A t-mah and pr concentration adjustment apparatus

Abstract

The application discloses a T-MAH and PR concentration adjusting device, and relates to the fields of precision chemical engineering and mixing technology, which comprises a supporting bottom plate, an auxiliary mixing mechanism is arranged on the top of the supporting bottom plate, and the auxiliary mixing mechanism is used to drive the stirring piece to rotate, so that the liquid generates a vortex flow. The vortex flow drives the blades to rotate and stir in the liquid which is not completely mixed. The rotation of the blades is not driven by the stirring piece. The tangential vortex flow is blocked and interfered by the blades in the opposite direction, so that the rotation speed of the vortex flow is limited, and is converted into axial and radial turbulent flow. The bubbles mixed into the liquid and the uneven concentration from top to bottom are reduced, the uniformity of the mixed liquid is improved, and the accuracy of the concentration adjusting is improved.

Description

Technical Field

[0001] This application relates to the field of precision chemical and mixing technology, and in particular to a T-MAH and PR concentration mixing device. Background Technology

[0002] T-MAH and PR concentration mixing equipment are commonly used in photolithography processes in high-precision electronics industries such as semiconductor manufacturing, integrated circuits, and liquid crystal display panels. Their core function is to prepare precisely concentrated and uniformly mixed chemical solutions for the photolithography process.

[0003] In current T-MAH and PR concentration mixing equipment, the mixing tank uses an agitator to guide the flow, causing the liquid inside the tank to swirl at high speed. Since both T-MAH and PR liquids are viscous, the swirling rotation will trap air into the liquid, resulting in a large number of bubbles inside the liquid. This will affect subsequent use. Furthermore, the vertical mixing between the high and low levels of the liquid is insufficient, which can easily lead to deviations in concentration control. This can result in localized insufficient concentration ratios that are not detected by the sensors in time, leading to substandard product quality. Utility Model Content

[0004] To address the issue of excessive air bubbles in liquids, this application provides a T-MAH and PR concentration mixing device.

[0005] The T-MAH and PR concentration mixing device provided in this application adopts the following technical solution: A T-MAH and PR concentration mixing device includes a supporting base plate, a supporting frame fixedly connected to the side wall of the supporting base plate, a fixed frame fixedly connected to the end of the supporting frame away from the supporting base plate, an auxiliary mixing mechanism provided on the top of the supporting base plate, and an auxiliary mixing mechanism provided on the fixed frame. The auxiliary mixing mechanism includes a stirring element for actively driving the liquid flow and blades for passively blocking vortices.

[0006] By adopting the above technical solution, the auxiliary mixing mechanism will drive the stirring component to rotate, thereby generating a vortex-like eddy in the liquid. The eddy will drive the blades to rotate and stir in the incompletely mixed liquid. The rotation of the blades is not driven by the stirring component, and the tangential eddy is blocked and interfered with by the blades in the opposite direction, thus limiting the speed of the eddy. The blades transform the liquid flow into axial and radial turbulence, reducing the occurrence of bubbles being mixed into the liquid and uneven concentrations, thereby improving the uniformity of the mixed liquid and the accuracy of concentration adjustment.

[0007] Preferably, the auxiliary mixing mechanism further includes a mixing tank fixedly disposed on the side wall of the fixed frame, a sealing cover fixedly disposed on the top of the mixing tank, a motor fixedly connected to the top of the sealing cover, a rotating rod fixedly connected to the output shaft end of the motor, a stirring component fixedly passing through the outer wall of the rotating rod, and a rotating assembly disposed on the outer wall of the rotating rod.

[0008] By adopting the above technical solution, the motor output shaft is fixedly connected to the stirring component by rotating the rod, thereby enabling the motor to drive the stirring component to rotate.

[0009] Preferably, the bottom output shaft of the motor extends through the top of the sealing cover, and multiple stirring components are vertically arranged along the direction of the rotating rod.

[0010] By adopting the above technical solution, multiple stirring components have sufficient kinetic energy to drive rotation, thereby providing sufficient shear force and torque to effectively mix high-viscosity fluids.

[0011] Preferably, the rotating assembly includes a bearing fixedly passing through the outer wall of the rotating rod, with limit rings provided at both the upper and lower ends of the bearing, a collar sleeved on the outer wall of the bearing, and multiple horizontal plates fixedly connected to the outer wall of the collar, with an adjustment mechanism provided at the top of the horizontal plates.

[0012] By adopting the above technical solution, the bearing is limited by the limiting ring, thereby preventing the bearing from moving vertically.

[0013] Preferably, the middle part of the limiting ring is threaded through the rotating rod, and the diameter of the limiting ring is larger than the diameter of the bearing.

[0014] By adopting the above technical solution, the limiting ring can also limit the components sleeved on the outer wall of the bearing, thereby making the rotation of the structure more stable.

[0015] Preferably, the adjustment mechanism includes a fixed plate fixedly connected to the top of the horizontal plate, a threaded rod threaded through the side wall of the fixed plate, a knob fixedly connected to the end of the threaded rod, a limit member movably connected to the end of the threaded rod away from the knob, and a rotating assembly provided on the top of the horizontal plate.

[0016] By adopting the above technical solution, rotating the knob can drive the threaded rod to move horizontally, thereby pushing the limiting component and fixing and constraining the rotating component.

[0017] Preferably, the rotating assembly includes a rotating column that movably passes through the top of the horizontal plate, a limiting plate is fixedly connected to the top of the rotating column, a fixing column is fixedly connected to the top of the limiting plate, a connecting plate is fixedly connected to the bottom of the rotating column, a vertical plate is fixedly connected to the bottom of the connecting plate, and multiple blades are fixedly connected to the side wall of the vertical plate.

[0018] By adopting the above technical solution, the rotating column is limited by the limiting plate, so that the rotating column cannot move vertically. The rotating column is constrained by the fixed column. When the fixed column cannot rotate, the rotating column will also be unable to rotate.

[0019] Preferably, the outer wall of the fixed column is fitted with the side of the limiting member near the fixed column, and the diameter of the limiting plate is larger than the diameter of the rotating column.

[0020] By adopting the above technical solution, the fixed column can be rotated and constrained by the limiting component. When the limiting plate is in contact with the top of the horizontal plate, the rotating column cannot continue to move vertically downward.

[0021] In summary, this application includes at least one of the following beneficial technical effects: 1. The auxiliary mixing mechanism drives the stirring element to rotate, thereby generating a vortex-like flow in the liquid. Since both T-MAH and PR liquids are viscous, the vortex will drive the blades to rotate and stir in the incompletely mixed liquid. The blades rotate synchronously with the flow of the viscous liquid. The rotation of the blades is not driven by the stirring element. The tangential vortex is blocked and interfered with by the blades in the opposite direction, thus limiting the vortex speed and transforming it into axial and radial turbulence. This reduces the occurrence of bubbles being mixed into the liquid and uneven concentrations, thereby improving the uniformity of the mixed liquid and the accuracy of concentration adjustment. Attached Figure Description

[0022] Figure 1 This is a schematic diagram illustrating the overall structure of this application; Figure 2 This is a schematic diagram of the interior of the mixing tank in this application; Figure 3 This is a partial schematic diagram of the connection box in this application; Figure 4 This is a partial schematic diagram of the rotating rod in this application; Figure 5 This is a partial cross-sectional view of the rotating rod in this application; Figure 6 This is a partial schematic diagram of the fixed column in this application; Figure 7 This is a partial cross-sectional view of the rotating column in this application.

[0023] Figure label: 1. Support base plate; 11. Support frame; 12. Fixing frame; 2. Auxiliary mixing mechanism; 21. Mixing tank; 22. Sealing cover; 23. Motor; 24. Rotating rod; 25. Stirring component; 26. Bearing; 27. Limiting ring; 28. Collar; 29. ​​Horizontal plate; 210. Fixing plate; 211. Threaded rod; 212. Knob; 213. Limiting component; 214. Rotating column; 215. Limiting plate; 216. Fixing column; 217. Connecting plate; 218. Vertical plate; 219. Blade; 3. Liquid receiving tray; 4. Control device; 41. Refractometer; 42. Touch screen; 5. Circulating pump; 6. Connecting box; 61. Delivery pipe; 62. Pneumatic valve; 63. Flow meter. Detailed Implementation

[0024] The following is in conjunction with the appendix Figures 1-7 This application will be described in further detail.

[0025] This application discloses a T-MAH and PR concentration mixing device.

[0026] Reference Figures 1-3 A T-MAH and PR concentration mixing device includes a supporting base plate 1, a support frame 11 fixedly connected to the side wall of the supporting base plate 1, a fixing frame 12 fixedly connected to the end of the support frame 11 away from the supporting base plate 1, an auxiliary mixing mechanism 2 provided on the top of the supporting base plate 1, a liquid receiving tray 3 provided on the top of the supporting base plate 1, a control device 4 fixedly connected to the top of the supporting base plate 1, the control device 4 having a built-in PLC for information analysis and control, a refractometer 41 mounted on the side wall of the control device 4, and a touch screen 42 fixedly connected to the side wall of the control device 4. A connecting box 6 is provided on the wall, and a conveying pipe 61 is fixedly passed through the top of the connecting box 6. The conveying pipe 61 is set at a right angle and is used for liquid conveying. A pneumatic valve 62 is connected to the middle of the conveying pipe 61 for controlling the switch. A flow meter 63 is connected to the side of the conveying pipe 61 away from the connecting box 6. The pneumatic valve 62 is connected to the control device 4 through a signal line. The auxiliary mixing mechanism 2 includes a mixing tank 21. A stirring element 25 is movably arranged inside the mixing tank 21. A blade 219 is movably arranged inside the mixing tank 21. The blade 219 is used to block the tangential flow of the fluid and promote axial and radial mixing.

[0027] The staff connected the T-MAH liquid container, ultrapure water storage tank, PR raw rubber storage tank, and diluent storage tank to a delivery pipe 61, and then connected the pneumatic valve 62 to the control device 4. The staff then set the mixing concentration on the touch screen 42. The control device 4 controlled the pneumatic valve 62 to input T-MAH liquid into the mixing tank 21. Then, ultrapure water was delivered according to the set concentration. The liquid inside the mixing tank 21 was delivered to the refractometer 41 for concentration analysis through the circulation pump 5. The concentration was then adjusted according to the value of the refractometer 41, thus completing the concentration adjustment. The same steps were followed when adjusting the concentration of PR raw rubber.

[0028] Reference Figures 2-5The auxiliary mixing mechanism 2 also includes a mixing tank 21 fixedly mounted on the side wall of the fixing frame 12. A sealing cover 22 is fixedly mounted on the top of the mixing tank 21, and the inner wall of the sealing cover 22 is engaged with the outer wall of the mixing tank 21. Figure 4 As shown, a motor 23 is fixedly connected to the top of the sealing cover 22. A circular hole is opened through the top of the sealing cover 22, and the bottom output shaft of the motor 23 is movably connected through the circular hole, so that the output shaft of the motor 23 is rotatably connected to the sealing cover 22. A rotating rod 24 is fixedly connected to the output shaft of the motor 23. The rotating rod 24 is kept vertical. An external thread is opened on the outer wall of the middle section of the rotating rod 24. A stirring component 25 is fixedly passed through the outer wall of the rotating rod 24. Multiple columns are symmetrically arranged at the horizontal center of the stirring component 25 to improve the stirring efficiency. Multiple stirring components 25 are vertically arranged along the direction of the rotating rod 24. A rotating component is provided on the outer wall of the rotating rod 24.

[0029] When T-MAH liquid and ultrapure water are simultaneously injected into the mixing tank 21, they need to be mixed and stirred to dilute the concentration of T-MAH liquid. Motor 23 will be started, and motor 23 will drive rotating rod 24 to rotate. Rotating rod 24 will drive stirring element 25 to rotate, thereby causing the internal liquid to flow and form a vortex. When the liquid flows, blades 219 will interfere with the flow of the vortex, thereby slowing down the flow rate.

[0030] Reference Figures 5-6 The rotating assembly includes a bearing 26 fixedly passing through the outer wall of the rotating rod 24. Limiting rings 27 are provided at both the upper and lower ends of the bearing 26. An internal thread is formed in the middle of the limiting ring 27, which is threadedly connected to the external thread of the rotating rod 24, allowing the rotating rod 24 to thread through the middle of the limiting ring 27. The diameter of the limiting ring 27 is larger than the diameter of the bearing 26. A collar 28 is fitted onto the outer wall of the bearing 26, with both the upper and lower surfaces of the collar 28 fitting against the limiting ring 27, thus limiting the collar 28 simultaneously. Multiple horizontal plates 29 are fixedly connected to the outer wall of the collar 28, symmetrically arranged at the horizontal center of the collar 28. An adjustment mechanism is provided at the top of each horizontal plate 29.

[0031] When the rotating rod 24 rotates, it will drive the limiting ring 27 to rotate. The rotating rod 24 will also drive the bearing 26 to rotate. The collar 28 will not be affected by the rotation of the rotating rod 24. The collar 28 and the horizontal plate 29 are affected by the flow velocity of the blade 219.

[0032] Reference Figures 6-7The adjustment mechanism includes a fixed plate 210 fixedly connected to the top of the horizontal plate 29. The fixed plate 210 is kept vertical. A threaded rod 211 is threaded through the side wall of the fixed plate 210. The side wall of the fixed plate 210 has an internal thread. The threaded rod 211 is threaded through the side wall of the fixed plate 210, so that the threaded rod 211 is threadedly connected to the fixed plate 210. A knob 212 is fixedly connected to the end of the threaded rod 211. The outer wall of the knob 212 has friction grooves to facilitate rotation. The end of the threaded rod 211 away from the knob 212 is movably connected to a limiting member 213. The limiting member 213 has a circular groove on the side near the threaded rod 211. The threaded rod 211 is inserted into the circular groove, so that the threaded rod 211 can drive the limiting member 213 to move horizontally. The limiting member 213 is made of hard rubber. A rotating component is provided at the top of the horizontal plate 29.

[0033] When it is necessary to adjust the horizontal angle of the blade 219, the operator first drives the blade 219 to rotate through the rotating assembly, and then the operator rotates the knob 212. The knob 212 will drive the threaded rod 211 to move horizontally, and the threaded rod 211 will drive the limiting member 213 to move horizontally. The side of the limiting member 213 near the rotating assembly will fit against the outer wall of the fixing column 216, thereby fixing the rotating assembly through friction, thus completing the angle adjustment of the blade 219.

[0034] Reference Figures 6-7 The rotating assembly includes a rotating column 214 that movably passes through the top of a horizontal plate 29. A second circular hole is provided through the top of the horizontal plate 29, through which the rotating column 214 movably passes, thereby allowing the rotating rod 24 to be rotatably connected to the horizontal plate 29. A limiting plate 215 is fixedly connected to the top of the rotating column 214, and a fixed column 216 is fixedly connected to the top of the limiting plate 215. The outer wall of the fixed column 216 is fitted against the side of the limiting member 213 near the fixed column 216. The diameter of the limiting plate 215 is larger than the diameter of the rotating column 214, thereby limiting the rotating column 214. A connecting plate 217 is fixedly connected to the bottom of the rotating column 214, and the connecting plate 217 remains horizontal. A vertical plate 218 is fixedly connected to the bottom of the connecting plate 217, and the vertical plate 218 always remains vertical. Multiple blades 219 are fixedly connected to the side wall of the vertical plate 218, and the blades 219 are tilted at 30°, thereby increasing the flow trajectory of the liquid and slowing down the flow rate.

[0035] When the rotating assembly adjusts the rotation of the blade 219, the operator rotates the fixed column 216, which in turn drives the limiting plate 215 to rotate. The limiting plate 215 then drives the rotating column 214 to rotate, which in turn drives the connecting plate 217 to rotate. The connecting plate 217 then drives the vertical plate 218 to rotate, which in turn drives the blade 219 located on the side wall of the vertical plate 218 to rotate synchronously. This completes the angle adjustment of the blade 219, allowing the blade 219 to better adapt to the flow direction of the vortex.

[0036] When the liquid in the mixing tank 21 forms a vortex and impacts the blades 219 on the side wall of the vertical plate 218, the vertical plate 218 itself has a large mass and inertia. Therefore, the vertical plate 218 will not be easily pushed by the vortex and will rotate relatively stationary with the vortex. When the liquid is at a low flow rate, the vertical plate 218 and the blades 219 will remain in a near-stationary state. When the liquid is at a high flow rate, the vertical plate 218 will drive the blades 219 to rotate slowly. The vertical plate 218 will generate relative motion with the vortex, which will cause the vortex to be blocked by the vertical plate 218 and the blades 219, thus slowing down the flow rate. The tilting of the blades 219 will make the exchange of liquid levels between the upper and lower parts more frequent, thereby preventing the flow rate from being too fast and entraining air into the liquid. At the same time, it will make the liquid levels between the upper and lower parts more uniform, resulting in a better mixing effect. This ensures that the concentration value measured by the refractometer has higher representativeness and accuracy, and provides more realistic values ​​for concentration adjustment.

[0037] In the mixing tank 21, only the vertical plate 218 and blades 219 are in contact with the liquid. The liquid level is controlled below the limiting ring 27 to avoid mechanical contamination of the liquid. The mixing tank 21 and its internal parts are made of 316L stainless steel to ensure sufficient mechanical strength and quality. All internal surfaces (liquid contact surfaces) that come into contact with chemicals must be lined with a seamless perfluoroalkoxy integral lining with a thickness of not less than 3 mm to prevent contamination.

[0038] The implementation principle of a T-MAH and PR concentration mixing device in this application is as follows: The staff connected the T-MAH liquid container, ultrapure water storage tank, PR raw rubber storage tank, and diluent storage tank to the delivery pipe 61, and then connected the pneumatic valve 62 to the control device 4. After setting the mixing concentration on the touch screen 42, the control device 4 controlled the pneumatic valve 62 to input T-MAH liquid into the mixing tank 21, and then delivered ultrapure water according to the concentration. The liquid in the mixing tank 21 was delivered to the refractometer 41 for concentration analysis through the circulation pump 5, and the concentration was adjusted according to the value of the refractometer 41 to complete the mixing. The mixing steps for PR raw rubber were the same.

[0039] After T-MAH and ultrapure water are injected into the mixing tank 21, the motor 23 is started to mix and stir. The motor 23 drives the rotating rod 24 to rotate, and the rotating rod 24 drives the stirring piece 25 to rotate, forming a vortex. The blades 219 interfere with the vortex and slow down the flow rate. When the rotating rod 24 rotates, it drives the limiting ring 27 and the bearing 26, but the collar 28 is not affected by the rotating rod 24. The collar 28 and the horizontal plate 29 are affected by the flow rate of the blades 219.

[0040] When adjusting the horizontal angle of blade 219, the operator rotates blade 219 through the rotating assembly, and then rotates knob 212. Knob 212 drives threaded rod 211 to move horizontally, and threaded rod 211 drives limiting member 213 to move horizontally. Limiting member 213 is in contact with the outer wall of fixed column 216, and the rotating assembly is fixed by friction. During adjustment, rotating fixed column 216 drives limiting plate 215 to rotate, limiting plate 215 drives rotating column 214 to rotate, rotating column 214 drives connecting plate 217 to rotate, connecting plate 217 drives vertical plate 218 to rotate, and vertical plate 218 drives blade 219 to rotate, thus completing the angle adjustment and making blade 219 adapt to the vortex flow direction.

[0041] The vortex is slowed down by the vertical plate 218 and the blades 219. The tilt of the blades 219 makes the liquid level exchange between the upper and lower parts more frequent, avoids air from entering and makes the mixing more uniform, thereby improving the mixing effect and the accuracy of the refractometer 41 value, and providing more realistic and accurate data for concentration adjustment.

[0042] When processing high-viscosity PR raw adhesive, the fluid shear force is large, and the vertical plate 218 rotates at a relatively slow speed, generating a strong shearing effect that effectively tears and disperses colloidal clumps. When processing low-viscosity T-MAH diluent, the vertical plate 218 is easily driven to a higher speed, efficiently converting the tangential flow into a gentle axial flow, achieving rapid mixing while maximally suppressing the generation of bubbles.

[0043] The above are merely optional embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A device for mixing T-MAH and PR concentrations, characterized in that: Includes a supporting base plate (1), a supporting frame (11) is fixedly connected to the side wall of the supporting base plate (1), a fixed frame (12) is fixedly connected to the end of the supporting frame (11) away from the supporting base plate (1), and an auxiliary mixing mechanism (2) is provided on the fixed frame (12). The auxiliary mixing mechanism (2) includes a stirring element (25) for actively driving the liquid flow and a blade (219) for passively blocking the vortex.

2. The T-MAH and PR concentration mixing device according to claim 1, characterized in that: The auxiliary mixing mechanism (2) also includes a mixing tank (21) fixedly installed on the side wall of the fixed frame (12). A sealing cover (22) is fixedly installed on the top of the mixing tank (21). A motor (23) is fixedly connected to the top of the sealing cover (22). A rotating rod (24) is fixedly connected to the output shaft end of the motor (23). A stirring component (25) is fixedly inserted through the outer wall of the rotating rod (24). A rotating component is provided on the outer wall of the rotating rod (24).

3. The T-MAH and PR concentration mixing device according to claim 2, characterized in that: The bottom output shaft of the motor (23) extends through the top of the sealing cover (22), and multiple stirring components (25) are vertically arranged along the direction of the rotating rod (24).

4. The T-MAH and PR concentration mixing device according to claim 2, characterized in that: The rotating assembly includes a bearing (26) fixedly passing through the outer wall of the rotating rod (24). Limiting rings (27) are provided at both the upper and lower ends of the bearing (26). A collar (28) is sleeved on the outer wall of the bearing (26). Multiple horizontal plates (29) are fixedly connected to the outer wall of the collar (28). An adjustment mechanism is provided on the top of the horizontal plate (29).

5. The T-MAH and PR concentration mixing device according to claim 4, characterized in that: The middle part of the limiting ring (27) is threaded through the rotating rod (24), and the diameter of the limiting ring (27) is larger than the diameter of the bearing (26).

6. The T-MAH and PR concentration mixing device according to claim 4, characterized in that: The adjustment mechanism includes a fixed plate (210) fixedly connected to the top of the horizontal plate (29), a threaded rod (211) threaded through the side wall of the fixed plate (210), a knob (212) fixedly connected to the end of the threaded rod (211), a limit member (213) movably connected to the end of the threaded rod (211) away from the knob (212), and a rotating assembly provided on the top of the horizontal plate (29).

7. The T-MAH and PR concentration mixing device according to claim 6, characterized in that: The rotating assembly includes a rotating column (214) that moves through the top of the horizontal plate (29). A limiting plate (215) is fixedly connected to the top of the rotating column (214). A fixing column (216) is fixedly connected to the top of the limiting plate (215). A connecting plate (217) is fixedly connected to the bottom of the rotating column (214). A vertical plate (218) is fixedly connected to the bottom of the connecting plate (217). Multiple blades (219) are fixedly connected to the side wall of the vertical plate (218).

8. The T-MAH and PR concentration mixing device according to claim 7, characterized in that: The outer wall of the fixed column (216) is attached to the side of the limiting member (213) near the fixed column (216), and the diameter of the limiting plate (215) is larger than the diameter of the rotating column (214).

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