Microscopic stage interlock

Abstract

The micro stage interlocking device of the utility model at least includes first slide and second slide, first slide is slidably arranged on second slide, micro stage interlocking device includes sensing control assembly and locking execution assembly. Sensing control assembly is configured for detecting the working condition of the micro stage, and generating the corresponding control signal. The locking execution assembly is arranged on the second slide and is in communication connection with the sensing control assembly. The locking execution assembly responds to the control signal, has a locking position that extends to limit the sliding of the first slide, and a unlocking position that retracts to allow the first slide to slide. The micro stage interlocking device of the utility model carries out real-time and accurate monitoring on the working condition of the micro stage through the sensing control assembly, and automatically controls the state of the locking execution assembly, replacing the original backward mode that relies on the hearing judgment of the operator. It fundamentally avoids the misjudgment caused by environmental noise, personnel fatigue or negligence, effectively prevents the wafer fragments and equipment alarm shutdown caused by pulling the micro stage in the wrong position, greatly improves the safety and reliability of the operation process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging technology, specifically to a micro-stage interlocking device. Background Technology

[0002] In the semiconductor packaging manufacturing process, wafers require multiple high-precision inspections and measurements. Automated microscopes are crucial equipment in this process. They are typically equipped with a multi-degree-of-freedom precision moving stage, or microstage, to hold and precisely position the wafer, allowing the microscope lens to observe and measure the microstructure of the wafer surface from all angles. This microstage is usually designed with a multi-layered sliding structure (e.g., including sliding plates that can move in the X and Y directions) to achieve precise in-plane positioning. A typical workflow involves a robotic arm transferring the wafer from the macrostage to the microscope's microstage. The microstage holds the wafer in place using vacuum suction, and then an operator or automated system moves the stage manually or electrically, sequentially bringing different parts of the wafer under the lens for observation.

[0003] However, in the crucial step of transferring the wafer between the robotic arm and the micro-stage (i.e., macro-micro interaction), existing technologies present significant safety and efficiency risks. Current technologies generally lack an effective mechanical interlocking mechanism to ensure the micro-stage is in the correct position during transfer. Currently, positioning in this process relies on an acoustic feedback system: the micro-stage needs to move until a component (such as a striker) contacts a fixed point on the macro platform. At this point, a force sensor is triggered, emitting a brief "beep" sound. This sound signal informs the operator that "the stage has moved into position, vacuum adsorption has been established, and it is now safe to pull the stage for further operations." This positioning method, relying on human auditory judgment, reveals the following serious drawbacks in actual production environments. Semiconductor manufacturing workshops are environments filled with various noises, such as the operation of other equipment, airflow sounds, and alarm sounds. In such a noisy background, operators are highly likely to miss or mishear the brief beep, leading to misjudgment. Even in a quiet environment, operators may fail to accurately detect warning signals due to fatigue, distraction, or an excessively fast operating pace. This is an inherent and difficult-to-avoid human error risk. Misjudgment can lead to machine downtime or wafer breakage. Utility Model Content

[0004] In view of the problems existing in the prior art described above, this application provides a micro stage interlocking device, which can realize the precise positioning and fixation of the micro stage during the interaction between the wafer and the robot, thereby effectively preventing wafer breakage and machine downtime caused by stage misalignment.

[0005] To achieve the above and other related objectives, this utility model provides a microscopic stage interlocking device. The microscopic stage includes at least a first sliding plate and a second sliding plate, wherein the first sliding plate is slidably disposed on the second sliding plate. The microscopic stage interlocking device includes:

[0006] The sensing and control components are configured to detect the operating conditions of the micro-stage and generate corresponding control signals.

[0007] A locking actuator is disposed on the second slide plate and communicates with the sensing and control assembly. The locking actuator responds to a control signal and has an extension to a locking position that restricts the sliding of the first slide plate, and a retraction to an unlocking position that allows the first slide plate to slide.

[0008] Optionally, the sensing control component includes:

[0009] The vacuum control box is communicatively connected to the locking actuator and is used to detect the pressure value in the vacuum adsorption pipeline of the micro stage, and is configured to generate a first control signal when the pressure value exceeds a first preset threshold.

[0010] A fiber optic sensor, communicatively connected to the locking actuator, is used to detect whether the microstage is in its initial position and is configured to generate a second control signal when the microstage is in its initial position.

[0011] Optionally, the locking execution component is driven to the unlock position in response to the first control signal and to the locked position in response to the second control signal.

[0012] Optionally, the vacuum control box is connected in series to the vacuum adsorption pipeline of the micro stage.

[0013] Optionally, the micro-stage interlocking device further includes a protective shell, which is fixedly installed on the second slide plate and covers the periphery of the locking actuator.

[0014] Optionally, the lock execution component includes:

[0015] A linear actuator, mounted on the second slide and communicatively connected to the sensing and control components;

[0016] Limit rod;

[0017] The connecting rod is connected at one end to the linear actuator and at the other end to the limit rod;

[0018] The linear actuator responds to a control signal to move the connecting rod, thereby causing the limit rod to extend to a locked position that restricts the sliding of the first slide plate, and to retract to an unlocked position that allows the first slide plate to slide.

[0019] Optionally, the first slide plate is provided with a limiting groove corresponding to the limiting rod. When the limiting rod is in the locked position, the end of the limiting rod extends into the groove.

[0020] Optionally, the first slide includes a first section and a second section arranged sequentially along its sliding direction. The width of the first section is greater than the width of the second section, thereby forming a limiting step surface between the first section and the second section. When the limiting rod is in the locked position, the end of the limiting rod extends to a position where it interferes with the side wall of the first section in the sliding direction, thereby blocking the passage of the limiting step surface.

[0021] Optionally, the linear actuator is a telescopic motor, which includes a main body and a telescopic part, the telescopic part being connected to a connecting rod.

[0022] Optionally, the micro-stage interlocking device further includes: a wafer carrier, disposed on the first slide plate.

[0023] As described above, the microscopic platform interlocking device provided by this utility model has at least the following beneficial technical effects:

[0024] The microscopic stage of this invention includes at least a first sliding plate and a second sliding plate. The first sliding plate is slidably mounted on the second sliding plate. The microscopic stage interlocking device includes a sensing and control component and a locking execution component. The sensing and control component is configured to detect the operating condition of the microscopic stage and generate corresponding control signals. The locking execution component is mounted on the second sliding plate and is communicatively connected to the sensing and control component. Responding to the control signals, the locking execution component extends to a locking position that restricts the sliding of the first sliding plate, and retracts to an unlocking position that allows the first sliding plate to slide.

[0025] This invention relates to a micro-stage interlocking device that uses sensor control components to monitor the operating conditions of the micro-stage in real time and accurately, and automatically controls the state of the locking execution components, replacing the outdated method that relied on the operator's auditory judgment. This fundamentally avoids misjudgments caused by environmental noise, operator fatigue, or negligence, effectively preventing wafer breakage and equipment alarm shutdowns caused by pulling the micro-stage in the wrong position, greatly improving the safety and reliability of the operation process. Attached Figure Description

[0026] Figure 1 The diagram shows the structure of the microscopic platform interlocking device provided in the embodiment of this utility model in the locked position.

[0027] Figure 2 The diagram shows the structure of the microscopic platform interlocking device provided in the embodiment of this utility model in the unlocked position.

[0028] Figure 3The diagram shows the overall structure of the macroscopic stage and the microscopic stage provided in the embodiment of this utility model.

[0029] Figure Labels

[0030] 1. Microscopic stage; 11. First slide plate; 111. Limiting groove; 112. First section; 113. Second section; 114. Limiting step surface; 115. Wafer carrier; 12. Second slide plate; 13. Third slide plate; 14. Microscopic stage interlocking device; 141. Sensing and control assembly; 1411. Vacuum control box; 1412. Fiber optic sensor; 142. Locking execution assembly; 1421. Linear actuator; 14211. Main body; 14212. Telescopic part; 1422. Limiting rod; 1423. Connecting rod; 143. Protective shell; 2. Vacuum adsorption pipeline; 3. Macroscopic stage; 31. Robotic arm. Detailed Implementation

[0031] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0032] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Although the illustrations only show components related to this utility model and are not drawn according to the actual number, shape and size of the components, the shape, quantity, positional relationship and proportion of each component can be arbitrarily changed under the premise of realizing the technical solution of this utility model, and the layout of the components may also be more complex.

[0033] This embodiment provides a microscopic stage interlocking device 14, referring to... Figure 3 When observing and measuring the surface structure of a wafer, the process includes transferring the wafer from the macroscopic stage 3 to the microscopic stage 1 by a robotic arm 31. (Refer to...) Figures 1 to 2 In this embodiment, the micro stage 1 includes at least a first slide plate 11 and a second slide plate 12, with the first slide plate 11 slidably disposed on the second slide plate 12. The first slide plate 11 is provided with a wafer carrier portion 115.

[0034] Reference Figure 1 and Figure 2The micro-stage interlocking device 14 of this embodiment includes a sensing and control component 141 and a locking execution component 142. The two work together to achieve intelligent sensing and mechanical locking of the motion state of the micro-stage 1. The sensing and control component 141 is configured to detect the operating condition of the micro-stage 1 and generate corresponding control signals. The sensing and control component 141 features high sensitivity, strong anti-interference capability, and fast response speed, enabling stable operation in complex industrial environments. The detection signals from the sensing and control component 141 serve as the basis for the action of the locking execution component 142, ensuring the accuracy and timeliness of locking and unlocking operations. The locking execution component 142 is mounted on the second slide plate 12 and is communicatively connected to the sensing and control component 141. Responding to the control signals, the locking execution component 142 extends to a locking position that restricts the sliding of the first slide plate 11, and retracts to an unlocking position that allows the first slide plate 11 to slide. Both the locking and unlocking processes require no manual intervention, achieving fully automated control and effectively avoiding human error or misoperation.

[0035] Specifically, refer to Figure 1 and Figure 2In this embodiment, the sensing and control component 141 includes a vacuum control box 1411 and an optical fiber sensor 1412. The vacuum control box 1411 and the optical fiber sensor 1412 monitor in real time whether the wafer is reliably adsorbed and whether the micro-stage 1 returns to its initial position, respectively. Any abnormal signal at any level will trigger the locking execution component 142 to enter a safe state, fundamentally preventing erroneous operation. Specifically, the vacuum control box 1411 is connected in series to the vacuum adsorption pipeline 1 of the micro-stage 1 via a standard pipe connector. This series connection ensures that all vacuum pressure flowing through the pipeline for wafer adsorption is accurately monitored without altering the original vacuum generation system. Furthermore, the vacuum control box 1411 is communicatively connected to the locking execution component 142 to detect the pressure value within the vacuum adsorption pipeline 2 of the micro-stage 1 and is configured to generate a first control signal when the pressure value exceeds a first preset threshold. Specifically, the vacuum control box 1411 integrates a high-precision piezoresistive sensor and signal processing circuit. The core function of the vacuum control box 1411 is to continuously monitor the vacuum pressure value within the vacuum adsorption pipeline 2 and convert this analog quantity into a digital signal. This module has a pre-stored first preset threshold, calibrated through numerous process experiments. This first preset threshold represents the minimum vacuum pressure required for the wafer to be safely and stably adsorbed. When the detected pressure value continuously exceeds the first preset threshold and remains stable for a very short time, the vacuum control box 1411 determines that "adsorption is successful" and immediately sends a first control signal to the locking execution component 142. The beam of the fiber optic sensor 1412 is aligned with the initial position mark surface of the micro-stage 1 and is communicatively connected to the locking execution component 142. It is used to detect whether the micro-stage 1 is in the initial position and is configured to generate a second control signal when the micro-stage 1 is in the initial position. Specifically, when the micro-stage 1 is in the initial position, the reflected light intensity signal received by the fiber optic sensor 1412 is less than the second preset threshold, at which point the second control signal is generated. The locking execution component 142 is driven to the unlock position in response to the first control signal and to the locked position in response to the second control signal. The two constitute an interlocking logic: that is, the system is allowed to unlock only when both the "vacuum establishment" and "position reset" conditions are met at the same time, otherwise it remains locked, thereby eliminating the risk of misoperation.

[0036] Reference Figure 1 and Figure 2The locking execution component 142 serves as the mechanical execution terminal of the entire interlocking device, and its core function is to convert electrical control signals into reliable physical locking actions. In this embodiment, the locking execution component 142 includes a linear driver 1421, a limit rod 1422, and a connecting rod 1423. The linear driver 1421 is the power source of the entire component. The linear driver 1421 is mounted on the second slide plate 12 and is communicatively connected to the sensing and control component 141 to ensure that control commands can be received and executed without delay. In this embodiment, the linear driver 1421 is a telescopic motor, which includes a main body 14211 and a telescopic part 14212. The main body 14211 internally encapsulates a two-phase hybrid stepper motor as the power core and a precision ball screw and nut pair coaxially connected to it. This transmission combination has advantages such as high transmission efficiency, accurate positioning, long service life, and good self-locking performance, making it very suitable for applications requiring precise positioning and holding. To meet the stringent requirements of semiconductor equipment for structural strength, durability, and cleanliness, the telescopic part 14212 is made of martensitic stainless steel using a cold-drawing process and its surface undergoes hard anodizing treatment. This ceramicized surface not only greatly improves wear resistance and corrosion resistance but also effectively reduces the coefficient of friction during movement. To ensure absolute reliability and zero backlash in power transmission, the extended end of the telescopic part 14212 is rigidly connected to the connecting rod 1423 via a precision metric fine-pitch thread. This design avoids loosening that may occur under frequent start-stop and impact loads. One end of the connecting rod 1423 is connected to the linear actuator 1421, and the other end is connected to the limiting rod 1422, forming a reliable force transmission path. The linear actuator 1421 responds to a control signal to move the connecting rod 1421, thereby causing the limiting rod 1422 to extend to the locked position that restricts the sliding of the first slide plate 11, and retract to the unlocked position that allows the first slide plate 11 to slide.

[0037] Reference Figure 1 and Figure 2In an optional embodiment of this invention, the first sliding plate 11 is provided with a limiting groove 111 corresponding to the limiting rod 1422. The groove 111 is U-shaped or V-shaped, and optionally, the depth of the groove 111 is between 5mm and 8mm. When the limiting rod 1422 is in the locked position, the end of the limiting rod 1422 extends out and is precisely embedded in the groove 111, forming a mechanical hard limit, thereby completely restricting the displacement freedom of the first sliding plate 11. In another optional embodiment of this example, the first slide plate 11 adopts a variable width structure design, including a first section 112 and a second section 113 arranged successively along its sliding direction. The width of the first section 112 is greater than the width of the second section 113, thereby forming a limiting step surface 114 between the first section 112 and the second section 113. When the limiting rod 1422 is in the locked position, the end of the limiting rod 1422 extends to a position that interferes with the side wall of the first section 112 in the sliding direction, thereby blocking the passage of the limiting step surface 114 and achieving physical obstruction. This design eliminates the need to additionally process the groove 111 on the first slide plate 11, simplifying the slide plate manufacturing process. Optionally, the micro-platform interlocking device 14 also includes a protective shell 143, which is fixedly installed on the second slide plate 12 and covers the periphery of the locking execution component 142. Specifically, the protective shell 143 is made of stainless steel sheet bent and welded, and is fixedly installed on the second sliding plate 12 by countersunk screws, completely covering the periphery of the locking actuator 142. Preferably, a sealing ring is provided between the protective shell 143 and the second sliding plate 12, which can effectively prevent contaminants such as cutting fluid and dust from entering the interior of the locking actuator 142. The design of the protective shell 143 improves the reliability and service life of the locking actuator 142 in harsh industrial environments.

[0038] Reference Figures 1 to 3 The microscopic stage interlock device 14 of this invention monitors the operating condition of the microscopic stage 1 in real time and accurately through the sensing and control component 141, and automatically controls the state of the locking execution component 142, replacing the outdated method that relied on the operator's auditory judgment. This fundamentally avoids misjudgments caused by environmental noise, operator fatigue, or negligence, effectively preventing wafer breakage and equipment alarm shutdowns caused by pulling the microscopic stage 1 in the wrong position, greatly improving the safety and reliability of the operation process. Furthermore, through automated interlocking, unplanned downtime caused by handling misoperation alarms and replacing broken wafers is significantly reduced. This allows the microscope equipment to maintain a longer effective operating time, directly improving the overall equipment efficiency on the mass production line. At the same time, the reduction in wafer breakage rate also saves significant material costs, thus bringing significant economic benefits to the enterprise.

[0039] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A microscopic stage interlocking device, wherein the microscopic stage comprises at least a first sliding plate and a second sliding plate, the first sliding plate being slidably disposed on the second sliding plate, characterized in that, The micro-stage interlocking device includes: A sensing and control component is configured to detect the operating condition of the micro-stage and generate corresponding control signals. A locking actuator is disposed on the second slide plate and communicatively connected to the sensing and control assembly. The locking actuator, in response to the control signal, has an extension to a locking position that restricts the sliding of the first slide plate, and a retraction to an unlocking position that allows the first slide plate to slide.

2. The microscopic stage interlocking device according to claim 1, characterized in that, The sensing control component includes: A vacuum control box, which is communicatively connected to the locking execution component, is used to detect the pressure value in the vacuum adsorption pipeline of the micro stage, and is configured to generate a first control signal when the pressure value exceeds a first preset threshold. An optical fiber sensor, communicatively connected to the locking execution component, is used to detect whether the microstage is in the initial position and is configured to generate a second control signal when the microstage is in the initial position.

3. The microscopic stage interlocking device according to claim 2, characterized in that, The locking execution component is driven to the unlock position in response to the first control signal, and to the locked position in response to the second control signal.

4. The microscopic stage interlocking device according to claim 2, characterized in that, The vacuum control box is connected in series to the vacuum adsorption pipeline of the microscopic stage.

5. The microscopic stage interlocking device according to claim 1, characterized in that, Also includes: A protective shell is fixedly installed on the second sliding plate and covers the periphery of the locking actuator.

6. The microscopic stage interlocking device according to claim 1, characterized in that, The locking execution component includes: A linear actuator is mounted on the second slide plate and is communicatively connected to the sensing and control component; Limit rod; The connecting rod is connected at one end to the linear actuator and at the other end to the limiting rod; The linear actuator responds to the control signal to move the connecting rod, thereby causing the limiting rod to extend to a locked position that restricts the sliding of the first slide plate, and to retract to an unlocked position that allows the first slide plate to slide.

7. The microscopic stage interlocking device according to claim 6, characterized in that, The first slide plate is provided with a limiting groove corresponding to the limiting rod. When the limiting rod is in the locked position, the end of the limiting rod extends into the groove.

8. The microscopic stage interlocking device according to claim 6, characterized in that, The first slide plate includes a first section and a second section arranged sequentially along its sliding direction. The width of the first section is greater than the width of the second section, thereby forming a limiting step surface between the first section and the second section. When the limiting rod is in the locked position, the end of the limiting rod extends to a position that interferes with the side wall of the first section in the sliding direction, thereby blocking the passage of the limiting step surface.

9. The microscopic stage interlocking device according to claim 6, characterized in that, The linear actuator is a telescopic motor, which includes a main body and a telescopic part, and the telescopic part is connected to the connecting rod.

10. The microscopic stage interlocking device according to claim 1, characterized in that, Also includes: The wafer carrier is disposed on the first slide plate.

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