A boron extended tail exhaust gas filtering device

Abstract

The utility model discloses a kind of boron extension tail exhaust gas filtering devices, including high-temperature diffusion furnace, condenser bottle and multiple filter bottles connected in sequence;Multiple filter bottles are all provided with filter cotton with support, and the filter cotton with support includes cylindrical support and filter cotton arranged on support;The device is provided with two parallel exhaust gas treatment branches between the condenser bottle and the multiple filter bottles, boron-containing exhaust gas passes through first exhaust gas treatment branch, and is sequentially filtered by the multiple filter bottles, boron-free exhaust gas passes through second exhaust gas treatment branch, and is only filtered by last filter bottle;First exhaust gas treatment branch and second exhaust gas treatment branch are separated and controlled by valve.The device is provided with filter cotton with support in filter bottle, increases the contact area of exhaust gas and water, prevents large volume bubble and oxide particulate matter from passing through airflow;Through two parallel exhaust gas treatment branches, the processing efficiency of system is improved.

Description

Technical Field

[0001] This utility model relates to the field of boron tail gas filtration technology, and in particular to a boron tail gas filtration device. Background Technology

[0002] In the photovoltaic cell manufacturing process, the boron diffusion furnace is the core equipment for forming PN junctions by surface doping of P-type silicon wafers. During the boron diffusion process, the high-temperature diffusion furnace diffuses through a BBr3 source at a temperature of approximately 850-1000℃, producing exhaust gases containing harmful substances such as BBr3, HBO2, and B2O3. Existing boron diffusion furnace exhaust gas treatment systems only use a single filter element for physical filtration before directly discharging the exhaust gas into the exhaust pipe. This method has several problems: the filter element is a consumable and has high operating costs; physical filtration cannot completely remove harmful substances from the exhaust gas, resulting in poor filtration efficiency; the exhaust pipe is prone to clogging, requiring frequent replacement and cleaning, approximately every 10-15 days; and B2O3 blockage reduces equipment operating time, causes unstable process pressure, and affects film uniformity. Furthermore, B2O3 crystallization in the pipe can trigger equipment alarms, leading to equipment shutdowns for maintenance and severely impacting normal production line operations.

[0003] Although subsequent water filtration solutions improved the treatment effect to some extent, the filtration effect remained unsatisfactory due to the short contact time between the exhaust gas and water. Furthermore, the Bernoulli effect at the short-circuit valve caused boron oxide deposits on the pipe wall, leading to new clogging problems. Existing water filtration devices typically cannot employ different treatment methods for exhaust gases with different compositions; all exhaust gases must undergo the same treatment process, which is inefficient and increases the maintenance burden on the equipment. In addition, in practical applications, the large air bubbles in the water filter device limit the contact area with water, resulting in insufficient removal of harmful substances in the exhaust gas. Utility Model Content

[0004] The purpose of this invention is to provide a boron diffuser exhaust gas filtration device to solve the problems of poor treatment effect and easy blockage of pipes in the existing technology.

[0005] To solve the above-mentioned technical problems, this utility model provides a boron diffuser exhaust gas filtration device, which includes a high-temperature diffusion furnace, a condenser bottle and multiple filter bottles connected in sequence. Each of the multiple filter bottles is provided with a filter cotton with a support, and the filter cotton with a support includes a cylindrical support and filter cotton disposed on the support. The device has two parallel exhaust gas treatment branches between the condenser bottle and the plurality of filter bottles. Boron-containing exhaust gas passes through the first exhaust gas treatment branch and is filtered sequentially through the plurality of filter bottles. Boron-free exhaust gas passes through the second exhaust gas treatment branch and is filtered only through the last filter bottle. The first waste gas treatment branch and the second waste gas treatment branch are controlled separately by valves.

[0006] Furthermore, the cylindrical support includes multiple layers of annular support frames, with each layer of annular support frames connected by vertical pillars, and each layer of annular support frames is provided with radial support bars.

[0007] Furthermore, the radial support strips are evenly distributed radially.

[0008] Furthermore, the filter cotton is disposed between adjacent annular support frames.

[0009] Furthermore, the valve includes a water circuit valve and a gas circuit valve; the water circuit valve is located at the beginning of the first waste gas treatment branch, and the gas circuit valve is located at the beginning of the second waste gas treatment branch.

[0010] Furthermore, the plurality of filter bottles includes a first filter bottle, a second filter bottle, a third filter bottle, and a fourth filter bottle connected in sequence, wherein the second filter bottle, the third filter bottle, and the fourth filter bottle are provided with the filter cotton with support.

[0011] Furthermore, the device also includes a first water valve, a second water valve, and a third water valve, wherein the second filter bottle, the third filter bottle, and the fourth filter bottle are respectively connected to a water pipeline through the first water valve, the second water valve, and the third water valve.

[0012] Furthermore, the outlet of the device is provided with a first branch and a second branch connected in parallel. The first branch is connected in sequence to an air extraction valve, a diaphragm pump and a tailpipe; the second branch is provided with a CDA valve.

[0013] Furthermore, the main pipeline at the bottom of the second filter bottle is also connected to a drain pipe via a drain valve.

[0014] Compared with the prior art, the present invention has at least the following beneficial effects: This invention features two parallel waste gas treatment branches between the condenser bottle and the plurality of filter bottles. Boron-containing waste gas passes through the first waste gas treatment branch and is filtered sequentially through the plurality of filter bottles, while boron-free waste gas passes through the second waste gas treatment branch and is filtered only through the last filter bottle. This avoids the problem of oxide deposition and the redundant treatment of all waste gas through all filter bottles, significantly improving treatment efficiency. Furthermore, the filter bottles are equipped with filter cotton with supports, which significantly increases the contact time and contact area between waste gas and water. At the same time, the filter cotton can effectively prevent oxide particles from entering the tail diaphragm pump with the airflow, improving filtration efficiency.

[0015] Furthermore, a combination of water and air valves is used to isolate the air and water circuits, preventing backflow of water when a large flow of gas passes through and improving system stability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the filter device in one embodiment of the present invention; Figure 2 This is a schematic diagram of the design of the filter cotton support in a specific embodiment of the present invention; Figure 3 This is a schematic diagram of the design of the filter cotton support in another specific embodiment of the present invention.

[0017] Reference numerals: 1. High-temperature diffusion furnace; 2. Condensation bottle; 3. First filter bottle; 4. Water valve; 5. Gas valve; 6. Second filter bottle; 7. Third filter bottle; 8. Fourth filter bottle; 9. CDA gas valve; 10. Vacuum valve; 11. Tail drain pipe; 12. Diaphragm pump; 13. Third water valve; 14. Second water valve; 15. First water valve; 16. Filter cotton with support; 17. Drain valve; 18. Cylindrical support. Detailed Implementation

[0018] The following is a more detailed description of a boron-based exhaust gas filtration device of the present invention, with reference to schematic diagrams illustrating preferred embodiments. It should be understood that those skilled in the art can modify the present invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the present invention.

[0019] The present invention will be described in more detail below by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0020] like Figures 1 to 3 As shown in the figure, this utility model embodiment proposes a boron diffuser exhaust gas filtration device, which includes a high-temperature diffusion furnace 1, a condenser flask 2 and a plurality of filter flasks arranged in sequence.

[0021] Each of the multiple filter bottles is equipped with a filter cotton 16 with a support. The filter cotton 16 with a support includes a cylindrical support 18 and filter cotton mounted on the support. The device has two parallel exhaust gas treatment branches between the condenser bottle 2 and the multiple filter bottles. Boron-containing exhaust gas passes through the first exhaust gas treatment branch and is filtered sequentially through the multiple filter bottles. Boron-free exhaust gas passes through the second exhaust gas treatment branch and is filtered only through the last filter bottle. The first exhaust gas treatment branch and the second exhaust gas treatment branch are separated and controlled by valves.

[0022] In this embodiment, the plurality of filter bottles include a first filter bottle 3, a second filter bottle 6, a third filter bottle 7, and a fourth filter bottle 8 connected in sequence by pipes, wherein the second filter bottle 6, the third filter bottle 7, and the fourth filter bottle 8 are provided with the support-supported filter cotton 16.

[0023] The valves include a water circuit valve 4 and a gas circuit valve 5. The water circuit valve 4 is located at the beginning of the first waste gas treatment branch, and the gas circuit valve 5 is located at the beginning of the second waste gas treatment branch.

[0024] Specifically, the outlet of the high-temperature diffusion furnace 1 is connected to the inlet of the condenser bottle 2, and the outlet of the condenser bottle 2 is connected to the inlet of the first filter bottle 3 via a pipe. In the first waste gas treatment branch, the outlet of the first filter bottle 3 is connected to the inlet of the second filter bottle 6 via the water valve 4, and the inlets and outlets of the second filter bottle 6, the third filter bottle 7, and the fourth filter bottle 8 are connected sequentially via pipes. In the second waste gas treatment branch, the outlet of the first filter bottle 3 is also connected to the outlet of the third filter bottle 7 via the gas valve 5.

[0025] In this embodiment, the cylindrical support 18 includes multiple layers of annular support frames, which are connected by vertical pillars, and each layer of annular support frame is provided with radial support bars.

[0026] Specifically, the radial support strips are evenly distributed in a radial pattern.

[0027] Furthermore, the filter cotton is disposed between adjacent annular support frames, and the annular support frames provide support for the filter cotton.

[0028] like Figure 2 As shown in the design of a specific embodiment, the cylindrical bracket 18 is divided into 10 equal parts for each layer of the annular support frame.

[0029] like Figure 3 As shown, in another specific embodiment, the cylindrical support 18 is divided into four equal parts, i.e., designed as a cross shape.

[0030] As can be seen from the two specific embodiments above, in the actual use process, the cylindrical support 18 can be designed according to actual needs and is not limited to this.

[0031] In this embodiment, the device further includes a first water valve 15, a second water valve 14, and a third water valve 13. The second filter bottle 6, the third filter bottle 7, and the fourth filter bottle 8 are respectively connected to the water pipeline through the first water valve 15, the second water valve 14, and the third water valve 13 to control the water level of each filter bottle.

[0032] Furthermore, the main pipeline at the bottom of the second filter bottle 6 is also connected to a drain pipe via a drain valve 17 for discharging sediment from the filter bottle.

[0033] In this embodiment, the outlet of the device is provided with a first branch and a second branch connected in parallel. The first branch is connected in sequence to the vacuum valve 10, the diaphragm pump 12 and the tailpipe 11; the second branch is provided with a CDA valve 9.

[0034] Specifically, in the first branch, the outlet of the fourth filter bottle 8 is connected to the tailpipe 11 via the vacuum valve 10 and the diaphragm pump 12. In the second branch, the CDA valve 9 is installed on the connecting pipe of the outlet of the fourth filter bottle 8, and the CDA valve 9 is used to purge the pipeline with CDA gas.

[0035] The working principle of this invention is as follows: Waste gas enters the condenser bottle 2 from the high-temperature diffusion furnace 1, where it undergoes pretreatment to lower its temperature and condense some water vapor. The pretreated waste gas then enters the first filter bottle 3, where a combination of the water valve 4 and the gas valve 5 controls the separation of boron-containing and boron-free waste gas. When the system detects boron-containing waste gas, the gas valve 5 closes, and the waste gas passes through the second filter bottle 6, the third filter bottle 7, and the fourth filter bottle 8 for multi-stage filtration. During water filtration, the waste gas passes through the filter cotton 16 with a support, flushing the bottom water into the cotton. Simultaneously, the boron oxide contained in the waste gas is fully absorbed by the water after being delayed by the filter cotton. The treated waste gas then passes through the vacuum valve 10 and the diaphragm pump 12 into the tailpipe 11. When the system detects boron-free exhaust gas, the gas path valve 5 opens, and the exhaust gas is directly filtered by the fourth filter bottle 8, then passes through the vacuum valve 10, and enters the tailpipe 11 via the diaphragm pump 12. The filter cotton 16 with a support frame in each filter bottle can increase the contact area between the exhaust gas and water, improving the filtration effect.

[0036] Before the device treats the exhaust gas, water needs to be added to the device. The specific operation is as follows: First, open the evacuation valve 10; Then, open the first water valve 15, the second water valve 14 and the third water valve 13, and add water to the three filter bottles simultaneously through the water valves; Next, fill each filter bottle with water to the designated level and then close the corresponding water valve; Finally, after all the filter bottles have been filled with water, the water filling process is complete.

[0037] The drainage process of the device is as follows: First, open the drain valve 17; Then, open the CDA gas valve 9 to introduce CDA gas into the device; Next, the introduced gas pushes the water in the fourth filter bottle 8 through the long tube into the third filter bottle 7, and then into the second filter bottle 6; Finally, the water in the device is discharged through the drain valve 17 via the drain outlet at the bottom of the second filter bottle 6.

[0038] In summary, the above technical solution utilizes two parallel waste gas treatment branches between the condenser bottle and the multiple filter bottles. Boron-containing waste gas passes through the first waste gas treatment branch and is filtered sequentially through the multiple filter bottles, while boron-free waste gas passes through the second waste gas treatment branch and is filtered only through the last filter bottle. This avoids the problem of oxide deposition and the redundant treatment of all waste gas through all filter bottles, significantly improving treatment efficiency. Furthermore, the use of filter cotton with supports in the filter bottles significantly increases the contact time and contact area between waste gas and water. At the same time, the filter cotton effectively prevents oxide particles from entering the tail diaphragm pump with the airflow, improving filtration efficiency. Additionally, the combined control method of water and gas valves isolates the gas and water circuits, preventing backflow of water when large flow of gas passes through, thus improving system stability.

[0039] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A boron-based tail gas exhaust gas filtration device, characterized in that, It includes a high-temperature diffusion furnace, a condenser flask, and multiple filter flasks connected in sequence; Each of the multiple filter bottles is provided with a filter cotton with a support, and the filter cotton with a support includes a cylindrical support and filter cotton disposed on the support. The device has two parallel exhaust gas treatment branches between the condenser bottle and the plurality of filter bottles. Boron-containing exhaust gas passes through the first exhaust gas treatment branch and is filtered sequentially through the plurality of filter bottles. Boron-free exhaust gas passes through the second exhaust gas treatment branch and is filtered only through the last filter bottle. The first waste gas treatment branch and the second waste gas treatment branch are controlled separately by valves.

2. The waste gas filtration device as described in claim 1, characterized in that, The cylindrical support includes multiple layers of annular support frames, which are connected by vertical pillars, and each layer of annular support frame is provided with radial support bars.

3. The waste gas filtration device as described in claim 2, characterized in that, The radial support bars are evenly distributed in a radial pattern.

4. The waste gas filtration device as described in claim 3, characterized in that, The filter cotton is disposed between adjacent annular support frames.

5. The waste gas filtration device as described in claim 1, characterized in that, The valves include a water circuit valve and a gas circuit valve; the water circuit valve is located at the beginning of the first waste gas treatment branch, and the gas circuit valve is located at the beginning of the second waste gas treatment branch.

6. The exhaust gas filtration device as described in claim 1, characterized in that, The plurality of filter bottles include a first filter bottle, a second filter bottle, a third filter bottle, and a fourth filter bottle connected in sequence, wherein the second filter bottle, the third filter bottle, and the fourth filter bottle are provided with the filter cotton with support.

7. The waste gas filtration device as described in claim 6, characterized in that, The device further includes a first water valve, a second water valve, and a third water valve. The second filter bottle, the third filter bottle, and the fourth filter bottle are respectively connected to the water pipeline through the first water valve, the second water valve, and the third water valve.

8. The waste gas filtration device as described in claim 1, characterized in that, The device has a first branch and a second branch connected in parallel at the air outlet. The first branch is connected in sequence to an air extraction valve, a diaphragm pump and a tailpipe; the second branch is equipped with a CDA valve.

9. The waste gas filtration device as described in claim 1, characterized in that, The main pipe at the bottom of the second filter bottle is also connected to a drain pipe via a drain valve.

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