A filtering device for electronic grade reagents

Abstract

The utility model provides a kind of electronic grade reagent's filtering device, belong to reagent filtering technical field, including filter tank and the filter mechanism being set to its inside, filter mechanism includes rotating frame being rotationally connected in filter tank inner cavity axis, the inner cavity of rotating frame is successively equipped with filter drum one and filter drum two from outside to inside, the inner wall of filter tank is also equipped with the cleaning assembly for cleaning filter drum one and filter drum two filter surface, cleaning assembly includes respectively setting in the inner wall of filter tank and close to the fixed cover of filter drum one and filter drum two outer arc surface, the opening of fixed cover is respectively and the filter surface of corresponding filter drum one and filter drum two sliding fit, and the outside end aperture of fixed cover is all equipped with liquid suction tube.The utility model cooperates with cleaning assembly by filter mechanism, realizes the on-line maintenance function of cleaning while filtering, effectively avoids the problem of efficiency reduction or interrupted operation caused by filter screen blockage of traditional filtering equipment.

Description

Technical Field

[0001] This utility model belongs to the field of reagent filtration technology, specifically relating to a filtration device for electronic-grade reagents. Background Technology

[0002] Electronic-grade reagents are widely used in high-precision fields such as semiconductors, liquid crystal displays and microelectronics. Their purity directly affects product quality and yield. During the production process, particulate impurities must be filtered out, making filtration a key process step. In existing technologies, the filtration of electronic-grade reagents mostly adopts fixed filter cartridges or multi-layer filter membrane structures, relying on driving the liquid to pass through the filter material to complete the purification. Although some equipment has backwashing function, it is still necessary to stop the filtration process for offline cleaning, which requires shutdown for maintenance and other problems, affecting continuous production. Utility Model Content

[0003] In view of this, the present invention provides a filtration device for electronic-grade reagents, which can achieve online maintenance function of filtering and cleaning simultaneously through the coordinated cooperation of the filtration mechanism and the cleaning component. This effectively avoids the problem of reduced efficiency or interruption of operation caused by filter screen clogging in traditional filtration equipment, significantly improves the stability and automation level of continuous and high-purity filtration of electronic-grade reagents, and extends the service life of the filter media and reduces the frequency of downtime maintenance.

[0004] To solve the above-mentioned technical problems, this utility model provides a filtration device for electronic-grade reagents, including a filter tank and a filtration mechanism disposed therein. The filtration mechanism includes a rotating frame rotatably connected to the axis of the inner cavity of the filter tank. The inner cavity of the rotating frame is provided with a first filter cylinder and a second filter cylinder sequentially arranged from the outside to the inside. The inner wall of the filter tank is also provided with a cleaning assembly for cleaning the filter surfaces of the first and second filter cylinders. The cleaning assembly includes fixed covers respectively disposed on the inner wall of the filter tank and close to the outer arc surfaces of the first and second filter cylinders. The openings of the fixed covers are respectively connected to the corresponding filter cylinders. The filter cartridge has a sliding fit between the two filter surfaces. Each outer end of the fixed cover has a suction tube installed in its opening. The suction tube penetrates the wall of the filter tank and extends to the outside. The outer end of the fixed cover has a sealing plate, which is slidably sealed to the annular clearance port on the rotating frame. This achieves online maintenance function of filtering and cleaning simultaneously, effectively avoiding the efficiency reduction or operation interruption caused by filter screen clogging in traditional filtration equipment. It significantly improves the stability and automation level of continuous and high-purity filtration of electronic-grade reagents, while extending the service life of the filter media and reducing the frequency of downtime maintenance. The filtration mechanism also includes a drain pipe located at the axis of the filter tank near the suction pipe. The drain pipe is rotatably connected to the corresponding rotating hole on the rotating frame. The drain pipe extends into the filter cylinder and has evenly distributed inlet holes on its outer arc surface, which ensures the uniformity of the filtration flow rate and the continuity of the draining process.

[0005] The filtration mechanism also includes a motor located at the axis of the filter tank away from the suction pipe. The motor is fixedly connected to the end of the rotating frame, thus providing a stable power source.

[0006] The cleaning assembly also includes several scrapers respectively set inside the fixed cover. The outer arc surfaces of filter cylinder one and filter cylinder two are in contact with the adjacent scrapers on the same side, thus realizing real-time physical cleaning of the filter surface.

[0007] Several scrapers are arranged along the axial direction of the filter tank, which means they can scrape along the entire length of the filter cartridge surface, enhancing the cleaning coverage and reducing blind spots.

[0008] The cleaning assembly also includes brush rollers that are rotatably connected to the fixed cover. The brush rollers contact the outer arc surfaces of the adjacent filter cylinders 1 and 2 on the same side, which can remove the fine impurities attached to the filter screen, thus enhancing the comprehensiveness and adaptability of the cleaning.

[0009] It also includes a transmission component. The outer end of the brush roller is equipped with a gear. The outer arc surface of the rotating frame near the end of the gear and the inner arc surface of the annular clearance are equipped with annular tooth grooves. The annular tooth grooves are respectively meshed with the adjacent gears on the same side. The fixed cover is provided with an installation port to provide rotation space for the gear. That is, the brush roller is self-driven and brushing is achieved through the meshing transmission of the gear and the annular tooth groove, without the need for an additional power source.

[0010] The fixed cover end is provided with an annular protective cover, which is rotatably connected to the outer arc surface of the rotating frame. The outer annular tooth groove is located inside the annular protective cover, which effectively protects the transmission components, prevents reagents from seeping in and affecting gear meshing, maintains a sealed environment, and ensures long-term stable operation of the equipment, thereby improving the safety and durability of the overall device.

[0011] The beneficial effects of the above-mentioned technical solution of this utility model are as follows: 1. The reagent to be filtered enters from the feed end of the filter tank and undergoes multi-stage filtration through the surfaces of filter cartridge one and filter cartridge two. Impurities are trapped on the filter surfaces. Simultaneously, the motor drives the rotating frame to rotate, which in turn drives filter cartridge one and filter cartridge two to rotate synchronously, while the fixed cover and its internal cleaning components remain stationary. The suction pipe continuously draws out the detached impurities through the negative pressure suction generated by the external pump, while simultaneously drawing out the filtered liquid from filter cartridges one and two in the reverse direction. This process achieves a reverse flushing effect on filter cartridges one and two, further improving the cleaning efficiency. The sliding sealing structure of the sealing plate and the annular clearance port ensures the airtightness of the cleaning area and prevents leakage. At the same time, the drain pipe is located at the other end of the filter tank and is rotatably connected to the rotating frame. The filtered liquid is discharged through the inlet hole on it to maintain continuous flow. This realizes the online maintenance function of filtering and cleaning at the same time. It effectively avoids the problem of reduced efficiency or interruption of operation caused by filter screen clogging in traditional filtration equipment. It significantly improves the stability and automation level of continuous and high-purity filtration of electronic-grade reagents, while extending the service life of filter media and reducing the frequency of downtime maintenance.

[0012] 2. Filter cylinder one and filter cylinder two rotate synchronously, while the fixed cover and its internal cleaning components remain stationary. This causes the outer arc surfaces of filter cylinder one and filter cylinder two to move relative to the scraper and brush roller, thereby achieving mechanical scraping and brushing cleaning of the filter surface and preventing filter pore blockage.

[0013] 3. The annular protective cover can provide safety protection for the outer annular tooth groove, preventing the reagent liquid from corroding it. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the main structure of a filtration device for electronic-grade reagents according to this utility model; Figure 2 This is a partial cross-sectional view of the present invention. Figure 3 This is a cross-sectional structural diagram of the present invention; Figure 4 This is an enlarged structural diagram of point A in this utility model; Figure 5 This is an enlarged structural diagram of section B of the present invention.

[0015] Explanation of reference numerals in the attached drawings: 100, filter tank; 200, rotating frame; 201, filter cylinder one; 202, filter cylinder two; 203, drain pipe; 204, inlet hole; 205, motor; 300, fixed cover; 301, suction pipe; 302, sealing plate; 303, scraper; 304, brush roller; 400, gear; 401, annular tooth groove; 500, annular protective cover. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the following will be described in conjunction with the accompanying drawings of the embodiments of this utility model. Figure 1-5 The technical solutions of the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model are within the protection scope of this utility model.

[0017] This embodiment provides a filtration device for electronic-grade reagents, such as... Figure 1-5 The filter includes a filter tank 100 and a filtration mechanism disposed therein. The filtration mechanism includes a rotating frame 200 rotatably connected to the axis of the inner cavity of the filter tank 100. The inner cavity of the rotating frame 200 has a filter cylinder 201 and a filter cylinder 202 arranged sequentially from the outside to the inside. The inner wall of the filter tank 100 is also provided with a cleaning assembly for cleaning the filter surfaces of the filter cylinders 201 and 202. The cleaning assembly includes fixed covers 300 respectively disposed on the inner wall of the filter tank 100 and close to the outer arc surfaces of the filter cylinders 201 and 202. The openings of the fixed covers 300 slide in contact with the corresponding filter surfaces of the filter cylinders 201 and 202. A suction tube is provided in the opening at the outer end of each fixed cover 300. 301, the suction pipe 301 penetrates the wall of the filter tank 100 and extends to the outside. The outer end of the fixed cover 300 is provided with a sealing plate 302. The sealing plate 302 is slidably sealed to the annular clearance port provided on the rotating frame 200. The filtration mechanism also includes a drain pipe 203 provided at the axis of the filter tank 100 near the suction pipe 301. The drain pipe 203 is rotatably connected to the corresponding rotating hole on the rotating frame 200. The drain pipe 203 extends into the filter cylinder 202 and has uniformly distributed inlet holes 204 on its outer arc surface. The filtration mechanism also includes a motor 205 provided at the axis of the filter tank 100 away from the suction pipe 301. The motor 205 is fixedly connected to the end of the rotating frame 200.

[0018] The reagent to be filtered enters from the feed end of the filter tank 100 and undergoes multi-stage filtration by passing through the surfaces of filter cartridge 1 201 and filter cartridge 202 in sequence. Impurities are trapped on the filter surfaces. At the same time, the motor 205 drives the rotating frame 200 to rotate, which in turn drives filter cartridge 1 201 and filter cartridge 202 to rotate synchronously. Meanwhile, the fixed cover 300 and its internal cleaning components remain stationary. The suction pipe 301 continuously sucks up the detached impurities through the negative pressure suction generated by the external pump, while simultaneously drawing out the filtered liquid from filter cartridge 1 201 and filter cartridge 202 in the reverse direction. During this process, the filter cartridge 1 201 and filter cartridge 202 are backwashed. The function of the sealing plate 302 and the sliding sealing structure of the annular avoidance port further improves the cleaning effect. The sealing plate 302 and the sliding sealing structure of the annular avoidance port ensure the airtightness of the cleaning area and avoid leakage. At the same time, the drain pipe 203 is located at the other end of the filter tank 100 and is rotatably connected to the rotating frame 200. The filtered clear liquid is discharged through the liquid inlet hole 204 on it to maintain continuous flow. It realizes the online maintenance function of filtering and cleaning at the same time, effectively avoiding the problem of efficiency reduction or operation interruption caused by filter screen blockage in traditional filtration equipment. It significantly improves the stability and automation level of continuous and high-purity filtration of electronic reagents, while extending the service life of filter media and reducing the frequency of downtime maintenance.

[0019] like Figure 2-5 As shown, the cleaning assembly also includes several scrapers 303 respectively disposed within the fixed cover 300, and the outer arc surfaces of filter cylinder one 201 and filter cylinder two 202 respectively contact the adjacent scrapers 303 on the same side; the several scrapers 303 are arranged along the axial direction of the filter tank 100; the cleaning assembly also includes brush rollers 304 respectively rotatably connected within the fixed cover 300, and the brush rollers 304 respectively contact the outer arc surfaces of the adjacent filter cylinder one 201 and filter cylinder two 202 on the same side.

[0020] The scraper 303 works in conjunction with the brush roller 304 to mechanically scrape and brush the filter surface, preventing the filter holes from becoming clogged.

[0021] like Figure 3-5 As shown, it also includes a transmission assembly. The outer ends of the brush roller 304 are provided with gears 400. The outer arc surface of the rotating frame 200 near the end of the gear 400 and the inner diameter arc surface of the annular clearance opening are provided with annular tooth grooves 401. The annular tooth grooves 401 are respectively meshed with the adjacent gears 400 on the same side. The fixed cover 300 is provided with an installation port to provide rotation space for the gears 400.

[0022] The brush roller 304 engages with the annular tooth groove 401 on the rotating frame 200 via its end gear 400, automatically obtaining rotational power when the rotating frame 200 rotates, thereby enhancing the cleaning effect.

[0023] like Figure 3-5As shown, the outer fixed cover 300 end is provided with an annular protective cover 500, the annular protective cover 500 is rotatably connected to the outer arc surface of the rotating frame 200, and the outer annular tooth groove 401 is located inside the annular protective cover 500.

[0024] It can provide safety protection for the outer annular tooth groove 401, preventing the reagent liquid from corroding it.

[0025] The working principle of the electronic-grade reagent filtration device provided by this utility model is as follows: The reagent to be filtered enters from the feed end of the filter tank 100 and passes through the surfaces of filter cylinder 1 201 and filter cylinder 202 in sequence to complete multi-stage filtration. Impurities are trapped on the filter surface. At the same time, the motor 205 drives the rotating frame 200 to rotate, thereby driving filter cylinder 1 201 and filter cylinder 202 to rotate synchronously, while the fixed cover 300 and its internal cleaning components remain stationary, so that the outer arc surfaces of filter cylinder 1 201 and filter cylinder 202 generate relative movement with the scraper 303 and the brush roller 304, realizing mechanical scraping and brushing cleaning of the filter surface and preventing filter hole blockage. Among them, the brush roller 304 engages with the annular tooth groove 401 on the rotating frame 200 through its end gear 400, automatically obtaining rotational power when the rotating frame 200 rotates, enhancing the cleaning effect. During the cleaning process, the suction pipe 301 The negative pressure suction generated by the external pump continuously draws out the detached impurities, while simultaneously drawing out the filtered liquid from filter cartridges 201 and 202 in the reverse direction. This process achieves the effect of backwashing filter cartridges 201 and 202, further improving the cleaning effect. The sliding sealing structure of the sealing plate 302 and the annular clearance port ensures the airtightness of the cleaning area and prevents leakage. At the same time, the drain pipe 203 is located at the other end of the filter tank 100 and is rotatably connected to the rotating frame 200. The filtered clear liquid is discharged through the inlet hole 204 on it, maintaining continuous flow. This realizes the online maintenance function of filtering and cleaning simultaneously, effectively avoiding the efficiency reduction or operation interruption problems caused by filter screen clogging in traditional filtration equipment. It significantly improves the stability and automation level of continuous and high-purity filtration of electronic-grade reagents, while extending the service life of the filter media and reducing the frequency of downtime maintenance.

[0026] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A filtration device for electronic-grade reagents, characterized in that: The filter includes a filter tank (100) and a filtration mechanism disposed therein. The filtration mechanism includes a rotating frame (200) rotatably connected to the axis of the inner cavity of the filter tank (100). The inner cavity of the rotating frame (200) is provided with a filter cylinder one (201) and a filter cylinder two (202) sequentially from the outside to the inside. The inner wall of the filter tank (100) is also provided with a cleaning assembly for cleaning the filter surfaces of the filter cylinder one (201) and the filter cylinder two (202). The cleaning assembly includes components respectively disposed on the inner wall of the filter tank (100) and close to the filter cylinder one (201) and the filter cylinder two (202). The fixed cover (300) on the outer arc surface of the filter cylinder two (202) has an opening that slides with the filter surfaces of the corresponding filter cylinder one (201) and filter cylinder two (202). The outer end opening of the fixed cover (300) is provided with a suction tube (301). The suction tube (301) penetrates the tank wall of the filter tank (100) and extends to the outside. The outer end of the fixed cover (300) is provided with a sealing plate (302). The sealing plate (302) is slidably sealed to the annular clearance port provided on the rotating frame (200).

2. The filtration device for electronic-grade reagents as described in claim 1, characterized in that: The filtration mechanism also includes a drain pipe (203) located at the center of the filter tank (100) near the suction pipe (301). The drain pipe (203) is rotatably connected to the corresponding rotating hole on the rotating frame (200). The drain pipe (203) extends into the filter cylinder (202) and has uniformly distributed inlet holes (204) on its outer arc surface.

3. The filtration device for electronic-grade reagents as described in claim 1, characterized in that: The filtration mechanism also includes a motor (205) located at the axis of the filter tank (100) away from the suction pipe (301), and the motor (205) is fixedly connected to the end of the rotating frame (200).

4. The filtration device for electronic-grade reagents as described in claim 1, characterized in that: The cleaning assembly also includes a number of scrapers (303) respectively disposed in the fixed cover (300), and the outer arc surfaces of the first filter cylinder (201) and the second filter cylinder (202) respectively contact the adjacent scrapers (303) on the same side.

5. The filtration device for electronic-grade reagents as described in claim 4, characterized in that: Several of the scrapers (303) are arranged along the axial direction of the filter tank (100).

6. The filtration device for electronic-grade reagents as described in claim 1, characterized in that: The cleaning assembly also includes brush rollers (304) that are rotatably connected to the fixed cover (300), and the brush rollers (304) are in contact with the outer arc surfaces of the adjacent filter cylinders 1 (201) and 2 (202) on the same side.

7. The filtration device for electronic-grade reagents as described in claim 6, characterized in that: It also includes a transmission assembly. The outer ends of the brush roller (304) are provided with gears (400). The outer arc surface of the rotating frame (200) near the end of the gear (400) and the inner diameter arc surface of the annular clearance are provided with annular tooth grooves (401). The annular tooth grooves (401) are respectively meshed with the adjacent gears (400) on the same side. The fixed cover (300) is provided with an installation port to provide rotation space for the gears (400).

8. The filtration device for electronic-grade reagents as described in claim 7, characterized in that: The outer end of the fixed cover (300) is provided with an annular protective cover (500), which is rotatably connected to the outer arc surface of the rotating frame (200), and the outer annular tooth groove (401) is located inside the annular protective cover (500).

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