A crystal expander feeding positioning device

Abstract

The utility model provides a kind of feeding positioning device of expansion machine, including workbench, positioning ring seat and upper compression ring, workbench is respectively provided with lock catch mechanism one and lock catch mechanism two around positioning ring seat, upper compression ring and positioning ring seat are hinged to each other, upper compression ring and positioning ring seat are equipped with the corresponding clamping plate of position, upper compression ring and positioning ring seat hinged side opposite side is also equipped with lug plate handle, lug plate handle lower end is equipped with guide column, buffer spring is sleeved on guide column, lock catch mechanism includes straight line sliding table, movable clamping block and telescopic cylinder.The utility model has the beneficial effects: by setting two lock catch mechanisms, realize detection front and rear end locking pressure, simultaneously by guide column, buffer spring and the pressure sensor two of installation hole in workbench constitute right side pressure control assembly, both ensure the closed guiding accuracy of positioning ring seat and upper compression ring, also absorb impact force by buffer spring, right side down pressure can also be monitored, realize the accurate positioning of expansion ring, stable locking and safety protection.

Description

Technical Field

[0001] This utility model mainly relates to the field of crystal expansion machine technology, specifically to a feeding and positioning device for a crystal expansion machine. Background Technology

[0002] In semiconductor packaging processes, die expanders are key equipment for increasing the spacing after wafer dicing. The feeding and positioning accuracy of the die expander ring directly determines the die expansion quality. If the positioning is off or the locking is unstable, it can easily lead to uneven wafer stretching, edge damage, and even affect the accuracy of subsequent die mounting processes. Currently, die expander feeding and positioning mostly rely on manual alignment or simple mechanical limits. During the positioning process, the die expander ring position needs to be adjusted repeatedly, which is not only inefficient but also makes it difficult to ensure consistency.

[0003] Existing positioning devices often use a separate design for the upper pressure ring and the positioning ring seat. When picking up or putting down the expansion ring, the upper pressure ring must be completely removed, which is cumbersome and can easily cause damage to the expansion ring due to collision. In addition, the locking mechanism lacks pressure detection and feedback, which often causes deformation of the expansion ring due to excessive locking force or positioning deviation due to insufficient locking force. At the same time, there is a lack of effective buffer structure, and the impact force when closing the upper pressure ring can easily cause hidden damage to the wafer. Utility Model Content

[0004] 1. The technical problem to be solved by the utility model: This invention provides a feeding and positioning device for a crystal expander, which solves the technical problems existing in the background art.

[0005] 2. Technical Solution: To achieve the above objectives, the technical solution provided by this utility model is as follows: a feeding and positioning device for a crystal expansion machine, comprising a worktable, a positioning ring seat, and an upper pressure ring. A locking mechanism one and a locking mechanism two are respectively arranged around the positioning ring seat on the worktable. The upper pressure ring and the positioning ring seat are hinged together. Correspondingly positioned locking plates are provided on the upper pressure ring and the positioning ring seat. An ear plate handle is also provided on the side of the upper pressure ring opposite to the hinged side of the positioning ring seat. A guide post is provided at the lower end of the ear plate handle, and a buffer spring is sleeved on the guide post. The locking mechanism one and the locking mechanism two have the same structure, both including a linear slide, a movable locking block, and a telescopic cylinder. The locking plates are matched with the movable locking block.

[0006] Furthermore, the first locking mechanism and the second locking mechanism are respectively disposed at the front and rear ends of the positioning ring seat and embedded in the worktable.

[0007] Furthermore, the movable card block includes an upper pressure plate, a lower pressure plate, and two pressure sensors, with the upper pressure plate and the lower pressure plate having an arc surface on the side closest to the card plate.

[0008] Furthermore, the lower pressure plate is L-shaped, and a vertical sliding groove is provided on its vertical surface, in which the two pressure sensors are embedded.

[0009] Furthermore, one end of the upper pressure plate is provided with a sliding block that passes through the vertical sliding groove, and one end of the sliding block is connected to a pressing plate. The upper pressure plate, the sliding block, and the pressing plate are integrally formed.

[0010] Furthermore, the lower end of the telescopic cylinder is slidably connected to the linear slide via a slider, and the lower end of the pressing plate is fixedly connected to the telescopic end of the telescopic cylinder.

[0011] Furthermore, the worktable is provided with mounting grooves and mounting holes, and a pressure sensor is installed in the mounting holes. The two linear slides are respectively embedded in the mounting grooves.

[0012] 3. Beneficial effects: Compared with the prior art, the technical solution provided by this utility model has the following advantages: This utility model is reasonably designed. By setting two locking mechanisms, it can detect the locking pressure at the front and rear ends. At the same time, the guide column, buffer spring and pressure sensor in the mounting hole on the worktable form the right pressure control component. This not only ensures the closing guidance accuracy of the positioning ring seat and the upper pressure ring, but also absorbs the impact force with the buffer spring and can monitor the downward pressure on the right side. The whole device realizes the precise positioning, stable locking and safety protection of the expansion ring, and has the advantages of convenient operation and adaptability.

[0013] It should be noted that the structures not described in this utility model are the same as or can be implemented using existing technology, and will not be elaborated here, as they do not involve the design points and improvement directions of this utility model. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the overall structure of this utility model from another angle; Figure 3 This is a schematic diagram of the workbench structure of this utility model; Figure 4 This is a partial structural schematic diagram of the present invention; Figure 5 This is a schematic diagram of the movable card block structure of this utility model; Figure 6 This is a schematic diagram of the movable card block structure from another angle of this utility model.

[0015] Figure label: 1. Workbench; 101. Mounting slot; 102. Mounting hole; 103. Pressure sensor two; 2. Positioning ring seat; 3. Upper pressure ring; 4. Ear plate handle; 5. Guide column; 6. Buffer spring; 7. Linear slide; 8. Movable locking block; 801. Upper pressure plate; 802. Lower pressure plate; 8021. Vertical sliding groove; 803. Pressure sensor one; 804. Sliding block; 805. Pressing plate; 9. Telescopic cylinder; 10. Locking plate. Detailed Implementation

[0016] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, which show several embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the utility model will be more thorough and complete.

[0017] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "page", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0019] In this utility model, unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," "fixed," "provided with," and "located in" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0020] See attached document Figure 1-6A feeding and positioning device for a crystal expansion machine includes a worktable 1, a positioning ring seat 2, and an upper pressure ring 3. A locking mechanism one and a locking mechanism two are respectively arranged around the positioning ring seat 2 on the worktable 1. The upper pressure ring 3 and the positioning ring seat 2 are hinged to each other. The upper pressure ring 3 and the positioning ring seat 2 are provided with corresponding clamping plates 10. The side of the upper pressure ring 3 opposite to the hinged side of the positioning ring seat 2 is also provided with an ear plate handle 4. The lower end of the ear plate handle 4 is provided with a guide post 5. A buffer spring 6 is sleeved on the guide post 5. The locking mechanism one and the locking mechanism two have the same structure, both including a linear slide 7, a movable clamping block 8, and a telescopic cylinder 9. The clamping plate 10 is matched with the movable clamping block 8.

[0021] The worktable 1 has a mounting slot 101 for embedding the linear slide 7 of the locking mechanism, and a mounting hole 102 for embedding the pressure sensor 103. The sensing surface is flush with the upper surface of the worktable 1 and is used to detect the downward pressure of the upper pressure ring 3. The bottom of the worktable 1 has a mounting screw hole for fixing to the crystal expansion machine frame to ensure overall stability.

[0022] The positioning ring seat 2 is ring-shaped, and the left side is hinged to the upper pressure ring 3, so that the upper pressure ring 3 can be flipped around the hinge for easy placement and removal of the expansion ring; the front and rear ends are symmetrically welded with clamping plates 10; the lower end face of the upper pressure ring 3 is pasted with a fluororubber pad to avoid scratching the expansion ring, and the front and rear ends are also welded with corresponding clamping plates 10 of the positioning ring seat 2; the right side is welded with an ear plate handle 4 for easy manual flipping operation.

[0023] The guide post 5 at the lower end of the ear plate handle 4, the buffer spring 6, and the pressure sensor 103 together form the right-side pressure control between the upper pressure plate 3 and the positioning ring seat 2. The guide post 5 is welded to the lower end of the ear plate handle 4 and is clearance-fitted with the mounting hole 102 of the worktable 1 to ensure the guiding accuracy when the upper pressure ring 3 is closed. The buffer spring 6 is sleeved on the outside of the guide post 5, with its upper end in contact with the lower end face of the ear plate handle 4 and its lower end in contact with the upper surface of the worktable 1. It absorbs the impact force when the upper pressure ring 3 is closed through compression deformation. The pressure sensor 103 is embedded in the bottom of the mounting hole 102, with its sensing surface in cooperation with the lower end face of the guide post 5 to detect the downward pressure of the upper pressure ring 3 on one side of the positioning ring seat 2.

[0024] Locking mechanism one and locking mechanism two are respectively set at the front and rear ends of the positioning ring seat 2 and embedded in the worktable 1. They are used to lock the upper pressure ring 3 and the positioning ring seat 2. Each locking mechanism includes a linear slide 7, a movable locking block 8 and a telescopic cylinder 9. The linear slide 7 is fixed in the mounting groove 101. The upper surface of the slide block is flush with the upper surface of the worktable 1, providing horizontal movement power for the movable locking block 8. The telescopic cylinder 9 is a miniature cylinder. The cylinder body is bolted to the slide block of the linear slide 7. It is used to drive the upper pressure plate 801 in the movable locking block 8 to make vertical movements. The movable locking block 8 consists of an upper pressure plate 801, a lower pressure plate 802 and two pressure sensors 803, which are used to dock with the locking plate 10 to achieve locking.

[0025] The lower pressure plate 802 is L-shaped, with a vertical sliding groove 8021 on its vertical surface. Two pressure sensors 803 are embedded in the vertical sliding groove 8021, with their sensing surfaces facing upwards and contacting the lower end face of the sliding block 804. The upper pressure plate 801 is an L-shaped plate, with a sliding block 804 and a pressing plate 805 integrally formed at one end. The sliding block 804 passes through the vertical sliding groove 8021 and is in clearance fit with the groove wall. The lower end face of the pressing plate 805 is fixed to the telescopic end of the telescopic cylinder 9 by threads. The telescopic cylinder 9 descends, causing the upper pressure plate 801 to descend as a whole, which is used to lock the corresponding clamping plates 10 on the upper pressure ring 3 and the positioning ring seat 2. The pressure sensor 803 is contacted by the downward pressure of the sliding block 804 to detect the downward pressure of the upper pressure ring 3 on the front and rear ends of the positioning ring seat 2.

[0026] The upper pressure plate 801 and the lower pressure plate 802 have curved surfaces on the side near the clamping plate 10. The curvature matches the inner side of the clamping plate 10, ensuring a tighter fit and more stable locking.

[0027] In summary, the feeding and positioning device of this crystal expander is supported by the worktable 1, and integrates the positioning ring seat 2 and the upper pressure ring 3 to form a positioning structure. The two are hinged on the left side to achieve flipping and opening, which facilitates the loading and unloading of the crystal expander ring. The upper pressure ring 3 and the positioning ring seat 2 are locked together by the locking plates 10 symmetrically arranged at the front and rear ends, and by the locking mechanism 1 and locking mechanism 2 embedded in the worktable 1. The locking mechanism is powered by the horizontal movement of the linear slide table 7, and the telescopic cylinder 9 drives the movable block 8 to move vertically. The upper pressure plate 801 and the lower pressure plate 802 of the movable block 8 are connected by an arc The surface is attached to the card plate 10, and the front and rear locking pressure is detected by the pressure sensor 803 to ensure stable locking. At the same time, the guide post 5 on the right side of the upper pressure ring 3, the buffer spring 6, and the pressure sensor 103 in the mounting hole 102 of the worktable 1 constitute the right-side pressure control component. The guide post 5 ensures the closed guiding accuracy, the buffer spring 6 absorbs the impact force, and the pressure sensor 103 monitors the right-side downward pressure. The whole device realizes the precise positioning, stable locking and safety protection of the expansion ring, and has the advantages of convenient operation and adaptability.

[0028] The above-described embodiments are merely illustrative of certain implementations of this utility model, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A feeding and positioning device for a crystal expander, comprising a worktable (1), a positioning ring seat (2), and an upper pressure ring (3), characterized in that: Locking mechanism one and locking mechanism two are respectively arranged around the positioning ring seat (2) on the workbench (1). The upper pressure ring (3) and the positioning ring seat (2) are hinged to each other. The upper pressure ring (3) and the positioning ring seat (2) are provided with corresponding card plates (10). The upper pressure ring (3) and the positioning ring seat (2) are also provided with ear plate handle (4) on the side opposite to the hinge side of the positioning ring seat (2). The lower end of the ear plate handle (4) is provided with guide post (5). The guide post (5) is fitted with buffer spring (6). The locking mechanism one and the locking mechanism two have the same structure, both including linear slide (7), movable card block (8) and telescopic cylinder (9). The card plate (10) is matched with the movable card block (8).

2. The feeding and positioning device for a crystal expander according to claim 1, characterized in that: The first locking mechanism and the second locking mechanism are respectively located at the front and rear ends of the positioning ring seat (2) and are embedded in the worktable (1).

3. The feeding and positioning device for a crystal expander according to claim 1, characterized in that: The movable card block (8) includes an upper pressure plate (801), a lower pressure plate (802) and two pressure sensors (803). The upper pressure plate (801) and the lower pressure plate (802) are curved on the side near the card plate (10).

4. The feeding and positioning device for a crystal expander according to claim 3, characterized in that: The lower pressure plate (802) is L-shaped, and a vertical sliding groove (8021) is provided on its vertical surface. Two pressure sensors (803) are embedded in the vertical sliding groove (8021).

5. The feeding and positioning device for a crystal expander according to claim 4, characterized in that: The upper pressure plate (801) has a sliding block (804) that passes through the vertical sliding groove (8021) at one end, and a pressing plate (805) is connected to one end of the sliding block (804). The upper pressure plate (801), the sliding block (804) and the pressing plate (805) are integrally formed.

6. The feeding and positioning device for a crystal expander according to claim 5, characterized in that: The lower end of the telescopic cylinder (9) is slidably connected to the linear slide (7) via a slider, and the lower end of the pressure plate (805) is fixedly connected to the telescopic end of the telescopic cylinder (9).

7. The feeding and positioning device for a crystal expander according to claim 1, characterized in that: The workbench (1) is provided with a mounting groove (101) and a mounting hole (102). A pressure sensor (103) is provided in the mounting hole (102). The two linear slides (7) are respectively embedded in the mounting groove (101).

Images