A sliding cover sealed vacuum automatic opening and closing sample transfer protection device

Abstract

The utility model provides a kind of slide cover sealing type vacuum automatic opening and closing sample transfer protection device, comprising: warehouse body, warehouse body upper is provided with a sample containing cavity, the warehouse body is provided with an installation groove, installation groove is slidably provided with a sliding block, sliding block and installation groove between have a differential pressure chamber, sliding block side wall is connected with a slide cover, slide cover is used to open / close sample containing cavity, the side wall of the end of warehouse body away from the sliding block is provided with a gas valve;The device is in vacuum environment detection equipment (differential pressure chamber internal air pressure>external) when vacuumizing, so that slide cover is automatically opened, when (external air pressure is greater than or equal to differential pressure chamber internal), so that slide cover is automatically closed, can ensure that sample is safely, efficiently transferred between different environments, provides perfect guarantee for sensitive sample, so that its sample warehouse is successfully transmitted from glove box to scanning electron microscope vacuum environment detection equipment in the case where it is isolated from outside.Effective to avoid the pollution of oxygen, moisture or dust to sample.

Description

Technical Field

[0001] This utility model relates to a sliding cover-sealed vacuum automatic opening and closing sample transfer protection device. Background Technology

[0002] This invention relates to the field of sample transfer technology in vacuum equipment, specifically a sample transfer protection device for scanning electron microscopes (SEM), focused ion beam (FIB), and other vacuum analytical equipment. It is particularly suitable for the non-destructive transfer of air- and moisture-sensitive samples (such as lithium battery materials, bioactive samples, and metal nanomaterials) under protective atmospheres and vacuum environments. To avoid contamination or oxidation of air- or moisture-sensitive materials during preparation, storage, and transfer, a dry protective atmosphere or vacuum environment is required throughout the process. A sample vacuum transfer system is undoubtedly a key technology for solving this problem. Currently, existing technologies mainly fall into the following categories:

[0003] 1. Electrical control method: This method uses a motor or other electrical products for drive, but requires modification of the equipment to introduce circuitry into the device for control. Furthermore, the device requires connecting wires, restricting its movement within the equipment and potentially damaging the internal structure of the detection devices.

[0004] 2. Remote control method: The device is controlled by a remote control from the outside. The device is also driven by a motor or other electrical products. It requires a built-in battery or other energy source. Furthermore, the signal emitted by the remote control device can easily affect the detection of precision instruments.

[0005] 3. Internal vacuuming method: The device is evacuated internally and closed by pressure difference. It is opened by springs or other structures in a vacuum environment. Once opened, it cannot be closed again. It is generally opened by flipping up the cover or opening and closing the side drawer.

[0006] These methods can all protect samples, but some are too complex and costly to implement, some require vacuuming inside the device before use, some can only open automatically but not close automatically, making sensitive samples unusable, and none of them can achieve rapid transfer of a sample between multiple devices. In view of the problems of the existing technology, this utility model proposes a sliding cover sealed vacuum automatic opening and closing sample transfer protection device. Utility Model Content

[0007] This invention provides a sliding cover-sealed vacuum automatic opening and closing sample transfer protection device, which can effectively solve the above problems.

[0008] This utility model is implemented as follows:

[0009] A sliding-cover, sealed, vacuum automatic opening and closing sample transfer protection device includes:

[0010] The chamber has a sample receiving cavity at its top, a mounting groove inside the chamber, a slider slidably mounted in the mounting groove, a pressure differential cavity between the slider and the mounting groove, a sliding cover connected to the side wall of the slider for opening / closing the sample receiving cavity, and an air valve on the side wall of the chamber away from the slider.

[0011] In a protective atmosphere environment, open the gas valve and manually open the sliding cover, place the sample in the sample receiving chamber and close the sliding cover. With the sliding cover closed, lock the gas valve. Then place the device in a vacuum environment testing device. Before testing, the testing device will first perform a vacuum operation. The gas pressure in the pressure difference chamber is greater than the gas pressure in the vacuum testing environment. The sliding cover opens under the action of gas pressure to perform sample testing. After the sample is tested, protective gas is introduced into the vacuum testing environment. The gas pressure in the vacuum testing environment is greater than or equal to the gas pressure in the pressure difference chamber. The sliding cover closes under the action of gas pressure.

[0012] As a further improvement, a receiving groove is provided on the outer periphery of the sample receiving cavity, and a sealing ring is provided in the receiving groove.

[0013] As a further improvement, a cover plate is provided at the end of the chamber away from the slider, and a mounting hole is provided in the center of the cover plate, and an air valve is provided in the mounting hole.

[0014] As a further improvement, a pair of sliding grooves are symmetrically arranged on the left and right sidewalls of the slider, and positioning holes corresponding to the sliding grooves are provided on both sides of the chamber. Positioning bolts are installed in the positioning holes and can be slidably arranged in the sliding grooves.

[0015] As a further improvement, the sliding cover includes a mounting part and a sliding cover body integrally formed with the mounting part. The mounting part and the sliding cover body have an L-shaped structure. The mounting part is located at the front end of the slider, and the sliding cover body is located above the compartment. Limiting plates are provided at the left and right ends of the sliding cover extending downwards. The limiting plates are located on the left and right sides of the compartment.

[0016] As a further improvement, a connecting part is provided at the bottom of the chamber, which is used to fix the device inside the vacuum environment testing equipment.

[0017] As a further improvement, a detachable connector is provided inside the connecting part.

[0018] As a further improvement, the connection part can be a combination of one or more of the following methods adapted to vacuum environment testing equipment: snap-fit, magnetic attraction, threaded connection, bolt fastening, and dovetail groove.

[0019] As a further improvement, the connector is one or a combination of various methods adapted to the connecting part, such as snap-fit, magnetic attraction, threaded connection, bolt fastening, and dovetail groove.

[0020] The beneficial effects of this invention are as follows: When a vacuum is drawn (pressure inside the differential chamber > external pressure), the sliding cover automatically opens; when the vacuum is broken (external pressure ≥ pressure inside the differential chamber), the sliding cover automatically closes. This ensures the safe and efficient transfer of samples between different environments, providing excellent protection for sensitive samples. It allows samples to be smoothly transferred from the glove box to the scanning electron microscope vacuum environment testing equipment without contact with air or moisture. Furthermore, when the vacuum is broken before the vacuum testing equipment is opened, the sample chamber can be automatically closed for further protection, allowing the protected sample to be re-entered into other vacuum environment testing equipment for analysis. This effectively avoids contamination of the sample by oxygen, moisture, or dust. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of the sliding cover sealed vacuum automatic opening and closing sample transfer protection device of this utility model.

[0023] Figure 2 This is a top view schematic diagram of the sliding cover sealed vacuum automatic opening and closing sample transfer protection device of this utility model.

[0024] Figure 3 yes Figure 2 A schematic diagram of the cross-sectional structure at point AA.

[0025] Figure 4 This is an exploded structural diagram of the sliding cover sealed vacuum automatic opening and closing sample transfer protection device of this utility model.

[0026] The attached diagram is labeled as follows:

[0027] 10. Chamber body; 11. Sample receiving cavity; 12. Mounting groove; 13. Differential pressure cavity; 14. Receiving groove; 15. Positioning hole; 16. Connecting part;

[0028] 20. Slider; 21. Sliding groove; 22. Positioning bolt;

[0029] 30. Sliding cover; 31. Mounting part; 32. Sliding cover body; 33. Limiting plate;

[0030] 40. Cover plate; 41. Mounting hole;

[0031] 50. Air valve;

[0032] 60. Connectors. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.

[0034] In the description of this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0035] Reference Figure 1 As shown, a sliding-cover sealed vacuum automatic opening and closing sample transfer protection device is characterized by comprising a chamber 10, a sample receiving cavity 11 disposed above the chamber 10, an installation groove 12 disposed inside the chamber 10, a slider 20 slidably disposed inside the installation groove 12, a pressure differential cavity 13 between the slider 20 and the installation groove 12, a sliding cover 30 connected to the side wall of the slider 20, the sliding cover 30 being used to open / close the sample receiving cavity 11, and an air valve 50 disposed on the side wall of the chamber 10 away from the slider 20.

[0036] The working principle of this utility model is as follows: Under a protective atmosphere, open the gas valve and manually open the sliding cover, place the sample in the sample receiving cavity 11 and close the sliding cover. Lock the gas valve while the sliding cover is closed, and then place the device in a vacuum environment testing device. Before testing, the testing device will first perform a vacuuming operation. The gas pressure in the differential pressure cavity 13 is greater than the gas pressure in the vacuum testing environment. The sliding cover 30 opens under the action of gas pressure to perform sample testing. After the sample is tested, protective gas is introduced into the vacuum testing environment. The gas pressure in the vacuum testing environment is greater than or equal to the gas pressure in the differential pressure cavity 13. The sliding cover 30 closes under the action of gas pressure.

[0037] This invention utilizes the inherent vacuum pressure difference of vacuum equipment to achieve sliding cover opening and closing through a purely mechanical structure, completely avoiding electromagnetic interference from motors / batteries. Furthermore, the side-sliding cover structure is compact and poses no threat to the internal instruments of the testing equipment. It can be used without pre-vacuuming and does not require additional equipment such as a vacuum pump. A single sample can be inserted and opened and closed multiple times, allowing for testing with the same type of equipment or multiple devices. The sample compartment opening faces upwards for easy detection by scanning electron microscopes (SEM), dual-beam electron microscopes, and other similar equipment. It also minimizes the obstruction of scattered electron signals.

[0038] Reference Figure 1 , Figure 2 As shown, in this embodiment, the sample receiving cavity 11 is slot-shaped, but it can also be circular, rectangular, etc. The shape and depth of the sample receiving cavity 11 are not limited here. In other embodiments, a clamp is provided inside the sample receiving cavity 11 to fix the sample. Since the clamp is an existing design, it is not limited here. A receiving groove 14 is provided on the outer periphery of the sample receiving cavity 11, and a sealing ring is provided inside the receiving groove 14. When the sliding cover slides, the sealing ring remains stable in the receiving groove to ensure continuous airtightness during opening and closing.

[0039] Reference Figures 1-3 As shown, a cover plate 40 is provided at the end of the chamber 10 away from the slider 20. A mounting hole 41 is provided in the center of the cover plate 40, and an air valve 50 is provided in the mounting hole 41. The air valve is rigidly connected to the chamber through the cover plate.

[0040] Reference Figure 4 As shown, a pair of sliding grooves 21 are symmetrically arranged on the left and right side walls of the slider 20. Positioning holes 15 corresponding to the sliding grooves 21 are provided on both sides of the chamber 10. Positioning bolts 22 are installed in the positioning holes 15. The positioning bolts 22 are slidably arranged in the sliding grooves 21. The positioning bolts are limited in the sliding grooves. The bolts are detachable, which is convenient for cleaning or replacing worn parts.

[0041] Reference Figure 1 , Figure 2 As shown, the sliding cover 30 includes a mounting part 31 and a sliding cover body 32 integrally formed with the mounting part 31. The mounting part 31 and the sliding cover body 32 have an L-shaped structure. The mounting part 31 is located at the front end of the slider 20, and the sliding cover body 32 is located above the chamber 10. Limiting plates 33 extend downward from both the left and right ends of the sliding cover 30 and are located on the left and right sides of the chamber 10. The L-shaped sliding cover 30 can effectively seal the sample receiving cavity 11 located above the chamber 10, and the limiting plates 33 can further limit the sliding cover, improving the stability of the sliding cover operation.

[0042] Reference Figure 1 , Figure 3 , Figure 4 As shown, a connecting part 16 is provided below the chamber body 10. The connecting part 16 is used to fix the device inside the vacuum environment testing equipment. The connecting part 16 is a combination of one or more of the following methods adapted to the vacuum environment testing equipment: snap-fit, magnetic attraction, threaded connection, bolt fastening, and dovetail groove. The connecting part 16 is not limited to the above-mentioned installation methods and can also be other installation methods. In this embodiment, the connecting part 16 is a threaded hole.

[0043] In another embodiment, a detachable connector 60 is provided in the connecting part 16. The device is fixed to the vacuum environment detection equipment through the connector 60. The connector 60 is a combination of one or more of the following methods adapted to the connecting part (16): snap fastener, magnetic attraction, threaded connection, bolt fastening, and dovetail groove. The connector 60 is not limited to the above-mentioned installation methods. In this embodiment, the connector 60 is a positioning shaft. By replacing the connector, it can be adapted to different vacuum environment detection equipment such as scanning electron microscopes.

[0044] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A sliding-cover, sealed, vacuum automatic opening and closing sample transfer protection device, characterized in that, include: The chamber (10) has a sample receiving cavity (11) above it, a mounting groove (12) inside it, a slider (20) slidably disposed inside the mounting groove (12), a pressure differential cavity (13) between the slider (20) and the mounting groove (12), a sliding cover (30) connected to the side wall of the slider (20), the sliding cover (30) being used to open / close the sample receiving cavity (11), and an air valve (50) disposed on the side wall of the chamber (10) away from the slider (20). In a protective atmosphere environment, open the gas valve and manually open the sliding cover, place the sample in the sample receiving cavity (11) and close the sliding cover. Lock the gas valve while the sliding cover is closed, and then place the device in the vacuum environment detection equipment. Before the detection equipment is tested, it will first perform a vacuum operation. The gas pressure in the differential pressure cavity (13) is greater than the gas pressure in the vacuum detection environment. The sliding cover (30) opens under the action of gas pressure and the sample is tested. After the sample is tested, protective gas is filled into the vacuum detection environment. The gas pressure in the vacuum detection environment is greater than or equal to the gas pressure in the differential pressure cavity (13). The sliding cover (30) closes under the action of gas pressure.

2. The sliding cover sealed vacuum automatic opening and closing sample transfer protection device according to claim 1, characterized in that, A receiving groove (14) is provided on the outer periphery of the sample receiving cavity (11), and a sealing ring is provided inside the receiving groove (14).

3. The sliding cover sealed vacuum automatic opening and closing sample transfer protection device according to claim 1, characterized in that, A cover plate (40) is provided at the end of the chamber (10) away from the slider (20). A mounting hole (41) is provided in the center of the cover plate (40), and an air valve (50) is provided in the mounting hole (41).

4. The sliding cover sealed vacuum automatic opening and closing sample transfer protection device according to claim 3, characterized in that, The slider (20) has a pair of sliding grooves (21) symmetrically arranged on the left and right side walls. The chamber (10) has positioning holes (15) corresponding to the sliding grooves (21) on both sides. Positioning bolts (22) are installed in the positioning holes (15) and can be slidably arranged in the sliding grooves (21).

5. A sliding cover-sealed vacuum automatic opening and closing sample transfer protection device according to claim 1, characterized in that, The sliding cover (30) includes an installation part (31) and a sliding cover body (32) integrally formed with the installation part (31). The installation part (31) and the sliding cover body (32) have an L-shaped structure. The installation part (31) is located at the front end of the slider (20). The sliding cover body (32) is located above the compartment (10). Limiting plates (33) extend downward from the left and right ends of the sliding cover (30). The limiting plates (33) are located on the left and right sides of the compartment (10).

6. A sliding-cover sealed vacuum automatic opening and closing sample transfer protection device according to claim 1, characterized in that, A connecting part (16) is provided below the chamber (10), and the connecting part (16) is used to fix the device inside the vacuum environment detection equipment.

7. A sliding-cover sealed vacuum automatic opening and closing sample transfer protection device according to claim 6, characterized in that, A detachable connector (60) is provided inside the connecting part (16).

8. A sliding-cover sealed vacuum automatic opening and closing sample transfer protection device according to claim 6, characterized in that, The connecting part (16) is a combination of one or more of the following methods adapted to the vacuum environment testing equipment: snap fastener, magnetic attraction, threaded connection, bolt fastening, and dovetail groove.

9. A sliding-cover sealed vacuum automatic opening and closing sample transfer protection device according to claim 7, characterized in that, The connector (60) is a combination of one or more of the following methods adapted to the connector (16): snap fastener, magnetic attraction, threaded connection, bolt fastening, and dovetail groove.

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