A glue coating cup transfer device

Abstract

The application discloses a glue coating cup transfer device and relates to the technical field of transfer equipment. The glue coating cup transfer device comprises a carrying assembly and a bearing assembly which are connected with each other, the bearing assembly comprises a bearing seat and a cover body connected to the bearing seat, the bearing seat is provided with a containing groove for containing the glue coating cup, the containing groove contains an exhaust port and a liquid discharge port of the glue coating cup, and the cover body covers a wafer placing port of the glue coating cup. The glue coating cup transfer device can improve the cleanliness of a clean room and improve product yield.

Description

Technical Field

[0001] This application relates to the field of transfer equipment technology, and more specifically, to a glue-coating cup transfer device. Background Technology

[0002] In the semiconductor manufacturing field, photolithography is a crucial step in the semiconductor manufacturing process that determines the precision and performance of chips. Its process stability directly affects the yield and quality of the final product. Within the photolithography module, the photoresist coating process is an important pre-process step. This process mainly involves precisely adsorbing the wafer using a vacuum chuck and driving it to rotate at high speed. Centrifugal force is used to evenly spin-coat a specific type of photoresist onto the wafer surface, thereby forming a photoresist film layer that meets the requirements of subsequent photolithography exposure. During the coating process, the coating cup, as a key component of the wafer, plays an irreplaceable and multi-core role. The coating cup surrounds the wafer and uses a built-in ventilation adjustment structure to precisely control the airflow in the coating area. At the same time, the waste liquid discharge channel promptly removes excess photoresist waste liquid generated during the spin-coating process, preventing waste liquid accumulation and contamination of the wafer surface.

[0003] However, in existing semiconductor manufacturing processes, there has long been a lack of effective solutions for the replacement and transfer of coating cups, which relies entirely on manual operation. This has significant technical defects and safety hazards. Throughout the entire process of removing the coating cup from the equipment, transferring it to the cleaning tank, rinsing it, and then transferring it to the storage point or reinstalling it, residual photoresist waste liquid on the surface of the coating cup will still drip off during handling, and attached particles will also be detached by airflow, thus contaminating the cleanroom floor and air, the trolleys used for transfer, and even contaminating the equipment interface and internal cavity of the coating and developing machine during reinstallation; thereby affecting product yield. Utility Model Content

[0004] The purpose of this application is to provide a coating cup transfer device that can improve the cleanliness of cleanrooms and increase product yield.

[0005] The embodiments of this application are implemented as follows: This application provides a coating cup transfer device, including a conveying component and a carrying component connected to each other. The carrying component includes a carrying base and a cover connected to the carrying base. The carrying base has a receiving groove for accommodating the coating cup. The receiving groove accommodates the vent and drain port of the coating cup. The cover seals the wafer placement port of the coating cup.

[0006] Optionally, as an implementable method, the bottom of the receiving groove is provided with a first mounting groove and a second mounting groove, the first mounting groove accommodating the vent of the coating cup, and the second mounting groove accommodating the drain of the coating cup.

[0007] Optionally, as an implementable method, a rubber pad is provided at the bottom of the cover, and the cover contacts the adhesive cup through the rubber pad.

[0008] Optionally, as an implementable method, the support base and the cover are rotatably connected by a connector, the connector is rotatably connected to the support base via a first connecting shaft, and the connector is rotatably connected to the cover via a second connecting shaft, the distance between the first connecting shaft and the second connecting shaft being adapted to the height of the glue cup.

[0009] Alternatively, as an implementable method, the handling assembly includes two handles connected by a connecting plate, the handles being plugged into the carrier.

[0010] Alternatively, as an implementable method, sleeves for connecting the handle are provided on both sides of the support, and the handle is inserted into the sleeves.

[0011] Optionally, as an implementable method, a locking rod is provided inside the grip, the middle part of the locking rod is rotatably connected to the middle part of the grip, the operating end of the locking rod is provided with a pressure block, the working end of the locking rod is provided with a locking block, and the grip is provided with through holes protruding from the pressure block and the locking block. By pressing the pressure block, the locking block protrudes from the through hole, and the locking block is locked with the sleeve.

[0012] Optionally, as an implementable method, the inner wall of the sleeve is provided with a slot that engages with the locking block.

[0013] Alternatively, as an implementable method, the connecting plate is provided with a limiting notch adapted to the bearing seat.

[0014] Alternatively, as an implementable method, the handle end of the grip is provided with a rubber sleeve.

[0015] The beneficial effects of the embodiments of this application include: The coating cup transfer device provided in this application includes a conveying component and a carrying component connected to each other. The carrying component includes a carrier base and a cover connected to the carrier base. The carrier base has a receiving groove for accommodating the coating cup. The receiving groove accommodates the vent and drain of the coating cup. The cover seals the wafer placement port of the coating cup. By accommodating the vent and drain of the coating cup in the receiving groove of the carrier base, residual photoresist waste liquid on the surface of the coating cup and at the vent and drain ports can drip into the waste liquid collection tank of the receiving groove, effectively preventing waste liquid from dripping and contaminating the cleanroom floor, air, and transfer tools. At the same time, the cover sealing the wafer placement port of the coating cup can prevent residual particles inside the coating cup from falling off and can also prevent external contaminants from entering the interior of the coating cup, achieving fully enclosed protection during the transfer process and fundamentally solving the contamination problem of manual transfer. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is one of the structural schematic diagrams of the glue-coating cup transfer device provided in the embodiments of this application; Figure 2 This is a second schematic diagram of the structure of the glue-coating cup transfer device provided in the embodiments of this application; Figure 3 This is a schematic diagram of the transport component in the glue cup transfer device provided in the embodiments of this application.

[0018] Icons: 100-Glue cup transfer device; 110-Bearing component; 111-Bearing seat; 1111-Accommodation slot; 1112-First mounting slot; 1113-Second mounting slot; 112-Cover; 113-Connector; 114-Sleeve; 1141-Slot; 120-Transfer component; 121-Handle; 122-Connecting plate; 123-Clamping rod; 1231-Pressure block; 1232-Clamping block; 124-Rubber sleeve; 200-Glue cup. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0021] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0023] Please refer to Figure 1 , Figure 2 and Figure 3 This embodiment provides a coating cup transfer device 100, including a conveying component 120 and a carrying component 110 connected to each other. The carrying component 110 includes a carrying seat 111 and a cover 112 connected to the carrying seat 111. The carrying seat 111 has a receiving groove 1111 for accommodating the coating cup 200. The receiving groove 1111 accommodates the exhaust port and the drain port of the coating cup 200. The cover 112 covers the wafer placement port of the coating cup 200.

[0024] Specifically, the handling component 120 is used by the operator to hold and move the entire transfer device and the coating cup 200. It is made of lightweight, high-strength stainless steel with a polished surface to prevent particle formation and features anti-slip textures to improve the stability of the operator's grip. The support component 110 includes a support base 111 and a cover 112 connected to the support base 111. The support base 111 has a receiving groove 1111 for accommodating the coating cup 200. The shape of the receiving groove 1111 matches the outer contour of the coating cup 200, ensuring that the coating cup 200 can be stably positioned without shaking after being placed in it. Simultaneously, the receiving groove 1111 can completely accommodate the vent and drain outlet of the coating cup 200, allowing residual waste liquid at the vent and drain outlet to drip directly into the receiving groove. The photoresist is placed inside the container 1111 to prevent it from dripping outwards. The bottom of the container 1111 is equipped with a waste liquid collection tank for temporarily storing the dripping photoresist waste liquid. The waste liquid collection tank is removable for easy cleaning. When the coating cup 200 is placed in the container 1111, the cover 112 can completely seal the wafer placement port of the coating cup 200. This prevents residual particles inside the coating cup 200 from falling out of the wafer placement port and also prevents external contaminants from entering the coating cup 200, thus achieving two-way protection for the coating cup 200.

[0025] The coating cup transfer device 100 provided in this embodiment includes a conveying component 120 and a carrier component 110 connected to each other. The carrier component 110 includes a carrier base 111 and a cover 112 connected to the carrier base 111. The carrier base 111 has a receiving groove 1111 for accommodating the coating cup 200. The receiving groove 1111 accommodates the exhaust port and the drain port of the coating cup 200. The cover 112 covers the wafer placement port of the coating cup 200. The vent and drain ports of the coating cup 200 are accommodated in the receiving groove 1111 of the carrier 111, allowing residual photoresist waste liquid on the surface of the coating cup 200 and at the vent and drain ports to drip into the waste liquid collection tank of the receiving groove 1111, effectively preventing waste liquid from dripping and contaminating the cleanroom floor, air, and transport tools. At the same time, the cover 112 seals the wafer placement port of the coating cup 200, preventing residual particles inside the coating cup 200 from falling off and preventing external pollutants from entering the coating cup 200, achieving fully enclosed protection during the transport process and fundamentally solving the pollution problem of manual transport.

[0026] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, the bottom of the receiving groove 1111 is provided with a first mounting groove 1112 and a second mounting groove 1113. The first mounting groove 1112 accommodates the exhaust port of the glue coating cup 200, and the second mounting groove 1113 accommodates the drain port of the glue coating cup 200.

[0027] Specifically, both the first mounting groove 1112 and the second mounting groove 1113 are recessed structures formed at the bottom of the receiving groove 1111. Their dimensions and shapes are precisely matched to the outer contours of the vent and drain ports of the coating cup 200, respectively. The depth of the first mounting groove 1112 is slightly greater than the protrusion height of the vent of the coating cup 200, and the groove diameter is greater than the outer diameter of the vent. The structure of the second mounting groove 1113 is designed similarly to ensure that after the coating cup 200 is placed in the receiving groove 1111, the vent can be completely embedded in the first mounting groove 1112, and the drain port can be completely embedded in the second mounting groove 1113.

[0028] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, a rubber pad is provided at the bottom of the cover 112, and the cover 112 contacts the glue cup 200 through the rubber pad.

[0029] The elastic properties of the rubber pad allow it to fit tightly against the end face of the coating cup 200, filling the tiny gap between the lid 112 and the coating cup 200. Compared to hard contact, this significantly improves the sealing effect, effectively preventing external particles from entering the interior of the coating cup 200, while also preventing leakage of residual particles inside the coating cup 200. The elastic contact of the rubber pad can buffer the impact force on the coating cup 200 when the lid 112 is closed, avoiding wear on the end face of the coating cup 200 or deformation of the lid 112 caused by hard collisions between the lid 112 and the coating cup 200, thus protecting the structural integrity of the coating cup 200 and the lid 112.

[0030] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, the carrier 111 and the cover 112 are rotatably connected by a connector 113. The connector 113 is rotatably connected to the carrier 111 via a first connecting shaft and to the cover 112 via a second connecting shaft. The distance between the first and second connecting shafts is adapted to the height of the coating cup 200 to ensure that the cover 112 stably seals the wafer placement opening of the coating cup 200.

[0031] Specifically, when the coating cup 200 is placed into the receiving slot 1111 of the carrier 111, and the cover 112 rotates around the connector 113 to the sealing position, the rubber pad at the bottom of the cover 112 can fit tightly against the edge of the wafer placement port of the coating cup 200; when the cover 112 rotates around the connector 113 to the fully open position, the cover 112 will not interfere with the carrier 111, the coating cup 200 or the handling assembly 120.

[0032] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3As shown, the handling assembly 120 includes two handles 121, which are connected by a connecting plate 122. The handles 121 are inserted into the support 111.

[0033] Specifically, the two handles 121 are ergonomically designed, allowing operators to hold and move them with both hands. Compared to a single handle 121 structure, this provides better control over the device's balance, preventing tilting during transport that could cause the coating cup 200 to wobble or spill waste liquid. The handles 121 and the support base 111 use a plug-in connection for quick disassembly. If either the handle 121 or the support base 111 is damaged, only the corresponding part needs to be replaced, eliminating the need to replace the entire device and reducing maintenance costs. The connecting plate 122 connects the two handles 121 into a single unit, forming a stable "U"-shaped frame structure that ensures a stable distance between the two handles 121.

[0034] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, sleeves 114 for connecting handles 121 are provided on both sides of the support base 111, and the handles 121 are inserted into the sleeves 114.

[0035] Specifically, the sleeve 114 is a cylindrical stainless steel tube with an inner diameter that matches the outer diameter of the handle 121. It is horizontally fixed to the two side walls of the bearing seat 111 by welding, and the axis of the sleeve 114 is perpendicular to the center line of the bearing seat 111.

[0036] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, a locking rod 123 is inserted inside the handle 121. The middle part of the locking rod 123 is rotatably connected to the middle part of the handle 121. The operating end of the locking rod 123 is provided with a pressure block 1231, and the working end of the locking rod 123 is provided with a locking block 1232. The handle 121 is provided with through holes for the pressure block 1231 and the locking block 1232. By pressing the pressure block 1231, the locking block 1232 protrudes out of the through hole, and the locking block 1232 is locked with the sleeve 114.

[0037] Specifically, the lever 123 is a long, strip-shaped metal rod that extends horizontally through a hollow channel inside the handle 121. The middle of the lever 123 is rotatably connected to a pivot fixed to the inner wall of the handle 121, allowing the lever 123 to swing up and down around the pivot, forming a lever structure. A pressure block 1231 is fixed to the operating end of the lever 123, and a locking block 1232 is fixed to the other end of the lever 123. In its natural state, the lever 123's elasticity causes the locking block 1232 to retract inside the handle 121. When the pressure block 1231 is pressed, the lever 123 rotates around the central pivot, and the locking block 1232 at the working end protrudes from the square through-hole and engages with the inner wall of the sleeve 114. By pressing the pressure block 1231, the locking block 1232 can be engaged or disengaged from the sleeve 114 without additional tools. The operator can install and disassemble the handle 121 with one hand, significantly improving operational convenience. The locking structure between the locking block 1232 and the sleeve 114 can effectively prevent the handle 121 from coming out of the sleeve 114 due to vibration or tilting during the transfer process, thus avoiding damage to the glue cup 200 or injury to personnel caused by the device falling, and improving operational safety.

[0038] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, the inner wall of the sleeve 114 is provided with a slot 1141 that engages with the locking block 1232.

[0039] Specifically, the precise fit between the slot 1141 and the block 1232 allows the block 1232 to be fully embedded in the slot 1141 after it protrudes, avoiding the problem of insecure locking caused by the block 1232 only making point contact with the inner wall of the sleeve 114, and further preventing the handle 121 from falling off.

[0040] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, the connecting plate 122 is provided with a limiting notch that is adapted to the bearing seat 111.

[0041] Specifically, the limiting notch is an arc-shaped groove formed in the middle of the connecting plate 122, and its curvature is completely consistent with the arc-shaped contour of the side of the bearing seat 111. When the handle 121 is inserted and engaged with the bearing seat 111, the connecting plate 122 fits against the side of the bearing seat 111 through the limiting notch. When the inner wall of the limiting notch is in close contact with the side wall of the bearing seat 111, the positions of the slot 1141 and the block 1232 correspond.

[0042] In one possible embodiment of this application, such as Figure 1 , Figure 2 and Figure 3 As shown, a rubber sleeve 124 is provided on the handle end of the grip 121.

[0043] Specifically, the anti-slip texture of the rubber sleeve 124 can significantly increase the friction between the hand and the handle 121, so that even if the operator's hands are sweaty or they are wearing gloves, they can firmly hold the handle 121, prevent the device from slipping, and improve operational safety.

[0044] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A glue-coating cup transfer device, characterized in that, The device includes interconnected transport and carrier components. The carrier component includes a carrier base and a cover connected to the carrier base. The carrier base has a receiving groove for accommodating the coating cup. The receiving groove accommodates the vent and drain ports of the coating cup. The cover seals the wafer placement port of the coating cup.

2. The adhesive cup transfer device according to claim 1, characterized in that, The bottom of the receiving tank is provided with a first mounting groove and a second mounting groove. The first mounting groove accommodates the vent of the coating cup, and the second mounting groove accommodates the drain of the coating cup.

3. The adhesive cup transfer device according to claim 1, characterized in that, A rubber pad is provided at the bottom of the cover, and the cover contacts the glue-coating cup through the rubber pad.

4. The adhesive cup transfer device according to claim 1, characterized in that, The support base and the cover are rotatably connected by a connector. The connector is rotatably connected to the support base via a first connecting shaft and to the cover via a second connecting shaft. The distance between the first connecting shaft and the second connecting shaft is adapted to the height of the glue cup.

5. The adhesive cup transfer device according to claim 1, characterized in that, The transport assembly includes two handles connected by a connecting plate, and the handles are plugged into the carrier.

6. The adhesive cup transfer device according to claim 5, characterized in that, The support base has sleeves on both sides for connecting the handle, and the handle is inserted into the sleeves.

7. The adhesive cup transfer device according to claim 6, characterized in that, A locking rod is inserted inside the grip, and the middle part of the locking rod is rotatably connected to the middle part of the grip. A pressure block is provided at the operating end of the locking rod, and a locking block is provided at the working end of the locking rod. The grip is provided with through holes protruding from the pressure block and the locking block. By pressing the pressure block, the locking block protrudes from the through hole, and the locking block is locked with the sleeve.

8. The adhesive cup transfer device according to claim 7, characterized in that, The inner wall of the sleeve is provided with a slot that engages with the locking block.

9. The adhesive cup transfer device according to claim 5, characterized in that, The connecting plate is provided with a limiting notch adapted to the bearing seat.

10. The adhesive cup transfer device according to claim 5, characterized in that, The handle end of the grip is provided with a rubber sleeve.

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