A square substrate chuck setting structure

Abstract

The utility model belongs to square substrate cleaning equipment technical field, concretely speaking it is a kind of square substrate chuck setting structure, including chuck main body, fixed screw piece, nut seal cover, wherein fixed screw piece is by from top to bottom in turn divided into the top end head, connecting ring part and screw main body part connected together. The utility model is through the cooperation setting of fixed screw piece with nut seal cover with connecting ring part, can effectively prevent fixed screw piece itself to meet liquid medicine and be corroded, and effectively avoid the problem that liquid medicine or acid gas etc. pass through hole downstream to motor shaft place and cause damage to motor. The chuck main body of the utility model can guarantee the structure strength while guaranteeing the resistance to strong acid, fully suitable for substrate cleaning process, and long service life. The utility model is through the setting of support column part with support inclined plane, can effectively realize linear contact support for square substrate, sufficiently reduce the contact area of square substrate, avoid the damage of square substrate.

Description

Technical Field

[0001] This utility model belongs to the technical field of square substrate cleaning equipment, specifically a square substrate chuck setting structure. Background Technology

[0002] In square substrate cleaning equipment, the square substrate to be cleaned is typically positioned by a square substrate chuck structure located inside the process chamber. A motor outside the process chamber is connected to the square substrate chuck structure and drives the square substrate chuck structure to rotate to complete the process.

[0003] Existing square base plate chucks are generally simply fixed to the motor shaft by standard bolts located in the middle of the square base plate chuck. The bolt heads are exposed on the outside of the square base plate chuck. Cleaning solutions can easily corrode the bolt heads. Long-term use may even cause some of the solution to flow down the hole on the square base plate chuck corresponding to the bolt to the motor shaft, damaging the motor. Utility Model Content

[0004] To address the aforementioned problems, the purpose of this utility model is to provide a square substrate chuck mounting structure.

[0005] The objective of this utility model is achieved through the following technical solution: A square substrate chuck mounting structure includes a chuck body, a fixing screw, and a nut sealing cover; The chuck body is divided into a central shaft portion and an outer ring portion connected together. The outer ring portion is located on the outer periphery of the central shaft portion. Several support pillars for directly supporting the square base plate are protruding on the outer ring portion. A motor shaft connection hole is opened on the bottom surface of the central shaft portion. A connecting keyway is recessed on the inner circumferential surface of the motor shaft connection hole. A screw through hole is opened on the top surface of the central shaft portion. The screw through hole communicates with the motor shaft connection hole. The motor shaft connection hole is used to insert the corresponding motor shaft. The connecting keyway cooperates with the key on the corresponding motor shaft. The fixing screw is divided into a top head, a connecting ring, and a screw body, which are connected together from top to bottom. The outer diameter of the connecting ring is larger than the outer diameter of the screw body and the outer diameter of the top head. The lower end of the screw body has an external thread A on its outer circumference, the connecting ring has an external thread B on its outer circumference, and the inner side of the nut sealing cap has an internal thread that matches the external thread B of the connecting ring. The screw body passes through the screw through hole, and the screw body is connected to the motor shaft located in the motor shaft connection hole through the external thread A at the lower end of the screw body. The lower edge of the connecting ring abuts against the top surface of the central shaft of the chuck body and covers the screw through hole. The nut sealing cover is connected to the external thread B of the connecting ring through the internal thread of the nut sealing cover. The bottom of the nut sealing cover abuts against the top surface of the central shaft of the chuck body. The nut sealing cover is made of corrosion-resistant non-metallic material.

[0006] The axial center lines of the screw through hole, the motor shaft connecting hole, the central shaft of the chuck body, and the outer ring of the chuck body are all collinear.

[0007] The central axis of the chuck body and the outer ring of the chuck body are connected by a number of connecting beams evenly arranged circumferentially, and the central axis of the chuck body and the outer ring of the chuck body are divided into a number of hollow spaces by the connecting beams.

[0008] The chuck body, consisting of the central shaft, outer ring, connecting beam, and support pillars, is an integral structure with an internal stainless steel frame and an external anti-corrosion non-metallic coating.

[0009] Four support pillars are evenly arranged on the outer ring of the chuck body. Each support pillar corresponds to a corner of the square base plate. Each support pillar has a right-angle notch. At the right-angle notch of each support pillar, a support slope gradually slopes downward from the direction away from the corresponding corner of the square base plate to the direction closer to the corresponding corner of the square base plate. The support slope on each support pillar is in line contact with the two sides of the bottom side of the corresponding corner of the square base plate.

[0010] Each of the support columns is also provided with two limiting protrusions on its top surface. One of the limiting protrusions on each support column is located on the outside of one side of the corresponding corner of the square substrate, and the other limiting protrusion on each support column is located on the outside of the other side of the corresponding corner of the square substrate. That is, the two limiting protrusions on each support column are used to block the corresponding side of the square substrate to prevent the square substrate from tilting.

[0011] Each of the limiting protrusions has a guide slope on one side near the square substrate, and the guide slope of each limiting protrusion gradually slopes downward from the side away from the square substrate to the side near the square substrate.

[0012] A sealing ring inlay groove is provided on the top surface of the central shaft of the chuck body and at the outer periphery of the screw through hole. A sealing ring is embedded in the sealing ring inlay groove. The connecting ring of the fixing screw member covers the sealing ring inlay groove and presses down the sealing ring.

[0013] The outer perimeter of the upper part of the central axis of the chuck body is larger than the outer perimeter of the lower part of the central axis of the chuck body.

[0014] An annular liquid guiding slope is formed on the top surface of the central shaft of the chuck body and on the outside of the nut sealing cover. The annular liquid guiding slope gradually slopes downward from the side close to the nut sealing cover to the side away from the nut sealing cover.

[0015] The advantages and positive effects of this utility model are as follows: 1. This utility model, through the cooperation of a fixing screw with a connecting ring and a nut sealing cap, can effectively prevent the fixing screw itself from coming into contact with the liquid medicine and being corroded, and can effectively prevent the liquid medicine or acid gas from flowing down the screw through the hole to the motor shaft and causing damage to the motor.

[0016] 2. The chuck body of this utility model can ensure structural strength while ensuring resistance to strong acids, is fully applicable to substrate cleaning processes, and has a long service life.

[0017] 3. By providing a support column with a supporting slope, this utility model can effectively achieve line contact support for the square substrate, significantly reducing the contact area with the square substrate and avoiding damage to it. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention in use; Figure 2 This is a cross-sectional structural diagram of the present invention in use; Figure 3 This is a three-dimensional structural diagram of the chuck body of this utility model; Figure 4 This is a side view of the main body of the chuck of this utility model. Figure 5 for Figure 2 Enlarged view of point A; Figure 6 for Figure 2 Enlarged view of point B; Figure 7 for Figure 3 Enlarged view of point C.

[0019] In the diagram: 1 is the chuck body, 101 is the central shaft of the chuck body, 102 is the outer ring of the chuck body, 103 is the support column, 104 is the motor shaft connection hole, 105 is the connecting keyway, 106 is the screw through hole, 107 is the connecting beam, 108 is the hollow space, 109 is the right angle notch, 110 is the support slope, 111 is the limiting protrusion, 112 is the guide slope, 113 is the sealing ring inlay groove, and 114 is the annular liquid guiding slope. 2 is the fixed screw part, 201 is the top head, 202 is the connecting ring part, and 203 is the screw body part; 3 is a nut sealing cap; 001 is a square base plate, 002 is a motor, 0021 is a motor shaft, 0022 is a key, 003 is a motor bracket, and 004 is a waterproof cover. Detailed Implementation

[0020] The following is in conjunction with the appendix Figures 1-7 The present invention will be described in further detail.

[0021] A square base plate chuck mounting structure, such as Figures 1-7 As shown, this embodiment includes a chuck body 1, a fixing screw 2, and a nut sealing cap 3. The usage and setup of the square substrate chuck structure proposed in this embodiment in the corresponding equipment can be found in [reference needed]. Figure 1 and Figure 2 The chuck body 1 is connected and fixed to the motor shaft 0021 of the motor 002 via a fixing screw 2. The motor 002 itself has a conventional structure, for example, it is fixedly installed below the corresponding process cavity via a motor bracket 003.

[0022] like Figure 3 and Figure 4 As shown, the chuck body 1 is divided into a central shaft portion 101 and an outer ring portion 102 connected together. The outer ring portion 102 is located on the outer periphery of the central shaft portion 101. Four support pillars 103 for directly supporting the square base plate 001 are evenly protruding on the outer ring portion 102. Figure 2 and Figure 5As shown, a motor shaft connection hole 104 is provided on the bottom surface of the central shaft portion 101 of the chuck body. A connecting keyway 105 is recessed on the inner circumferential surface of the motor shaft connection hole 104. A screw through hole 106 is provided on the top surface of the central shaft portion 101 of the chuck body. The screw through hole 106 communicates with the motor shaft connection hole 104. The motor shaft connection hole 104 is used to insert the corresponding motor shaft 0021. The connecting keyway 105 cooperates with the key 0022 on the corresponding motor shaft 0021. The outer ring portion 102 of the chuck body is located inside the corresponding process cavity. The lower part of the central shaft portion 101 of the chuck body extends out from the process cavity to the bottom of the process cavity. A waterproof cover 004 is generally fixed on the process cavity where the central shaft portion 101 of the chuck body passes through.

[0023] like Figure 6 As shown, the fixing screw 2 is divided into a top head 201, a connecting ring 202 and a screw body 203 connected together from top to bottom. The outer diameter of the connecting ring 202 is larger than the outer diameter of the screw body 203 and the outer contour of the top head 201. The lower end of the screw body 203 is provided with an external thread A, the outer surface of the connecting ring 202 is provided with an external thread B, and the inner side of the nut sealing cover 3 is provided with an internal thread that matches the external thread B of the connecting ring 202.

[0024] During installation and use, the motor shaft 0021 is first inserted into the motor shaft connecting hole 104, and the screw body 203 passes through the screw through hole 106. The key 0022 on the motor shaft 0021 mates with the connecting keyway 105. The screw body 203 is connected to the motor shaft 0021 in the motor shaft connecting hole 104 through the external thread A at the lower end of the screw body 203. The lower edge of the connecting ring 202 abuts against the top surface of the chuck body central shaft 101 and covers the screw through hole 106. The nut sealing cover 3 is connected to the external thread B of the connecting ring 202 through the internal thread of the nut sealing cover 3. The bottom of the nut sealing cover 3 abuts against the top surface of the chuck body central shaft 101. The nut sealing cover 3 is made of corrosion-resistant non-metallic material. In this embodiment, the nut sealing cover 3 is made of PTFE material. By using the fixing screw 2 with connecting ring 202 and the nut sealing cover 3, the fixing screw 2 itself can be effectively prevented from coming into contact with the liquid and being corroded. It can also effectively prevent the liquid or acid gas from flowing down the screw through the hole 106 to the motor shaft 0021 and causing damage to the motor 002.

[0025] Specifically, such as Figure 2 and Figure 3As shown, in this embodiment, the axial centerline of the screw through hole 106, the axial centerline of the motor shaft connecting hole 104, the axial centerline of the chuck body central shaft portion 101, and the axial centerline of the chuck body outer ring portion 102 are all collinear to ensure stable operation. The chuck body central shaft portion 101 and the chuck body outer ring portion 102 are connected by four circumferentially evenly arranged connecting beams 107. The chuck body central shaft portion 101 and the chuck body outer ring portion 102 are divided into four hollow spaces 108 by the connecting beams 107, which can effectively reduce the overall weight. In addition, the hollow spaces 108 also facilitate the exit of the liquid medicine from the chuck body 1. The chuck body 1, which consists of the central shaft 101, outer ring 102, connecting beam 107, and support column 103, is an integral structure with an internal 316L stainless steel frame and an external coating of corrosion-resistant non-metallic material (such as PCTFE material coating). This structure ensures that the chuck body 1 can withstand strong acids while maintaining structural strength, making it suitable for substrate cleaning processes and providing a long service life.

[0026] In this embodiment, the outer periphery of the upper part of the central shaft portion 101 of the chuck body is larger than that of the lower part of the central shaft portion 101. This allows the outer periphery of the upper part of the central shaft portion 101 to connect with the shape of the waterproof cover 004, ensuring the waterproof effect of the waterproof cover 004 and preventing liquid from falling from the waterproof cover 004 into the location of the motor 002. An annular liquid guiding slope 114 is formed on the top surface of the central shaft portion 101 of the chuck body and on the outside of the nut sealing cap 3. The annular liquid guiding slope 114 gradually slopes downward from the side near the nut sealing cap 3 to the side away from the nut sealing cap 3, facilitating the outward flow of liquid onto the annular liquid guiding slope 114 and preventing accumulation on the top surface of the central shaft portion 101 of the chuck body.

[0027] Specifically, such as Figure 3 , Figure 4 and Figure 7 As shown, in this embodiment, each support portion 103 corresponds to a corresponding corner of the square substrate 001. Each support portion 103 has a right-angled notch 109, and at the right-angled notch 109 of each support portion 103, a supporting slope 110 is formed that gradually slopes downwards from the direction away from the corresponding corner of the square substrate 001 to the direction closer to the corresponding corner of the square substrate 001. The supporting slope 110 on each support portion 103 forms line contact with the two sides of the bottom side of the corresponding corner of the square substrate 001. By providing the support portion 103 with the supporting slope 110, line contact support can be effectively achieved for the square substrate 001, significantly reducing the contact area with the square substrate 001 and avoiding damage to the square substrate 001.

[0028] like Figure 7As shown, each support portion 103 is provided with two limiting protrusions 111 on its top surface. One of the limiting protrusions 111 on each support portion 103 is located on the outer side of one side of the corresponding corner of the square substrate 001, and the other limiting protrusion 111 on each support portion 103 is located on the outer side of the other side of the corresponding corner of the square substrate 001. That is, the two limiting protrusions 111 on each support portion 103 are used to block the corresponding side of the square substrate 001 to prevent the square substrate 001 from tilting. The side of each limiting protrusion 111 near the square substrate 001 serves as a guide slope 112, and the guide slope 112 of each limiting protrusion 111 gradually slopes downward from the side away from the square substrate 001 to the side near the square substrate 001. When the side of the square substrate 001 contacts the guide slope 112 of the limiting protrusion 111, it can slide down along the guide slope 112 and finally be supported by the support slope 110. When the square substrate 001 is properly supported, it will not contact each limiting protrusion 111.

[0029] Specifically, such as Figure 3 and Figure 6 As shown, in this embodiment, a sealing ring inlay groove 113 is provided on the top surface of the central shaft portion 101 of the chuck body and at the outer periphery of the screw through hole 106. A sealing ring (omitted from the attached drawings) is embedded in the sealing ring inlay groove 113. The connecting ring portion 202 of the fixing screw member 2 covers the sealing ring inlay groove 113 and presses down the sealing ring. By setting the sealing ring, the liquid outside the connecting ring portion 202 can be further prevented from flowing into the screw through hole 106 through the gap between the connecting ring portion 202 and the top surface of the central shaft portion 101 of the chuck body, effectively improving the sealing effect.

Claims

1. A square substrate chuck mounting structure, characterized in that: Includes chuck body (1), fixing screw (2), and nut sealing cover (3); The chuck body (1) is divided into a central shaft portion (101) and an outer ring portion (102) connected together. The outer ring portion (102) is located on the outer periphery of the central shaft portion (101). Several support pillars (103) for directly supporting the square base plate (001) are protruding on the outer ring portion (102). A motor shaft connection hole (104) is opened on the bottom surface of the central shaft portion (101). A connecting keyway (105) is recessed on the inner circumferential surface of the motor shaft connecting hole (104). A screw through hole (106) is provided on the top surface of the central shaft part (101) of the chuck body. The screw through hole (106) is connected to the motor shaft connecting hole (104). The motor shaft connecting hole (104) is used to insert the corresponding motor shaft (0021). The connecting keyway (105) is engaged with the key (0022) on the corresponding motor shaft (0021). The fixing screw (2) is divided into a top head (201), a connecting ring (202) and a screw body (203) connected together from top to bottom. The outer diameter of the connecting ring (202) is larger than the outer diameter of the screw body (203) and the outer contour of the top head (201). The lower end of the screw body (203) is provided with an external thread A, the outer surface of the connecting ring (202) is provided with an external thread B, and the inner side of the nut sealing cap (3) is provided with an internal thread that matches the external thread B of the connecting ring (202). The screw body (203) passes through the screw through hole (106). The screw body (203) is connected to the motor shaft (0021) located in the motor shaft connection hole (104) through the external thread A at the lower end of the screw body (203). The lower edge of the connecting ring (202) abuts against the top surface of the central shaft part (101) of the chuck body and covers the screw through hole (106). The nut sealing cover (3) is connected to the external thread B of the connecting ring part (202) through the internal thread of the nut sealing cover (3). The bottom of the nut sealing cover (3) abuts against the top surface of the central shaft part (101) of the chuck body. The nut sealing cover (3) is made of corrosion-resistant non-metallic material.

2. The square substrate chuck mounting structure according to claim 1, characterized in that: The axial center lines of the screw through hole (106), the motor shaft connecting hole (104), the axial center line of the chuck body central shaft (101), and the axial center line of the chuck body outer ring (102) are all collinear.

3. The square substrate chuck mounting structure according to claim 1, characterized in that: The central shaft portion (101) of the chuck body and the outer ring portion (102) of the chuck body are connected by a number of connecting beams (107) evenly arranged in the circumferential direction. The central shaft portion (101) of the chuck body and the outer ring portion (102) of the chuck body are divided into a number of hollow spaces (108) by each of the connecting beams (107).

4. The square substrate chuck mounting structure according to claim 3, characterized in that: The chuck body (1), formed by the central shaft (101), outer ring (102), connecting beam (107), and support column (103) of the chuck body, is an integral structure with an internal stainless steel skeleton and an external anti-corrosion non-metallic material coating.

5. The square substrate chuck mounting structure according to claim 1, characterized in that: Four support sections (103) are evenly arranged on the outer ring (102) of the chuck body. Each support section (103) corresponds to a corner of the square base plate (001). Each support section (103) has a right-angle notch (109). At the right-angle notch (109) of each support section (103), a support slope (110) is formed that gradually slopes downward from the direction away from the corner of the square base plate (001) to the direction close to the corner of the square base plate (001). The support slope (110) on each support section (103) forms line contact with the two sides of the bottom side of the corresponding corner of the square base plate (001).

6. The square substrate chuck mounting structure according to claim 5, characterized in that: Each of the support columns (103) is provided with two limiting protrusions (111) on its top surface. One of the limiting protrusions (111) on each of the support columns (103) is located on the outside of one side of the corresponding corner of the square substrate (001), and the other limiting protrusion (111) on each of the support columns (103) is located on the outside of the other side of the corresponding corner of the square substrate (001). That is, the two limiting protrusions (111) on each of the support columns (103) are used to block the corresponding side of the square substrate (001) to prevent the square substrate (001) from tilting.

7. The square substrate chuck mounting structure according to claim 6, characterized in that: Each of the limiting protrusions (111) has a side facing the square substrate (001) as a guide slope (112), and the guide slope (112) of each of the limiting protrusions (111) gradually slopes downward from the side away from the square substrate (001) to the side facing the square substrate (001).

8. The square substrate chuck mounting structure according to claim 1, characterized in that: A sealing ring inlay groove (113) is provided on the top surface of the central shaft part (101) of the chuck body and at the outer periphery of the screw through hole (106). A sealing ring is embedded in the sealing ring inlay groove (113). The connecting ring part (202) of the fixing screw part (2) covers the sealing ring inlay groove (113) and presses the sealing ring.

9. The square substrate chuck mounting structure according to claim 1, characterized in that: The outer periphery of the upper part of the central shaft portion (101) of the chuck body is larger than the outer periphery of the lower part of the central shaft portion (101) of the chuck body.

10. The square substrate chuck mounting structure according to claim 1, characterized in that: An annular liquid guiding slope (114) is formed on the top surface of the central shaft portion (101) of the chuck body and on the outside of the nut seal cover (3). The annular liquid guiding slope (114) gradually slopes downward from the side close to the nut seal cover (3) to the side away from the nut seal cover (3).

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