A rectification purification system of electronic-grade p-cresol for photoresist

Abstract

The utility model discloses a kind of electronic grade p-methylphenol rectification purification systems for photoresist, including control cabinet, reagent reaction tank, multistage filter, centrifugal pump, composite rectification tower, the control cabinet is electrically connected with reagent reaction tank, multistage filter, centrifugal pump, composite rectification tower, the reagent reaction tank is connected with multistage filter, composite rectification tower pipeline, the centrifugal pump is installed between pipeline, the utility model is by integration intelligent control's pretreatment unit and composite structure rectification tower, provide a kind of efficient stable electronic grade p-methylphenol rectification purification system.

Description

Technical Field

[0001] This utility model relates to a distillation and purification system for electronic-grade p-cresol used in photoresists. Background Technology

[0002] Electronic-grade m-p-cresol is a key monomer in the manufacture of high-end photoresist core resins, and its purity directly affects the resolution and performance of the photoresist. This material is widely used in the semiconductor chip manufacturing field.

[0003] Because the boiling points of the m- and p-cresol isomers are close, and the raw materials often contain trace impurities such as metal ions at the ppb level that are difficult to remove, the technical threshold for high-purity refining is extremely high.

[0004] Currently, domestic production mainly relies on imports, and existing refining processes generally suffer from problems such as low separation efficiency, incomplete removal of metal impurities, poor process stability, and high energy consumption. These issues make it impossible to reliably meet the stringent requirements of electronic-grade p-cresol for purity and impurity content, severely restricting the independent and controllable development of photoresist materials in my country. Utility Model Content

[0005] The purpose of this invention is to provide a distillation and purification system for electronic-grade p-cresol used in photoresists, in order to solve the above-mentioned technical problems.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A distillation purification system for electronic-grade p-cresol used in photoresists includes a control cabinet, a reagent reaction vessel, a multi-stage filter, a centrifugal pump, and a composite distillation column. The control cabinet is electrically connected to the reagent reaction vessel, the multi-stage filter, the centrifugal pump, and the composite distillation column. The reagent reaction vessel is connected to the multi-stage filter and the composite distillation column via pipelines. The centrifugal pump is installed between the pipelines.

[0007] Based on the above technical solution, the reagent reaction vessel includes a tank body, a pH sensor, a reagent inlet, an additive inlet, and a base. The pH sensor is fixedly connected to the top of the tank body, the reagent inlet is located on the upper left side of the tank body, the additive inlet is located on the upper left side of the tank body, and the base is fixedly connected to the bottom of the tank body.

[0008] Based on the above technical solution, the composite distillation column includes a column body, a condenser, distillation sieve plates, a reboiler, a packed distillation section, a reagent regulating valve, a concentration detector, and a bottom liquid outlet. The condenser is installed at the top of the column body, and multiple distillation sieve plates are equidistantly fixedly connected inside the lower part of the column body. The reboiler is installed on the upper outer side of the column body, the packed distillation section is installed inside the upper part of the column body, the reagent regulating valve is located on the right side of the column body, the concentration detector is located on the lower right side of the column body, and the bottom liquid outlet is located at the bottom of the column body.

[0009] Compared with the prior art, the present invention has the following advantages: The present invention provides a highly efficient and stable electronic-grade p-cresol distillation purification system by integrating an intelligently controlled pretreatment unit with a composite structure distillation column.

[0010] This system can precisely control the reaction environment and effectively remove metal ions and large particulate impurities during the pretreatment stage. Furthermore, during the distillation stage, it utilizes the unique structure of the composite distillation column 5—the lower sieve plate zone efficiently separates large molecular impurities, while the upper packed zone precisely separates isomers with similar boiling points—to achieve deep purification. Simultaneously, the real-time monitoring and dynamic feedback adjustment of the distillation process via the concentration detector 17 significantly improves separation accuracy and product stability. This solves the core problems of incomplete impurity removal and poor stability in existing technologies, and effectively reduces overall energy consumption, providing a reliable technical guarantee for the large-scale production of high-purity m-p-cresol in China. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the appearance and structure of this utility model.

[0012] Figure 2 This is a schematic diagram of the pharmaceutical reaction vessel of this utility model.

[0013] Figure 3 This is a schematic diagram of the composite distillation column structure of this utility model.

[0014] In the diagram: 1. Control cabinet, 2. Reagent reaction vessel, 3. Multistage filter, 4. Centrifugal pump, 5. Compound distillation column, 6. Tank body, 7. pH sensor, 8. Reagent inlet, 9. Additive inlet, 10. Base, 11. Column body, 12. Condenser, 13. Distillation sieve plate, 14. Reboiler, 15. Packed distillation section, 16. Reagent regulating valve, 17. Concentration detector, 18. Kettle liquid outlet. Detailed Implementation

[0015] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0016] like Figure 1-3 As shown, a distillation purification system for electronic-grade p-cresol used in photoresists includes a control cabinet 1, a reagent reaction tank 2, a multi-stage filter 3, a centrifugal pump 4, and a composite distillation column 5. The control cabinet 1 is electrically connected to the reagent reaction tank 2, the multi-stage filter 3, the centrifugal pump 4, and the composite distillation column 5. The reagent reaction tank 2 is connected to the multi-stage filter 3 and the composite distillation column 5 by pipelines. The centrifugal pump 4 is installed between the pipelines.

[0017] The reagent reaction vessel 2 includes a vessel body 6, a pH sensor 7, a reagent inlet 8, an additive inlet 9, and a base 10. The pH sensor 7 is fixedly connected to the top of the vessel body 6. The reagent inlet 8 is located on the upper left side of the vessel body 6. The additive inlet 9 is located on the upper left side of the vessel body 6. The base 10 is fixedly connected to the bottom of the vessel body 6.

[0018] The composite distillation column 5 includes a column body 11, a condenser 12, a distillation sieve plate 13, a reboiler 14, a packed distillation section 15, a reagent regulating valve 16, a concentration detector 17, and a bottom liquid outlet 18. The condenser 12 is installed on the top of the column body 11. Multiple distillation sieve plates 13 are equidistantly fixedly connected inside the lower part of the column body 11. The reboiler 14 is installed on the upper outer side of the column body 11. The packed distillation section 15 is installed inside the upper part of the column body 11. The reagent regulating valve 16 is located on the right side of the column body 11. The concentration detector 17 is located on the lower right side of the column body 11. The bottom liquid outlet 18 is located at the bottom of the column body 11.

[0019] The working principle of this utility model is as follows: When this utility model is in operation, the crude p-cresol raw material first enters the reagent reaction tank (2), and the treatment agent is added through the reagent inlet (8) and the additive inlet (9). The chemical reaction is carried out in the tank (6) to remove metal impurities. The reaction environment is monitored in real time by the pH sensor (7). After the pre-treatment, the material is filtered by the multi-stage filter (3) and then transported to the composite distillation column (5) by the centrifugal pump (4). In the column (11), the material first flows through the lower area composed of multiple distillation sieve plates (13). Under the heat provided by the reboiler (14), the high-boiling-point macromolecular impurities are separated and sink. The gas phase rises to the upper packed distillation section (15), and precise mass transfer separation is carried out by the surface of the high-efficiency packing to effectively remove isomer impurities (such as 2,6-xylenol) with boiling points very close to those of p-cresol. The top vapor of the column is condensed by the condenser (12) to obtain a high-purity product. Throughout the distillation process, the concentration detector (17) continuously monitors the concentration of key components and feeds the data back to the control cabinet (1). The control cabinet (1) then automatically adjusts the opening of the reagent regulating valve (16) (e.g., to replenish specific treatment agents) and the operating parameters of equipment such as the reboiler (14) to achieve intelligent closed-loop control of the distillation process. Finally, the impurity residue is discharged from the kettle liquid outlet (18).

[0020] The above description is a preferred embodiment of the present utility model. For those skilled in the art, any changes, modifications, substitutions and variations made to the implementation methods without departing from the principles and spirit of the present utility model, based on the teachings of the present utility model, still fall within the protection scope of the present utility model.

Claims

1. A distillation purification system for electronic-grade p-cresol used in photoresists, comprising a control cabinet (1), a reagent reaction vessel (2), a multi-stage filter (3), a centrifugal pump (4), and a composite distillation column (5), characterized in that: The control cabinet (1) is electrically connected to the reagent reaction tank (2), the multi-stage filter (3), the centrifugal pump (4), and the composite distillation column (5). The reagent reaction tank (2) is connected to the multi-stage filter (3) and the composite distillation column (5) via pipelines. The centrifugal pump (4) is installed between the pipelines.

2. The distillation purification system for electronic-grade p-cresol for photoresist according to claim 1, characterized in that: The reagent reaction vessel (2) includes a vessel body (6), a pH sensor (7), a reagent inlet (8), an additive inlet (9), and a base (10). The pH sensor (7) is fixedly connected to the top of the vessel body (6). The reagent inlet (8) is located on the upper left side of the vessel body (6). The additive inlet (9) is located on the upper left side of the vessel body (6). The base (10) is fixedly connected to the bottom of the vessel body (6).

3. The distillation purification system for electronic-grade p-cresol for photoresists according to claim 1, characterized in that: The composite distillation column (5) includes a column body (11), a condenser (12), a distillation sieve plate (13), a reboiler (14), a packed distillation section (15), a reagent regulating valve (16), a concentration detector (17), and a bottom liquid outlet (18). The condenser (12) is installed on the top of the column body (11). Multiple distillation sieve plates (13) are fixedly connected at equal intervals inside the lower part of the column body (11). The reboiler (14) is installed on the upper outer side of the column body (11). The packed distillation section (15) is installed inside the upper part of the column body (11). The reagent regulating valve (16) is located on the right side of the column body (11). The concentration detector (17) is located on the lower right side of the column body (11). The bottom liquid outlet (18) is located at the bottom of the column body (11).

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