Infinity-corrected microscope objective and microscope

Abstract

The utility model provides a kind of infinity correction microscope objective and microscope, wherein infinity correction microscope objective includes: first lens group, second lens group, third lens group, fourth lens group and fifth lens group are sequentially arranged from object side to image side with optical axis.The utility model scheme, the magnification of infinity correction microscope objective can be 10 times, with the field of view of about 2.2mm higher than conventional 10 times microscope objective, at 2.85mm field of view, resolution is still close to resolution limit;It can be used with 200mm focal length's tube lens, working distance is as long as 30.8mm, greater than conventional objective, corresponding numerical aperture is 0.28, wavelength range blue light 430nm-500nm, can improve the object field and working distance of infinity correction microscope objective;And while improving the field of view of infinity correction microscope objective, optical window or cover glass aberration correction optimization is also carried out, when using thickness 2mm fused quartz optical window or cover glass, resolution will not be reduced.

Description

Technical Field

[0001] This utility model relates to the field of microscopes, and in particular to an infinity-corrected microscope objective and a microscope. Background Technology

[0002] With the development of the semiconductor industry, the requirements for inspection systems are becoming increasingly stringent. In semiconductor inspection or visual inspection fields with high cleanliness requirements, optical viewing windows are often used to isolate the object under test from the outside environment. Objective lenses or microscopes inspect or photograph the object through these windows. However, most objective lenses on the market do not have windows or coverslips for compensation, and thicker optical viewing windows will introduce aberrations and reduce the resolution of the objective lens or microscope. Utility Model Content

[0003] One objective of this invention is to ensure that the resolution of a microscope is not reduced when using a fused silica optical observation window or coverslip of a certain thickness.

[0004] A further objective of this invention is to improve the object-side field of view and working distance of the infinity-corrected microscope objective, thereby enhancing the overall performance of the microscope.

[0005] Specifically, this invention provides an infinity-corrected microscope objective, comprising: a first lens group, a second lens group, a third lens group, a fourth lens group, and a fifth lens group arranged coaxially from the object side to the image side; each of the first, second, third, fourth, and fifth lens groups includes at least two lenses, and the at least two lenses in each lens group have different refractive indices; the first lens group has a convex surface facing both the object and image sides; the second lens group has a convex surface facing both the object and image sides; the third lens group has a convex surface facing both the object and image sides; the fourth lens group has a convex surface facing both the object and image sides; and the fifth lens group has a concave surface facing both the object and image sides.

[0006] Optionally, the first lens group is a cemented doublet lens, including a first lens and a second lens starting from the object side; the first lens is a biconvex lens, with a convex surface facing both the object and image sides; the second lens is a positive meniscus lens, with a concave surface facing both the object and image sides; the second lens group is a cemented doublet lens, including a third lens and a fourth lens starting from the object side; the third lens is a biconvex lens, with a convex surface facing both the object and image sides; the fourth lens is a biconcave lens, with a concave surface facing both the object and image sides; the third lens group is a cemented doublet lens, including a fifth lens and a sixth lens starting from the object side; the fifth lens is a negative meniscus lens. The first lens is a convex lens facing the object side and a concave lens facing the image side; the sixth lens is a biconvex lens, with both the object and image sides being convex; the fourth lens group is a cemented doublet, including the seventh and eighth lenses starting from the object side; the seventh lens is a biconvex lens, with both the object and image sides being convex; the eighth lens is a biconcave lens, with both the object and image sides being concave; the fifth lens group is a cemented doublet, including the ninth and tenth lenses starting from the object side; the ninth lens is a meniscus lens, with both the object and image sides being concave; the tenth lens is a biconcave lens, with both the object and image sides being concave.

[0007] Optionally, the first lens is made of H-ZLAF53B material; the second lens is made of H-ZF73 material; the third lens is made of H-LAK61 material; the fourth lens is made of ZF51 material; the fifth lens is made of H-ZF71 material; the sixth lens is made of H-FK55 material; the seventh lens is made of H-ZLAF69A material; the eighth lens is made of ZF12 material; the ninth lens is made of H-ZF62 material; and the tenth lens is made of H-FK61 material.

[0008] Optionally, the object-facing surface of the first lens is the first mirror surface, the cemented surface of the first and second lenses is the second mirror surface, and the image-facing surface of the second lens is the third mirror surface; the object-facing surface of the third lens is the fourth mirror surface, the cemented surface of the third and fourth lenses is the fifth mirror surface, and the image-facing surface of the fourth lens is the sixth mirror surface; the object-facing surface of the fifth lens is the seventh mirror surface, the cemented surface of the fifth and sixth lenses is the eighth mirror surface, and the image-facing surface of the sixth lens is the ninth mirror surface; the object-facing surface of the seventh lens is the tenth mirror surface, and the object-facing surface of the seventh and eighth lenses is the tenth mirror surface. The cemented surface of the mirror is the eleventh mirror surface; the image-facing surface of the eighth lens is the twelfth mirror surface; the object-facing surface of the ninth lens is the thirteenth mirror surface; the cemented surface of the ninth and tenth lenses is the fourteenth mirror surface; and the image-facing surface of the tenth lens is the fifteenth mirror surface. The radii of curvature of the second, third, fifth, ninth, eleventh, thirteenth, and fourteenth mirror surfaces are negative; the radii of curvature of the first, fourth, sixth, seventh, eighth, tenth, twelfth, and fifteenth mirror surfaces are positive.

[0009] Optionally, the radius of curvature of the first mirror is 814.99±0.01mm; the radius of curvature of the second mirror is -89.36±0.01mm; the radius of curvature of the third mirror is -34.95±0.01mm; the radius of curvature of the fourth mirror is 96.67±0.01mm; the radius of curvature of the fifth mirror is -22.46±0.01mm; the radius of curvature of the sixth mirror is 33.5±0.01mm; the radius of curvature of the seventh mirror is 86.85±0.01mm; and the radius of curvature of the eighth mirror is 43. The radius of curvature of the ninth mirror is -43.76±0.01mm; the radius of curvature of the tenth mirror is 33.3±0.01mm; the radius of curvature of the eleventh mirror is -46.95±0.01mm; the radius of curvature of the twelfth mirror is 49.17±0.01mm; the radius of curvature of the thirteenth mirror is -49.24±0.01mm; the radius of curvature of the fourteenth mirror is -21.02±0.01mm; and the radius of curvature of the fifteenth mirror is 20.47±0.01mm.

[0010] Optionally, the light-transmitting aperture of the first mirror is 21.02 mm; the light-transmitting aperture of the second mirror is 21.32 mm; the light-transmitting aperture of the third mirror is 22.16 mm; the light-transmitting aperture of the fourth mirror is 21.87 mm; the light-transmitting aperture of the fifth mirror is 21.68 mm; the light-transmitting aperture of the sixth mirror is 20.66 mm; the light-transmitting aperture of the seventh mirror is 21.01 mm; and the light-transmitting aperture of the eighth mirror is... The aperture of the tenth mirror is 21.12mm; the aperture of the eleventh mirror is 18.47mm; the aperture of the twelfth mirror is 14.31mm; the aperture of the thirteenth mirror is 14.03mm; the aperture of the fourteenth mirror is 14.18mm; and the aperture of the fifteenth mirror is 12.48mm.

[0011] Optionally, the mirror distance between the first and second mirrors is 1.71 mm; the mirror distance between the second and third mirrors is 4.1 mm; the mirror distance between the third and fourth mirrors is 1.11 mm; the mirror distance between the fourth and fifth mirrors is 4.75 mm; the mirror distance between the fifth and sixth mirrors is 5.17 mm; the mirror distance between the sixth and seventh mirrors is 2 mm; and the mirror distance between the seventh and eighth mirrors is 0.8 mm. The mirror distance between the eighth and ninth mirrors is 3.65 mm; the mirror distance between the ninth and tenth mirrors is 1 mm; the mirror distance between the tenth and eleventh mirrors is 12 mm; the mirror distance between the eleventh and twelfth mirrors is 12 mm; the mirror distance between the twelfth and thirteenth mirrors is 3.08 mm; the mirror distance between the thirteenth and fourteenth mirrors is 2.62 mm; and the mirror distance between the fourteenth and fifteenth mirrors is 12 mm.

[0012] Optionally, the infinity-corrected microscope objectives can be used with tube lenses with focal lengths including 200 mm.

[0013] Optionally, it also includes an aperture stop, which is disposed on the image-facing side of the fourth lens group; the aperture stop has a light-transmitting aperture of 14.16 mm; the mirror distance between the aperture stop and the twelfth mirror is 1.58 mm, and the mirror distance between the aperture stop and the thirteenth mirror is 1.5 mm.

[0014] According to another aspect of the present invention, a microscope is also provided, comprising any of the above-described infinity-corrected microscope objectives.

[0015] The infinity-corrected microscope objective of this invention has undergone aberration correction optimization with a 2mm thick fused silica optical window or coverslip, and the resolution will not be reduced when using a 2mm thick fused silica optical window or coverslip.

[0016] Furthermore, the infinity-corrected microscope objective of this invention, through the setting of specific parameters and structure of each lens, achieves a magnification of 10x and a field of view approximately 2.2mm wider than that of a conventional 10x microscope objective. At a field of view of 2.85mm, the resolution remains close to the resolution limit. It can be used with a 200mm focal length tube lens, resulting in a working distance of up to 30.8mm, which is greater than that of conventional objectives. The corresponding numerical aperture is 0.28, and the wavelength range is 430nm-500nm for blue light. This improves the object-side field of view and working distance of the infinity-corrected microscope objective, thereby enhancing the overall performance of the microscope.

[0017] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0018] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings: Figure 1 This is a schematic diagram of the structure of an infinity-correcting microscope objective lens according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the in-the-moment correction microscope objective lens according to an embodiment of the present invention. Figure 3 This is a dot plot of different fields of view of an infinity-corrected microscope objective lens according to an embodiment of the present invention; and Figure 4 This is a modulation transfer function curve of an infinity-corrected microscope objective lens according to an embodiment of the present invention. Detailed Implementation

[0019] This embodiment provides an infinity-corrected objective lens without window compensation that can be viewed through a 2mm thick fused silica optical window without reducing resolution. Figure 1 This is a schematic diagram of the structure of an infinity-correcting microscope objective lens according to an embodiment of the present invention. Figure 1 As shown, the microscope objective lens of this embodiment includes: a first lens group G1, a second lens group G2, a third lens group G3, a fourth lens group G4, and a fifth lens group G5 arranged coaxially from the object side to the image side. The first lens group G1, the second lens group G2, the third lens group G3, the fourth lens group G4, and the fifth lens group G5 each include at least two lenses, and the at least two lenses in each lens group have different refractive indices. The first lens group G1 has a convex surface facing both the object and image sides; the second lens group G2 has a convex surface facing both the object and image sides; the third lens group G3 has a convex surface facing both the object and image sides; the fourth lens group G4 has a convex surface facing both the object and image sides; and the fifth lens group G5 has a concave surface facing both the object and image sides.

[0020] In one specific embodiment, the first lens group G1 is a cemented doublet lens, including a first lens L1 and a second lens L2 starting from the object side. The first lens L1 is a biconvex lens, with a convex surface facing both the object and image sides. The second lens L2 is a meniscus lens, with a concave surface facing both the object and image sides. The biconvex lens has two convex surfaces, providing strong light convergence. A meniscus lens, on the other hand, has a center thickness greater than its edge thickness. Such lenses converge incident light, typically exhibiting a concave surface facing the object side and a convex surface facing the image side (or the difference in curvature radii between the two surfaces results in a converging overall optical effect), causing light to bend and converge along the optical axis. After cementing, the two lenses initially integrate the incident light, laying the foundation for subsequent aberration correction.

[0021] The second lens group G2 is a cemented doublet, consisting of a third lens L3 and a fourth lens L4 starting from the object side. The third lens L3 is a biconvex lens, with a convex surface facing both the object and image sides, converging light rays. The fourth lens L4 is a biconcave lens, with a concave surface facing both the object and image sides, diverging light rays. This combination of converging and diverging light rays allows for targeted correction of spherical aberration (focusing deviation of light rays at different altitudes).

[0022] The third lens group G3 is a cemented doublet, comprising the fifth lens L5 and the sixth lens L6, starting from the object side. The fifth lens L5 is a meniscus negative lens, with a convex surface facing the object side and a concave surface facing the image side. The sixth lens L6 is a biconvex lens, with a convex surface facing both the object and image sides. A meniscus negative lens is one where the edge thickness is greater than the center thickness. This lens diverges incident light, typically exhibiting a "convex surface facing the object side and a concave surface facing the image side" (or the difference in curvature radii between the two surfaces results in a divergent overall optical effect), causing light to deflect and diverge away from the optical axis. The biconvex lens, with both surfaces being convex, converges light. This precise balance of "divergence + convergence" effectively compensates for chromatic aberration (focusing deviation of different wavelengths of light).

[0023] The fourth lens group, G4, is a cemented doublet, comprising the seventh lens L7 and the eighth lens L8, starting from the object side. The seventh lens L7 is a biconvex lens, with a convex surface facing both the object and image sides; the eighth lens L8 is a biconcave lens, with a concave surface facing both the object and image sides. The combination of the biconvex and biconcave lenses further optimizes aberrations at high spatial frequencies (such as aberrations affecting fine structure resolution), enhancing the objective lens's resolution potential.

[0024] The fifth lens group G5 is a cemented doublet lens, including the ninth lens L9 and the tenth lens L10 starting from the object side; the ninth lens L9 is a meniscus lens, which is concave when facing the object side and convex when facing the image side; the tenth lens L10 is a biconcave lens, which is concave when facing the object side and concave when facing the image side.

[0025] In some preferred embodiments, the specific materials of the first lens L1 to the tenth lens L10 can be referred to Table 1. As shown in Table 1, the first lens L1 can be made of H-ZLAF53B material; the second lens L2 can be made of H-ZF73 material; the third lens L3 can be made of H-LAK61 material; the fourth lens L4 can be made of ZF51 material; the fifth lens L5 can be made of H-ZF71 material; the sixth lens L6 can be made of H-FK55 material; the seventh lens L7 can be made of H-ZLAF69A material; the eighth lens L8 can be made of ZF12 material; the ninth lens L9 can be made of H-ZF62 material; and the tenth lens L10 can be made of H-FK61 material.

[0026] In summary, all lenses used in the infinity-corrected microscope objective of this embodiment are made of optical glass, with only slight variations in composition. None of the lenses have a super-hemispherical radius of curvature, and no aspherical surfaces are used, making them very easy to manufacture. This effectively reduces manufacturing difficulty and improves manufacturing efficiency and quality.

[0027] Table 1 In one specific embodiment, the object-facing surface of the first lens L1 is the first mirror surface S1; the cemented surface of the first lens L1 and the second lens L2 is the second mirror surface S2; the image-facing surface of the second lens L2 is the third mirror surface S3; the object-facing surface of the third lens L3 is the fourth mirror surface S4; the cemented surface of the third lens L3 and the fourth lens L4 is the fifth mirror surface S5; the image-facing surface of the fourth lens L4 is the sixth mirror surface S6; the object-facing surface of the fifth lens L5 is the seventh mirror surface S7; and the fifth lens L5 and the sixth lens L6... The cemented surface of the seventh lens L7 is the eighth mirror surface S8, and the image-facing surface of the sixth lens L6 is the ninth mirror surface S9; the object-facing surface of the seventh lens L7 is the tenth mirror surface S10, the cemented surface of the seventh lens L7 and the eighth lens L8 is the eleventh mirror surface S11, and the image-facing surface of the eighth lens L8 is the twelfth mirror surface S12; the object-facing surface of the ninth lens L9 is the thirteenth mirror surface S13, the cemented surface of the ninth lens L9 and the tenth lens L10 is the fourteenth mirror surface S14, and the image-facing surface of the tenth lens L10 is the fifteenth mirror surface S15.

[0028] Furthermore, the radii of curvature of the second mirror S2, the third mirror S3, the fifth mirror S5, the ninth mirror S9, the eleventh mirror S11, the thirteenth mirror S13, and the fourteenth mirror S14 are negative; while the radii of curvature of the first mirror S1, the fourth mirror S4, the sixth mirror S6, the seventh mirror S7, the eighth mirror S8, the tenth mirror S10, the twelfth mirror S12, and the fifteenth mirror S15 are positive.

[0029] In a preferred embodiment, the specific values ​​of the radius of curvature, aperture, and mirror distance between adjacent mirrors for the first mirror S1 to the fifteenth mirror S15 can be found in Table 2. As shown in Table 2: the mirror distance between the object surface and the first mirror S1 is 26 mm; the radius of curvature of the first mirror S1 is 814.99 ± 0.01 mm, and the aperture is 21.02 mm; the mirror distance between the first mirror S1 and the second mirror S2 is 1.71 mm; the radius of curvature of the second mirror S2 is -89.36 ± 0.01 mm, and the aperture is 21.32 mm; the mirror distance between the second mirror S2 and the third mirror S3 is 4.1 mm; the radius of curvature of the third mirror S3 is -34.95 ± 0.01 mm, and the aperture is 22.16 mm; the mirror distance between the third mirror S3 and the fourth mirror S4 is 1.11 mm.

[0030] The radius of curvature of the fourth mirror S4 is 96.67±0.01mm, and the aperture is 21.87mm. The mirror distance between the fourth mirror S4 and the fifth mirror S5 is 4.75mm. The radius of curvature of the fifth mirror S5 is -22.46±0.01mm, and the aperture is 21.68mm. The mirror distance between the fifth mirror S5 and the sixth mirror S6 is 5.17mm. The radius of curvature of the sixth mirror S6 is 33.5±0.01mm, and the aperture is 20.66mm. The mirror distance between the sixth mirror S6 and the seventh mirror S7 is 2mm.

[0031] The radius of curvature of the seventh mirror S7 is 86.85±0.01mm, and the aperture is 21.01mm. The mirror distance between the seventh mirror S7 and the eighth mirror S8 is 0.8mm. The radius of curvature of the eighth mirror S8 is 43.12±0.01mm, and the aperture is 21.12mm. The mirror distance between the eighth mirror S8 and the ninth mirror S9 is 3.65mm. The radius of curvature of the ninth mirror S9 is -43.76±0.01mm, and the aperture is 21.30mm. The mirror distance between the ninth mirror S9 and the tenth mirror S10 is 1mm.

[0032] The tenth mirror S10 has a radius of curvature of 33.3±0.01mm and a light-transmitting aperture of 21.29mm. The mirror distance between the tenth mirror S10 and the eleventh mirror S11 is 12mm. The eleventh mirror S11 has a radius of curvature of -46.95±0.01mm and a light-transmitting aperture of 18.47mm. The mirror distance between the eleventh mirror S11 and the twelfth mirror S12 is 12mm. The twelfth mirror S12 has a radius of curvature of 49.17±0.01mm and a light-transmitting aperture of 14.31mm. The mirror distance between the twelfth mirror S12 and the thirteenth mirror S13 is 3.08mm.

[0033] The radius of curvature of the thirteenth mirror S13 is -49.24±0.01mm, and the aperture is 14.03mm. The mirror distance between the thirteenth mirror S13 and the fourteenth mirror S14 is 2.62mm. The radius of curvature of the fourteenth mirror S14 is -21.02±0.01mm, and the aperture is 14.18mm. The mirror distance between the fourteenth mirror S14 and the fifteenth mirror S15 is 12mm. The radius of curvature of the fifteenth mirror S15 is 20.47±0.01mm, and the aperture is 12.48mm.

[0034] Table 2 By setting the specific parameters and structures of each lens as shown in Tables 1 and 2 above, the magnification of the infinity-corrected microscope objective can be increased to 10x, providing a field of view approximately 2.2mm wider than that of a conventional 10x microscope objective. At a field of view of 2.85mm, the resolution remains close to the resolution limit. It can be used with a 200mm focal length tube lens, resulting in a working distance of up to 30.8mm, which is greater than that of a conventional objective lens. The corresponding numerical aperture is 0.28, and the wavelength range is 430nm-500nm for blue light. This improves the object-side field of view and working distance of the infinity-corrected microscope objective, thereby enhancing the overall performance of the microscope.

[0035] Furthermore, while improving the field of view of the infinity-corrected microscope objective, the infinity-corrected microscope objective of this invention has undergone aberration correction optimization for the 2mm thick fused silica optical window or coverslip. The resolution will not be reduced when using the 2mm thick fused silica optical window or coverslip, and it is completely independently designed. This solves the problem that existing 10x objectives cannot compensate for the observation window or coverslip, which leads to aberrations introduced when facing a thicker optical observation window, thus reducing the resolution of the objective or microscope.

[0036] In a preferred embodiment, the infinity-corrected microscope objective of this invention is further provided with an aperture stop. The function of the aperture stop is to limit the aperture through which the light beam passes, and the aperture stop can be set on the image-facing side of the fourth lens group G4. The aperture stop has a light-transmitting aperture of 14.16 mm, the mirror distance between the aperture stop and the twelfth mirror surface S12 is 1.58 mm, and the mirror distance between the aperture stop and the thirteenth mirror surface S13 is 1.5 mm.

[0037] Figure 2 This is a schematic diagram illustrating the usage of an infinity-corrected microscope objective lens according to an embodiment of the present invention, as shown below. Figure 2 As shown, the planar glass w1 is located between the first lens L1 and the object being measured. It can generally be an optical observation window or cover glass made of fused silica. G1 to G5 are the first to fifth lens groups, arranged sequentially from the object side to the image side along the optical axis. Each group consists of two lenses cemented together (G1 includes the first lens L1 and the second lens L2, G2 includes the third lens L3 and the fourth lens L4, G3 includes the fifth lens L5 and the sixth lens L6, G4 includes the seventh lens L7 and the eighth lens L8, and G5 includes the ninth lens L9 and the tenth lens L10). By combining lenses with different surface shapes (convex, concave, meniscus) and different refractive index materials, infinity correction and aberration compensation are achieved. S1 to S15 are the various optical surfaces (including the object side surface, image side surface, and cemented surface of the lens).

[0038] After light enters from the object side, it first passes through the flat glass w1, and then sequentially through the lens groups G1 to G5, finally completing the "infinity correction" transmission of the imaging light. The objective lens in this embodiment, through the special design of the lens group, can compensate for aberrations (such as spherical aberration, chromatic aberration, etc.) introduced by the flat glass, ensuring that excellent imaging quality (such as high resolution and sharp contrast) is maintained when working through the flat glass.

[0039] Figure 3 This is a dot plot of different fields of view of an infinity-corrected microscope objective lens according to an embodiment of the present invention. Figure 3 The focusing of light with wavelengths of 0.5, 0.45, 0.47, and 0.43 at the focal point is shown under different object plane fields of view. The object plane field of view of field of view (1) is 2.85 mm, the object plane half field of view of field of view (2) is 1.42 mm, and the on-axis field of view of field of view (3) is 0 mm. The test data are as follows: Airy disk radius (diffraction limit) is 0.9807 μm, RMS radius (root mean square) of field of view (1) is 0.160 μm, GEO radius (maximum) is 0.488 μm, RMS radius of field of view (2) is 0.122 μm, GEO radius is 0.292 μm, and RMS radius of field of view (3) is 0.074 μm and GEO radius is 0.161 μm.

[0040] The RMS radius, also known as the root mean square spot radius, is an indicator used to describe the size of a light beam. It is the spot radius obtained by taking the square root of the second average of the light intensity distribution. The GEO radius (Geometric Optical Radius) represents the radius of the smallest central circle that contains all light rays. Specifically, the GEO radius is the radius of the smallest central circle that allows all light rays to fall within its range. Figure 3 It can be seen that the focused light spots of different wavelengths of light in different fields of view are all within the Airy disk range, indicating that the infinity-corrected microscope objective lens of this embodiment has excellent focusing effect, and that the aberration of the infinity-corrected microscope objective lens of this embodiment is well controlled.

[0041] Figure 4 This is a modulation transfer function curve of an infinity-corrected microscope objective lens according to an embodiment of the present invention. Figure 4 The ordinate represents the magnitude of the optical transfer function (OTF), and the abscissa represents the spatial frequency, with units of lp / mm. The outermost line is the transfer function curve of the system under diffraction-limited conditions. For example... Figure 4 As shown, the transfer function curves of light of different wavelengths in the meridional and sagittal planes of the infinity-corrected microscope objective lens in this embodiment, with an object plane field of view of 1.47 mm, 0.71 mm, and 0 mm, indicate that the on-axis and off-axis field of view transfer function curves are close to the diffraction limit, indicating that the imaging contrast of the optical system across the entire field of view is very high and the imaging has a clear sense of layering.

[0042] This embodiment also provides a microscope, which includes the infinity-corrected microscope objective of any of the above embodiments. In a specific embodiment, by setting the specific parameters and structure of each lens, the infinity-corrected microscope objective achieves a magnification of 10x, with a field of view approximately 2.2mm wider than a conventional 10x microscope objective. At a field of view of 2.85mm, the resolution is still close to the resolution limit. It can be used with a 200mm focal length tube lens, with a working distance of up to 30.8mm, which is greater than that of a conventional objective. The corresponding numerical aperture is 0.28, and the wavelength range is 430nm-500nm for blue light. This improves the object-side field of view and working distance of the infinity-corrected microscope objective, thereby enhancing the overall performance of the microscope.

[0043] Furthermore, while improving the field of view of the infinity-corrected microscope objective, aberration correction optimization was also performed on the 2mm thick fused silica optical window or coverslip, so that the resolution is not reduced when using the 2mm thick fused silica optical window or coverslip.

[0044] Those skilled in the art should understand that, unless otherwise specified, the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "clockwise," and "counterclockwise" used to indicate orientation or positional relationships in the embodiments of this utility model are merely for the convenience of describing and understanding the technical solution of this utility model, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0045] The terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first," "second," etc., may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0046] Unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0047] Furthermore, in the description of this embodiment, "above" or "below" the second feature can include direct contact between the first and second features, or it can include contact between the first and second features through another feature between them. That is, in the description of this embodiment, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," or "below" of the second feature can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0048] In the description of this embodiment, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0049] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. An infinity-corrected microscope objective, characterized in that, include: The first lens group, the second lens group, the third lens group, the fourth lens group, and the fifth lens group are arranged coaxially from the object side to the image side. The first lens group, the second lens group, the third lens group, the fourth lens group, and the fifth lens group each include at least two lenses, and the at least two lenses in each lens group have different refractive indices; The first lens group has a convex surface facing the object and a convex surface facing the image. The second lens group has a convex surface facing the object and a concave surface facing the image; The third lens group has a convex surface facing both the object and image sides; the fourth lens group has a convex surface facing both the object and image sides; and the fifth lens group has a concave surface facing both the object and image sides.

2. The infinity-corrected microscope objective according to claim 1, characterized in that, The first lens group is a cemented doublet lens, including a first lens and a second lens starting from the object side; the first lens is a biconvex lens, with a convex surface facing the object side and a convex surface facing the image side; The second lens is a meniscus lens, with a concave surface facing the object and a convex surface facing the image. The second lens group is a cemented doublet lens, including a third lens and a fourth lens starting from the object side; the third lens is a biconvex lens, with a convex surface facing both the object side and the image side; the fourth lens is a biconcave lens, with a concave surface facing both the object side and the image side. The third lens group is a cemented doublet lens, including a fifth lens and a sixth lens starting from the object side; the fifth lens is a meniscus negative lens, which is convex when facing the object side and concave when facing the image side; the sixth lens is a biconvex lens, which is convex when facing the object side and convex when facing the image side. The fourth lens group is a cemented doublet lens, including a seventh lens and an eighth lens starting from the object side; the seventh lens is a biconvex lens, with a convex surface facing the object side and a convex surface facing the image side; The eighth lens is a biconcave lens, with a concave surface facing both the object and image sides; The fifth lens group is a cemented doublet lens, including a ninth lens and a tenth lens starting from the object side; the ninth lens is a meniscus lens, with a concave surface facing the object side and a convex surface facing the image side; the tenth lens is a biconcave lens, with a concave surface facing both the object side and the image side.

3. The infinity-corrected microscope objective according to claim 2, characterized in that, The first lens is made of H-ZLAF53B material; The second lens is made of H-ZF73 material; The third lens is made of H-LAK61 material; The fourth lens is made of ZF51 material; The fifth lens is made of H-ZF71 material; The sixth lens is made of H-FK55 material; The seventh lens is made of H-ZLAF69A material; The eighth lens is made of ZF12 material; The ninth lens is made of H-ZF62 material; The tenth lens is made of H-FK61 material.

4. The infinity-corrected microscope objective according to claim 3, characterized in that, The object-facing surface of the first lens is the first mirror surface, the cemented surface of the first lens and the second lens is the second mirror surface, and the image-facing surface of the second lens is the third mirror surface. The object-facing surface of the third lens is the fourth mirror surface, the cemented surface of the third lens and the fourth lens is the fifth mirror surface, and the image-facing surface of the fourth lens is the sixth mirror surface. The object-facing surface of the fifth lens is the seventh mirror surface, the cemented surface of the fifth lens and the sixth lens is the eighth mirror surface, and the image-facing surface of the sixth lens is the ninth mirror surface. The object-facing surface of the seventh lens is the tenth mirror surface, the cemented surface of the seventh lens and the eighth lens is the eleventh mirror surface, and the image-facing surface of the eighth lens is the twelfth mirror surface. The object-facing surface of the ninth lens is the thirteenth mirror surface, the cemented surface of the ninth and tenth lenses is the fourteenth mirror surface, and the image-facing surface of the tenth lens is the fifteenth mirror surface. The radii of curvature of the second, third, fifth, ninth, eleventh, thirteenth, and fourteenth mirrors are negative; the radii of curvature of the first, fourth, sixth, seventh, eighth, tenth, twelfth, and fifteenth mirrors are positive.

5. The infinity-corrected microscope objective according to claim 4, characterized in that, The radius of curvature of the first mirror is 814.99 ± 0.01 mm; The radius of curvature of the second mirror is -89.36±0.01mm; The radius of curvature of the third mirror is -34.95±0.01mm; The radius of curvature of the fourth mirror is 96.67 ± 0.01 mm; The radius of curvature of the fifth mirror is -22.46±0.01mm; The radius of curvature of the sixth mirror is 33.5 ± 0.01 mm; The radius of curvature of the seventh mirror is 86.85 ± 0.01 mm; The radius of curvature of the eighth mirror is 43.12 ± 0.01 mm; The radius of curvature of the ninth mirror is -43.76±0.01mm; The radius of curvature of the tenth mirror is 33.3 ± 0.01 mm; The radius of curvature of the eleventh mirror is -46.95±0.01mm; The radius of curvature of the twelfth mirror is 49.17 ± 0.01 mm; The radius of curvature of the thirteenth mirror is -49.24 ± 0.01 mm; The radius of curvature of the fourteenth mirror is -21.02 ± 0.01 mm; The radius of curvature of the fifteenth mirror is 20.47 ± 0.01 mm.

6. The infinity-corrected microscope objective according to claim 5, characterized in that, The aperture of the first mirror is 21.02 mm; The aperture of the second mirror is 21.32 mm; The aperture of the third mirror is 22.16 mm; The aperture of the fourth mirror is 21.87 mm; The aperture of the fifth mirror is 21.68 mm; The aperture of the sixth mirror is 20.66 mm; The aperture of the seventh mirror is 21.01 mm; The aperture of the eighth mirror is 21.12 mm; The aperture of the ninth mirror is 21.30 mm; The aperture of the tenth mirror is 21.29 mm; The aperture of the eleventh mirror is 18.47 mm; The aperture of the twelfth mirror is 14.31 mm; The aperture of the thirteenth mirror is 14.03 mm; The aperture of the fourteenth mirror is 14.18 mm; The aperture of the fifteenth mirror is 12.48 mm.

7. The infinity-corrected microscope objective according to claim 6, characterized in that, The mirror distance between the first mirror and the second mirror is 1.71 mm; The mirror distance between the second mirror and the third mirror is 4.1 mm; The mirror distance between the third mirror and the fourth mirror is 1.11 mm; The mirror distance between the fourth mirror and the fifth mirror is 4.75 mm; The mirror distance between the fifth mirror and the sixth mirror is 5.17 mm; The mirror distance between the sixth mirror and the seventh mirror is 2mm; The mirror distance between the seventh mirror and the eighth mirror is 0.8 mm; The mirror distance between the eighth mirror and the ninth mirror is 3.65 mm; The mirror distance between the ninth mirror and the tenth mirror is 1mm; The mirror distance between the tenth mirror and the eleventh mirror is 12mm; The mirror distance between the eleventh mirror and the twelfth mirror is 12mm; The mirror distance between the twelfth and thirteenth mirrors is 3.08 mm; The mirror distance between the thirteenth and fourteenth mirrors is 2.62 mm; The mirror distance between the fourteenth mirror and the fifteenth mirror is 12mm.

8. The infinity-corrected microscope objective according to claim 7, characterized in that, The infinity-corrected microscope objective is used with a tube lens with a focal length of 200mm.

9. The infinity-corrected microscope objective according to claim 4, characterized in that, Also includes An aperture stop is located on the image-facing side of the fourth lens group; The aperture of the aperture is 14.16 mm; The mirror distance between the aperture and the twelfth mirror is 1.58 mm, and the mirror distance between the aperture and the thirteenth mirror is 1.5 mm.

10. A microscope, characterized in that, Including the infinity-corrected microscope objective according to any one of claims 1 to 9.

Images