Quick dismounting structure of cold and hot disc

Abstract

The utility model discloses a quick dismounting structure of cold and hot disc, including cold and hot disc bottom plate and support plate, both sides of cold and hot disc bottom plate all is provided with support plate, the female buckle adapter plate is installed to cold and hot disc bottom plate, the female buckle is installed to female buckle adapter plate, the support plate is installed male buckle adapter plate, and the male buckle adapter plate is installed male buckle with female buckle cooperation. The utility model discloses, and male buckle installs with the bottom plate both sides of disc body through adapter plate, and female buckle installs on both sides fixed support plate through adapter plate, and the adapter plate of female buckle can adjust simultaneously, to adjust the fixed degree of hasp, and both sides fixed support plate installs on frame, and quick dismounting structure is simple and easy to operate, and firm, and has adjustable function simultaneously, and adjusts the fixed degree of hasp.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically a quick-assembly and disassembly structure for hot and cold plates. Background Technology

[0002] A semiconductor wafer is a round plate made of semiconductor material, typically silicon, with a smooth surface. Circuitry is etched onto its surface using a photolithography machine to create chips or transistors. Depending on the manufacturing process, semiconductor wafers may undergo heat treatment before processing to alter their physical properties.

[0003] A hot and cold composite tray for semiconductor wafer coating and developing, disclosed in publication number CN219737997U, includes a processing table, a hot tray processing area, and four cold trays. It also includes a rotating mechanism for rotating each cold tray, which is mounted on the processing table. This mechanism allows two non-adjacent wafers to be placed on each of the four cold trays. When a cold tray with a wafer is near the hot tray processing area, an electric push rod moves the tray to the hot tray processing area. The push rod is then controlled to retract the cold tray, and the drive mechanism is reversed to bring the empty cold tray on the right closer to the hot tray processing area, facilitating the receipt of wafers from the hot tray processing area. The wafer to be processed is then placed on the cold tray that has rotated out from the hot tray processing area for subsequent processing, eliminating the need to wait for the wafer's heat treatment to complete. This improves the efficiency of wafer heat treatment and fully utilizes the empty cold trays.

[0004] Existing hot and cold plates are generally fixed with screws, which is inconvenient to disassemble and make disassembly and assembly time long. To address this, we propose a quick disassembly and assembly structure for hot and cold plates. Utility Model Content

[0005] The purpose of this invention is to provide a quick assembly and disassembly structure for hot and cold plates to solve the problems in the prior art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a quick-assembly and disassembly structure for a hot and cold plate, comprising a hot and cold plate base plate and a support plate, wherein support plates are provided on both sides of the hot and cold plate base plate, a female buckle adapter plate is installed on the hot and cold plate base plate, and a female buckle is installed on the female buckle adapter plate; a male buckle adapter plate is installed on the support plate, and a male buckle that mates with the female buckle is installed on the male buckle adapter plate.

[0007] Preferably, the support plate has a guide limiting groove on one side of the hot and cold plate base plate that cooperates with the hot and cold plate base plate.

[0008] Preferably, the support plate is provided with a limiting protrusion at one end of the guide limiting groove.

[0009] Preferably, the male adapter plate and the hot / cold plate base plate are fixed together by screws, and the male buckle and the male adapter plate are fixed together by screws; the female adapter plate and the support plate are fixed together by screws, and the female buckle and the female adapter plate are fixed together by screws.

[0010] Compared with existing technologies, the advantages of this utility model are as follows: the male buckle is installed on both sides of the bottom plate of the tray body via an adapter plate, and the female buckle is installed on the fixed support plates on both sides via an adapter plate. Simultaneously, the adapter plate of the female buckle can be adjusted forward and backward to adjust the fixing force of the buckle. The fixed support plates on both sides are installed on the frame. The quick-release structure is simple and easy to operate, while being firmly fixed and having an adjustable function to adjust the fixing force of the buckle. Compared with other quick-release structures, this quick-release structure eliminates the need for screw removal and requires no tools to quickly assemble and disassemble the hot and cold trays, reducing workload. Its adjustable function allows for adjustment of the force according to different tray bodies and user needs, and prevents assembly and disassembly difficulties caused by processing factors. Attached Figure Description

[0011] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0012] Figure 1 This is a schematic diagram of the structure of this utility model;

[0013] Figure 2 This is a structural schematic diagram of the present invention from the bottom view;

[0014] Figure 3 This is an exploded view of the present invention;

[0015] Figure 4 This is a structural diagram of the female and male buckles of this utility model.

[0016] In the diagram: 1. Hot and cold plate base plate; 2. Support plate; 3. Female buckle adapter plate; 4. Female buckle; 5. Male buckle; 6. Male buckle adapter plate; 21. Guide limiting groove; 22. Limiting protrusion. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.

[0018] Please see Figure 1-4 In this embodiment of the present invention, a quick-assembly and disassembly structure for a hot and cold plate includes a hot and cold plate base plate 1 and a support plate 2. Support plates 2 are provided on both sides of the hot and cold plate base plate 1. A female buckle adapter plate 3 is installed on the hot and cold plate base plate 1, and a female buckle 4 is installed on the female buckle adapter plate 3. A male buckle adapter plate 6 is installed on the support plate 2, and a male buckle 5 that mates with the female buckle 4 is installed on the male buckle adapter plate 6. The male buckle adapter plate 6 and the hot and cold plate base plate 1 are fixed together by screws, and the male buckle 5 and the male buckle adapter plate 6 are fixed together by screws. The female buckle adapter plate 3 and the support plate 2 are fixed together by screws, and the female buckle 4 and the female buckle adapter plate 3 are fixed together by screws. The male buckle is installed on both sides of the base plate of the plate body via the adapter plate, and the female buckle is installed on the fixed support plates on both sides via the adapter plate. The adapter plate of the female buckle can be adjusted back and forth to adjust the fixing force of the buckle. The fixed support plates on both sides are installed on a frame. The quick-release mechanism is simple and easy to operate, while providing a secure hold. It also features an adjustable function to adjust the fastening force. Compared to other quick-release mechanisms, this one eliminates the need for screws and tools, allowing for rapid assembly and disassembly of hot and cold plates, reducing workload. The adjustable function allows for adjustment of the force according to different plate types and user needs, preventing assembly and disassembly difficulties caused by manufacturing processes.

[0019] The support plate 2 is provided with a guide limiting groove 21 on one side of the hot and cold plate base plate 1, which cooperates with the hot and cold plate base plate 1; the support plate 2 is provided with a limiting protrusion 22 at one end of the guide limiting groove 21.

[0020] The working principle of this utility model is as follows: the male buckle is installed on both sides of the base plate of the tray body via an adapter plate, and the female buckle is installed on the fixed support plates on both sides via an adapter plate. The adapter plate of the female buckle can be adjusted forward and backward to adjust the fixing force of the buckle. The fixed support plates on both sides are installed on the frame. The quick-release structure is simple and easy to operate, while also being firmly fixed and having an adjustable function to adjust the fixing force of the buckle. Compared with other quick-release structures, this quick-release structure eliminates the need to remove screws and tools, allowing for quick assembly and disassembly of hot and cold trays, reducing workload. Its adjustable function allows for adjustment of the force according to different tray bodies and user needs, and prevents assembly and disassembly difficulties caused by processing factors.

[0021] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A quick-release structure for hot and cold plates, characterized in that: It includes a hot and cold plate base plate (1) and a support plate (2). The hot and cold plate base plate (1) is provided with support plates (2) on both sides. The hot and cold plate base plate (1) is equipped with a female buckle adapter plate (3) and a female buckle (4) is installed on the female buckle adapter plate (3). The support plate (2) is equipped with a male buckle adapter plate (6) and a male buckle (5) that mates with the female buckle (4).

2. The quick-assembly and disassembly structure for hot and cold plates according to claim 1, characterized in that: The support plate (2) is provided with a guide limiting groove (21) on one side of the hot and cold plate base plate (1) to cooperate with the hot and cold plate base plate (1).

3. The quick-assembly and disassembly structure for hot and cold plates according to claim 2, characterized in that: The support plate (2) is provided with a limiting protrusion (22) at one end of the guide limiting groove (21).

4. The quick-assembly and disassembly structure for hot and cold plates according to claim 1, characterized in that: The male adapter plate (6) and the hot and cold plate base plate (1) are fixed together by screws, and the male buckle (5) and the male adapter plate (6) are fixed together by screws; the female adapter plate (3) and the support plate (2) are fixed together by screws, and the female buckle (4) and the female adapter plate (3) are fixed together by screws.

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