A silicon wafer rapid basket changing device

Abstract

The utility model discloses a kind of silicon wafer quick basket changing device, it includes frame: the basket top-lifting clamping mechanism one and basket top-lifting clamping mechanism two are movably connected on the frame, basket top-lifting clamping mechanism one and the basket top-lifting clamping mechanism two one side movably connected have flower basket body, the basket top-lifting clamping mechanism one includes sliding seat, clamping component one and clamping component two being installed on the sliding seat, the clamping component is by telescopic cylinder one being installed on the sliding seat. Compared with prior art, by the setting of basket top-lifting clamping mechanism one and basket top-lifting clamping mechanism two, the device can quickly clamp flower basket body by basket top-lifting clamping mechanism one and basket top-lifting clamping mechanism two, and basket top-lifting clamping mechanism one and basket top-lifting clamping mechanism two can alternately convey flower basket body, thereby shorten production rhythm, effectively improve work efficiency, and further enhance the continuity of production.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon wafer production and processing equipment, and in particular to a silicon wafer quick basket changing device. Background Technology

[0002] In the manufacturing process of photovoltaic silicon wafers, after the silicon wafers are slicing, they need to undergo cleaning, wafer insertion and other processes. The wafer insertion process is crucial and requires the coordination of the preceding and following processes. The preceding processes include slicing and wafer extraction, while the following processes include the supply of empty material baskets and the transfer of full material baskets.

[0003] The existing empty basket supply and full basket transfer mostly use a single tooling to transport the baskets. That is, after the tooling transports one basket from the loading point to the next loading point, it needs to return to the loading point to transport another basket from the loading point to the next loading point. During the loading and unloading process, there will be a period of idle time, which will result in a lot of time required to transport and transfer multiple baskets. Therefore, it is necessary to design a silicon wafer rapid basket changing device that can shorten the production idle time and improve work efficiency. Utility Model Content

[0004] In order to overcome the limitations of existing technologies, which often use a single tooling to transport empty baskets and full baskets, meaning that after the tooling transports one basket from the loading point to the next loading point, it needs to return to the loading point to transport another basket from the loading point to the next loading point, there will be a period of idle time during the loading and unloading process, resulting in insufficient time for transporting multiple baskets, one of the objectives of this utility model is to provide a rapid basket changing device for silicon wafers.

[0005] One of the objectives of this utility model is achieved by the following technical solution: a silicon wafer quick basket changing device, including a frame: a basket lifting and clamping mechanism one and a basket lifting and clamping mechanism two are movably connected to the frame, and a basket body is movably connected to one side of the basket lifting and clamping mechanism one and the basket lifting and clamping mechanism two.

[0006] The basket lifting and clamping mechanism includes a sliding seat, a clamping assembly 1 and a clamping assembly 2 mounted on the sliding seat. The clamping assembly 1 consists of a telescopic cylinder 1 mounted on the sliding seat, a moving part 1 located at the output end of the telescopic cylinder 1, a rack 1 and a rack 2 mounted on the moving part 1, a gear 1 and a gear 2 meshing with the rack 1 and the rack 2, a rotating shaft 1 and a rotating shaft 2 mounted in the middle of the gear 1 and the gear 2, a rotating part 1 mounted on one side of the rotating shaft 1, and a clamping cylinder 1 mounted on one side of the rotating part 1.

[0007] The clamping assembly 2 consists of a telescopic cylinder 2 mounted on the sliding seat, a movable component 2 located at the output end of the telescopic cylinder 2, a rack 3 mounted on the movable component 2, a gear 3 meshing with the rack 3, a rotating shaft 3 mounted in the middle of the gear 3, a rotating component 2 mounted on one side of the rotating shaft 3, and a clamping cylinder 2 mounted on one side of the rotating component 2.

[0008] According to the aforementioned silicon wafer quick basket changing device, the first clamping cylinder is installed at a right angle to the first rotating component, and the second clamping cylinder is installed in the same direction as the second rotating component.

[0009] According to the aforementioned silicon wafer quick basket changing device, the working principle and structure of the second basket lifting and clamping mechanism are the same as those of the first basket lifting and clamping mechanism. The first basket lifting and clamping mechanism and the second basket lifting and clamping mechanism are movably connected to the frame in an alternating manner.

[0010] According to the aforementioned silicon wafer quick basket changing device, support component one, support component two, and support component three are installed in the same direction on one side of the sliding seat. Support component one consists of two support frames one and two symmetrically installed on the sliding seat. Rotating shaft one is rotatably connected inside the support frames one and two.

[0011] According to the aforementioned silicon wafer quick basket changing device, the working principle and structure of the second support component and the third support component are the same as those of the first support component. The second support component is used to support the second rotating shaft, and the third support component is used to support the third rotating shaft.

[0012] According to the aforementioned silicon wafer quick basket changing device, a power distribution box is installed above the sliding seat, a rotary cylinder is installed on the side of the sliding seat near the power distribution box, a rotating component three is installed at the output end of the rotary cylinder, and a buffer strip is installed below the rotating component three.

[0013] According to the aforementioned silicon wafer quick basket changing device, an electric guide rail one and an electric guide rail two are installed on the frame. The electric guide rail one is used to drive the basket lifting and clamping mechanism one to move, and the electric guide rail two is used to drive the basket lifting and clamping mechanism two to move.

[0014] The above-mentioned solution has the following beneficial effects:

[0015] 1. By setting up basket lifting and clamping mechanism one and basket lifting and clamping mechanism two, compared with the prior art, this device can quickly clamp the flower basket body through basket lifting and clamping mechanism one and basket lifting and clamping mechanism two, and basket lifting and clamping mechanism one and basket lifting and clamping mechanism two can alternately convey the flower basket body, thereby shortening the production cycle, effectively improving work efficiency, and thus enhancing the continuity of production.

[0016] 2. By setting up clamping component one and clamping component two, with the cooperation of telescopic cylinder one, moving part one, rack one, gear one and clamping cylinder two, the lifting motion of telescopic cylinder one and rack one can be converted into the rotational motion of gear one, thereby clamping the flower basket body by lifting and rotating clamping, improving clamping stability, and the structure is simple and easy to use.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0019] Figure 1 This is a schematic diagram of the overall structure of a silicon wafer rapid basket changing device according to the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of the buffer bar of the silicon wafer quick basket changing device of this utility model;

[0021] Figure 3 This is a top view schematic diagram of the overall structure of a silicon wafer rapid basket changing device according to the present invention;

[0022] Figure 4 This is a side view of the overall structure of a silicon wafer quick basket changing device according to the present invention;

[0023] Figure 5 This is a schematic diagram of the clamping assembly of a silicon wafer quick basket changing device according to the present invention;

[0024] Figure 6 This utility model relates to a rapid basket changing device for silicon wafers. Figure 5 Enlarged structural diagram at point A in the middle;

[0025] Figure 7 This is a schematic diagram of the clamping component two of the silicon wafer quick basket changing device of this utility model;

[0026] Figure 8 This utility model relates to a rapid basket changing device for silicon wafers. Figure 7 Enlarged structural diagram at point B;

[0027] Figure 9 This is a schematic diagram of the clamping cylinder of a silicon wafer quick basket changing device according to the present invention;

[0028] Figure 10 This is a schematic diagram of the structure of the basket body of a silicon wafer quick basket changing device according to this utility model;

[0029] Figure 11 This is a schematic diagram of the power distribution box of a silicon wafer quick basket changing device according to this utility model.

[0030] Legend:

[0031] 1. Frame; 2. Electric guide rail one; 3. Electric guide rail two; 21. Sliding seat; 22. Clamping assembly one; 221. Telescopic cylinder one; 222. Moving part one; 223. Rack one; 224. Rack two; 225. Gear one; 226. Gear two; 227. Rotating shaft one; 228. Rotating shaft two; 229. Rotating part one; 220. Clamping cylinder one; 23. Clamping assembly two; 231. Telescopic cylinder two; 232. Moving part two; 233. Rack three; 234. Gear three; 235. Rotating shaft three; 236. Rotating part two; 237. Clamping cylinder two; 4. Flower basket body; 5. Support assembly one; 51. Support frame one; 52. Support frame two; 6. Support assembly two; 7. Support assembly three; 8. Distribution box; 9. Rotary cylinder; 10. Rotating part three; 11. Buffer strip. Detailed Implementation

[0032] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0033] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0034] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0035] Reference Figures 1-11A silicon wafer quick basket changing device includes a frame 1. A basket lifting and clamping mechanism one and a basket lifting and clamping mechanism two are movably connected to the frame 1. A basket body 4 is movably connected to one side of each of the basket lifting and clamping mechanisms. The basket lifting and clamping mechanism one includes a sliding base 21, a clamping assembly one 22 mounted on the sliding base 21, and a clamping assembly two 23. The clamping assembly one 22 consists of a telescopic cylinder one 221 mounted on the sliding base 21 and a moving part one 2 located at the output end of the telescopic cylinder one 221. 22. The assembly consists of rack 223 and rack 224 mounted on the moving part 222, gear 225 and gear 226 meshing on rack 223 and rack 224, rotating shaft 227 and rotating shaft 228 mounted in the middle of gear 225 and gear 226, rotating part 229 mounted on one side of rotating shaft 227, and clamping cylinder 220 mounted on one side of rotating part 229. The clamping assembly 23 consists of telescopic cylinder 231 mounted on the sliding seat 21. The system comprises a movable component 232 located at the output end of the telescopic cylinder 231, a rack 233 mounted on the movable component 232, a gear 234 meshing with the rack 233, a rotating shaft 235 mounted in the middle of the gear 234, a rotating component 236 mounted on one side of the rotating shaft 235, and a clamping cylinder 237 mounted on one side of the rotating component 236. The clamping cylinder 220 is mounted at a right angle to the rotating component 229, and the clamping cylinder 237 is mounted in the same direction as the rotating component 236. The working principle and structure of the second basket lifting and clamping mechanism are the same as those of the first basket lifting and clamping mechanism. The first and second basket lifting and clamping mechanisms are connected to the frame 1 in an alternating manner. The basket body 4 can be quickly clamped by the first and second basket lifting and clamping mechanisms, and the basket body 4 can be transferred alternately, thereby shortening the production cycle and effectively improving work efficiency.

[0036] Support components 1 5, 2 6, and 3 7 are installed in the same direction on one side of the sliding seat 21. Support component 1 5 consists of two support frames 1 51 and 2 52 symmetrically installed on the sliding seat 21. Rotating shaft 1 227 is rotatably connected inside support frames 1 51 and 2 52. The working principle and structure of support components 2 6 and 3 7 are the same as those of support component 1 5. Support component 2 6 is used to support rotating shaft 2 228, and support component 3 7 is used to support rotating shaft 3 235. Support components 1 5, 2 6, and 3 7 can support the rotational stability of rotating shaft 1 227, rotating shaft 2 228, and rotating shaft 3 235, and at the same time, they can limit the position of rotating shaft 1 227, rotating shaft 2 228, and rotating shaft 3 235 to prevent gear 1 225, gear 2 226, and gear 3 234 from moving up and down.

[0037] A distribution box 8 is installed above the sliding seat 21. A rotary cylinder 9 is installed on the side of the sliding seat 21 near the distribution box 8. A rotating component 10 is installed at the output end of the rotary cylinder 9. A buffer strip 11 is installed below the rotating component 10. The distribution box 8 can provide kinetic energy to the electronic components of the device, ensuring the stable operation of each component on the device. Multiple silicon wafers are placed on the basket body 4. When the basket body 4 is full, the rotary cylinder 9, the rotating component 10 and the buffer strip 11 can prevent the silicon wafers from shifting upwards during the conveying process, thus playing a protective role.

[0038] Electric guide rail 1 2 and electric guide rail 2 3 are installed on the frame 1. Electric guide rail 1 2 is used to drive the basket lifting and clamping mechanism 1 to move, and electric guide rail 2 3 is used to drive the basket lifting and clamping mechanism 2 to move. Sensors are mounted on electric guide rail 1 2 and electric guide rail 2 3. The sensors are connected to an external control system. The movement stroke of electric guide rail 1 2 and electric guide rail 2 3 can be accurately controlled through the external control system and sensors. Electric guide rail 1 2 and electric guide rail 2 3 are existing relatively mature technologies, so their working principle and structure will not be described in detail.

[0039] Working principle: The basket lifting and clamping mechanism 1 clamps and transports the basket body 4. When the basket lifting and clamping mechanism 1 moves to the appropriate position under the drive of the electric guide rail 2, the clamping assembly 22 and the clamping assembly 23 are activated to clamp the basket body 4. This drives the telescopic cylinder 221 to start, which in turn drives the moving part 222 to move. The movement of the moving part 222 drives the rack 223 and the rack 224 to move. Due to the rotation shaft 227 and the rotation shaft 224... 228 is restricted by support assembly 5 and support assembly 6, so gears 225 and 226 will not descend or rise. Therefore, racks 223 and 224, while moving, mesh with gears 225 and 226 respectively, driving them to rotate. The rotation of gear 225 drives rotating component 229 to rotate via rotating shaft 227. The rotation of rotating component 229 drives clamping cylinder 220 to rotate synchronously. (Refer to...) Figure 9 The clamping cylinder 220 rotates to the empty space on the side wall of the flower basket body 4, and the clamping cylinder 220 is activated so that one side retracts and fits against the empty space on the side wall of the flower basket body 4, thereby clamping the flower basket body 4.

[0040] Simultaneously with the activation of telescopic cylinder 221, telescopic cylinder 231 is activated to achieve synchronous clamping of the flower basket body 4. The activation of telescopic cylinder 231 drives the movement of moving component 232, which in turn drives the movement of rack 3 233. Since the rotating shaft 3 235 is restricted by support component 3 7, gear 3 234 will not rise or fall. Therefore, rack 3 233 drives gear 3 234 to rotate. The rotation of gear 3 234, through rotating shaft 3 235, drives rotating component 236 to rotate. The rotation of rotating component 236 then drives clamping cylinder 237 to rotate. (Refer to...) Figure 9 The clamping cylinder 237 rotates to the front side of the flower basket body 4, and the clamping cylinder 237 is activated to drive one side of it to fit against the side wall of the flower basket body 4, so that the flower basket body 4 can be quickly clamped by the clamping component 1 22 and the clamping component 23.

[0041] The rotary cylinder 9 is activated to drive the rotating component 10 to rotate. The rotation of the rotating component 10 causes the buffer strip 11 to rotate to the inner wall of the basket body 4. The basket lifting and clamping mechanism 1 is then conveyed via the electric guide rail 2, thus conveying the basket body 4 to a suitable position. After the basket body 4 is conveyed to the suitable position, the basket lifting and clamping mechanism 1 returns to the position of the loading basket body 4 to wait. While the basket lifting mechanism 1 is clamping and conveying one basket body 4, the basket lifting and clamping mechanism 2 is clamping another basket body 4, and so on. When the basket lifting and clamping mechanism returns to the position of the loading basket body 4, the electric guide rail 2 3 will transfer another basket body 4 through the basket lifting and clamping mechanism 2. Therefore, the basket lifting and clamping mechanism 1 and the basket lifting and clamping mechanism 2 will operate alternately to transport multiple basket bodies 4. Compared with the existing method of using only one tool to transport basket bodies 4, this device can shorten the production cycle, improve work efficiency, and facilitate the loading of basket bodies 4, effectively enhancing production continuity.

[0042] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A rapid basket changing device for silicon wafers, characterized in that, Includes a frame (1): a basket lifting and clamping mechanism 1 and a basket lifting and clamping mechanism 2 are movably connected on the frame (1), and a flower basket body (4) is movably connected to one side of the basket lifting and clamping mechanism 1 and the basket lifting and clamping mechanism 2. The basket lifting and clamping mechanism includes a sliding seat (21), a clamping component one (22) and a clamping component two (23) mounted on the sliding seat (21). The clamping component one (22) consists of a telescopic cylinder one (221) mounted on the sliding seat (21), a moving part one (222) located at the output end of the telescopic cylinder one (221), a rack one (223) and a rack two (224) mounted on the moving part one (222), a gear one (225) and a gear two (226) meshing with the rack one (223) and the rack two (224), a rotating shaft one (227) and a rotating shaft two (228) mounted in the middle of the gear one (225) and the gear two (226), a rotating part one (229) mounted on one side of the rotating shaft one (227), and a clamping cylinder one (220) mounted on one side of the rotating part one (229). The clamping assembly two (23) consists of a telescopic cylinder two (231) mounted on the sliding seat (21), a moving part two (232) located at the output end of the telescopic cylinder two (231), a rack three (233) mounted on the moving part two (232), a gear three (234) meshing with the rack three (233), a rotating shaft three (235) mounted in the middle of the gear three (234), a rotating part two (236) mounted on one side of the rotating shaft three (235), and a clamping cylinder two (237) mounted on one side of the rotating part two (236).

2. The silicon wafer rapid basket changing device according to claim 1, characterized in that, The clamping cylinder one (220) is installed at a right angle to the rotating component one (229), and the clamping cylinder two (237) is installed in the same direction as the rotating component two (236).

3. The silicon wafer rapid basket changing device according to claim 1, characterized in that, The working principle and structure of the second basket lifting and clamping mechanism are the same as those of the first basket lifting and clamping mechanism. The first basket lifting and clamping mechanism and the second basket lifting and clamping mechanism are connected to the frame (1) in an alternating manner.

4. The silicon wafer rapid basket changing device according to claim 1, characterized in that, Support component one (5), support component two (6) and support component three (7) are installed in the same direction on one side of the sliding seat (21). Support component one (5) consists of two support frames one (51) and support frame two (52) symmetrically installed on the sliding seat (21). Rotating shaft one (227) is rotatably connected inside the support frame one (51) and the support frame two (52).

5. A silicon wafer rapid basket changing device according to claim 4, characterized in that, The working principle and structure of the second support component (6) and the third support component (7) are the same as those of the first support component (5). The second support component (6) is used to support the second rotating shaft (228), and the third support component (7) is used to support the third rotating shaft (235).

6. The silicon wafer rapid basket changing device according to claim 1, characterized in that, A distribution box (8) is installed above the sliding seat (21). A rotary cylinder (9) is installed on the side of the sliding seat (21) near the distribution box (8). A rotating component three (10) is installed at the output end of the rotary cylinder (9). A buffer strip (11) is installed below the rotating component three (10).

7. A silicon wafer rapid basket changing device according to claim 1, characterized in that, The frame (1) is equipped with an electric guide rail one (2) and an electric guide rail two (3). The electric guide rail one (2) is used to drive the basket lifting and clamping mechanism one to move, and the electric guide rail two (3) is used to drive the basket lifting and clamping mechanism two to move.

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