pressure switch

Abstract

The application provides a pressure switch, and relates to the technical field of pressure control.The pressure switch comprises a shell, a switch assembly and a moving assembly; the moving assembly is arranged on the inner wall of the shell, and the moving assembly divides the interior of the shell into an isolated first chamber and a second chamber; the first chamber is an atmospheric pressure chamber, and the second chamber is a negative pressure chamber of a device to be measured; the switch assembly is fixedly arranged on the inner wall of the first chamber; in the axial direction perpendicular to the mounting plane of the switch assembly, the moving assembly moves between the triggering position and the non-triggering position of the switch assembly based on the pressure difference between the first chamber and the second chamber; the moving assembly is in contact / non-contact with the switch assembly based on the change of the moving position, and the switch assembly generates a switch signal based on the contact / non-contact.The application detects the chamber pressure of the device to be measured based on the atmospheric pressure, can dynamically monitor and feed back the change of the negative pressure in the chamber based on the change of the atmospheric pressure, and realizes a relative vacuum pressure switch.

Description

Technical Field

[0001] This application relates to the field of pressure control technology, and more specifically, to a pressure switch. Background Technology

[0002] Vacuum pressure switches are widely used for real-time monitoring and feedback of the pressure of media in pipelines during PVD, CVD, ALD, etching, and composite processes in the semiconductor industry.

[0003] Current vacuum pressure switches are typically absolute pressure switches with a built-in vacuum chamber, using absolute vacuum (0 Torr) as a reference. They can accurately monitor the pressure of the medium inside a vacuum pipeline in real time. However, for some applications, such as at the door of a vacuum chamber, considering changes in external atmospheric pressure, it is often necessary to detect the actual vacuum pressure inside the chamber and the external atmospheric pressure. When the vacuum pressure inside the chamber is close to the atmospheric pressure, a switching signal is fed back to allow control based on actual changes in atmospheric pressure. However, current absolute pressure vacuum switches cannot control switching based on changing atmospheric pressure, and positive pressure vacuum switches cannot monitor and feedback changes in negative pressure. Therefore, existing vacuum pressure switches cannot control switching based on actual changes in atmospheric pressure and negative pressure chambers, failing to meet the requirements of control scenarios using atmospheric pressure as a reference. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a pressure switch to improve the problem that the vacuum pressure switch in the prior art cannot control the switch based on the actual changes in atmospheric pressure and the negative pressure chamber.

[0005] To address the aforementioned problems, this application provides a pressure switch, which includes: a housing, a switching assembly, and a moving assembly; The motion component is disposed on the inner wall of the housing, and the motion component divides the interior of the housing into an isolated first chamber and a second chamber; wherein, the first chamber is an atmospheric pressure chamber, and the second chamber is a negative pressure chamber of the device under test; The switch assembly is fixedly mounted on the inner wall of the first chamber; In an axial direction perpendicular to the mounting plane of the switch assembly, the motion component moves between the triggered and non-triggered positions of the switch assembly based on the pressure difference between the first chamber and the second chamber; The motion component makes contact with or does not contact with the switching component based on changes in its position, and the switching component generates a switching signal based on the contact or non-contact.

[0006] In the above implementation, the motion component is mounted on the inner wall of the housing, dividing the interior of the housing into two relatively isolated chambers: a first chamber (atmospheric pressure chamber for pressure detection) and a second chamber (negative pressure chamber for the connected device under test). The motion component dynamically monitors pressure changes in the negative pressure chamber using varying atmospheric pressure as a reference. A switch assembly is fixedly mounted on the inner wall of the first chamber. In the axial direction perpendicular to the mounting plane of the switch assembly, the motion component moves between the trigger and non-trigger positions of the switch assembly based on the pressure difference between the two chambers. This movement allows for contact and non-contact with the switch assembly, enabling the switch assembly to generate corresponding switching signals in different contact and non-contact states. These signals provide feedback on the actual pressure within the negative pressure chamber. This system enables the detection of chamber pressure in the device under test using atmospheric pressure as a reference, dynamically monitoring and feedback changes in negative pressure within the chamber based on atmospheric pressure variations. It achieves a relative vacuum pressure switch, meeting the needs of various control scenarios using atmospheric pressure as a reference.

[0007] Optionally, the motion component includes: a motion element, a trigger element, and an elastic element; The outer edge of the trigger is fixedly disposed on the inner wall of the housing, and the trigger divides the housing into the first chamber and the second chamber; The moving component and the elastic component are disposed in the first chamber, and the triggering component is connected to the moving component; the outer edge of the elastic component is fixed to the inner wall of the housing, and the inner edge of the elastic component is connected to the moving component; The triggering element generates elastic deformation based on the pressure difference between the first chamber and the second chamber. In the axial direction, the elastic element provides the moving element with a first upper pressure away from the second chamber. The moving element moves between the triggering position and the non-triggering position based on the elastic deformation and the first upper pressure.

[0008] In the above implementation process, the motion component includes a moving part that enables movement, a triggering element that generates changes based on pressure, and an elastic element that limits the movement of the moving part. The outer edge of the triggering element is fixed to the inner wall of the housing to divide the interior of the housing into a first chamber and a second chamber, which are isolated from each other. Both the moving part and the elastic element are disposed in the first chamber. The triggering element is connected to the moving part. The outer edge of the elastic element is fixed to the inner wall of the housing, and the inner edge is connected to the moving part. The triggering element can generate elastic deformation based on the pressure difference between the two chambers, so that the movement of the moving part is driven by the change of the triggering element. In the axial direction, the elastic element can provide the moving part with a first upper pressure away from the second chamber. Under the force of elastic deformation and the first upper pressure, the moving part can move between the triggered position and the non-triggered position, thereby realizing the triggering of different signals.

[0009] Optionally, the moving component includes: a guide and a motion shaft; The first end of the motion shaft near the second chamber is connected to the trigger element; The guide component is sleeved on the outer wall of the motion shaft; The guide is used to limit the direction of movement of the motion axis.

[0010] In the above implementation process, the moving component can be equipped with a guide and a motion shaft. The first end of the motion shaft near the second chamber is connected to a trigger, so that the trigger, based on its own elastic deformation, drives the motion shaft and multiple devices connected to the motion shaft to move synchronously. The guide is sleeved on the outer wall of the motion shaft to restrict the direction of motion of the motion shaft, so that the motion shaft always maintains reciprocating motion in the axial direction, reducing the directional deviation of the motion shaft, thereby reducing the situation where the motion shaft cannot make effective contact with the switching assembly due to directional deviation, and effectively improving the accuracy and precision of the switching signal.

[0011] Optionally, the motion component further includes: a baffle; The baffle is disposed in the first chamber, and the trigger is disposed between the baffle and the moving member; The trigger element is indirectly welded to the first end of the motion shaft via the baffle.

[0012] In the above implementation process, in order to better achieve elastic deformation based on the pressure difference between the two chambers, a thinner trigger element can be selected. Considering that the thinner trigger element may be damaged when welded to the motion shaft, a baffle can also be provided in the motion assembly. The baffle is located in the first chamber, and the trigger element is located between the baffle and the motion component. The trigger element can be indirectly heated and welded to the first end of the motion shaft through the baffle to reduce the damage caused by direct welding and to enable the baffle, trigger element and motion shaft to be connected together for synchronous movement.

[0013] Optionally, the housing is provided with a protruding structure, which is disposed between the elastic member and the trigger member in the axial direction; The protruding structure is provided with a through hole, and the first end of the motion shaft passes through the through hole and is connected to the trigger. The protruding structure is used to limit the displacement of the motion axis and limit the deformation range of the trigger.

[0014] In the above implementation process, in the axial direction, the housing can be provided with a corresponding protrusion structure between the elastic element and the trigger element. The protrusion structure has a through hole for the motion shaft to pass through and move, allowing the motion shaft to connect with the trigger element and achieve smooth reciprocating motion within the through hole. The protrusion structure can limit the displacement of the motion shaft in the axial direction, reducing adverse impacts on the trigger element and switching assembly caused by excessive motion shaft displacement, and limiting the range of motion of the motion shaft to allow it to move normally between the normal trigger position and the non-trigger position. The protrusion structure can also limit the deformation range of the trigger element, reducing the possibility of excessive expansion of the trigger element, thereby reducing adverse situations such as breakage caused by excessive expansion.

[0015] Optionally, the moving component further includes: a limiting component; A groove is provided on the second end of the motion shaft away from the second chamber; The limiting component is fitted inside the groove; The limiting member is used to restrict the position of the guide member in the axial direction.

[0016] In the above implementation process, a limiting member can also be provided in the moving part. The limiting member is sleeved in the groove on the second end of the moving shaft away from the second chamber, so as to limit the position of the guide member in the axial direction, that is, limit the position of the guide member sleeved on the moving shaft, so that the guide member can be stably and reliably sleeved on the moving shaft, reducing the adverse situation that the moving shaft cannot be properly restricted due to the displacement of the guide member.

[0017] Optionally, the moving component further includes: an adjusting component; The inner edge of the elastic element is fixedly sleeved on the outer wall of the adjusting element; The outer wall of the guide member is provided with a first thread, and the inner wall of the adjusting member is provided with a second thread that matches the first thread. The adjusting member is sleeved on the outer wall of the guide member through the first thread and the second thread. The adjusting element is used to adjust the first upper pressure provided by the elastic element based on the thread.

[0018] In the above implementation process, the moving part can also be equipped with an adjusting part. The adjusting part is sleeved on the guide part by a matching thread, and the inner edge of the elastic part is fixedly sleeved on the outer wall of the adjusting part. By adjusting the actual position of the adjusting part, the position of the inner edge of the elastic part can be adjusted, thereby adjusting the force on the elastic part and thus adjusting the magnitude of the first upper pressure provided by the elastic part based on the force. The magnitude of the first upper pressure can be adjusted according to actual needs to adjust the force on the moving part and thus adjust the movement of the moving part, adapting to various control scenarios with different strokes.

[0019] Optionally, the initial state of the moving member is: in the axial direction, the moving member drives the trigger member to move away from the second chamber based on the first upper pressure.

[0020] In the above implementation process, considering that the pressure in the negative pressure chamber is usually between negative pressure and atmospheric pressure, in order to enable the trigger to move away from the first chamber normally under negative pressure and have normal movement space, in the initial state of the pressure switch, the initial state of the moving part can be that the moving part can drive the trigger to move away from the second chamber under the action of the first upper pressure. That is, in the initial state, the trigger can be kept in an upward (away from the second chamber) state, so that under the negative pressure of the second chamber, the trigger has enough space to move downward (closer to the second chamber), thereby effectively detecting the negative pressure.

[0021] Optionally, the trigger position is determined based on the height position of the switch assembly in the axial direction and the trigger stroke.

[0022] In the above implementation process, the trigger position can be determined based on the height position of the switch assembly in the axial direction after it is fixed, as well as the trigger stroke of the micro switch on the switch assembly. The trigger position can be adjusted according to the actual detection requirements to detect pressure differences of various sizes and meet the usage requirements of various control scenarios.

[0023] Optionally, in the axial direction, when the elastic deformation generated by the trigger moves away from the switch assembly, the trigger provides a downward force to the moving member; if the downward force is greater than the first upward force, the moving member moves away from the switch assembly; if the downward force is less than the first upward force, the moving member moves closer to the switch assembly. In the axial direction, when the elastic deformation generated by the trigger is close to the switch assembly, the trigger provides a second upper pressure to the moving member, and the moving member moves close to the switch assembly based on the first upper pressure and the second upper pressure.

[0024] In the above implementation process, in the axial direction, if the trigger element undergoes elastic deformation away from the switching assembly (i.e., away from the first chamber), it provides downward pressure to the moving component. When the downward pressure is greater than the first upward pressure, the moving component moves away from the switching assembly; when the downward pressure is less than the first upward pressure, the moving component moves closer to the switching assembly. If the trigger element undergoes elastic deformation closer to the switching assembly (i.e., closer to the first chamber), it provides a second upward pressure to the moving component. Under the push of the first and second upward pressures in the same direction, the moving component moves closer to the switching assembly. The trigger element can provide corresponding force to the moving component based on the actual pressure conditions of the two chambers, and the moving component can generate movement in the corresponding direction and distance based on the actual force conditions, further improving the accuracy and effectiveness of the moving component's movement, thereby improving the effectiveness of the triggered switching signal.

[0025] In summary, the embodiments of this application provide a pressure switch that detects the chamber pressure of the device under test based on atmospheric pressure. It can dynamically monitor and feedback changes in negative pressure within the chamber based on changes in atmospheric pressure, thus realizing a relative vacuum pressure switch. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 A schematic diagram of the structure of a pressure switch provided in an embodiment of this application; Figure 2 This is a detailed structural diagram of a pressure switch provided in an embodiment of this application.

[0028] Icons: 100-Housing; 200-Switch assembly; 300-Motion assembly; D1-First chamber; D2-Second chamber; A-Axial direction; 310-Motion component; 320-Trigger component; 330-Elastic component; 311-Guide component; 312-Motion shaft; 340-Baffle; 110-Protruding structure; 313-Limiting component; 314-Adjusting component. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of the embodiments of this application.

[0030] Current vacuum pressure switches are typically absolute pressure switches with a built-in vacuum chamber, using absolute vacuum (0 Torr) as a reference. They can accurately monitor the pressure of the medium inside a vacuum pipeline in real time. However, for some applications, such as at the door of a vacuum chamber, considering changes in external atmospheric pressure, it is often necessary to detect the actual vacuum pressure inside the chamber and the external atmospheric pressure. When the vacuum pressure inside the chamber is close to the atmospheric pressure, a switching signal is fed back to allow control based on actual changes in atmospheric pressure. Pressure switches based on atmospheric pressure are usually positive pressure vacuum switches. However, current absolute pressure vacuum switches cannot control switching based on changing atmospheric pressure, and positive pressure vacuum switches cannot monitor and feedback changes in negative pressure. Therefore, existing vacuum pressure switches cannot control switching based on actual changes in atmospheric pressure and negative pressure chambers, failing to meet the requirements of control scenarios using atmospheric pressure as a reference.

[0031] To address the aforementioned issues, this application provides a pressure switch that uses atmospheric pressure as a reference to detect the chamber pressure of the device under test. It can dynamically monitor and feedback changes in negative pressure within the chamber based on changes in atmospheric pressure, thus achieving a relative vacuum pressure switch.

[0032] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of a pressure switch provided in an embodiment of the present application. The pressure switch may include: a housing 100, a switch assembly 200, and a motion assembly 300. The motion component 300 is disposed on the inner wall of the housing 100, dividing the interior of the housing 100 into an isolated first chamber D1 and a second chamber D2. The first chamber D1 is an atmospheric pressure chamber, and the second chamber D2 is a negative pressure chamber for the device under test. The motion component 300, by dividing the interior of the housing 100 into the relatively isolated first chamber D1 and second chamber D2, allows for dynamic monitoring of pressure changes in the negative pressure chamber using changing atmospheric pressure as a pressure reference.

[0033] Optionally, the inner wall of the first chamber D1 of the housing 100 may be provided with one or more corresponding perforated structures to ensure that the atmospheric pressure inside the first chamber D1 is consistent with that outside, thus making the first chamber D1 an atmospheric pressure chamber. The second chamber D2 of the housing 100 may be configured with a corresponding connector structure to connect to the pipes or other structures of the device under test. The device under test may be a corresponding vacuum device with an internal pressure between negative pressure and atmospheric pressure, thus making the second chamber D2 a negative pressure chamber.

[0034] For example, the housing 100 can be made of various types of metal materials, such as stainless steel, to provide a stable working environment for the multiple devices therein.

[0035] Optionally, the motion component 300 is fixed to the inner wall of the housing 100, but multiple devices inside the motion component 300 can generate motion to respond to pressure changes in the two chambers through motion.

[0036] It should be noted that the switch assembly 200 is fixedly mounted on the inner wall of the first chamber D1. In the axial direction A perpendicular to the mounting plane of the switch assembly 200, the motion assembly 300 moves between the triggered and non-triggered positions of the switch assembly 200 based on the pressure difference between the first chamber D1 and the second chamber D2. The motion assembly 300 contacts / does not contact the switch assembly 200 based on the change in its movement position, and the switch assembly 200 generates a switching signal based on this contact / non-contact. The motion assembly 300 can move between the triggered and non-triggered positions of the switch assembly 200 based on the pressure difference between the two chambers, achieving contact and non-contact with the switch assembly 200 based on the change in its movement position. This allows the switch assembly 200 to generate corresponding switching signals in different contact and non-contact states, providing feedback on the actual pressure within the negative pressure chamber based on the switching signal.

[0037] Optionally, the switch assembly 200 may include a corresponding switch fixture and a switch element. The switch element can be fixed in the switch fixture by screws, glue, etc. The outer wall of the switch fixture may be provided with threads that match the inner wall of the housing 100, so as to fix it to the inner wall of the first chamber D1 by the threads. The switch element can be a micro limit switch or other switching element that requires contact for control. The end of the switch element near the motion assembly 300 may be provided with a control terminal, and the trigger terminal can be a corresponding pressing element, such as a button, so as to generate a corresponding switching signal through contact and non-contact between the control terminal and the motion assembly 300. The trigger position of the switch assembly 200 is the corresponding position of the motion assembly 300 triggering the control terminal; other positions are non-trigger positions.

[0038] Optionally, the switching device may include corresponding COM (Common Terminal), NC (Normal Close), and NO (Normal Open) terminals. The ports corresponding to the control terminal can be set according to actual control requirements. For example, the control terminal can be configured as a COM terminal and an NC terminal. When the control terminal contacts the motion component 300, the COM terminal and the NC terminal are turned on, generating a corresponding switching signal. Alternatively, the control terminal can also be configured as a COM terminal and a NO terminal. When the control terminal contacts the motion component 300, the COM terminal and the NO terminal are turned on, generating a corresponding switching signal. Or, the control terminal can also be configured as a COM terminal, an NC terminal, and a NO terminal. When the control terminal contacts the motion component 300, all three terminals are turned on, generating a corresponding switching signal. The specific type of switching signal can be set and adjusted according to actual requirements.

[0039] Optionally, the switch can also be connected to a display unit or signal unit outside the housing 100 via a connector such as a wire to transmit the generated switch signal, and the external display unit or signal unit can display and prompt the switch signal.

[0040] exist Figure 1 In the illustrated embodiment, the chamber pressure of the device under test can be detected with atmospheric pressure as a reference. Based on changes in atmospheric pressure, the changes in negative pressure in the chamber are dynamically monitored and fed back, realizing a relative vacuum pressure switch and meeting the usage requirements of various control scenarios with atmospheric pressure as a reference.

[0041] Optionally, please refer to Figure 2 , Figure 2 The present application provides a detailed structural schematic diagram of a pressure switch. The motion component 300 may include: a motion element 310, a trigger element 320, and an elastic element 330.

[0042] The outer edge of the trigger 320 is fixedly disposed on the inner wall of the housing 100, dividing the housing 100 into a first chamber D1 and a second chamber D2. The moving member 310 and the elastic member 330 are disposed in the first chamber D1, with the trigger 320 connected to the moving member 310. The outer edge of the elastic member 330 is fixed to the inner wall of the housing 100, and the inner edge of the elastic member 330 is connected to the moving member 310. The trigger 320 generates elastic deformation based on the pressure difference between the first chamber D1 and the second chamber D2. In the axial direction A, the elastic member 330 provides the moving member 310 with a first upward pressure away from the second chamber D2. The moving member 310 moves between a triggered position and a non-triggered position based on the elastic deformation and the first upward pressure. The trigger 320 can generate elastic deformation based on the pressure difference between the two chambers, so that the movement 310 can be driven to move by the change of the trigger 320. In the axial direction A, the elastic element 330 can provide the movement 310 with a first upper pressure away from the second chamber D2. Under the force of elastic deformation and the first upper pressure, the movement 310 can move between the trigger position and the non-trigger position, thereby realizing the triggering of different signals.

[0043] Optionally, the shapes of the trigger 320 and the elastic element 330 can be set according to the shape of the housing 100. For example, when the housing 100 is a cylindrical housing 100, the trigger 320 can be set as a circular structure and the elastic element 330 can be set as a ring structure.

[0044] For example, the housing 100 may have a long, thin-walled structure to reduce the impact of high temperatures during welding on the switching assembly 200, the trigger element 320, and the elastic element 330.

[0045] For example, the trigger 320 can be a flexible diaphragm structure, such as a stainless steel diaphragm, which is corrosion-resistant, high-temperature resistant, has high mechanical strength, and a long service life, making it suitable for applications involving high pressure, high temperature, or corrosive environments. The edge of the diaphragm structure can be welded and fixed to the inner wall of the housing 100. The fixing position of the diaphragm structure can be selected near the interface of the housing 100 to divide the interior of the housing 100 into an isolated first chamber D1 and a second chamber D2.

[0046] For example, the elastic element 330 can be an elastic disc spring structure. In the axial direction A, the disc spring structure is pressed down by the moving element 310, that is, the moving element 310 applies a force to the disc spring structure in the direction pointing towards the trigger element 320. The disc spring structure generates compression. Under the elastic action, the disc spring structure can provide the moving element 310 with a reaction force away from the second chamber D2 as a first upward pressure.

[0047] It should be noted that the deformability of the trigger element 320 can be determined based on the actual pressure range of the negative pressure chamber, and the elastic parameters of the elastic element 330 can be determined based on the actual pressure range of the negative pressure chamber and atmospheric pressure. These elastic parameters can include various parameters such as the outer diameter, inner diameter, thickness, and free height of the elastic element 330. This allows the elastic element 330 to be applicable to various types of pressure environments, thereby effectively expanding the applicability of the pressure switch.

[0048] Please continue reading. Figure 2 The moving component 310 may further include a guide 311 and a moving shaft 312. The first end of the moving shaft 312 near the second chamber D2 is connected to the trigger 320, so that the trigger 320, based on its own elastic deformation, drives the moving shaft 312 and multiple devices connected to the moving shaft 312 to move synchronously. The guide 311 is sleeved on the outer wall of the moving shaft 312. The guide 311 is used to limit the direction of movement of the moving shaft 312, ensuring that the moving shaft 312 always reciprocates in the axial direction A, reducing directional deviations of the moving shaft 312, thereby reducing the possibility of ineffective contact with the switching assembly 200 due to directional deviations, and effectively improving the accuracy and precision of the switching signal.

[0049] Optionally, the motion shaft 312 can be configured as a shaft-shaped structure that facilitates movement, such as a cylindrical shaft. The first end of the motion shaft 312 can be configured as a plate-shaped structure to increase the connection area between the motion shaft 312 and the trigger 320, thereby improving the stability and effectiveness of the connection between the motion shaft 312 and the trigger 320.

[0050] Optionally, the guide member 311 can be configured as a columnar structure with a hollow region, the hollow region being in contact with the outer wall of the motion shaft 312, so that the motion shaft 312 can move smoothly up and down in the guide member 311. Furthermore, the central axis of the guide member 311 is parallel to the axial direction A, so as to restrict the movement direction of the motion shaft 312 through the guide member 311.

[0051] Please continue reading. Figure 2To better utilize the pressure difference between the two chambers for elastic deformation, a thinner trigger element 320 can be selected. Considering the potential for breakage when welding the thin trigger element 320 to the motion shaft 312, the motion assembly 300 may also include a baffle 340. The baffle 340 is disposed in the first chamber D1, and the trigger element 320 is disposed between the baffle 340 and the motion element 310. The trigger element 320 is indirectly welded to the first end of the motion shaft 312 via the baffle 340. The placement of the trigger element 320 between the baffle 340 and the motion element 310 allows for indirect heating and welding to the first end of the motion shaft 312 via the baffle 340, reducing the risk of breakage during direct welding and enabling the baffle 340, trigger element 320, and motion shaft 312 to move synchronously together.

[0052] Optionally, the baffle 340 can be configured as a corresponding sheet metal structure. When fixing, the connection structure of the first end of the baffle 340-trigger 320-motion shaft 312 can be determined first, and then the baffle 340 can be heated to weld and fix the first end of the baffle 340, trigger 320 and motion shaft 312 through indirect heating.

[0053] Please continue reading. Figure 2 The housing 100 is provided with a protruding structure 110, which is disposed between the elastic member 330 and the trigger member 320 in the axial direction A. The protruding structure 110 has a through hole through which the first end of the motion shaft 312 passes and connects to the trigger member 320. The protruding structure 110 is used to limit the displacement of the motion shaft 312 and limit the deformation range of the trigger member 320. In the axial direction A, the housing 100 may have a corresponding protruding structure 110 between the elastic member 330 and the trigger member 320. The protruding structure 110 has a through hole for the motion shaft 312 to pass through and move, so that the motion shaft 312 can pass through the through hole to connect with the trigger member 320 and achieve free reciprocating motion within the through hole. The protruding structure 110 can limit the displacement of the motion shaft 312 in the axial direction A, thereby reducing the adverse impact on the trigger element 320 and the switching assembly 200 caused by excessive displacement of the motion shaft 312, and limiting the range of motion of the motion shaft 312 so that it can move normally between the normal trigger position and the non-trigger position. The protruding structure 110 can also limit the deformation range of the trigger element 320, reducing the possibility of excessive expansion of the trigger element 320, thereby reducing adverse situations such as breakage caused by excessive expansion of the trigger element 320.

[0054] Optionally, the material of the protruding structure 110 is the same as that of the housing 100. The protruding structure 110 can be a corresponding baffle or other structure. Taking the housing 100 as a cylindrical housing 100 as an example, the protruding structure 110 can be set as an annular structure with a through hole in the middle. Furthermore, the shape of the through hole on the protruding structure 110 can be set according to the shape and size of the outer wall of the motion shaft 312. Taking the motion shaft 312 as a circular shaft as an example, the through hole is a circular hole, and the diameter of the circular hole is slightly larger than the diameter of the circular shaft 312, so that the motion shaft 312 can achieve smooth reciprocating motion within the through hole. Furthermore, by Figure 2 It can be seen that the protruding structure 110 does not directly contact the moving part 310 and will not have an adverse effect on the movement of the moving part 310.

[0055] For example, when the motion shaft 312 moves closer to the switch assembly 200, since the first end of the motion shaft 312 is provided with a sheet-like structure, the protrusion structure 110 can limit the upward movement range of the motion shaft 312 in conjunction with the sheet-like structure. When the motion shaft 312 moves away from the switch assembly 200, since the guide member 311 and other devices are provided on the outside of the motion shaft 312, the protrusion structure 110 can limit the downward movement range of the motion shaft 312 in conjunction with the external guide member 311, thereby limiting the overall displacement range of the motion shaft 312.

[0056] Please continue reading. Figure 2 The moving component 310 may further include a limiting component 313. A groove is provided on the second end of the moving shaft 312 away from the second chamber D2, and the limiting component 313 is sleeved within the groove. The limiting component 313 is used to limit the position of the guide component 311 in the axial direction A. By limiting the position of the guide component 311 in the axial direction A through the limiting component 313, that is, by limiting the position of the guide component 311 sleeved on the moving shaft 312, the guide component 311 can be stably and reliably sleeved on the moving shaft 312, reducing the adverse situation where displacement of the guide component 311 leads to the inability to properly limit the movement direction of the moving shaft 312.

[0057] For example, the limiting member 313 can be configured as a device such as a corresponding shaft retaining ring that can limit the position of the guide member 311.

[0058] Optionally, a corresponding metal contact or ceramic contact may be provided on the second end of the motion shaft 312. The metal contact or ceramic contact is fixed on the second end by means of glue or the like, so that when the motion shaft 312 moves to the corresponding trigger position, it contacts the control end of the switch element through the contact, thereby realizing the switch control.

[0059] Please continue reading. Figure 2The moving part 310 may further include an adjusting part 314. The inner edge of the elastic part 330 is fixedly sleeved on the outer wall of the adjusting part 314. The outer wall of the guide part 311 is provided with a first thread, and the inner wall of the adjusting part 314 is provided with a second thread that matches the first thread. The adjusting part 314 is sleeved on the outer wall of the guide part 311 through the first thread and the second thread. The adjusting part 314 is used to adjust the first upper pressure provided by the elastic part 330 based on the thread. Adjusting member 314 is fitted onto guide member 311 via a matching thread. The inner edge of elastic member 330 is fixedly fitted onto the outer wall of adjusting member 314. By adjusting the actual position of adjusting member 314, the position of the inner edge of elastic member 330 can be adjusted to adjust the force on elastic member 330, thereby adjusting the magnitude of the first upper pressure provided by elastic member 330 based on the force. The magnitude of the first upper pressure can be adjusted according to actual needs to adjust the force on moving member 310, thereby adjusting the movement of moving member 310, adapting to various control scenarios with different strokes.

[0060] For example, the adjusting member 314 can be a corresponding adjusting nut. The fixed position of the adjusting member 314 on the guide member 311 can be adjusted by means of thread adjustment. Since the inner edge of the elastic member 330 is fixed on the adjusting member 314, when the position of the adjusting member 314 changes in the axial direction, the pressure on the elastic member 330 will also change, and the magnitude of the first upper pressure fed back by the elastic member 330 to the adjusting member 314 will also change.

[0061] Optionally, taking the elastic element 330 as a disc spring structure as an example, a corresponding groove structure can be provided on the inner wall of the housing 100, and an outer retaining ring of the disc spring is set in the groove structure. The outer edge of the disc spring structure is fixed to the inner wall of the housing 100 through the outer retaining ring of the disc spring. A corresponding groove structure can also be provided on the outer wall of the adjusting element 314, and an inner retaining ring of the disc spring is set in the groove structure. The inner edge of the disc spring structure is fixed to the adjusting element 314 through the inner retaining ring of the disc spring.

[0062] It should be noted that, considering the pressure inside the negative pressure chamber is typically between negative and atmospheric pressure, in order for the trigger 320 to move normally away from the first chamber D1 under negative pressure conditions and to have sufficient space for movement, in the initial state of the pressure switch, the moving part 310 is initially positioned as follows: in the axial direction A, the moving part 310, based on the first upward pressure, drives the trigger 320 to move away from the second chamber D2. That is, in the initial state, the trigger 320 is kept in an upward (away from the second chamber D2) position, so that when the second chamber D2 is under negative pressure, the trigger 320 has sufficient space to move downward (closer to the second chamber D2), thereby effectively detecting the negative pressure condition.

[0063] It should be noted that the trigger position is determined based on the height position of the switch assembly 200 in the axial direction A and the trigger stroke. The trigger position can be determined according to the height position of the switch assembly 200 in the axial direction A after it is fixed, and the trigger stroke of the micro switch on the switch assembly 200. The trigger position can be adjusted according to the actual detection requirements to detect various pressure differences and meet the needs of various control scenarios.

[0064] For example, the height of the switch assembly 200 in the axial direction A can be adjusted by adjusting the thread position of the switch fixing. Since the displacement of the moving assembly 300 in the axial direction A can characterize the actual pressure difference between the two chambers, a suitable trigger position can be determined according to the actual detection requirements so that the moving assembly 300 can reach the trigger position under the corresponding pressure difference, so that the switch assembly 200 generates a switching signal based on contact and non-contact conditions, and the switching is controlled by the corresponding pressure difference.

[0065] It should be noted that, in the axial direction A, when the elastic deformation of the trigger 320 moves away from the switch assembly 200, the trigger 320 provides downward pressure to the moving member 310. If the downward pressure is greater than the first upward pressure, the moving member 310 moves away from the switch assembly 200; if the downward pressure is less than the first upward pressure, the moving member 310 moves closer to the switch assembly 200. If the trigger 320 generates elastic deformation away from the switch assembly 200, i.e., away from the first chamber D1, the trigger 320 can provide downward pressure to the moving member 310. When the downward pressure is greater than the first upward pressure, the moving member 310 can move away from the switch assembly 200; when the downward pressure is less than the first upward pressure, the moving member 310 can move closer to the switch assembly 200.

[0066] It should be noted that, in the axial direction A, when the elastic deformation of the trigger 320 approaches the switch assembly 200, the trigger 320 provides a second upward pressure to the moving member 310, and the moving member 310 moves towards the switch assembly 200 based on the first and second upward pressures. If the trigger 320 generates an elastic deformation approaching the switch assembly 200, i.e., approaching the first chamber D1, the trigger 320 can provide a second upward pressure to the moving member 310, and the moving member 310 moves towards the switch assembly 200 under the push of the first and second upward pressures in the same direction.

[0067] Therefore, the trigger 320 can provide a corresponding force to the moving part 310 based on the actual pressure in the two chambers, and the moving part 310 can generate movement in the corresponding direction and distance based on the actual force, which further improves the accuracy and effectiveness of the moving part 310 during movement, thereby improving the effectiveness of the triggering switch signal.

[0068] For example, taking the negative pressure chamber as a vacuum negative pressure case, under the pressure difference between atmospheric pressure and negative pressure, the trigger 320 deforms away from the switch assembly 200. The downward pressure of the trigger 320 overcomes the first upward pressure applied by the elastic member 330, the switch is opened, and the electrical signal is reversed. When the negative pressure chamber gradually reaches atmospheric pressure, the air pressure inside and outside the first chamber D1 and the second chamber D2 is balanced, and there is no pressure difference. The moving member 310 moves closer to the switch assembly 200 under the action of the first upward pressure of the elastic member 330, the switch is turned on, and the electrical signal is reversed.

[0069] Optionally, for ease of encapsulation, the housing 100 may be provided with a corresponding cover structure. The cover structure is located at the end of the first chamber D1 away from the moving component 300. The cover structure may be provided with corresponding upper cover contacts. The switch and the upper cover contacts may be connected by a metal guide solder with an insulating sheath to transmit the switch signal to an external device for processing.

[0070] For example, the overall assembly process of the vacuum switch may include: fixing the outer edge of the trigger 320 to the inner wall of the housing 100, welding the baffle 340, trigger 320, and motion shaft 312 together, fixing the outer edge of the elastic member 330 inside the housing 100, fixing the inner edge of the elastic member 330 to the adjusting member 314, then fitting the adjusting member 314 and the guide member 311 onto the motion shaft 312, installing the limiting member 313 to limit the position of the guide member 311 and the adjusting member 314, adjusting the position of the adjusting member 314 in the axial direction A by threading, fixing the switch assembly 200 to the inner wall of the first chamber D1, connecting the switch member and the upper cover contact, and finally welding the cover structure to the housing 100.

[0071] For example, a pressure switch needs to be installed at the door of a vacuum chamber. When the vacuum pressure in the second chamber D2 is within 20 Torr below atmospheric pressure, a signal indicating that the chamber door can be opened is fed back. The pressure switch provided in the embodiments of this application can be used. Before the switch assembly 200 is installed, the force state of the elastic member 330 is changed by the adjusting member 314. When the air pressure in the second chamber D2 changes from atmospheric pressure to -20 Torr, the trigger member 320 generates a displacement s in the axial direction A, and the displacement s is greater than the axial trigger displacement t of the switch member. Then, the switch assembly 200 is installed and tested to see if it can be triggered normally. The moving component 300 maintains its initial state when the vacuum pressure in the second chamber D2 is below -20 Torr. When the vacuum pressure in the second chamber D2 is within -20 Torr, the switch assembly 200 is triggered, and the electrical signal reverses. Then, the switch assembly 200 is fixed, and the overall installation and welding are completed. When the pressure switch, after completing this test, is connected to the pipeline of the device under test, and the second chamber D2 is under high vacuum, under the pressure difference between the atmospheric pressure in the first chamber D1 and the negative pressure in the second chamber D2, the trigger element 320 moves away from the switch assembly 200. The downward pressure applied to the moving element 310 overcomes the first upward pressure applied by the elastic element 330, causing the moving element 310 to move synchronously away from the switch assembly 200 to a certain position. The switch is in the initial on (off) state (the wiring contacts control whether it is initially on or off). As the vacuum pressure in the second chamber D2 gradually increases, the first chamber... As the atmospheric pressure in chamber D1 and the vacuum pressure difference in chamber D2 gradually decrease, the moving part 310 moves closer to the switch assembly 200 under the action of the first upper pressure of the elastic part 330. When the atmospheric pressure in the first chamber D1 and the vacuum pressure difference in the second chamber D2 are within 20 Torr, the moving part 310 moves closer to the switch assembly 200 to a certain position, triggering the switch. The electrical signal is reversed, and the switch is in the open (conducting) state. After receiving the signal, the external equipment reminds the staff that the pipeline pressure of the equipment under test has reached the preset pressure, and the chamber door can be opened for subsequent processing.

[0072] It should be noted that since the triggering principle is based on the vacuum pressure difference between the atmospheric pressure in the first chamber D1 and the pressure in the second chamber D2, the actual trigger value of the pressure in the second chamber D2 can vary with atmospheric pressure, improving triggering accuracy in many applications. For example, when the atmospheric pressure is 760 Torr, the trigger value is 750 Torr, meaning the signal reverses when the pressure difference is approximately 10 Torr; when the atmospheric pressure is 750 Torr, the trigger value is approximately 740 Torr, achieving variable high-precision control requirements in some applications.

[0073] In addition, the components in the various embodiments of this application can be integrated together to form an independent part, or each component can exist independently, or two or more components can be integrated to form an independent part.

[0074] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application. It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0075] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

[0076] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, article, or apparatus that includes said element.

Claims

1. A pressure switch, characterized in that, The pressure switch includes: a housing, a switching assembly, and a moving assembly; The motion component is disposed on the inner wall of the housing, and the motion component divides the interior of the housing into an isolated first chamber and a second chamber; wherein, the first chamber is an atmospheric pressure chamber, and the second chamber is a negative pressure chamber of the device under test; The switch assembly is fixedly mounted on the inner wall of the first chamber; In an axial direction perpendicular to the mounting plane of the switch assembly, the motion component moves between the triggered and non-triggered positions of the switch assembly based on the pressure difference between the first chamber and the second chamber; The motion component makes contact with or does not contact with the switching component based on changes in its position, and the switching component generates a switching signal based on the contact or non-contact.

2. The pressure switch according to claim 1, characterized in that, The motion component includes: a motion element, a trigger element, and an elastic element; The outer edge of the trigger is fixedly disposed on the inner wall of the housing, and the trigger divides the housing into the first chamber and the second chamber; The moving component and the elastic component are disposed in the first chamber, and the triggering component is connected to the moving component; the outer edge of the elastic component is fixed to the inner wall of the housing, and the inner edge of the elastic component is connected to the moving component; The triggering element generates elastic deformation based on the pressure difference between the first chamber and the second chamber. In the axial direction, the elastic element provides the moving element with a first upper pressure away from the second chamber. The moving element moves between the triggering position and the non-triggering position based on the elastic deformation and the first upper pressure.

3. The pressure switch according to claim 2, characterized in that, The moving parts include: a guide and a motion shaft; The first end of the motion shaft near the second chamber is connected to the trigger element; The guide component is sleeved on the outer wall of the motion shaft; The guide is used to limit the direction of movement of the motion axis.

4. The pressure switch according to claim 3, characterized in that, The motion component also includes: a baffle; The baffle is disposed in the first chamber, and the trigger is disposed between the baffle and the moving member; The trigger element is indirectly welded to the first end of the motion shaft via the baffle.

5. The pressure switch according to claim 3, characterized in that, The housing is provided with a protruding structure, which is disposed between the elastic member and the trigger member in the axial direction; The protruding structure is provided with a through hole, and the first end of the motion shaft passes through the through hole and is connected to the trigger. The protruding structure is used to limit the displacement of the motion axis and limit the deformation range of the trigger.

6. The pressure switch according to claim 3, characterized in that, The moving component further includes: a limiting component; A groove is provided on the second end of the motion shaft away from the second chamber; The limiting component is fitted inside the groove; The limiting member is used to restrict the position of the guide member in the axial direction.

7. The pressure switch according to claim 3, characterized in that, The moving component further includes: an adjusting component; The inner edge of the elastic element is fixedly sleeved on the outer wall of the adjusting element; The outer wall of the guide member is provided with a first thread, and the inner wall of the adjusting member is provided with a second thread that matches the first thread. The adjusting member is sleeved on the outer wall of the guide member through the first thread and the second thread. The adjusting element is used to adjust the first upper pressure provided by the elastic element based on the thread.

8. The pressure switch according to any one of claims 2-7, characterized in that, in, The initial state of the moving component is as follows: in the axial direction, the moving component drives the trigger component to move away from the second chamber based on the first upper pressure.

9. The pressure switch according to any one of claims 2-7, characterized in that, in, The trigger position is determined based on the height position of the switch assembly in the axial direction and the trigger stroke.

10. The pressure switch according to any one of claims 2-7, characterized in that, in, In the axial direction, when the elastic deformation generated by the trigger moves away from the switch assembly, the trigger provides a downward force to the moving member. If the downward force is greater than the first upward force, the moving member moves away from the switch assembly. If the downward force is less than the first upward force, the moving member moves closer to the switch assembly. In the axial direction, when the elastic deformation generated by the trigger is close to the switch assembly, the trigger provides a second upper pressure to the moving member, and the moving member moves close to the switch assembly based on the first upper pressure and the second upper pressure.

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