A solid-state laser seed source, laser, laser device, and laser apparatus

CN224790154UActive Publication Date: 2026-09-22MAXPHOTONICS CORP +1
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Patent Information

Application Number
CN202522357521.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-11-06
Publication Date
2026-09-22
Estimated Expiration
2035-11-06

AI Technical Summary

Technical Problem

[0004]本实用新型提供了一种固体激光种子源、激光器、激光装置和激光设备,以解决相关技术中MOPA光纤激光器放大级数过多引起的非线性效应以及成本高的问题,同时避免了瓦量级直接半导体激光器多路合束引起的光束质量下降、复杂热管理以及激光器寿命受限等问题

Benefits of technology

[0023]根据本实用新型实施例提供的固体激光种子源、激光器、激光装置和激光设备,固体激光种子源包括:种子源模块、偏振分束器、激光晶体、偏振调控组件、反射镜和泵浦源模块;其中,种子源模块用于输出线偏振种子激光光束;泵浦源模块,用于输出线偏振泵浦激光光束;偏振分束器位于种子源模块的出光侧,激光晶体位于偏振分束器的出光侧,反射镜位于激光晶体的出光侧;偏振调控组件位于偏振分束器与激光晶体之间,泵浦源模块位于反射镜背离激光晶体的一侧;或者,偏振调控组件位于激光晶体与反射镜之间,泵浦源模块位于种子源模块与偏振分束器之间;在线偏振泵浦激光光束的作用下,线偏振种子激光光束经过激光晶体双程放大,放大后的线偏振种子激光光束由偏振分束器输出。由此,通过低功率半导体激光器和固体放大能够获得连续输出的高功率高可靠性的种子源,能够有效解决MOPA光纤激光器放大级数过多引起的非线性效应以及成本升高问题,同时避免了瓦量级直接半导体激光器多路合束引起的光束质量下降、复杂热管理以及激光器寿命受限等问题,并且本实用新型提供的固体激光种子源为全空间光传输,具有更好的高散热性和可靠性,在高平均功率运行时,产生的热量可以有效地被导散到光学平台和空气中,在应对微弱震动时,不会导致光束指向性变化、光斑变形等问题,实际应用价值较高,具有更高的可靠性和稳定性,整体结构设计简单,成本降低。

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Abstract

The utility model discloses a kind of solid laser seed source, laser, laser device and laser equipment, solid laser seed source includes: seed source module, polarizing beam splitter, laser crystal, polarization control component, reflector and pump source module;Polarizing beam splitter is located in the light exit side of seed source module, laser crystal is located in the light exit side of polarizing beam splitter, reflector is located in the light exit side of laser crystal;Polarization control component is located between polarizing beam splitter and laser crystal, pump source module is located in the side of reflector away from laser crystal;Or, polarization control component is located between laser crystal and reflector, pump source module is located between seed source module and polarizing beam splitter;Under the action of linear polarization pump laser beam, linear polarization seed laser beam is amplified by laser crystal double pass, and amplified linear polarization seed laser beam is output by polarizing beam splitter. Thus, by low-power semiconductor laser and solid amplification, high-power high-reliability seed source can be obtained.
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Description

Technical Field

[0001] This utility model relates to the field of laser technology, and in particular to a solid-state laser seed source, a laser, a laser device, and a laser equipment. Background Technology

[0002] High-power lasers in the 1064nm band have important applications in industrial processing, medical treatment, and national defense research. Currently, the main method for generating 1064nm high-power lasers is the MOPA (Master Parametric Oscillator Amplifier) ​​scheme. Its core structure includes a seed source (master oscillator, MO), a pump source (980nm or 1064nm laser), a gain fiber (ytterbium-doped fiber), a wavelength division multiplexer (WDM) or beam combiner, and an isolator. The seed source typically uses a low-power semiconductor laser, which is amplified through multiple fiber stages to obtain high-power laser output. Although the output beam quality is good, the electro-optic efficiency is low (20%-30%) due to the low coupling efficiency between the pump light and the signal light, and energy loss caused by the nonlinear absorption of ytterbium-doped fiber (such as stimulated Raman scattering). Furthermore, the nonlinear effects caused by multi-stage fiber amplification, such as stimulated Raman scattering (SRS) and stimulated Brillouin scattering (SBS), severely limit the amplification power level. High-power pump sources (such as 980nm lasers), beam combiners, and isolators are expensive, resulting in high overall equipment prices.

[0003] To address the aforementioned issues, the use of watt-level semiconductor lasers in related technologies can reduce the number of amplification stages and alleviate the problems encountered in conventional MOPA fiber amplification. The main technical solution involves using multiple 1064nm semiconductor laser chips (typically multimode output) at the milliwatt level (e.g., 100-500mW) and employing beam combining techniques (such as wavelength combining, polarization combining, and spatial combining) to superimpose the power from multiple optical paths, ultimately outputting watt-level power. Its key characteristic is direct laser output without resonant cavity feedback, relying solely on the wavelength and mode characteristics of the chips themselves. However, multi-chip beam combining can lead to mode aliasing, resulting in poor output laser beam quality. Simultaneously, high power density causes increased chip junction temperature, and temperature fluctuations can cause wavelength drift and refractive index changes, leading to mode instability and demanding thermal management requirements. Furthermore, chip defects (such as dislocations and dark lines) propagate under high current, causing a decrease in optical output efficiency and limiting laser lifespan. Utility Model Content

[0004] This invention provides a solid-state laser seed source, laser, laser device, and laser equipment to solve the problems of nonlinear effects and high cost caused by excessive amplification stages in MOPA fiber lasers in related technologies. It also avoids the problems of beam quality degradation, complex thermal management, and limited laser lifespan caused by multiplexing in watt-level direct semiconductor lasers. This invention has the advantages of miniaturization, low cost, and high reliability.

[0005] According to one aspect of the present invention, a solid-state laser seed source is provided, comprising: a seed source module, a polarization beam splitter, a laser crystal, a polarization control component, a mirror, and a pump source module;

[0006] The seed source module is used to output a linearly polarized seed laser beam; the pump source module is used to output a linearly polarized pump laser beam.

[0007] The polarization beam splitter is located on the light-emitting side of the seed source module, the laser crystal is located on the light-emitting side of the polarization beam splitter, and the reflector is located on the light-emitting side of the laser crystal; the polarization control component is located between the polarization beam splitter and the laser crystal, and the pump source module is located on the side of the reflector opposite to the laser crystal; or, the polarization control component is located between the laser crystal and the reflector, and the pump source module is located between the seed source module and the polarization beam splitter.

[0008] Under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified twice by the laser crystal, and the amplified linearly polarized seed laser beam is output by the polarization beam splitter.

[0009] Optionally, the solid-state laser seed source further includes an isolator located on the light-emitting side of the seed source module, used to prevent the reflected linearly polarized seed laser beam from re-entering the seed source module.

[0010] Optionally, the seed source module includes a seed source and a first half-wave plate.

[0011] Optionally, the side of the reflector closest to the laser crystal is provided with a high-reflectivity coating to reflect the linearly polarized seed laser beam, and / or the side of the reflector furthest from the laser crystal is provided with an anti-reflection coating to transmit the linearly polarized pump laser beam.

[0012] Optionally, when the polarization control component is located between the laser crystal and the reflector, and the pump source module is located between the seed source module and the polarization beam splitter, the solid-state laser seed source further includes a dichroic mirror. The dichroic mirror is used to transmit the linearly polarized seed laser beam and reflect the linearly polarized pump laser beam to form a combined beam. The polarization beam splitter is used to transmit the combined beam to the laser crystal. The linearly polarized seed laser beam is amplified once and then passes through the polarization control component to the reflector. After being reflected by the reflector, it enters the polarization control component, is amplified a second time by the laser crystal, and then enters the polarization beam splitter for output.

[0013] The pump source module includes a pump source and a second half-wave plate.

[0014] Optionally, when the polarization control component is located between the polarization beam splitter and the laser crystal, and the pump source module is located on the side of the reflector away from the laser crystal, the pump source module includes a pump source for emitting the linearly polarized pump laser beam. The linearly polarized pump laser beam passes through the reflector and enters the laser crystal, forming a combined beam with the linearly polarized seed laser beam. The linearly polarized seed laser beam is amplified once by the laser crystal and then passes through the reflector. After being reflected by the reflector, it enters the laser crystal for a second amplification, passes through the polarization control component, and then enters the polarization beam splitter for output.

[0015] Optionally, the seed source includes a seed laser chip, a first fast-axis collimating lens, a first slow-axis collimating lens, a first volume Bragg grating, and a first dichroic mirror arranged sequentially along the light transmission path;

[0016] The seed laser chip is used to output a seed laser, the first fast-axis collimating lens is used to shape the seed laser in the fast-axis direction, the first slow-axis collimating lens is used to shape the seed laser in the slow-axis direction, the first volume Bragg grating is used to stabilize the wavelength of the seed laser, and the first dichroic mirror is used to reflect the seed laser and output it.

[0017] Optionally, the pump source includes a pump laser chip, a second fast-axis collimating mirror, a second slow-axis collimating mirror, a second volume Bragg grating, and a second dichroic mirror arranged sequentially along the optical transmission path;

[0018] The pump laser chip is used to output pump laser, the second fast-axis collimating lens is used to shape the pump laser in the fast-axis direction, the second slow-axis collimating lens is used to shape the pump laser in the slow-axis direction, the second volume Bragg grating is used to stabilize the wavelength of the pump laser, and the second dichroic mirror is used to reflect the pump laser and output it.

[0019] Optionally, the laser crystal is an Nd:YVO4 crystal or an Nd:YAG crystal; the wavelength of the linearly polarized seed laser beam output by the seed source module is 1064 nm, and the wavelength of the linearly polarized pump laser beam output by the pump source module is 808 nm or 888 nm.

[0020] According to another aspect of the present invention, a laser is provided, including the solid-state laser seed source described in any embodiment of the present invention.

[0021] According to another aspect of the present invention, a laser device is provided, including the laser described in any embodiment of the present invention.

[0022] According to another aspect of the present invention, a laser device is provided, including the laser device described in any embodiment of the present invention.

[0023] According to the embodiments of this utility model, the solid-state laser seed source, laser, laser device, and laser equipment include: a seed source module, a polarization beam splitter, a laser crystal, a polarization control component, a mirror, and a pump source module; wherein, the seed source module is used to output a linearly polarized seed laser beam; the pump source module is used to output a linearly polarized pump laser beam; the polarization beam splitter is located on the output side of the seed source module, the laser crystal is located on the output side of the polarization beam splitter, and the mirror is located on the output side of the laser crystal; the polarization control component is located between the polarization beam splitter and the laser crystal, and the pump source module is located on the side of the mirror opposite to the laser crystal; or, the polarization control component is located between the laser crystal and the mirror, and the pump source module is located between the seed source module and the polarization beam splitter; under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified twice by the laser crystal, and the amplified linearly polarized seed laser beam is output by the polarization beam splitter. Therefore, a high-power, high-reliability seed source with continuous output can be obtained by using a low-power semiconductor laser and solid-state amplification. This effectively solves the nonlinear effects and increased costs caused by excessive amplification stages in MOPA fiber lasers. At the same time, it avoids the problems of beam quality degradation, complex thermal management, and limited laser lifespan caused by multi-beam combining of watt-level direct semiconductor lasers. Furthermore, the solid-state laser seed source provided by this invention provides full-space optical transmission, which has better heat dissipation and reliability. When operating at high average power, the generated heat can be effectively dissipated to the optical platform and air. When dealing with weak vibrations, it will not cause problems such as changes in beam directionality or beam distortion. It has high practical application value, higher reliability and stability, simple overall structural design, and reduced cost.

[0024] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the optical path of a solid-state laser seed source provided in an embodiment of this utility model;

[0027] Figure 2 This is an optical path diagram of another solid-state laser seed source provided in this embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the optical path of the seed source module in the solid-state laser seed source provided in this embodiment of the present invention.

[0029] Figure 4 This is a schematic diagram of the optical path of the pump source module in the solid-state laser seed source provided in this embodiment of the present invention.

[0030] Reference numerals: 101, Seed source module; 102, Polarization beam splitter; 103, Laser crystal; 104, Polarization control component; 105, Mirror; 106, Pump source module; 107, Isolator; 108, Dichroic mirror; 1011, Seed source; 1012, First half-wave plate; 1061, Pump source; 1062, Second half-wave plate; 111, Seed laser chip; 112, First fast-axis collimating mirror; 113, First slow-axis collimating mirror; 114, First volume Bragg grating; 115, First dichroic mirror; 611, Pump laser chip; 612, Second fast-axis collimating mirror; 613, Second slow-axis collimating mirror; 614, Second volume Bragg grating; 615, Second dichroic mirror. Detailed Implementation

[0031] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0032] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0033] Figure 1This is a schematic diagram of the optical path of a solid-state laser seed source provided in an embodiment of this utility model. Figure 2 This is a schematic diagram of the optical path of another solid-state laser seed source provided in an embodiment of this utility model. Figure 1 and Figure 2 As shown, the solid-state laser seed source includes: a seed source module 101, a polarization beam splitter 102, a laser crystal 103, a polarization control component 104, a reflector 105, and a pump source module 106.

[0034] The seed source module 101 is used to output a linearly polarized seed laser beam; the pump source module 106 is used to output a linearly polarized pump laser beam.

[0035] The polarization beam splitter 102 is located on the light-emitting side of the seed source module 101, the laser crystal 103 is located on the light-emitting side of the polarization beam splitter 102, and the reflector 105 is located on the light-emitting side of the laser crystal 103; the polarization control component 104 is located between the polarization beam splitter 102 and the laser crystal 103, and the pump source module 106 is located on the side of the reflector 105 facing away from the laser crystal 103; or, the polarization control component 104 is located between the laser crystal 103 and the reflector 105, and the pump source module 106 is located between the seed source module 101 and the polarization beam splitter 102.

[0036] Under the action of the linearly polarized pumped laser beam, the linearly polarized seed laser beam is amplified twice by the laser crystal 103, and the amplified linearly polarized seed laser beam is output by the polarization beam splitter 102.

[0037] It should be noted that the reference Figure 1 The polarization control component 104 is located between the laser crystal 103 and the reflector 105, and the pump source module 106 is located between the seed source module 101 and the polarization beam splitter 102. The working principle of the solid-state laser seed source is as follows: both the linearly polarized seed laser beam and the linearly polarized pump laser beam are transmitted through the polarization beam splitter 102 and reach the laser crystal 103. Under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified after passing through the laser crystal 103. After the amplified linearly polarized seed laser beam passes through the polarization control component 104, its polarization direction is rotated by 45 degrees and it reaches the reflector 105. After being reflected by the reflector 105, it passes through the polarization control component 104 again, its polarization direction is rotated by 45 degrees again, and it passes through the laser crystal 103 again. Then it is reflected and output by the polarization beam splitter 102.

[0038] refer to Figure 2The polarization control component 104 is located between the polarization beam splitter 102 and the laser crystal 103, and the pump source module 106 is located on the side of the reflector 105 facing away from the laser crystal 103. The working principle of this solid-state laser seed source is as follows: After the linearly polarized seed laser beam is transmitted through the polarization beam splitter 102, it passes through the polarization control component 104 for the first time, and its polarization direction is deflected by 45 degrees. Then it enters the laser crystal 103. At this time, the linearly polarized pump laser beam is transmitted from the reflector 105 into the laser crystal 103. Under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified after passing through the laser crystal 103. The amplified linearly polarized seed laser beam is output to the polarization control component 104 after passing through the reflector 105. After the polarization direction is rotated by 45 degrees, it is output by the polarization beam splitter 102.

[0039] It is understandable that the linearly polarized seed laser beam acts as a guide in the laser crystal 103. Under the influence of the linearly polarized pump laser beam, the amplified properties of the linearly polarized seed laser beam are essentially the same as those of the linearly polarized seed laser beam. For example, in... Figure 1 In the process, the linearly polarized pump laser beam and the linearly polarized seed laser beam pass through the polarization beam splitter 102 and then enter the laser crystal 103. Under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified by the laser crystal 103. Then, the amplified linearly polarized seed laser beam passes through the polarization control component 104 twice, in both directions, resulting in a 90-degree deflection of its polarization direction compared to the original beam. Consequently, the polarization beam splitter 102 can reflect and output it without interfering with the optical path before amplification. Similarly, in... Figure 2 In the process, after the linearly polarized seed laser beam passes through the polarization beam splitter 102 and the polarization adjustment component 104, its polarization direction is deflected by 45 degrees. Under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified by the laser crystal 103, then reflected by the mirror 105, and output again through the laser crystal 103. After passing through the polarization adjustment component 104 again, its polarization direction is deflected by 45 degrees again, so that the polarization beam splitter 102 can reflect and output it without interfering with the initial optical path of the linearly polarized seed laser beam.

[0040] Therefore, the solid-state laser seed source in this embodiment can be paired with a low-power seed source module (e.g., 1-3W) and a solid-state amplification module to form a small laser, outputting a high-power, high-reliability seed source. This effectively solves the nonlinear effects and increased costs caused by excessive amplification stages in MOPA fiber lasers, while avoiding the beam quality degradation, complex thermal management, and limited laser lifespan issues caused by multi-path beam combining in watt-level direct semiconductor lasers. Furthermore, the absence of optical fiber in this solid-state laser seed source avoids the problem of poor beam quality control during fiber coupling.

[0041] Optionally, continue to refer to Figure 1 and Figure 2 The solid-state laser seed source also includes an isolator 107, located on the light-emitting side of the seed source module 101, used to isolate the reflected linearly polarized seed laser beam from re-entering the seed source module 101.

[0042] In other words, when the seed source module 101 emits a polarized seed laser beam, it is transmitted to subsequent devices. During the transmission process, the surface of each device may reflect the beam, or the polarization beam splitter 102 and polarization control component 104 may have errors that cause backlight to be reflected back to the seed source module 101, causing damage to the seed source module 101. Therefore, an isolator 107 can be set on the light-emitting side of the seed source module 101 to prevent reflected light from damaging the device and affecting its lifespan.

[0043] Optionally, refer to Figure 1 and Figure 2 The seed source module 101 includes a seed source 1011 and a first half-wave plate 1012. The polarization direction of the initial linearly polarized seed laser beam emitted from the seed source 1011 is at an angle of 45 degrees with the optical axis of the first half-wave plate 1012.

[0044] The seed source 1011 emits an initial linearly polarized seed laser beam. When the angle between the seed source 1011 and the optical axis of the first half-wave plate 1012 is 45 degrees, the polarization direction of the initial linearly polarized seed laser beam rotates by 90 degrees after passing through the first half-wave plate 1012, so as to be consistent with the polarization direction that can be transmitted by the subsequent polarization beam splitter 102.

[0045] Optionally, a high-reflectivity coating for reflecting linearly polarized seed laser beams is provided on the side end face of the reflector 105 closest to the laser crystal 103, and an anti-reflection coating for transmitting linearly polarized pump laser beams is provided on the side end face of the reflector 105 furthest from the laser crystal 103.

[0046] Among them, Figure 1 In this process, the linearly polarized seed laser beam and the linearly polarized pump laser beam simultaneously pass through the laser crystal 103 and reach the polarization control component 104, where they are then reflected by the mirror 105. During this process, under the influence of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified. The mirror 105 reflects the amplified linearly polarized seed laser beam back, deflecting its polarization direction by 90 degrees, so that the double-pass amplified seed light is reflected and output by the polarization beam splitter 102. A high-reflection coating for the seed light and an anti-reflection coating for the pump light are coated on the end face of the mirror 105 near the laser crystal 103, allowing unused linearly polarized pump laser beams to be transmitted through the mirror 105, thereby improving the reliability of the solid-state laser seed source.

[0047] exist Figure 2In the process, the end face of the reflector 105 near the laser crystal 103 is coated with a high-reflectivity film for the seed light, which is also for reflecting the amplified linearly polarized seed laser beam. The other side of the reflector 105 is coated with an anti-reflection film for the pump light, which is for transmitting the linearly polarized pump laser beam to the laser crystal 103.

[0048] The high-reflectivity film has a reflectivity greater than 99.5%, and the anti-reflective film has a transmittance greater than 99.5%.

[0049] Optionally, refer to Figure 1 When the polarization control component 104 is located between the laser crystal 103 and the reflector 105, and the pump source module 106 is located between the seed source module 101 and the polarization beam splitter 102, the solid-state laser seed source further includes a dichroic mirror 108. The dichroic mirror 108 is used to transmit the linearly polarized seed laser beam and reflect the linearly polarized pump laser beam to form a combined beam. The polarization beam splitter 102 is used to transmit the combined beam to the laser crystal 103. The linearly polarized seed laser beam is amplified once and then passes through the polarization control component 104 and the reflector 105. After being reflected by the reflector 105, it enters the polarization control component 104 and is amplified again by the laser crystal 103 before entering the polarization beam splitter 102 and being output.

[0050] The pump source module 106 includes a pump source 1061 and a second half-wave plate 1062. The polarization direction of the initial linearly polarized pump laser beam emitted from the pump source 1061 is at an angle of 45 degrees with the optical axis of the second half-wave plate 1062.

[0051] The dichroic mirror 108 is used to combine the linearly polarized seed laser beam and the linearly polarized pump laser beam in an orthogonal direction. That is, the linearly polarized seed laser beam can be incident on the dichroic mirror 108 at an incident angle of 45 degrees, and the linearly polarized pump laser beam can also be incident on the dichroic mirror 108 at an incident angle of 45 degrees. The dichroic mirror 108 transmits the linearly polarized seed laser beam and reflects the linearly polarized pump laser beam at the same time to form a combined beam.

[0052] The pump source 1061 emits an initial linearly polarized pump laser beam. When the angle between the initial linearly polarized pump laser beam and the optical axis of the second half-wave plate 1062 is 45 degrees, the polarization direction of the initial linearly polarized pump laser beam rotates by 90 degrees after passing through the second half-wave plate 1062, so as to be consistent with the polarization direction that can be transmitted by the subsequent polarization beam splitter 102.

[0053] Optionally, refer to Figure 2When the polarization control component 104 is located between the polarization beam splitter 102 and the laser crystal 103, and the pump source module 106 is located on the side of the reflector 105 away from the laser crystal 103, the pump source module 106 includes a pump source for emitting a linearly polarized pump laser beam. The linearly polarized pump laser beam passes through the reflector 105 and enters the laser crystal 103, forming a combined beam with the linearly polarized seed laser beam. The linearly polarized seed laser beam is amplified once by the laser crystal 103 and then passes through the reflector 105. After being reflected by the reflector 105, it enters the laser crystal 103 for a second amplification, passes through the polarization control component 104, and then enters the polarization beam splitter 102 for output.

[0054] In other words, since the pump source module 106 is incident from the side of the reflector 105 away from the laser crystal 103, it is not affected by the polarization beam splitter 102. Therefore, in this embodiment, only the pump source needs to be set, and there is no need to set a half-wave plate for polarization direction adjustment.

[0055] Optionally, such as Figure 3 As shown, the seed source 1011 includes a seed laser chip 111, a first fast-axis collimating lens 112, a first slow-axis collimating lens 113, a first volume Bragg grating 114, and a first dichroic mirror 115 arranged sequentially along the light transmission path;

[0056] The seed laser chip 111 is used to output the seed laser, the first fast-axis collimating lens 112 is used to shape the seed laser in the fast-axis direction, the first slow-axis collimating lens 113 is used to shape the seed laser in the slow-axis direction, the first volume Bragg grating 114 is used to stabilize the wavelength of the seed laser, and the first dichroic mirror 115 is used to reflect the seed laser and output it.

[0057] It should be noted that the seed laser chip 111 can be a light-emitting diode (LED). When the LED emits light, the resulting beam quality is poor. Therefore, a fast-axis collimating lens and a slow-axis collimating lens can be used to collimate the beam in two directions to improve its collimation. Simultaneously, a volume Bragg grating is used to lock the wavelength of the beam, i.e., by adjusting the voltage to ensure the wavelength of the LED emission is at the desired wavelength. This modularization of the seed source 1011 improves the beam quality of the subsequent linearly polarized seed laser beam and eliminates the need for complex installation processes when integrating other components. The first dichroic mirror 115 is also used to transmit the pump light. The first dichroic mirror 115 can be a 45-degree dichroic mirror.

[0058] Optionally, refer to Figure 4 The pump source 1061 includes a pump laser chip 611, a second fast-axis collimating lens 612, a second slow-axis collimating lens 613, a second volume Bragg grating 614, and a second dichroic mirror 615 arranged sequentially along the optical transmission path.

[0059] Among them, the pump laser chip 611 is used to output the pump laser, the second fast-axis collimating lens 612 is used to shape the pump laser in the fast-axis direction, the second slow-axis collimating lens 613 is used to shape the pump laser in the slow-axis direction, the second volume Bragg grating 614 is used to stabilize the wavelength of the pump laser, and the second dichroic mirror 615 is used to reflect the pump laser and output it.

[0060] It should be noted that the pump laser chip 611 can be a light-emitting diode (LED). When the LED emits light, the resulting beam quality is poor. Therefore, a fast-axis collimating lens and a slow-axis collimating lens can be used to collimate the beam in two directions to improve its collimation. Simultaneously, a volume Bragg grating is used to lock the beam wavelength, i.e., by adjusting the voltage to ensure the LED emits light at the desired wavelength. This modularization of the pump source 1061 improves the beam quality of the subsequent linearly polarized seed laser beam and eliminates the need for complex installation processes when integrating other components. The second dichroic mirror 615 is also used to transmit the seed light. The second dichroic mirror 615 can be a 45-degree dichroic mirror.

[0061] Optionally, the laser crystal 103 is an Nd:YVO4 crystal or an Nd:YAG crystal; the wavelength of the linearly polarized seed laser beam output by the seed source module 101 is 1064nm, and the wavelength of the linearly polarized pump laser beam output by the pump source module 106 is 808nm or 888nm.

[0062] The pump source module 106 has a pump wavelength of 808nm or 888nm, which enables Nd³⁺ ions in the laser crystal, i.e., Nd:YVO4 crystal or Nd:YAG crystal, to be excited from the excited state to a high energy level, then to a metastable state through non-radiative relaxation, and finally to release 1064nm photons when transitioning from the metastable state to a low energy level, thereby amplifying the seed laser beam.

[0063] In one embodiment, the laser crystal 103 has an anti-reflection coating for the pump wavelength and an anti-reflection coating for the seed wavelength on the side near the polarization beam splitter 102, and an anti-reflection coating for the pump wavelength on the side near the polarization control assembly 104. Figure 1 In this design, an anti-reflection coating for the pump wavelength is provided on the side of the laser crystal 103 near the polarization beam splitter 102 to allow the pump laser beam to enter the laser crystal 103. An anti-reflection coating for the pump wavelength is provided on the side of the laser crystal 103 near the polarization control component 104 to allow unused pump laser beams to be extracted. An anti-reflection coating for the seed wavelength is provided on the side of the laser crystal 103 near the polarization beam splitter 102 to allow the seed laser beam to pass through.

[0064] exist Figure 2In the laser crystal 103, an anti-reflection coating for the pump wavelength is provided on the side near the polarization control component 104 to allow the pump laser beam to enter the laser crystal 103. An anti-reflection coating for the pump wavelength is provided on the side of the laser crystal 103 near the polarization beam splitter 102 to allow unused pump light to be extracted. An anti-reflection coating for the seed wavelength is provided on the side of the laser crystal 103 near the polarization beam splitter 102 to transmit the seed laser beam to the laser crystal 103.

[0065] In this embodiment, the transmittance of the antireflection film is greater than 99.8%.

[0066] Among them, the polarization control component 104 mentioned above can be a 45° Faraday rotator.

[0067] According to another aspect of the present invention, a laser is provided, including the solid-state laser seed source described in any embodiment of the present invention.

[0068] According to another aspect of the present invention, a laser device is provided, including the laser described in any embodiment of the present invention.

[0069] According to another aspect of the present invention, a laser device is provided, including the laser device described in any embodiment of the present invention.

[0070] In summary, according to the embodiments of this utility model, the solid-state laser seed source, laser, laser device, and laser equipment include: a seed source module, a polarization beam splitter, a laser crystal, a polarization control component, a reflector, and a pump source module; wherein, the seed source module is used to output a linearly polarized seed laser beam; the pump source module is used to output a linearly polarized pump laser beam; the polarization beam splitter is located on the output side of the seed source module, the laser crystal is located on the output side of the polarization beam splitter, and the reflector is located on the output side of the laser crystal; the polarization control component is located between the polarization beam splitter and the laser crystal, and the pump source module is located on the side of the reflector opposite to the laser crystal; or, the polarization control component is located between the laser crystal and the reflector, and the pump source module is located between the seed source module and the polarization beam splitter; under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified twice by the laser crystal, and the amplified linearly polarized seed laser beam is output by the polarization beam splitter. Therefore, a high-power, high-reliability seed source can be obtained by using a low-power semiconductor laser and solid-state amplification. This effectively solves the nonlinear effects and increased costs caused by excessive amplification stages in MOPA fiber lasers. At the same time, it avoids the problems of beam quality degradation, complex thermal management, and limited laser lifespan caused by multi-path combining of watt-level direct semiconductor lasers. Furthermore, the solid-state laser seed source provided by this invention provides full-space optical transmission, which has better heat dissipation and reliability. When operating at high average power, the generated heat can be effectively dissipated to the optical platform and air. When dealing with weak vibrations, it will not cause problems such as changes in beam directionality or beam distortion. It has high practical application value, higher reliability and stability, and a simple overall structural design with reduced costs.

[0071] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A solid-state laser seed source, characterized in that, include: Seed source module, polarization beam splitter, laser crystal, polarization control components, mirror and pump source module; The seed source module is used to output a linearly polarized seed laser beam; the pump source module is used to output a linearly polarized pump laser beam; the polarization beam splitter is located on the output side of the seed source module, the laser crystal is located on the output side of the polarization beam splitter, and the reflector is located on the output side of the laser crystal; the polarization control component is located between the polarization beam splitter and the laser crystal, and the pump source module is located on the side of the reflector opposite to the laser crystal; or, the polarization control component is located between the laser crystal and the reflector, and the pump source module is located between the seed source module and the polarization beam splitter. Under the action of the linearly polarized pump laser beam, the linearly polarized seed laser beam is amplified twice by the laser crystal, and the amplified linearly polarized seed laser beam is output by the polarization beam splitter.

2. The solid-state laser seed source according to claim 1, characterized in that, Also includes: An isolator, located on the light-emitting side of the seed source module, is used to prevent the reflected linearly polarized seed laser beam from re-entering the seed source module.

3. The solid-state laser seed source according to claim 1, characterized in that, The seed source module includes a seed source and a first half-wave plate.

4. The solid-state laser seed source according to claim 1, characterized in that, The mirror has a high-reflectivity coating on the side face of the mirror closest to the laser crystal to reflect the linearly polarized seed laser beam, and / or an anti-reflection coating on the side face of the mirror furthest from the laser crystal to transmit the linearly polarized pump laser beam.

5. The solid-state laser seed source according to claim 1, characterized in that, When the polarization control component is located between the laser crystal and the mirror, and the pump source module is located between the seed source module and the polarization beam splitter, then... The solid-state laser seed source also includes a dichroic mirror, which is used to transmit the linearly polarized seed laser beam and reflect the linearly polarized pump laser beam to form a combined beam; the polarization beam splitter is used to transmit the combined beam to the laser crystal; the linearly polarized seed laser beam is amplified once and then passes through the polarization control component to the reflector, and after being reflected by the reflector, it enters the polarization control component, is amplified a second time by the laser crystal, and then enters the polarization beam splitter for output; the pump source module includes a pump source and a second half-wave plate.

6. The solid-state laser seed source according to claim 1, characterized in that, The polarization control component is located between the polarization beam splitter and the laser crystal. When the pump source module is located on the side of the reflector away from the laser crystal, the pump source module includes a pump source for emitting the linearly polarized pump laser beam. The linearly polarized pump laser beam passes through the reflector and enters the laser crystal, forming a combined beam with the linearly polarized seed laser beam. The linearly polarized seed laser beam is amplified once by the laser crystal and then passes through the reflector. After being reflected by the reflector, it enters the laser crystal for a second amplification, passes through the polarization control component, and then enters the polarization beam splitter for output.

7. The solid-state laser seed source according to claim 3, characterized in that, The seed source includes a seed laser chip, a first fast-axis collimating lens, a first slow-axis collimating lens, a first volume Bragg grating, and a first dichroic mirror arranged sequentially along the light transmission path; The seed laser chip is used to output a seed laser, the first fast-axis collimating lens is used to shape the seed laser in the fast-axis direction, the first slow-axis collimating lens is used to shape the seed laser in the slow-axis direction, the first volume Bragg grating is used to stabilize the wavelength of the seed laser, and the first dichroic mirror is used to reflect the seed laser and output it.

8. The solid-state laser seed source according to claim 5 or 6, characterized in that, The pump source includes a pump laser chip, a second fast-axis collimating lens, a second slow-axis collimating lens, a second volume Bragg grating, and a second dichroic mirror arranged sequentially along the optical transmission path. The pump laser chip is used to output pump laser, the second fast-axis collimating lens is used to shape the pump laser in the fast-axis direction, the second slow-axis collimating lens is used to shape the pump laser in the slow-axis direction, the second volume Bragg grating is used to stabilize the wavelength of the pump laser, and the second dichroic mirror is used to reflect the pump laser and output it.

9. A laser, characterized in that, Includes the solid-state laser seed source as described in any one of claims 1-8.

10. A laser device, characterized in that, Including the laser as described in claim 9.

11. A laser device, characterized in that, Includes the laser device as described in claim 10.