Wafer breakage prevention holder

Abstract

The utility model discloses a kind of wafer anti-breakage wafer holder, comprising: bottom plate, two fixed plates and two adjustable side plates;Two fixed plates are symmetrically arranged on the front and back sides of bottom plate;Bottom plate top end is equipped with the elastic buffer for buffering wafer;Two adjustable side plates are symmetrically arranged on the left and right sides of elastic buffer;Two adjustable side plates are all located between two fixed plates.The utility model cooperates through fixed plate, adjustable side plate and elastic buffer, can avoid wafer to be broken in the process of being placed back carrier due to collision with carrier, so as to reduce the requirement to operator and product breakage rate, so as to improve work efficiency, reduce production cost.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and more specifically to a wafer anti-breakage tray. Background Technology

[0002] During chip manufacturing, quality inspection is performed on the chips, which requires removing them from and placing them back into a standard carrier. However, existing carriers lack cushioning, making the edges of the chips prone to breakage due to impact during return. This damage is generally irreparable, rendering the product unusable and significantly increasing manufacturing costs. Currently, chip processing relies on operators handling the chips carefully to minimize breakage, which is time-consuming, labor-intensive, and results in an uncontrollable chip breakage rate.

[0003] Therefore, how to provide a wafer anti-breakage tray that can improve work efficiency and reduce production costs is one of the technical problems that urgently need to be solved in this field. Utility Model Content

[0004] In view of this, the present invention provides a wafer anti-breakage wafer holder, the purpose of which is to solve the problems existing in the prior art.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] A wafer anti-breakage tray includes: a base plate, two fixed plates and two adjustable side plates; the two fixed plates are symmetrically arranged on the front and rear sides of the base plate; the top of the base plate is provided with an elastic buffer for buffering the wafer; the two adjustable side plates are symmetrically arranged on the left and right sides of the elastic buffer; both adjustable side plates are located between the two fixed plates.

[0007] Preferably, the top of the base plate has two positioning grooves for positioning the vehicle; the two positioning grooves are symmetrically arranged on the left and right sides of the elastic buffer; the bottom of the vehicle is provided with a positioning block that matches the positioning grooves.

[0008] Preferably, the adjustable side plate is provided with symmetrical adjustment rods on both the front and rear sides; the fixed plate is provided with adjustment slots for adjusting the position of the adjustment rods; the number of adjustment rods and adjustment slots are the same and they are arranged in a one-to-one correspondence; the adjustment rods pass through the corresponding adjustment slots.

[0009] Preferably, the adjusting groove includes a first limiting part, a connecting part, and a second limiting part; the first limiting part and the second limiting part are arranged side by side and connected through the connecting part; the connecting part is located above the first limiting part and the second limiting part.

[0010] Preferably, a limiting block is provided at the end of the adjusting rod away from the adjustable side plate; the limiting block is located on the side of the fixed plate away from the adjustable side plate.

[0011] Preferably, the elastic buffer is a silicone tube.

[0012] Preferably, a support plate is provided on the front side of the bottom end of the base plate.

[0013] The present invention achieves the following technical advantages over the prior art:

[0014] 1) This utility model, through the combination of a fixed plate, an adjustable side plate and an elastic buffer, can prevent the wafer from being damaged by collision with the carrier during the return process, thereby reducing the requirements for operators and the product breakage rate, thus improving work efficiency and reducing production costs.

[0015] 2) This utility model can adjust the distance between the two adjustable side plates by means of the adjustment rod and the adjustment groove 7, so as to adapt to wafers of different sizes.

[0016] 3) By setting a support plate at the bottom of the base plate, this utility model can keep the wafer anti-breakage tray in an inclined state when it is placed, thereby ensuring that the main surface of the wafer is tilted upward during the wafer placement process, so as to protect the main surface of the wafer. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of a wafer anti-breakage support device according to the present invention;

[0018] Figure 2 This is a schematic diagram of the adjustable side panel.

[0019] Figure 3 This is a structural diagram of the fixed plate;

[0020] Figure 4 A schematic diagram showing the placement of wafers and carriers in a wafer breakage protection tray;

[0021] In the figure: 1. Base plate; 2. Fixing plate; 3. Adjustable side plate; 4. Elastic buffer; 5. Positioning groove; 6. Adjusting rod; 7. Adjusting groove; 701. First limiting part; 702. Connecting part; 703. Second limiting part; 8. Limiting block; 9. Support plate; 10. Wafer; 11. Carrier. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example

[0024] Reference Figure 1-4 As shown, this utility model discloses a wafer anti-breakage tray, including: a base plate 1, two fixed plates 2, and two adjustable side plates 3; the two fixed plates 2 are symmetrically arranged on the front and rear sides of the base plate 1; the top of the base plate 1 is provided with an elastic buffer 4 for buffering the wafer 10; the two adjustable side plates 3 are symmetrically arranged on the left and right sides of the elastic buffer 4; both adjustable side plates 3 are located between the two fixed plates 2; in use, the wafer and the carrier are placed together in the wafer anti-breakage tray, the carrier 11 is positioned by the fixed plates 2 and the adjustable side plates 3, and the wafer 10 is lifted by the elastic buffer 4, so that the wafer 10 does not directly contact the bottom of the carrier 11. During the process of placing the wafer 10 into the carrier 11, the wafer 10 contacts the elastic buffer 4, which can effectively alleviate the impact force generated by the wafer under the action of gravity, thereby avoiding damage to the edge of the wafer.

[0025] The above technical solution, through the combination of a fixed plate, an adjustable side plate, and an elastic buffer, can prevent the wafer from being damaged by collision with the carrier during the return process. This reduces the requirements for operators and the product breakage rate, thereby improving work efficiency and reducing production costs.

[0026] In this embodiment, two positioning grooves 5 are provided at the top of the base plate 1 for positioning the carrier 11; the two positioning grooves 5 are symmetrically arranged on the left and right sides of the elastic buffer 4; the bottom of the carrier 11 is provided with a positioning block that matches the positioning grooves 5; the carrier can be quickly positioned and installed by the cooperation of the positioning grooves and the positioning blocks.

[0027] In this embodiment, adjustable rods 6 are symmetrically arranged on the front and rear sides of the adjustable side plate 3; an adjustment groove 7 is provided on the fixed plate 2 for adjusting the position of the adjustable rods 6; the number of adjustable rods 6 and adjustment grooves 7 are the same and they are arranged in a one-to-one correspondence; the adjustable rods 6 pass through the corresponding adjustment grooves 7; in use, the distance between the two adjustable side plates 3 is adjusted by adjusting the position of the adjustable rods 6 in the adjustment grooves 7, thereby adapting to carriers and wafers of different sizes.

[0028] In this embodiment, the adjustment groove 7 includes a first limiting part 701, a connecting part 702, and a second limiting part 703; the first limiting part 701 and the second limiting part 703 are arranged side by side and connected through the connecting part 702; the connecting part 702 is located above the first limiting part 701 and the second limiting part 703; both the first limiting part 701 and the second limiting part 703 are arranged perpendicularly to the base plate 1; the connecting part 702 is arranged parallel to the base plate 1; in use, the position of the adjustable side plate 3 is adjusted by moving the adjusting rod 6 to the first limiting part 701 or the second limiting part 703.

[0029] In this embodiment, a limiting block 8 is provided at the end of the adjusting rod 6 away from the adjustable side plate 3; the limiting block 8 is located on the side of the fixed plate 2 away from the adjustable side plate 3.

[0030] In this embodiment, the elastic buffer 4 is a silicone tube.

[0031] In this embodiment, a support plate 9 is provided on the front side of the bottom end of the base plate 1 so that the wafer anti-breakage tray is kept in an inclined state when placed. When in use, the wafer is placed in the carrier so that the main surface of the wafer is tilted upward. During the movement of the wafer, friction between the main surface of the wafer and the carrier can be avoided, thereby achieving the purpose of protecting the main surface of the wafer.

[0032] In this embodiment, the fixing plate has a U-shaped structure, which facilitates the placement and removal of the wafer.

[0033] The above description is merely a preferred embodiment of the present utility model and does not constitute any limitation on the technical scope of the present utility model. Therefore, any minor modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A wafer anti-breakage tray, characterized in that, include: The base plate (1), two fixed plates (2) and two adjustable side plates (3); the two fixed plates (2) are symmetrically arranged on the front and rear sides of the base plate (1); the top of the base plate (1) is provided with an elastic buffer (4) for buffering the wafer (10); the two adjustable side plates (3) are symmetrically arranged on the left and right sides of the elastic buffer (4); the two adjustable side plates (3) are located between the two fixed plates (2).

2. The wafer anti-breakage tray according to claim 1, characterized in that, The top of the base plate (1) has two positioning grooves (5) for positioning the vehicle (11); the two positioning grooves (5) are symmetrically arranged on the left and right sides of the elastic buffer (4); the bottom of the vehicle (11) is provided with a positioning block that matches the positioning grooves (5).

3. A wafer anti-breakage tray according to claim 1, characterized in that, The adjustable side plate (3) is symmetrically provided with adjusting rods (6) on the front and rear sides; the fixed plate (2) is provided with adjusting grooves (7) for adjusting the position of the adjusting rods (6); the number of adjusting rods (6) and adjusting grooves (7) are the same and they are set one to one; the adjusting rods (6) are inserted into the corresponding adjusting grooves (7).

4. A wafer anti-breakage tray according to claim 3, characterized in that, The adjustment groove (7) includes a first limiting part (701), a connecting part (702), and a second limiting part (703); the first limiting part (701) and the second limiting part (703) are arranged side by side and connected through the connecting part (702); the connecting part (702) is located above the first limiting part (701) and the second limiting part (703).

5. A wafer anti-breakage tray according to claim 3, characterized in that, The adjusting rod (6) has a limiting block (8) at the end away from the adjustable side plate (3); the limiting block (8) is located on the side of the fixed plate (2) away from the adjustable side plate (3).

6. A wafer anti-breakage tray according to claim 1, characterized in that, The elastic buffer (4) is a silicone tube.

7. A wafer anti-breakage tray according to claim 1, characterized in that, The bottom plate (1) has a support plate (9) on the front side of its bottom end.

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