment plate. The push screw of the second pull-back structure is connected to the adjustment plate. The push screw of the movable second pull-back structure pulls back the adjustment plate through the pull-back hole on the adapter plate to make the adapter plate move closer to the adjustment plate.

[0017] Optionally, the adapter plate is provided with a plurality of second top pull structures, which are arranged along the edge of the adapter plate.

[0018] Optionally, along the direction from the first end face to the second end face, the size of the mounting plate is larger than the size of the adapter plate and larger than the size of the adjusting plate; the size of the adjusting plate is the same as the size of the adapter plate, and the adapter plate and the adjusting plate are positioned close to the first end face.

[0019] Optionally, the lens includes a body module and a lens module, the body module being connected to an adapter plate, and the lens module extending from one end of the body module along a direction from a first end face to a second end face.

[0020] Compared with the prior art, the lens adjustment device of this utility model has at least the following beneficial effects:

[0021] The lens adjustment device of this utility model includes a surface for mounting a lens, and a first end face and a second end face respectively disposed at both ends of the surface and perpendicular to each other. The lens adjustment device includes a mounting plate, a first pull structure, an adjustment plate, an adapter plate, and a second pull structure. The first pull structure is disposed on the mounting plate and located on the side of the first end face of the lens adjustment device. The adjustment plate is disposed on the surface of the mounting plate, on the side of the first end face of the lens adjustment device, and is movably connected to the first pull structure. The first pull structure is configured to allow the adjustment plate to rotate along an axis perpendicular to the surface of the mounting plate. The adapter plate is disposed on the surface of the adjustment plate, and the surface of the adapter plate forms the surface of the lens adjustment device. The second pull structure is disposed on the surface of the adapter plate, and the second pull structure is configured to allow the adapter plate to rotate along an axis perpendicular to the first end face. Therefore, this utility model forms a simple lens adjustment device by using the position and structure of three plates and two top pull structures. This device can adjust the rotation (around the Y-axis) and tilt (around the Z-axis) of the lens mounted on its surface, and the two processes of adjusting rotation and tilt can be effectively separated to avoid cross-adjustment and improve the efficiency of assembly and adjustment. In addition, this device occupies little space and is especially suitable for assembling and adjusting larger lenses. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the lens adjustment device in an embodiment of the present utility model;

[0023] Figure 2 This is a schematic diagram of the structure of the adjustment plate in an embodiment of the present utility model;

[0024] Figure 3 This is a schematic diagram of the adapter plate in an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the lens adjustment device with an integrated lens installed in an embodiment of the present invention.

[0026] Illustration of reference numerals in the attached diagram:

[0027] 100. Lens adjustment device; 101. Surface; 102. First end face; 103. Second end face; 110. Mounting plate; 120. First push-pull structure; 121. Adjusting block; 122. First ejection structure; 123. First pull-back structure; 130. Adjusting plate; 131. Positioning structure; 132. First fixing structure; 133. First set screw hole; 134. Second set screw hole; 140. Adapter plate; 141. Second fixing structure; 142. Lens mounting hole; 150. Second push-pull structure; 151. Second ejection structure; 1511. Ejection hole; 152. Second pull-back structure; 1521. Pull-back hole; 160. Weight reduction hole; 170. Pin hole; 200. Lens; 201. Body module; 202. Lens module. Detailed Implementation

[0028] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, unless otherwise specified, the following embodiments and features in the embodiments can be combined with each other.

[0029] It should be understood that the illustrations provided in the embodiments of this utility model are merely schematic representations of the basic concept of this utility model. Although the illustrations only show components related to this utility model and are not drawn according to the actual number, shape, and size of components in implementation, the shape, quantity, and proportion of each component can be arbitrarily changed in actual implementation, and the layout of the components may also be more complex. The structures, proportions, sizes, etc., shown in the accompanying drawings are only used to complement the content disclosed in the specification for those skilled in the art to understand and read, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this application.

[0030] This embodiment provides a lens adjustment device that can be used in semiconductor measurement equipment, especially in precision thin-film measurement equipment. The lens adjustment device has a compact structure, occupies little space, is easy to assemble and adjust, and avoids positional shifts during the adjustment rotation and tilting processes, thereby improving measurement accuracy and enhancing the product's competitiveness in the market.

[0031] Reference Figure 1 The lens adjustment device 100 in this embodiment includes a surface 101 for mounting a lens and a first end face 102 and a second end face 103 respectively disposed at both ends of the surface and perpendicular to the surface 101. The lens adjustment device 100 includes a mounting plate 110, a first pull structure 120, an adjustment plate 130, an adapter plate 140, and a second pull structure 150.

[0032] Reference Figure 1The mounting plate 110 includes a front and a back side disposed opposite to each other. The front side is used to mount other structures of the lens adjustment device 100, and the back side is used to fix the lens adjustment device 100 as a whole. An adjustment plate 130 and an adapter plate 140 are sequentially disposed on the front side of the mounting plate 110 along a direction perpendicular to the surface of the mounting plate 110 (i.e., perpendicular to the surface 101 where the lens is mounted). The adjustment plate 130 is used to cooperate with the first pull structure 120 to rotate along an axis perpendicular to the surface of the mounting plate 110 (parallel to the Z direction). The surface of the adapter plate 140 is formed as the surface 101 where the lens of the lens adjustment device 100 is mounted, and the adapter plate 140 is used to cooperate with the second pull structure 150 to move the adapter plate 140 along an axis perpendicular to the first end face 102 (parallel to the Y direction). Optionally, the mounting plate 110 has screw holes (not shown in the figure) on the side of the first end face 102 for connecting with the first pull structure 120, and screw holes (not shown in the figure) for connecting with the adjustment plate 130 and pin holes (not shown in the figure) for initial positioning are provided on the surface of the mounting plate 110.

[0033] Optionally, refer to Figure 1 Along the direction (Y direction) from the first end face 102 to the second end face 103, the size of the mounting plate 110 is larger than the size of the adapter plate 140 and also larger than the size of the adjusting plate 130. The size of the adjusting plate 130 is the same as that of the adapter plate 140, and both the adapter plate 140 and the adjusting plate 130 are positioned on the surface of the mounting plate 110 near the first end face 102. The size difference between the adjusting plate 130 and the adapter plate 140 ensures that the lens mounted on the adapter plate 140 has sufficient adjustment space. When adjusting the lens position, this adjustment space can be used to adjust the lens position. At the same time, the fact that the size of the mounting plate 110 is larger than the size of the lens mounting surface also contributes to the overall stability of the adjustment device, making it particularly suitable for fixing large lenses.

[0034] Reference Figure 1On the side of the first end face 102 of the lens adjustment device 100, a first push-pull structure 120 is fixedly disposed on the mounting plate 110. The first push-pull structure 120 is also movably connected to an adjustment plate 130 disposed on the surface of the mounting plate 110, so as to allow the adjustment plate 130 to rotate along an axis perpendicular to the surface of the mounting plate 110. The first push-pull structure 120 includes an adjustment block 121, a first ejection structure 122, and a first pull-back structure 123. The adjustment block 121 is fixedly disposed on the mounting plate 110, and the first ejection structure 122 and the first pull-back structure 123 are disposed on the adjustment block 121. Optionally, the first ejector structure 122 includes an ejector screw (not shown in the figure) and an ejector hole (not shown in the figure). The ejector screw ejects the adjusting plate 130 through the ejector hole on the adjusting block 121. The first pull-back structure 123 includes an ejector screw (not shown in the figure) and a pull-back hole (not shown in the figure). The ejector screw pulls back the adjusting plate 130 through the pull-back hole (not shown in the figure) on the adjusting block 121. Optionally, the ejector screw of the second pull-back structure 152 is connected to the adjusting plate 130 to perform the pull-back action. Optionally, refer to... Figure 1 and Figure 2 The adjusting plate 130 is provided with a first set screw hole 133 for connection with the set screw of the second pull-back structure 152. In this embodiment, refer to... Figure 1 The adjusting block 121 has three through holes and one screw hole on a surface parallel to the first end face 102. Two of the through holes are used to fix the adjusting block 121 to the mounting plate 110 with screws. One of the through holes is formed as the pull-back hole of the first pull-back structure 123, and the screw hole is formed as the ejection hole of the first ejection structure 122. They are used to adjust the angle of the adjusting plate 130 by cooperating with the set screw installed in the pull-back hole or the ejection hole.

[0035] Optionally, refer to Figure 1 The mounting plate 110 may be provided with multiple sets of first pull structures 120, for example, at least two sets of first pull structures 120 are provided at intervals to coordinate and adjust the rotation of the adjustment plate 130. In this embodiment, the mounting plate 110 is provided with two first pull structures 120. By adjusting the distance difference between the set screws on the two first pull structures 120 and the adjustment plate 130, the entire adjustment plate 130 is rotated along an axis perpendicular to the surface of the mounting plate 110, thereby adjusting the position of the subsequently installed lens in a direction parallel to the surface of the mounting plate 110 (XY plane).

[0036] Optionally, refer to Figure 1To ensure that the adapter plate 140 is synchronized with the position of the adjustment plate 130 after the adjustment plate 130 is fixed, and to achieve precise adjustment, a positioning structure 131 is also provided on the adjustment plate 130 on the side of the second end face 103 of the lens adjustment device 100. This positioning structure 131 extends from the adjustment plate 130 to the end face of the adapter plate 140, which is located on the surface of the adjustment plate 130, to limit the position of the adapter plate 140 based on the position of the adjustment plate 130, ensuring that the adapter plate 140 does not move during position adjustments in other directions. In this embodiment, the positioning structure 131 is a positioning block with a through hole, through which the positioning block is mounted on the adjustment plate 130. Optionally, the mounting surface of the positioning block is a precision surface, which ensures that the lens angle does not move during adjustment of the adapter plate 140 with the lens mounted on it.

[0037] Reference Figure 1 and Figure 2 The adjusting plate 130 is provided with a first fixing structure 132, which is used to fix the adjusting plate 130 to the mounting plate 110 when it is rotated to the desired position. In this embodiment, countersunk holes are provided at the four corners of the edge of the adjusting plate 130. These countersunk holes are used for the fixed connection between the adjusting plate 130 and the mounting plate 110, and the countersunk holes need to reserve adjustment space. Optionally, the adjusting plate 130 is also provided with pin holes 170 for initial positioning when installing with the mounting plate 110, so as to facilitate its positioning and installation. Optionally, the front and back sides of the adjusting plate 130 have form and position tolerance requirements, which can effectively reduce the difficulty of assembly and adjustment. Optionally, the adjusting plate 130 is also provided with screw holes for connecting the adapter plate 140. Optionally, the adjusting plate 130 is also provided with a second set screw hole 134 to cooperate with the set screw of the subsequent second pull-back structure 152 to perform the pull-back action. Optionally, the adjustment plate 130 is also provided with a number of weight reduction holes 160, which are used to reduce the overall weight of the device.

[0038] Reference Figure 1 and combined Figure 3 An adapter plate 140 is disposed on the surface of the adjustment plate 130, and the surface of the adapter plate 140 is formed as the surface 101 for mounting the lens of the lens adjustment device 100. A second pull-out structure 150 is disposed on the surface of the adapter plate 140, and the second pull-out structure 150 is configured to allow the adapter plate 140 to rotate along an axis perpendicular to the first end face 102 (i.e., rotation in a plane parallel to the XZ plane). The second pull-out structure 150 includes a second ejection structure 151 and a second pull-back structure 152. Similarly, the second ejection structure 151 includes a set screw (not shown in the figure) and an ejection hole 1511, and the second pull-back structure 152 includes a set screw (not shown in the figure) and a pull-back hole 1521. (Refer to...) Figure 3The ejector hole 1511 and the pull-back hole 1521 are paired and arranged on the adapter plate 140. The ejector screw of the movable second ejector structure 151 ejects the adjusting plate 130 through the ejector hole 1511 on the adapter plate 140, causing the adapter plate 140 to move away from the adjusting plate 130. The ejector screw of the second pull-back structure 152 is connected to the adjusting plate 130. The ejector screw of the movable second pull-back structure 152 pulls the adjusting plate 130 back through the pull-back hole 1521 on the adapter plate 140, causing the adapter plate 140 to move closer to the adjusting plate 130. Optionally, the adapter plate 140 is provided with a plurality of second push-pull structures 150, which are arranged along the edge of the adapter plate 140. In this embodiment, four sets of second push-pull structures 150 are provided along the edge of the adapter plate 140, although two sets are also possible. Optionally, the adapter plate 140 is also provided with three lens mounting holes 142, which are located at the three vertices of a triangle. This arrangement is more conducive to the stability of lens mounting. Optionally, the adapter plate 140 is also provided with a second fixing structure 141, which is used to fix the adapter plate 140 to the adjusting plate 130 when the adapter plate 140 is adjusted to the desired position.

[0039] In this embodiment, the first pull structure 120 and the second pull structure 150 can also be implemented by a spring structure or other structures. As long as the pull function can be achieved, this embodiment does not limit the specific structure of the first pull structure 120 and the second pull structure 150.

[0040] The lens adjustment device 100 of this embodiment can be used for lens adjustment in semiconductor measurement equipment, especially for precision thin-film measurement equipment used to measure various thin-film parameters and subtle changes (such as film thickness, refractive index, stress, etc.) in semiconductor manufacturing processes, such as ellipsometers. This type of equipment requires high measurement accuracy, thus placing higher demands on lens adjustment. The lens adjustment device in this embodiment ensures that adjustments in both directions do not overlap during lens optical path adjustment, achieving high-precision and high-efficiency lens position adjustment.

[0041] This lens adjustment device is particularly applicable to large or heavy lenses. For example, the lens in this embodiment is an integrated lens, which has a large volume and weight, approximately 5 kg. (See reference...) Figure 4The lens 200 includes a body module 201 and a lens module 202. The body module 201 is connected to an adapter plate 140, and the lens module 202 extends from one end of the body module 201 along a direction (Y direction) from a first end face to a second end face. Optionally, an image sensor, which can be a CMOS sensor or a CCD sensor, is disposed within the body module 201. The lens module 202 includes a first lens section and a second lens section arranged sequentially along the optical axis, forming a two-section integrated lens. The body module 201 of the lens 200 is connected to the adapter plate 140 of the lens adjustment device 100, and it completely covers the connection surface with the lens adjustment device 100. The lens module 202 extends from the connection end with the body module 201 along a direction (Y direction) from the first end face to the second end face, and is spaced apart from the surface of the exposed mounting plate 110 of the lens adjustment device 100. Fixing the mounting plate 110, which carries the lens and other structures of the lens adjustment device 100, to the desired structure is more conducive to the stability of the lens installation.

[0042] The installation steps of the lens adjustment device 100 in this embodiment are as follows: The adjustment block 121 is installed on the mounting plate 110 with screws. Then, the mounting plate 110 is installed on the connection interface using pins. The adjustment plate 130 is positioned with pins and then fixed to the mounting plate 110 with screws. A positioning block is then installed below the adjustment plate 130. After the lens is installed on the adapter plate 140, the tilt of the lens is adjusted using the first top-pull structure 120 on the adjustment block 121. After the tilt is adjusted, the corresponding screws are tightened to secure it. The lens is installed on the adapter plate 140, and then the adapter plate 140 is installed on the adjustment plate 130 with screws. The rotation of the lens and the tilt in another dimension are adjusted using the first top-pull structure 120 and the second top-pull structure 150, which can effectively reduce movement during angle adjustment.

[0043] Compared with existing adjustment devices, the advantages of this embodiment are: first, it can withstand heavier lenses; second, there is no cross-movement during Ry / Rz adjustment; and third, it has a simple structure and is easy to assemble and adjust. Therefore, the lens adjustment device in this embodiment has advantages such as being able to withstand heavier lenses, being easy to assemble and adjust, and having a simple structure, which improves economic efficiency and equipment reliability for mass production.

[0044] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A lens adjustment device, characterized in that, The lens adjustment device includes a surface for mounting a lens, and a first end face and a second end face respectively disposed at both ends of the surface and perpendicular to the surface; the lens adjustment device includes: Mounting plate; The first top-pull structure is disposed on the mounting plate and located on the side of the first end face of the lens adjustment device; An adjustment plate is disposed on the surface of the mounting plate, on the side of the first end face of the lens adjustment device. The adjustment plate is movably connected to the first top-pull structure, which is configured to allow the adjustment plate to rotate along an axis perpendicular to the surface of the mounting plate. An adapter plate is disposed on the surface of the adjustment plate, and the surface of the adapter plate is formed as the surface of the lens adjustment device; A second top-pull structure is disposed on the surface of the adapter plate, and the second top-pull structure is configured to allow the adapter plate to rotate along an axis perpendicular to the first end face.

2. The lens adjustment device according to claim 1, characterized in that, On the side of the second end face of the lens adjustment device, a positioning structure is provided on the adjustment plate. The positioning structure extends from the adjustment plate to the adapter plate in a direction parallel to the second end face to limit the position of the adapter plate based on the position of the adjustment plate.

3. The lens adjustment device according to claim 1, characterized in that, The adjustment plate is provided with a first fixing structure, which is used to fix the adjustment plate to the mounting plate when the adjustment plate is rotated to the desired position.

4. The lens adjustment device according to claim 1, characterized in that, The adapter plate is provided with a second fixing structure, which is used to fix the adapter plate to the adjusting plate when the adapter plate is adjusted to the required position.

5. The lens adjustment device according to claim 1, characterized in that, At least two first top pull structures are provided at intervals on the mounting plate.

6. The lens adjustment device according to claim 1, characterized in that, The first push-pull structure includes an adjustment block, a first push-out structure, and a first pull-back structure. The adjustment block is fixedly mounted on the mounting plate. The first push-out structure and the first pull-back structure are mounted on the adjustment block. The push screw of the movable first push-out structure pushes the adjustment plate out through the push-out hole on the adjustment block.

7. The lens adjustment device according to claim 1, characterized in that, The second push-pull structure includes a second push-out structure and a second pull-back structure. The push screw of the movable second push-out structure pushes the adjusting plate out through the push-out hole on the adapter plate, causing the adapter plate to move away from the adjusting plate. The push screw of the movable second pull-back structure is connected to the adjusting plate. The push screw of the movable second pull-back structure pulls the adjusting plate back through the pull-back hole on the adapter plate, causing the adapter plate to move closer to the adjusting plate.

8. The lens adjustment device according to claim 1 or 7, characterized in that, The adapter plate is provided with a plurality of second top pull structures, which are arranged along the edge of the adapter plate.

9. The lens adjustment device according to claim 1, characterized in that, Along the direction from the first end face to the second end face, the size of the mounting plate is larger than the size of the adapter plate and larger than the size of the adjusting plate; the size of the adjusting plate is the same as the size of the adapter plate, and the adapter plate and the adjusting plate are disposed near the first end face.

10. The lens adjustment device according to claim 1 or 9, characterized in that, The lens includes a body module and a lens module. The body module is connected to the adapter plate, and the lens module extends from one end of the body module along the direction from the first end face to the second end face.

Images