support structure

Abstract

The application discloses a supporting structure and belongs to the field of wafer bonding. The supporting structure comprises an elastic pad with a protrusion, a rod body with a cavity, and a protruding part formed on the inner wall of the cavity. The protruding part has a sliding groove penetrating through the protruding part along a first direction and a clamping groove with an opening facing the bottom wall of the cavity. The protrusion is adapted to be in sliding fit with the sliding groove and is clamped in the clamping groove. A supporting part is arranged on the cavity wall away from the elastic pad and is in abutment with the elastic pad. The protrusion structure of the elastic pad, the sliding groove and the clamping groove structure of the rod body are arranged, so that the elastic pad is facilitated to slide along the sliding groove and is clamped in the clamping groove. The clamping groove limits the movement of the elastic pad, avoids the falling of the elastic pad, the supporting part in the cavity supports the elastic pad, the supporting structure has high bearing capacity, and has good working stability.

Description

Technical Field

[0001] This application belongs to the field of wafer bonding, and particularly relates to a support structure. Background Technology

[0002] In the wafer fabrication process, two wafers need to be bonded together to form a bonded wafer. The pre-bonding module of the machine is equipped with pins for support. During the bonding process, the pins often fall off, causing the wafer bonding to fail. Utility Model Content

[0003] This application aims to solve at least one of the technical problems existing in the related art. To this end, this application proposes a support structure in which the elastic pad is not easily detached.

[0004] Firstly, this application provides a support structure, including: Elastic pad with raised sections; The rod has a cavity, the inner wall of which forms a protrusion. The protrusion has a groove that extends through the protrusion in a first direction and a slot that opens toward the bottom wall of the cavity. The protrusion is adapted to slide with the groove and is engaged with the slot. A support portion is provided on the side wall of the cavity away from the elastic pad, and the support portion abuts against the elastic pad.

[0005] According to the support structure of this application, by setting the protruding structure of the elastic pad, the sliding groove and the slot structure of the rod, the elastic pad can slide along the sliding groove and be inserted into the slot. The slot restricts the movement of the elastic pad and prevents the elastic pad from falling off. The support part in the cavity supports the elastic pad. The support structure has a strong load-bearing capacity and good working stability.

[0006] According to one embodiment of this application, the elastic pad includes an end and a rod, the end being connected to the rod on the side facing the cavity, the rod being fitted onto the rod, and the protrusion being located on the outer wall of the rod.

[0007] According to the support structure of this application, by setting the structure of the elastic pad, the elastic pad and the rod are installed and matched, and the rod provides good support for the elastic pad.

[0008] According to one embodiment of this application, when the protrusion abuts against the groove wall near the elastic pad, the end facing the cavity is spaced apart from the rod.

[0009] According to the support structure of this application, when the protrusion is set close to the elastic pad and abuts against the groove wall, the distance from the lower end of the elastic pad to the cavity opening is less than the length of the rod, so that the rod part is exposed outside the cavity when not under pressure, so as to improve the load-bearing capacity and buffering capacity of the support structure for heavy objects such as wafers.

[0010] According to one embodiment of this application, the support includes a spring assembly, and the elastic pad abuts against the spring assembly.

[0011] According to the support structure of this application, by setting the support part as a spring assembly, the load-bearing capacity and buffering capacity of the support structure are improved, and the support structure is easy to reset.

[0012] According to one embodiment of this application, the spring assembly includes a spring and a spring washer, the spring abutting against the cavity wall on the side of the cavity away from the elastic pad, and the two sides of the spring washer abutting against the elastic pad and the spring, respectively.

[0013] According to the support structure of this application, by setting the composition and matching method of the spring assembly, the service life of the support structure is improved while ensuring the load-bearing capacity and buffering capacity of the support structure.

[0014] According to one embodiment of this application, the elastic pad includes an end portion and a rod portion, the end portion being connected to the rod portion on the side facing the cavity, one end of the rod portion abutting against the support portion, the end portion being made of an elastic material, and the rod portion being made of a rigid material.

[0015] According to the support structure of this application, the structure and material of the elastic pad are provided to facilitate the support and cushioning of the load.

[0016] According to one embodiment of this application, the slot and the slide are spaced apart circumferentially along the protrusion.

[0017] According to the support structure of this application, the slots and grooves are spaced apart circumferentially along the protrusion. When the protrusion slides along the groove, it has good guiding properties, and when the protrusion is engaged in the slot, it is firmly engaged and not easy to slip out.

[0018] According to one embodiment of this application, the support portion includes a boss connected to the inner wall of the cavity, the slot communicating with the slide groove, the protrusion slidingly engaging with the slide groove and the slot, and when the side of the protrusion near the elastic pad abuts against the wall of the slot, the elastic pad abuts against the boss.

[0019] According to the support structure of this application, by providing a boss on the cavity wall away from the elastic pad, it is easy for the protrusion to abut against the boss when it slides into the cavity along the slide groove, and slide along the boss surface to the slot for engagement, which has good guiding and support properties.

[0020] According to one embodiment of this application, the elastic pad includes an end portion and a rod portion, the end portion being connected to the rod portion on the side facing the cavity, one end of the rod portion abutting against the support portion, and both the end portion and the rod portion being made of elastic material.

[0021] According to the support structure of this application, the structure and material of the elastic pad are provided to facilitate the support and cushioning of the load.

[0022] According to one embodiment of this application, the protrusions are multiple, and the multiple protrusions are circumferentially spaced on the elastic pad.

[0023] According to the support structure of this application, by setting the number and arrangement of protrusions, the stability of the elastic pad under force is improved, and it is not easy to deviate or fall off.

[0024] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0025] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the support structure provided in the embodiments of this application; Figure 2 This is a cross-sectional view of the support structure provided in the embodiments of this application; Figure 3 This is one of the cross-sectional views of the rod provided in the embodiments of this application; Figure 4 This is a second sectional view of the rod provided in the embodiments of this application; Figure 5 This is a schematic diagram of the structure of the elastic pad provided in the embodiments of this application; Figure 6 This is a schematic diagram of the structure of the spring assembly provided in the embodiments of this application; Figure 7 This is the third sectional view of the rod provided in the embodiments of this application.

[0026] Figure label: Support structure 1; 10 elastic pad, 11 protrusion, 12 end, 13 rod; Rod body 20, cavity 21, inner wall 211, bottom wall 2111, side wall 2112, protrusion 22, slide groove 221, slot 222, support part 23, spring assembly 231, spring 2311, spring washer 2312, boss 232. First direction z1. Detailed Implementation

[0027] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0028] The principle of the support structure 1 proposed in this application will be explained in detail below: In related technologies, during the wafer fabrication process, two wafers need to be bonded to form a bonded wafer. The pre-bonding module of the machine is equipped with pins for support. During bonding, the pins often fall off, causing the wafer bonding to fail.

[0029] To address this technical problem, this application provides a support structure 1 for supporting wafers, as described below. Figures 1-7 The support structure 1 according to an embodiment of this application is described.

[0030] like Figure 1 As shown, the support structure 1 in this embodiment includes: an elastic pad 10 and a rod 20.

[0031] In this embodiment, the support structure 1 is used to align and support the wafer during the wafer bonding process.

[0032] like Figure 5 As shown, the elastic pad 10 has protrusions 11.

[0033] In this embodiment, the protrusion 11 is arranged along the circumference of the elastic pad 10, and the size and shape of the protrusion 11 can be set according to the specific use case.

[0034] like Figure 4 As shown, the rod 20 has a cavity 21, and a protrusion 22 is formed on the inner wall of the cavity 21.

[0035] In this embodiment, the rod 20 forms a cavity 21 by opening a hole on one side. The inner wall of the cavity 21 includes two parts, one part forming a protrusion 22, and the wall thickness of the protrusion 22 is greater than the wall thickness of the other part of the cavity 21.

[0036] like Figure 3 and Figure 4 As shown, the protrusion 22 has a sliding groove 221 and a slot 222.

[0037] The groove 221 passes through the protrusion 22 along the first direction z1, and the opening of the slot 222 faces the bottom wall 2111.

[0038] In this embodiment, the first direction z1 is the height direction of the rod 20. The inner wall 211 of the cavity 21 includes a bottom wall 2111 and a side wall 2112. The protrusion 22 is provided near the opening of the cavity 21. The sliding groove 221 passes through the protrusion 22 along the first direction z1. The slot 222 is provided at the bottom end of the protrusion 22, and the opening of the slot 222 faces the bottom wall 2111 of the cavity 21, that is, the opening of the slot 222 faces downward.

[0039] The protrusion 11 is adapted to slide with the groove 221, and the protrusion 11 is engaged with the groove 222.

[0040] In this embodiment, the protrusion 11 of the elastic pad 10 can cooperate with the slide groove 221. The protrusion 11 slides along the slide groove 221 into the cavity 21 and rotates into the slot 222, where the protrusion 11 is engaged with the slot 222.

[0041] like Figure 3 As shown, a support portion 23 is provided on the side wall of the cavity 21 away from the elastic pad 10, and the support portion 23 abuts against the elastic pad 10.

[0042] In this embodiment, a support portion 23 is provided on the side wall of the cavity 21 away from the elastic pad 10. That is, a support portion 23 is provided on the side wall of the cavity 21 away from the elastic pad 10. The protrusion 11 of the elastic pad 10 slides into the cavity 21 along the slide groove 221 and then abuts against and is supported by the support portion 23. The support portion 23 plays a limiting role. At the same time, there is elastic support between the elastic pad 10 and the support portion 23, which can prevent the elastic pad 10 from falling off under force when in contact with the wafer.

[0043] In related technologies, during the wafer fabrication process, two wafers need to be bonded to form a bonded wafer. The pre-bonding module of the machine is equipped with pins for support. The pins and the carrier stage are only physically nested. During bonding, due to the poor cleanliness of the back side of the wafer, the elastic pads of the pins often fall off under the action of wafer adhesion or vacuum adsorption, resulting in wafer bonding failure.

[0044] In this embodiment, the support structure 1 has an elastic pad 10 with a protrusion 11 along its circumference. The inner wall of the cavity 21 of the rod 20 forms a protrusion 22. The protrusion 22 has a groove 221 that extends from the opening of the cavity 21 towards the side of the cavity 21 away from the elastic pad 10, penetrating the protrusion 22. The protrusion 11 of the elastic pad 10 slides into the groove 221, allowing the elastic pad 10 to slide into the cavity 21 along the height direction of the rod 20, providing good guidance. After sliding downwards and abutting against the support part 23, the elastic pad 10 rotates and engages with the slot 222. The slot 222 opens downwards, allowing the elastic pad 10 to slide into the cavity 21. The protrusions 11 of the elastic pad 10 apply a downward force to prevent the elastic pad 10 from falling out of the cavity 21. At the same time, the support part 23 provides an upward force, which provides good support for the elastic pad 10. When the support structure 1 supports the wafer, the weight of the wafer generates a downward force on the elastic pad 10, and the support part 23 provides a reverse force to support the elastic pad 10. When the adhesion force and vacuum adsorption force of the wafer generate an upward force on the elastic pad 10, the slot 222 generates a reverse force on the protrusions 11, which restricts the movement of the elastic pad 10. The elastic pad 10 is not easy to fall off, and the working stability of the support structure 1 is good.

[0045] According to the support structure 1 provided in the embodiment of this application, by setting the protrusion 11 structure of the elastic pad 10, the sliding groove 221 and the slot 222 structure of the rod 20, the elastic pad 10 can slide along the sliding groove 221 and be inserted into the slot 222. The slot 222 restricts the movement of the elastic pad 10 and prevents the elastic pad 10 from falling off. The support part 23 in the cavity 21 supports the elastic pad 10. The support structure 1 has a strong load-bearing capacity and good working stability.

[0046] In some embodiments, such as Figure 5 As shown, the elastic pad 10 may include an end portion 12 and a rod portion 13.

[0047] The cross-sections of the end portion 12 and the rod portion 13 can be circular, rectangular, or other shapes. The cross-sectional shapes of the end portion 12 and the rod portion 13 can be the same or different.

[0048] In this embodiment, the cross-sectional shape of both end 12 and rod 13 is circular, that is, both end 12 and rod 13 are columnar bodies. When under pressure, the radial and circumferential stress distribution is consistent, avoiding stress concentration. Furthermore, when rod 13 is installed in cavity 21, the sealing performance is good.

[0049] The end portion 12 is connected to the rod portion 13 on the side facing the cavity 21.

[0050] The end 12 and the rod 13 can be connected by adhesive, metal clips or clamps, or they can be integrally formed.

[0051] The shaft 20 is fitted onto the shaft 13, and the protrusion 11 is located on the outer wall of the shaft 13.

[0052] In this embodiment, the protrusion 11 is arranged circumferentially on the outer wall of the rod portion 13. The rod portion 13 of the elastic pad 10 is fitted into the cavity 21 of the rod body 20. The end 12 of the elastic pad 10 is located outside the cavity 21, and the end 12 can abut against the outer wall of the rod body 20 at the opening of the cavity 21 when compressed. The rod body 20 applies an upward force to the bottom surface of the end 12, providing good support.

[0053] According to the support structure 1 provided in the embodiment of this application, by setting the structure of the elastic pad 10, the elastic pad 10 and the rod 20 are installed and matched, and the rod 20 provides good support for the elastic pad 10.

[0054] In some embodiments, such as Figure 1 and Figure 2 As shown, when the side of the protrusion 11 near the elastic pad 10 abuts against the groove wall of the slot 222, the side of the end 12 facing the cavity 21 is spaced apart from the rod 20.

[0055] That is, when the side of the protrusion 11 close to the elastic pad 10 abuts against the groove wall of the slot 222, the distance from the lower end of the elastic pad 10 to the opening of the cavity 21 is less than the length of the rod 13.

[0056] In this embodiment, when the protrusion 11 is engaged with the slot 222 and the side of the protrusion 11 near the elastic pad 10 (i.e. the upper wall of the protrusion 11) abuts against the wall of the slot 222, the distance from the lower end of the elastic pad 10 to the opening of the cavity 21 is less than the length of the rod 13, thereby forming a certain gap between the end 12 facing the cavity 21 and the rod 20.

[0057] When the support part 23 is made of elastic material, the end 12 is compressed and the rod 13 moves downward. The gap between the side of the end 12 facing the cavity 21 and the rod 20 gradually decreases, and the end 12 will not immediately abut against the outer wall of the rod 20. When bearing heavy objects such as wafers, the buffering effect is better and the elastic pad 10 is not easy to pop out.

[0058] It is understandable that when the distance from the lower end of the elastic pad 10 to the opening of the cavity 21 is less than the length of the rod 13, a portion of the rod 13 protrudes outside the cavity 21 when the protrusion 11 is fully inserted into the slot 222.

[0059] According to the support structure 1 provided in the embodiment of this application, when the side of the protrusion 11 close to the elastic pad 10 abuts against the groove wall of the slot 222, the distance from the lower end of the elastic pad 10 to the opening of the cavity 21 is less than the length of the rod 13, so that when not under pressure, part of the rod 13 is exposed outside the cavity 21, so as to improve the load-bearing capacity and buffering capacity of the support structure 1 for heavy objects such as wafers.

[0060] In some embodiments, such as Figure 3 and Figure 6As shown, the support portion 23 may include a spring assembly 231.

[0061] The elastic pad 10 abuts against the spring assembly 231.

[0062] In this embodiment, the spring assembly 231 is installed on the cavity wall of the cavity 21 away from the elastic pad 10. The diameter of the spring assembly 231 is adapted to the diameter of the cavity 21. The protrusion 11 of the elastic pad 10 slides downward along the slide groove 221. After the bottom surface of the rod portion 13 of the elastic pad 10 abuts against the support portion 23, the elastic pad 10 is rotated, and the protrusion 11 engages with the slot 222. When the end 12 is pressed, due to the elasticity of the spring assembly 231, elastic deformation occurs, and the rod portion 13 can move downward. The end 12 will not immediately abut against the outer wall of the rod 20. The buffering effect is better when bearing heavy objects such as wafers, and the elastic pad 10 is not easy to pop out. After the pressure on the end 12 disappears, the spring assembly 231 returns to its original shape and pushes the elastic pad 10 to the initial state, completing the reset.

[0063] It should be noted that when the protrusion 11 of the elastic pad 10 is engaged in the slot 222, the elastic pad 10 can just abut against the spring assembly 231, or it can compress the spring assembly 231, causing the spring assembly 231 to undergo elastic deformation.

[0064] According to the support structure 1 provided in the embodiments of this application, by setting the support part 23 as a spring assembly 231, the load-bearing capacity and buffering capacity of the support structure 1 are improved, and the support structure 1 is easy to reset.

[0065] In some embodiments, such as Figure 6 As shown, the spring assembly 231 may include a spring 2311 and a spring washer 2312.

[0066] Spring washer 2312 can be selected from open wave washer, butterfly washer or spiral locking washer, etc.

[0067] Spring 2311 abuts against the cavity wall of cavity 21 on the side away from elastic pad 10, and spring washer 2312 abuts against elastic pad 10 and spring 2311 on both sides respectively.

[0068] In this embodiment, one end of the spring 2311 abuts against the cavity wall of the cavity 21 away from the elastic pad 10, and the other end abuts against the spring washer 2312. The spring washer 2312 is located between the elastic pad 10 and the spring 2311. The elastic pad 10 and the spring washer 2312 are in surface contact. Compared with the point contact between the elastic pad 10 and the spring 2311, the contact area is larger, the load distribution is more uniform, the contact stress is reduced, and the wear of the spring 2311 can be reduced. The service life of the support structure 1 is longer.

[0069] According to the support structure 1 provided in the embodiments of this application, by setting the composition and cooperation of the spring assembly 231, the service life of the support structure 1 is improved while ensuring the load-bearing capacity and buffering capacity of the support structure 1.

[0070] In some embodiments, such as Figure 5 As shown, the elastic pad 10 may include an end portion 12 and a rod portion 13.

[0071] The cross-sections of the end portion 12 and the rod portion 13 can be circular, rectangular, or other shapes. The cross-sectional shapes of the end portion 12 and the rod portion 13 can be the same or different.

[0072] In this embodiment, the cross-sectional shape of both end 12 and rod 13 is circular, that is, both end 12 and rod 13 are columnar bodies. When under pressure, the radial and circumferential stress distribution is consistent, avoiding stress concentration. Furthermore, when rod 13 is installed in cavity 21, the sealing performance is good.

[0073] The end 12 is connected to the rod 13 on the side facing the cavity 21, and one end of the rod 13 abuts against the support 23.

[0074] The end 12 and the rod 13 can be connected by adhesive, metal clips or clamps, or they can be integrally formed.

[0075] In this embodiment, the protrusion 11 is arranged circumferentially on the outer wall of the rod portion 13. The rod portion 13 of the elastic pad 10 is fitted into the cavity 21 of the rod body 20. The end 12 of the elastic pad 10 is located outside the cavity 21, and the end 12 can abut against the outer wall of the rod body 20 at the opening of the cavity 21 when compressed. The rod body 20 applies an upward force to the bottom surface of the end 12, providing good support.

[0076] The end portion 12 is made of an elastic material, and the rod portion 13 is made of a rigid material.

[0077] The end 12 can be made of elastic rubber materials such as natural rubber, styrene-butadiene rubber, TPV (thermoplastic vulcanizate) or TPU (thermoplastic polyurethane).

[0078] The rod 13 can be made of hard rubber materials such as high-sulfur vulcanized natural rubber, high-sulfur vulcanized styrene-butadiene rubber, or high-sulfur vulcanized nitrile rubber.

[0079] In this embodiment, the end portion 12 is made of an elastic material, which can bear and buffer the load (wafer, etc.). The rod portion 13 is made of a rigid material, which has good support. At the same time, when the rod portion 13 compresses the spring 2311, it can transmit the force downwards well. The rod portion 13 and the spring assembly 231 work together to buffer the load (wafer, etc.).

[0080] According to the support structure 1 provided in the embodiments of this application, the structure and material of the elastic pad 10 are provided to facilitate the support and buffering of the load.

[0081] In some embodiments, such as Figure 3 As shown, the card slot 222 and the slide groove 221 can be set at intervals.

[0082] The slot 222 and the slide 221 can be spaced apart along the circumference of the protrusion 22.

[0083] In this embodiment, the protrusion 11 is circumferentially disposed on the outer wall of the rod portion 13. The rod portion 13 of the elastic pad 10 is fitted inside the cavity 21 of the rod body 20. The end portion 12 of the elastic pad 10 is located outside the cavity 21. The spring assembly 231 is installed on the cavity wall of the cavity 21 away from the elastic pad 10. The diameter of the spring assembly 231 is adapted to the diameter of the cavity 21. The protrusion 11 of the elastic pad 10 slides down along the slide groove 221 to the outside of the slide groove 221. After the bottom surface of the rod portion 13 of the elastic pad 10 abuts against the support portion 23, the elastic pad 10 is rotated to the bottom of the slot 222. The protrusion 11 is raised upward and engages with the slot 222. The slot 222 and the slide groove 221 are spaced apart, and the engagement is stable. The protrusion 11 is not easy to slide out along the slide groove 221.

[0084] For example, when the protrusion 11 of the elastic pad 10 slides down along the slide groove 221 to outside the slide groove 221, the upper surface of the protrusion 11 can fit against the lower surface of the protrusion 22. The protrusion 11 rotates along the lower surface of the protrusion 22, causing the elastic pad 10 to move below the slot 222. Then the protrusion 11 is lifted up and engages with the slot 222. The guiding performance is good and it is easy to assemble.

[0085] According to the support structure 1 provided in the embodiment of this application, the slot 222 and the slide groove 221 are arranged circumferentially along the protrusion 22. When the protrusion 11 slides along the slide groove 221, the guidance is good, and when the protrusion 11 is engaged in the slot 222, the engagement is stable and it is not easy to slip out.

[0086] In some embodiments, such as Figure 7 As shown, the support portion 23 may include a boss 232.

[0087] The boss 232 is connected to the inner wall of the cavity 21.

[0088] In this embodiment, the boss 232 extends inward along the inner wall of the cavity 21, and the boss 232 forms a ring-shaped structure with a hole in the middle.

[0089] The slot 222 is connected to the slide 221, and the protrusion 11 slides in conjunction with the slide 221 and the slot 222.

[0090] In this embodiment, the slot 222 and the slide groove 221 are connected to form an L-shaped groove, and the protrusion 11 can slide into the slot 222 after sliding along the slide groove 221.

[0091] When the side of the protrusion 11 closest to the elastic pad 10 abuts against the groove wall of the slot 222, the elastic pad 10 abuts against the boss 232.

[0092] In this embodiment, the protrusion 11 is circumferentially disposed on the outer wall of the rod portion 13. The rod portion 13 of the elastic pad 10 is fitted into the cavity 21 of the rod body 20. The end portion 12 of the elastic pad 10 is located outside the cavity 21. The protrusion 11 of the elastic pad 10 slides down along the slide groove 221 until it contacts the boss 232. After the bottom surface of the rod portion 13 of the elastic pad 10 abuts against the support portion 23, the elastic pad 10 is rotated and slid into the slot 222 for engagement.

[0093] In some embodiments, the boss 232 may be a columnar structure, and the boss 232 forms the cavity wall of the cavity 21 away from the elastic pad 10.

[0094] According to the support structure 1 provided in the embodiment of this application, a boss 232 is provided on the side wall of the cavity 21 away from the elastic pad 10, so that when the protrusion 11 slides along the slide groove 221 into the cavity 21, it abuts against the boss 232 and slides along the platform of the boss 232 to the slot 222 for locking. The guiding performance is good and the support performance is good.

[0095] In some embodiments, such as Figure 5 As shown, the elastic pad 10 may include an end portion 12 and a rod portion 13.

[0096] The cross-sections of the end portion 12 and the rod portion 13 can be circular, rectangular, or other shapes. The cross-sectional shapes of the end portion 12 and the rod portion 13 can be the same or different.

[0097] In this embodiment, the cross-sectional shape of both end 12 and rod 13 is circular, that is, both end 12 and rod 13 are columnar bodies. When under pressure, the radial and circumferential stress distribution is consistent, avoiding stress concentration. Furthermore, when rod 13 is installed in cavity 21, the sealing performance is good.

[0098] The end 12 is connected to the rod 13 on the side facing the cavity 21, and one end of the rod 13 abuts against the support 23.

[0099] The end 12 and the rod 13 can be connected by adhesive, metal clips or clamps, or they can be integrally formed.

[0100] In this embodiment, the protrusion 11 is arranged circumferentially on the outer wall of the rod portion 13. The rod portion 13 of the elastic pad 10 is fitted into the cavity 21 of the rod body 20. The end 12 of the elastic pad 10 is located outside the cavity 21, and the end 12 can abut against the outer wall of the rod body 20 at the opening of the cavity 21 when compressed. The rod body 20 applies an upward force to the bottom surface of the end 12, providing good support.

[0101] Both end 12 and rod 13 are made of elastic material.

[0102] The end portion 12 and the rod portion 13 can be made of elastic rubber materials such as natural rubber, styrene-butadiene rubber, TPV (thermoplastic vulcanizate) or TPU (thermoplastic polyurethane). The materials used for the end portion 12 and the rod portion 13 can be the same or different.

[0103] In this embodiment, the end portion 12 and the rod portion 13 are made of elastic material, which can play a role in bearing and buffering the load (wafer, etc.), while the boss 232 is made of hard material and has good support.

[0104] According to the support structure 1 provided in the embodiments of this application, the structure and material of the elastic pad 10 are provided to facilitate the support and buffering of the load.

[0105] In some embodiments, such as Figure 5 As shown, there can be multiple protrusions 11.

[0106] The protrusion 11 can have two, three, four or more, and the specific number can be set according to the actual use.

[0107] Multiple protrusions 11 are spaced circumferentially on the elastic pad 10.

[0108] In this embodiment, there are two protrusions 11. The two protrusions 11 are evenly spaced around the rod portion 13 of the elastic pad 10, that is, the two protrusions 11 are symmetrically arranged about the rod portion 13. When the end 12 of the elastic pad 10 is pulled upward by vacuum adsorption force or adhesive force, the two protrusions 11 are engaged in the corresponding two slots 222, the force is even, and the elastic pad 10 is not easily biased.

[0109] According to the support structure 1 provided in the embodiments of this application, by setting the number and arrangement of protrusions 11, the stability of the elastic pad 10 under force is improved, and it is not easy to be biased or fall off.

[0110] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0111] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0112] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0113] In the description of this application, "multiple" means two or more.

[0114] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or the first and second features being in contact through another feature between them.

[0115] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0116] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0117] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A support structure, characterized in that, include: The elastic pad (10) has a protrusion (11); The rod (20) has a cavity (21), the inner wall (211) of the cavity (21) forms a protrusion (22), the protrusion (22) has a groove (221) that runs through the protrusion (22) along a first direction (z1) and a slot (222) that opens toward the bottom wall (2111) of the cavity (21), the protrusion (11) is adapted to slide with the groove (221) and the protrusion (11) is engaged with the slot (222), and a support (23) is provided on the side wall of the cavity (21) away from the elastic pad (10), the support (23) abuts against the elastic pad (10).

2. The support structure according to claim 1, characterized in that, The elastic pad (10) includes an end (12) and a rod (13). The end (12) is connected to the rod (13) on the side facing the cavity (21). The rod (20) is fitted onto the rod (13). The protrusion (11) is located on the outer wall of the rod (13).

3. The support structure according to claim 2, characterized in that, When the protrusion (11) abuts against the groove wall of the slot (222) on the side near the elastic pad (10), the end (12) is spaced apart from the rod (20) on the side facing the cavity (21).

4. The support structure according to claim 1, characterized in that, The support (23) includes a spring assembly (231), and the elastic pad (10) abuts against the spring assembly (231).

5. The support structure according to claim 4, characterized in that, The spring assembly (231) includes a spring (2311) and a spring washer (2312). The spring (2311) abuts against the cavity wall of the cavity (21) away from the elastic pad (10). The two sides of the spring washer (2312) abut against the elastic pad (10) and the spring (2311) respectively.

6. The support structure according to claim 4, characterized in that, The elastic pad (10) includes an end (12) and a rod (13). The end (12) is connected to the rod (13) on the side facing the cavity (21). One end of the rod (13) abuts against the support (23). The end (12) is made of elastic material, and the rod (13) is made of rigid material.

7. The support structure according to claim 4, characterized in that, The slot (222) and the slide (221) are spaced apart along the circumference of the protrusion (22).

8. The support structure according to claim 1, characterized in that, The support part (23) includes a boss (232), which is connected to the inner wall of the cavity (21). The slot (222) communicates with the slide (221). The protrusion (11) slides and engages with the slide (221) and the slot (222). When the side of the protrusion (11) near the elastic pad (10) abuts against the wall of the slot (222), the elastic pad (10) abuts against the boss (232).

9. The support structure according to claim 8, characterized in that, The elastic pad (10) includes an end (12) and a rod (13). The end (12) is connected to the rod (13) on the side facing the cavity (21). One end of the rod (13) abuts against the support (23). Both the end (12) and the rod (13) are made of elastic material.

10. The support structure according to any one of claims 1-9, characterized in that, The protrusions (11) are multiple, and the multiple protrusions (11) are circumferentially spaced on the elastic pad (10).

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