A solid-state laser seed source, laser, laser device, and laser apparatus

Abstract

The utility model discloses a kind of solid laser seed source, laser, laser device and laser equipment, in seed source, seed generator is used to output seed laser beam;Pump source is used to output pump laser beam;Double dichroic mirror is used to transmit seed laser beam, also for reflecting pump laser beam, to make seed laser beam and pump laser beam form combined beam;Focusing mirror is located in the light exit side of double dichroic mirror, for focusing combined beam into laser crystal;Laser crystal is located in the light exit side of focusing mirror, under the action of pump laser beam, amplifies seed laser beam, outputs amplified seed laser beam;Collimating lens is located in the light exit side of laser crystal, for collimating amplified seed laser beam to form spatial collimating beam;Fiber collimator is located in the light exit side of collimating lens, for coupling spatial collimating beam into optical fiber. Thus, by low-power semiconductor laser and solid amplification, high-power high-reliability seed source can be obtained.

Description

Technical Field

[0001] This utility model relates to the field of laser technology, and in particular to a solid-state laser seed source, a laser, a laser device, and a laser equipment. Background Technology

[0002] High-power lasers in the 1064nm band have important applications in industrial processing, medical treatment, and national defense research. Currently, the main method for generating 1064nm high-power lasers is the MOPA (Master Parametric Oscillator Amplifier) ​​scheme. Its core structure includes a seed source (master oscillator, MO), a pump source (980nm or 1064nm laser), a gain fiber (ytterbium-doped fiber), a wavelength division multiplexer (WDM) or beam combiner, and an isolator. The seed source typically uses a low-power semiconductor laser, which is amplified through multiple fiber stages to obtain high-power laser output. Although the output beam quality is good, the electro-optic efficiency is low (20%-30%) due to the low coupling efficiency between the pump light and the signal light, and energy loss caused by the nonlinear absorption of ytterbium-doped fiber (such as stimulated Raman scattering). Furthermore, the nonlinear effects caused by multi-stage fiber amplification, such as stimulated Raman scattering (SRS) and stimulated Brillouin scattering (SBS), severely limit the amplification power level. High-power pump sources (such as 980nm lasers), beam combiners, and isolators are expensive, resulting in high overall equipment prices.

[0003] To address the aforementioned issues, the use of watt-level semiconductor lasers in related technologies can reduce the number of amplification stages and alleviate the problems encountered in conventional MOPA fiber amplification. The main technical solution involves using multiple 1064nm semiconductor laser chips (typically multimode output) at the milliwatt level (e.g., 100-500mW) and employing beam combining techniques (such as wavelength combining, polarization combining, and spatial combining) to superimpose the power from multiple optical paths, ultimately outputting watt-level power. Its key characteristic is direct laser output without resonant cavity feedback, relying solely on the wavelength and mode characteristics of the chips themselves. However, multi-chip beam combining can lead to mode aliasing, resulting in poor output laser beam quality. Simultaneously, high power density causes increased chip junction temperature, and temperature fluctuations can cause wavelength drift and refractive index changes, leading to mode instability and demanding thermal management requirements. Furthermore, chip defects (such as dislocations and dark lines) propagate under high current, causing a decrease in optical output efficiency and limiting laser lifespan. Utility Model Content

[0004] This invention provides a solid-state laser seed source, laser, laser device, and laser equipment to solve the problems of nonlinear effects and high cost caused by excessive amplification stages in MOPA fiber lasers in related technologies. It also avoids the problems of beam quality degradation, complex thermal management, and limited laser lifespan caused by multiplexing in watt-level direct semiconductor lasers. This invention has the advantages of miniaturization, low cost, and high reliability.

[0005] According to one aspect of the present invention, a solid-state laser seed source is provided, comprising: a seed generator, a pump source, a dichroic mirror, a focusing mirror, a laser crystal, a collimating mirror, and a fiber collimator;

[0006] The seed generator is used to output a seed laser beam; the pump source is used to output a pump laser beam; the dichroic mirror is located on the output side of the seed generator and the pump source, used to transmit the seed laser beam and reflect the pump laser beam, so that the seed laser beam and the pump laser beam form a combined beam; the focusing mirror is located on the output side of the dichroic mirror, used to focus the combined beam into the laser crystal; the laser crystal is located on the output side of the focusing mirror, and amplifies the seed laser beam under the action of the pump laser beam, outputting the amplified seed laser beam; the collimating mirror is located on the output side of the laser crystal, used to collimate the amplified seed laser beam to form a spatially collimated beam; the fiber collimator is located on the output side of the collimating mirror, used to couple the spatially collimated beam into the optical fiber.

[0007] Optionally, it further includes: an isolator located between the seed generator and the dichroic mirror, for preventing the reflected seed laser beam from re-entering the seed generator.

[0008] Optionally, both the incident and exit sides of the focusing lens are provided with anti-reflection coatings to enhance the light transmission of the seed laser beam and the pump laser beam.

[0009] Optionally, both the incident and exit sides of the collimating lens are provided with anti-reflection coatings to enhance the light transmission of the seed laser beam and the pump laser beam.

[0010] Optionally, the laser crystal is provided with antireflection coatings near both end faces to enhance the reflection of the seed laser beam and the pump laser beam.

[0011] Optionally, the seed generator includes a seed laser chip, a first fast-axis collimating lens, a first slow-axis collimating lens, a first voltage-substrate wavelength-locked device, and a first dichroic mirror arranged sequentially along the seed laser beam transmission path;

[0012] The seed laser chip is used to output a seed laser, the first fast-axis collimating lens is used to shape the seed laser in the fast-axis direction, the first slow-axis collimating lens is used to shape the seed laser in the slow-axis direction, the first voltage-based wavelength-locked device is used to stabilize the wavelength of the seed laser, and the first dichroic mirror is used to reflect the seed laser and / or transmit pump lasers that may be reflected back, thereby extending the lifespan of the seed laser chip.

[0013] Optionally, the pump source includes a pump laser chip, a second fast-axis collimating mirror, a second slow-axis collimating mirror, a second voltage-substrate wavelength-locked device, and a second dichroic mirror arranged sequentially along the transmission path of the pump laser beam;

[0014] The pump laser chip is used to output pump laser, the second fast-axis collimating lens is used to shape the pump laser in the fast-axis direction, the second slow-axis collimating lens is used to shape the pump laser in the slow-axis direction, the second voltage-substrate wavelength-locked device is used to stabilize the wavelength of the pump laser, and the second dichroic mirror is used to reflect the pump laser and / or transmit seed lasers that may be reflected back, thereby extending the lifespan of the pump laser chip.

[0015] Optionally, the laser crystal is an Nd:YVO4 crystal or an Nd:YAG crystal.

[0016] Optionally, the wavelength of the seed laser beam output by the seed generator is 1064 nm, and the wavelength of the pump laser beam output by the pump source is 808 nm or 888 nm.

[0017] According to another aspect of the present invention, a laser is provided, including a solid-state laser seed source as described in any embodiment of the present invention.

[0018] According to another aspect of the present invention, a laser device is provided, including the laser described in any embodiment of the present invention.

[0019] According to another aspect of the present invention, a laser device is provided, including the laser device described in any embodiment of the present invention.

[0020] According to the embodiments of this utility model, the solid-state laser seed source, laser, laser device, and laser equipment include: a seed generator, a pump source, a dichroic mirror, a focusing mirror, a laser crystal, a collimating mirror, and a fiber collimator; wherein, the seed generator is used to output a seed laser beam; the pump source is used to output a pump laser beam; the dichroic mirror is located on the output side of the seed generator and the pump source, used to transmit the seed laser beam and also to reflect the pump laser beam, so that the seed laser beam and the pump laser beam form a combined beam; the focusing mirror is located on the output side of the dichroic mirror, used to focus the combined beam into the laser crystal; the laser crystal is located on the output side of the focusing mirror, and amplifies the seed laser beam under the action of the pump laser beam, outputting the amplified seed laser beam; the collimating mirror is located on the output side of the laser crystal, used to collimate the amplified seed laser beam to form a spatially collimated beam; and the fiber collimator is located on the output side of the collimating mirror, used to couple the spatially collimated beam into the optical fiber. Therefore, a high-power, high-reliability seed source can be obtained by using a low-power semiconductor laser and solid-state amplification. This effectively solves the nonlinear effects and increased costs caused by excessive amplification stages in MOPA fiber lasers. At the same time, it avoids the problems of beam quality degradation, complex thermal management, and limited laser lifespan caused by multi-path combining of watt-level direct semiconductor lasers. Furthermore, the solid-state laser seed source provided by this invention provides full-space optical transmission, which has better heat dissipation and reliability. When operating at high average power, the generated heat can be effectively dissipated to the optical platform and air. When dealing with weak vibrations, it will not cause problems such as changes in beam directionality or beam distortion. It has high practical application value, higher reliability and stability, and a simple overall structural design with reduced costs.

[0021] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the optical path of the solid-state laser seed source provided in this embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the optical path of the seed generator in the solid-state laser seed source provided in this embodiment of the present invention.

[0025] Figure 3 This is a schematic diagram of the optical path of the pump source in the solid-state laser seed source provided in this embodiment of the present invention.

[0026] Reference numerals: 101, Seed generator; 102, Pump source; 103, Dichroic mirror; 104, Focusing mirror; 105, Laser crystal; 106, Collimating mirror; 107, Fiber collimator; 108, Isolator; 1011, Seed laser chip; 1012, First fast-axis collimating mirror; 1013, First slow-axis collimating mirror; 1014, First voltage-substrate-locked wavelength device; 1015, First dichroic mirror; 1021, Pump laser chip; 1022, Second fast-axis collimating mirror; 1023, Second slow-axis collimating mirror; 1024, Second voltage-substrate-locked wavelength device; 1025, Second dichroic mirror. Detailed Implementation

[0027] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0028] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0029] Figure 1 This is a schematic diagram of the optical path of the solid-state laser seed source provided in this embodiment of the invention. Figure 1 As shown, the solid-state laser seed source includes: a seed generator 101, a pump source 102, a dichroic mirror 103, a focusing mirror 104, a laser crystal 105, a collimating mirror 106, and a fiber collimator 107.

[0030] The system includes a seed generator 101 for outputting a seed laser beam, a pump source 102 for outputting a pump laser beam, a dichroic mirror 103 located on the output side of both the seed generator 101 and the pump source 102 for transmitting the seed laser beam and reflecting the pump laser beam to form a combined beam, a focusing mirror 104 located on the output side of the dichroic mirror 103 for focusing the combined beam into a laser crystal 105, a laser crystal 105 located on the output side of the focusing mirror 104 for amplifying the seed laser beam under the action of the pump laser beam and outputting the amplified seed laser beam, a collimating mirror 106 located on the output side of the laser crystal 105 for collimating the amplified seed laser beam to form a spatially collimated beam, and an fiber collimator 107 located on the output side of the collimating mirror 106 for coupling the spatially collimated beam into an optical fiber.

[0031] It should be noted that the working principle of this solid-state laser seed source is as follows: the seed generator 101 outputs a seed laser beam, the pump source 102 outputs a pump laser beam, the seed laser beam is incident on the dichroic mirror 103 at a 45-degree angle, and the pump laser beam is incident on the dichroic mirror 103 at a 45-degree angle. The dichroic mirror 103 transmits the seed laser beam and simultaneously reflects the pump laser beam to form a combined beam (wherein, the side of the dichroic mirror 103 facing the seed laser beam has an anti-reflection coating that transmits the wavelength of the seed laser beam, and the side facing the pump laser beam has an anti-reflection coating that reflects the wavelength of the pump laser beam). After being focused by the focusing lens 104, the combined beam is output to the laser crystal 105. Under the action of the pump laser beam, the seed laser beam is amplified by the laser crystal 105 to form an amplified seed laser beam, which is then output to the collimating lens 106, and then output to the fiber collimator 107 to couple the spatially collimated beam into the optical fiber.

[0032] It is understandable that the seed laser beam acts as a guide in the laser crystal 105. Under the action of the pump laser beam, the properties of the seed laser beam after being amplified by the laser crystal 105 are basically the same as the properties of the seed laser beam before amplification.

[0033] Therefore, the solid-state laser seed source of this embodiment can be paired with a low-power seed generator module (e.g., 1-3W) and a solid-state amplification module to form a small laser, outputting a high-power, high-reliability seed source. Subsequent amplification using ytterbium-doped fiber can further amplify the laser power to 20W-50W. This effectively solves the nonlinear effects and increased costs caused by excessive amplification stages in MOPA fiber lasers, while avoiding the beam quality degradation, complex thermal management, and limited laser lifespan issues caused by multi-beam combining in watt-level direct semiconductor lasers. Furthermore, the absence of optical fiber in this solid-state laser seed source avoids the problem of poor beam quality control during fiber coupling.

[0034] Furthermore, the laser design scheme of high-power solid-state seed source (initial power watt level) + fiber amplification can replace the multi-stage amplification in the existing technology (MOPA (initial power milliwatt level) all-fiber amplification design scheme, because fiber optical path design has the advantage of good stability, but the overall size is large and the manufacturing cost is high. At the same time, the output pulse parameters are not as good as this scheme). Therefore, the design scheme has the advantages of reducing size and cost, and the output pulse parameters are optimized compared with the existing scheme.

[0035] Optionally, such as Figure 1 As shown, the solid-state laser seed source also includes an isolator 108, which is located between the seed generator 101 and the dichroic mirror 103, and is used to prevent the reflected seed laser beam from re-entering the seed generator.

[0036] In other words, when the seed generator 101 emits a seed laser beam, it is transmitted to subsequent devices. During the transmission process, the surface of each device may reflect the beam, resulting in backlight reflection back to the seed generator 101, which may damage the seed generator 101. Therefore, an isolator 108 can be set on the light-emitting side of the seed generator 101 to prevent reflected light from damaging the device and affecting its lifespan.

[0037] Optionally, both the incident and exit sides of the focusing lens 104 are provided with antireflection coatings to enhance the light transmission of the seed laser beam and the pump laser beam.

[0038] The focusing lens 104 is used to focus the combined beam of the seed laser beam and the pump laser beam so that the combined beam can enter the laser crystal 105. Furthermore, anti-reflection films for the seed laser beam and the pump laser beam are respectively provided on both sides, and the transmittance of the anti-reflection film is greater than 99.8%.

[0039] Optionally, both the incident and exit sides of the collimating lens 106 are provided with anti-reflection coatings to enhance the light transmission of the seed laser beam and the pump laser beam.

[0040] The collimating lens 106 has anti-reflection coatings on both sides to allow the magnified seed laser beam to pass through, with a transmittance greater than 99.5%. Anti-reflection coatings on both sides also allow the pump laser beam to exit along with the magnified seed laser beam, preventing any unused pump laser beam from being emitted. Optionally, the laser crystal 105 has anti-reflection coatings for both the seed and pump laser beams on its end face near the focusing lens 104, and an anti-reflection coating for the pump laser beam on its end face near the collimating lens 106.

[0041] The laser crystal 105 has an anti-reflection coating on the side face near the focusing lens 104, which is used to prevent the seed laser beam from entering the laser crystal 105 and to allow the pump laser beam to pass through it. The laser crystal 105 also has an anti-reflection coating on the side face near the collimating lens 106, which is used to prevent unused pump laser beams from passing through the laser crystal 105.

[0042] Optionally, Figure 2 This is a schematic diagram of the optical path of the seed generator in the solid-state laser seed source provided in this embodiment of the invention; as shown below. Figure 2 As shown, the seed generator 101 includes a seed laser chip 1011, a first fast-axis collimating lens 1012, a first slow-axis collimating lens 1013, a first voltage substrate-locked wavelength device 1014, and a first dichroic mirror 1015 arranged sequentially along the seed laser beam transmission path;

[0043] The seed laser chip 1011 is used to output the seed laser, the first fast-axis collimating lens 1012 is used to shape the seed laser in the fast-axis direction, the first slow-axis collimating lens 1013 is used to shape the seed laser in the slow-axis direction, the first voltage-substrate wavelength-locked device 1014 is used to stabilize the wavelength of the seed laser, and the first dichroic mirror 1015 is used to reflect the seed laser and transmit the pump laser that may be reflected back, thereby extending the lifespan of the seed laser chip. The first dichroic mirror 1015 can be a 45-degree dichroic mirror.

[0044] The seed laser chip 1011 can be a light-emitting diode (LED). When the LED emits light, the resulting beam quality is poor. Therefore, a fast-axis collimating lens and a slow-axis collimating lens can be used to collimate the beam in two directions to improve its collimation. Simultaneously, a voltage-based wavelength-locking device is used to lock the beam's wavelength, i.e., adjusting the voltage to ensure the LED emits light at the desired wavelength. This modular design of the seed generator 101 improves the beam quality of the subsequent linearly polarized seed laser beam and eliminates the need for complex installation processes when integrating other components.

[0045] Optionally, Figure 3 This is a schematic diagram of the optical path of the pump source in the solid-state laser seed source provided in this embodiment of the invention. Figure 3 As shown, the pump source 102 includes a pump laser chip 1021, a second fast-axis collimating mirror 1022, a second slow-axis collimating mirror 1023, a second voltage-substrate wavelength-locked device 1024, and a second dichroic mirror 1025 arranged sequentially along the transmission path of the pump laser beam.

[0046] The pump laser chip 1021 is used to output the pump laser, the second fast-axis collimating lens 1022 is used to shape the pump laser in the fast-axis direction, the second slow-axis collimating lens 1023 is used to shape the pump laser in the slow-axis direction, the second voltage-substrate wavelength-locked device 1024 is used to stabilize the wavelength of the pump laser, and the second dichroic mirror 1025 is used to reflect the pump laser and transmit any seed laser that may be reflected back, thus extending the lifespan of the pump laser chip. The second dichroic mirror 1025 can be a 45-degree dichroic mirror.

[0047] It should be noted that the pump laser chip 1021 can be a light-emitting diode (LED). When the LED emits light, the resulting beam quality is poor. Therefore, a fast-axis collimating lens and a slow-axis collimating lens can be used to collimate the beam in two directions to improve its collimation. Simultaneously, a voltage-based wavelength-locking device is used to lock the beam's wavelength, i.e., adjusting the voltage to ensure the LED emits light at the desired wavelength. This modularization of the pump source 102 improves the beam quality of the subsequent linearly polarized seed laser beam and eliminates the need for complex installation processes when integrating other components.

[0048] Optionally, the laser crystal 105 is an Nd:YVO4 crystal or an Nd:YAG crystal. The seed laser beam output by the seed generator 101 has a wavelength of 1064 nm, and the pump laser beam output by the pump source 102 has a wavelength of 808 nm or 888 nm.

[0049] The pump source module 106 has a pump wavelength of 808nm or 888nm, which enables Nd³⁺ ions in the laser crystal, i.e., Nd:YVO4 crystal or Nd:YAG crystal, to be excited from the excited state to a high energy level, then to a metastable state through non-radiative relaxation, and finally to release 1064nm photons when transitioning from the metastable state to a low energy level, thereby amplifying the seed laser beam.

[0050] According to another aspect of the present invention, a laser is provided, including a solid-state laser seed source as described in any embodiment of the present invention.

[0051] According to another aspect of the present invention, a laser device is provided, including the laser described in any embodiment of the present invention.

[0052] According to another aspect of the present invention, a laser device is provided, including the laser device described in any embodiment of the present invention.

[0053] In summary, according to the embodiments of this utility model, the solid-state laser seed source, laser, laser device, and laser equipment include: a seed generator, a pump source, a dichroic mirror, a focusing mirror, a laser crystal, a collimating mirror, and a fiber collimator; wherein, the seed generator is used to output a seed laser beam; the pump source is used to output a pump laser beam; the dichroic mirror is located on the output side of the seed generator and the pump source, used to transmit the seed laser beam and also to reflect the pump laser beam, so that the seed laser beam and the pump laser beam form a combined beam; the focusing mirror is located on the output side of the dichroic mirror, used to focus the combined beam into the laser crystal; the laser crystal is located on the output side of the focusing mirror, and amplifies the seed laser beam under the action of the pump laser beam, outputting the amplified seed laser beam; the collimating mirror is located on the output side of the laser crystal, used to collimate the amplified seed laser beam to form a spatially collimated beam; and the fiber collimator is located on the output side of the collimating mirror, used to couple the spatially collimated beam into the optical fiber. Therefore, a high-power, high-reliability seed source can be obtained by using a low-power semiconductor laser and solid-state amplification. This effectively solves the nonlinear effects and increased costs caused by excessive amplification stages in MOPA fiber lasers. At the same time, it avoids the problems of beam quality degradation, complex thermal management, and limited laser lifespan caused by multi-path combining of watt-level direct semiconductor lasers. Furthermore, the solid-state laser seed source provided by this invention provides full-space optical transmission, which has better heat dissipation and reliability. When operating at high average power, the generated heat can be effectively dissipated to the optical platform and air. When dealing with weak vibrations, it will not cause problems such as changes in beam directionality or beam distortion. It has high practical application value, higher reliability and stability, and a simple overall structural design with reduced costs.

[0054] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A solid-state laser seed source, characterized in that, include: Seed generator, pump source, dichroic mirror, focusing mirror, laser crystal, collimating mirror, and fiber collimator; The seed generator is used to output a seed laser beam; the pump source is used to output a pump laser beam; the dichroic mirror is located on the output side of the seed generator and the pump source, used to transmit the seed laser beam and reflect the pump laser beam, so that the seed laser beam and the pump laser beam form a combined beam; the focusing mirror is located on the output side of the dichroic mirror, used to focus the combined beam into the laser crystal; the laser crystal is located on the output side of the focusing mirror, and under the action of the pump laser beam, amplifies the seed laser beam and outputs the amplified seed laser beam; the collimating mirror is located on the output side of the laser crystal, used to collimate the amplified seed laser beam to form a spatially collimated beam; the fiber collimator is located on the output side of the collimating mirror, used to couple the spatially collimated beam into the optical fiber.

2. The solid-state laser seed source according to claim 1, characterized in that, Also includes: An isolator, located between the seed generator and the dichroic mirror, is used to prevent the reflected seed laser beam from re-entering the seed generator.

3. The solid-state laser seed source according to claim 1, characterized in that, An antireflection coating is provided on both the incident and exit sides of the focusing lens to enhance the light transmission of the seed laser beam and the pump laser beam.

4. The solid-state laser seed source according to claim 1, characterized in that, An antireflection coating is provided on both the incident and exit sides of the collimating lens to enhance the light transmission of the seed laser beam and the pump laser beam.

5. The solid-state laser seed source according to claim 1, characterized in that, An antireflection coating is provided on both ends of the laser crystal to enhance the reflection of the seed laser beam and the pump laser beam.

6. The solid-state laser seed source according to claim 1, characterized in that, The seed generator includes a seed laser chip, a first fast-axis collimating lens, a first slow-axis collimating lens, a first voltage-substrate wavelength-locked device, and a first dichroic mirror arranged sequentially along the seed laser beam transmission path. The seed laser chip is used to output a seed laser, the first fast-axis collimating lens is used to shape the seed laser in the fast-axis direction, the first slow-axis collimating lens is used to shape the seed laser in the slow-axis direction, the first voltage-based wavelength-locked device is used to stabilize the wavelength of the seed laser, and the first dichroic mirror is used to reflect the seed laser beam and / or transmit the pump laser beam.

7. The solid-state laser seed source according to claim 1, characterized in that, The pump source includes a pump laser chip, a second fast-axis collimating lens, a second slow-axis collimating lens, a second voltage-substrate wavelength-locked device, and a second dichroic mirror arranged sequentially along the transmission path of the pump laser beam. The pump laser chip is used to output pump laser, the second fast-axis collimating lens is used to shape the pump laser in the fast-axis direction, the second slow-axis collimating lens is used to shape the pump laser in the slow-axis direction, the second voltage-based wavelength-locked device is used to stabilize the wavelength of the pump laser, and the second dichroic mirror is used to reflect the pump laser and / or transmit the seed laser beam.

8. The solid-state laser seed source according to claim 1, characterized in that, The laser crystal is an Nd:YVO4 crystal or an Nd:YAG crystal.

9. The solid-state laser seed source according to claim 1, characterized in that, The seed laser beam output by the seed generator has a wavelength of 1064nm, and the pump laser beam output by the pump source has a wavelength of 808nm or 888nm.

10. A laser, characterized in that, Includes the solid-state laser seed source as described in any one of claims 1-9.

11. A laser device, characterized in that, Including the laser as described in claim 10.

12. A laser device, characterized in that, Includes the laser device as described in claim 11.

Images